ESD testing and combdrive snap-in in a MEMS tunable grating under shock and vibration

This work describes a method for tracking the dynamics of electrostatic discharge (ESD) sensitive MEMS structures during ESD events, as well as a model for determining the reduced combdrive snap-in voltage under vibration and shock. We describe our ESD test setup, based on the human body model, and optimized for high impedance devices. A brief description of the MEMS tunable grating, the test structure used here, and its operation is followed by results of the measured complex device dynamics during ESD events. The device fails at a voltage up to four times higher than that required to bring the parts into contact. We then present a model for the snap-in of combfingers under shock and vibration. We combine the results of the analytical model for combdrive snap-in developed here with a shock response model to compute the critical shock acceleration conditions that can result in combdrive snap-in as a function of the operating voltage. We discuss the validity regimes for the combdrive snap-in model and show how restricting the operation voltage below the snap-in voltage is not a sufficient criterion to ensure reliable operation especially in environments with large disturbances

Vibration and shock reliability of MEMS: modeling and experimental validation

A methodology to predict shock and vibration levels that could lead to the failure of MEMS devices is reported as a function of vibration frequency and shock pulse duration. A combined experimental–analytical approach is developed, maintaining the simplicity and insightfulness of analytical methods without compromising on the accuracy characteristic of experimental methods. The minimum frequency-dependent acceleration that will lead to surfaces coming into contact, for vibration or shock inputs, is determined based on measured mode shapes, damping, resonant frequencies, and an analysis of failure modes, thus defining a safe operating region, without requiring shock or vibration testing. This critical acceleration for failure is a strong function of drive voltage, and the safe operating region is predicted for transport (unbiased) and operation (biased condition). The model was experimentally validated for overdamped and underdamped modes of a comb-drive driven SOI-based tunable grating. In-plane and outofplane vibration (up to 65 g) and shock (up to 6000 g) tests were performed for biased and unbiased conditions, and very good agreement was found between predicted and observed critical accelerations

Auto-regressive optical filters in silicon-on-insulator waveguides.

The subject of the thesis is the modelling, design, fabrication and characterisation of single-stage and multi-stage resonators on Silicon-on-Insulator (SOI) strip and rib waveguides. The devices have been investigated with the aim to produce small and efficient wavelength selective elements that could one day be used in multiplexers, filters and other components of integrated optical circuits. Due to the complexity of devices and very often requirements of advanced simulation packages, most of the devices have been modelled (lambda = 1.55mum) through separate analyses of the components forming the filters. The study starts with the modelling of rib and strip waveguides aiming at the single-mode and zero-birefringent regime of operation, followed by the analysis of a directional coupler. The modelling suggests that the cross-sectional rectangular area of a strip waveguide should be smaller than 0.10mum2. Similarly, rib waveguides with a height of 1.35mum, and a waveguide width of 0.8mum or 1.0mum, could be used as basic single-mode and zero-birefringent elements for building relatively large rib waveguide based devices. The analysis of a directional coupler on strip waveguides has shown that a near-polarisation-independence regime is possible for waveguide separations below 0.20mum and waveguide widths in range 0.29 - 0.40mum, when a waveguide height is chosen to be 0.29mum or 0.34mum. Simplified z-transform models of filters have been employed to calculate values of the most relevant figures of merit such as Free Spectral Range (FSR), Full Width at Half Maximum (FWHM), Finesse (F) and Q-factor, and also to quantify the sensitivity of the transfer function to the changes of geometric parameters, coupling issues and thermal effects. Based on the modelling and information from test chips of previous students, 4 main designs grouped in 6 test chips have been proposed and fabricated in collaboration with the Intel Corporation Photonics research groups from San Jose and Jerusalem. Two designs were based on rib waveguide type devices and two on strip waveguide type devices. The goals in all cases were; polarisation insensitivity, single-mode behaviour, improvement of the FSR, shaping response by using various geometries, the possibility of tuning response by thermal means etc. Experimental results have shown improvement in the FWHM and FSR as expected for both strip and rib designs. An additional stage of multi-level, serially coupled racetrack resonator in rib waveguides has resulted in a decrease of the FWHM by more than 30% (6pm). Polarisation independence by using identical multiple serial-coupled rib racetracks has also been demonstrated. The FSR above 60nm have been reported for small strip resonators (radius of l.5mum) with good polarisation characteristics for rings which radius is near 3mum. To the author's knowledge this is the largest FSR yet reported for a silicon based ring resonator. There is also improvement of the spectral response of multiple Vernier rings, which, with some corrections in terms of side lobes appearing in the spectrum, may be used for designing devices with the FSR as large as 70nm

Auto-regressive optical filters in silicon-on-insulator waveguides.

