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2 research outputs found
Demonstration of TiO2 based ultra high-k (k=30) MIS capacitor and its electrical properties
Author
ANJEHYUN
BAEK ROCK HYUN
CHOI KYEONG KEUN
KANG BOHYEON
Publication venue
μ 27ν λ°λ체νμ λν
Publication date
14/02/2020
Field of study
No full text
2
ν¬ν곡과λνκ΅
Defect Curing Effects on High-k Gate Stack (Al/Al2O3/Si-sub) by Using H2 Plasma Treatment and Rapid Thermal Anneal
Author
ANJEHYUN
BAEK ROCK HYUN
CHOI KYEONG KEUN
KANG BOHYEON
Publication venue
μ 27ν λ°λ체νμ λν
Publication date
14/02/2020
Field of study
No full text
2
ν¬ν곡과λνκ΅