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3 research outputs found
Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography
Author
Anshuman Cherala
Babak Mokaberi
+7Â more
Byung Jin Choi
Dwayne LaBrake
Kosta Selinidis
Mario J. Meissl
Niyaz N. Khusnatdinov
Philip Schumaker
S. V. Sreenivasan
Publication venue
'Institute of Electrical and Electronics Engineers (IEEE)'
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