The subject of the thesis is the modelling, design, fabrication and characterisation of single-stage and multi-stage resonators on Silicon-on-Insulator (SOI) strip and rib waveguides. The devices have been investigated with the aim to produce small and efficient wavelength selective elements that could one day be used in multiplexers, filters and other components of integrated optical circuits. Due to the complexity of devices and very often requirements of advanced simulation packages, most of the devices have been modelled (lambda = 1.55mum) through separate analyses of the components forming the filters. The study starts with the modelling of rib and strip waveguides aiming at the single-mode and zero-birefringent regime of operation, followed by the analysis of a directional coupler. The modelling suggests that the cross-sectional rectangular area of a strip waveguide should be smaller than 0.10mum2. Similarly, rib waveguides with a height of 1.35mum, and a waveguide width of 0.8mum or 1.0mum, could be used as basic single-mode and zero-birefringent elements for building relatively large rib waveguide based devices. The analysis of a directional coupler on strip waveguides has shown that a near-polarisation-independence regime is possible for waveguide separations below 0.20mum and waveguide widths in range 0.29 - 0.40mum, when a waveguide height is chosen to be 0.29mum or 0.34mum. Simplified z-transform models of filters have been employed to calculate values of the most relevant figures of merit such as Free Spectral Range (FSR), Full Width at Half Maximum (FWHM), Finesse (F) and Q-factor, and also to quantify the sensitivity of the transfer function to the changes of geometric parameters, coupling issues and thermal effects. Based on the modelling and information from test chips of previous students, 4 main designs grouped in 6 test chips have been proposed and fabricated in collaboration with the Intel Corporation Photonics research groups from San Jose and Jerusalem. Two designs were based on rib waveguide type devices and two on strip waveguide type devices. The goals in all cases were; polarisation insensitivity, single-mode behaviour, improvement of the FSR, shaping response by using various geometries, the possibility of tuning response by thermal means etc. Experimental results have shown improvement in the FWHM and FSR as expected for both strip and rib designs. An additional stage of multi-level, serially coupled racetrack resonator in rib waveguides has resulted in a decrease of the FWHM by more than 30% (6pm). Polarisation independence by using identical multiple serial-coupled rib racetracks has also been demonstrated. The FSR above 60nm have been reported for small strip resonators (radius of l.5mum) with good polarisation characteristics for rings which radius is near 3mum. To the author's knowledge this is the largest FSR yet reported for a silicon based ring resonator. There is also improvement of the spectral response of multiple Vernier rings, which, with some corrections in terms of side lobes appearing in the spectrum, may be used for designing devices with the FSR as large as 70nm

Polarization-insensitive directional couplers based on SOI wire waveguides

Optical directional couplers based on SOI-wire waveguides have been modelled by a semi-analytical approach based on the Coupled Mode Theory and Finite Element Method. The modelling is used to obtain analytically optical power at the parallel and cross ports by utilizing numerically calculated coupling coefficients. Geometrical dimensions of the couplers have been optimized to obtain a polarization-independent behaviour. The influence of non-vertical sidewalls on the coupler performance has also been addressed

Design rules for single-mode and polarization-independent silicon-on-insulator rib waveguides using stress engineering

There is a trend towards miniaturization of silicon photonic circuits due to superior performance and small cost. Design rules that must be imposed on the geometry of optical waveguides to make them behave as polarization-independent and singlemode devices are well known for waveguides with relatively large cross sections and for some small cross-sectional rib waveguides with vertical sidewalls and an air top cladding. The influence of the top oxide cover on waveguide birefringence was analyzed recently, but only for relatively large cross-sectional waveguides. This paper reports simulations for both single-mode and polarization-independent behavior for small cross-sectional waveguides with variable rib width, etch depth, top oxide cover thickness, and sidewall angle. The results show that the stress-induced effects must be taken into account to satisfy both requirements. Design rules to maintain birefringence-free operation and to satisfy single-mode behavior for small rib silicon-on-insulator (SOI) waveguides are presented

MEMS acceleration sensor with remote optical readout for continuous power generator monitoring

Miniaturized accelerometers with remote optical readout are required devices for the continuous monitoring of vibrations inside power generators. In turbo and hydro generators, end-winding vibrations are present during operation causing in the long term undesirable out-of-service repairs. Continuous monitoring of these vibrations is therefore mandatory. The high electromagnetic fields in the generators impose the use of devices immune to electromagnetic interferences. In this paper a MEMS based accelerometer with remote optical readout is presented. Advantages of the proposed device are the use of a differential optical signal to reject the common mode signal and noise, the reduced number of steps for the MEMS chip fabrication and for the system assembly, and the reduced package volume

MEMS acceleration sensor with remote optical readout for continuous power generator monitoring

Miniaturized accelerometers with remote optical readout are required devices for the continuous monitoring of vibrations inside power generators. In turbo and hydro generators, end-winding vibrations are present during operation causing in the long term undesirable out-of-service repairs. Continuous monitoring of these vibrations is therefore mandatory. The high electromagnetic fields in the generators impose the use of devices immune to electromagnetic interferences. In this paper a MEMS based accelerometer with remote optical readout is presented. Advantages of the proposed device are the use of a differential optical signal to reject the common mode signal and noise, the reduced number of steps for the MEMS chip fabrication and for the system assembly, and the reduced package volume