Fast deposition of carbon and silicon layers

A review with 26 refs. on plasma CVD of a-Si:H and a-C:H. [on SciFinder (R)

Influence of HPM on IT-systems

High power microwave (HPM) devices are capable of producing peak power up to 40 GW. The ongoin

The VUV emissivity of a high-pressure cascade argon arc from 125 to 200 nm

We have investigated the vacuum ultraviolet (VUV) emissivity of a cascade arc in argon from 125 to 200 nm. The temperature and pressure dependences of this emissivity are the subject of this paper. Enhancement of the emissivity has been obtained by adding nitrogen to the argon. In some wavelength ranges, the increase of the emissivity due to broadened lines is more than a factor of 10 in a spectral range of several nanometers. These lines reach the blackbody limit, corresponding to the electron temperature of the plasma inside the arc. The electron temperature has been varied between 12,200 and 14,500 K. The relative temperature dependence of the free-bound Biberman factor as a function of wavelength in this temperature range has been determined from continuum measurements and compared to the theoretical temperature dependence of the free-bound Biberman factors according to Hofsaess. The agreement is good

The VUV emissivity of a high-pressure cascade argon arc from 125 to 200 nm

We have investigated the vacuum ultraviolet (VUV) emissivity of a cascade arc in argon from 125 to 200 nm. The temperature and pressure dependences of this emissivity are the subject of this paper. Enhancement of the emissivity has been obtained by adding nitrogen to the argon. In some wavelength ranges, the increase of the emissivity due to broadened lines is more than a factor of 10 in a spectral range of several nanometers. These lines reach the blackbody limit, corresponding to the electron temperature of the plasma inside the arc. The electron temperature has been varied between 12,200 and 14,500 K. The relative temperature dependence of the free-bound Biberman factor as a function of wavelength in this temperature range has been determined from continuum measurements and compared to the theoretical temperature dependence of the free-bound Biberman factors according to Hofsaess. The agreement is good

Radiative energy loss in a two-temperature argon plasma

We have calculated the total radiative loss in an argon plasma at wavelengths from 100 nm to 100 µm (zero absorption) as a function of temperature (3000–15,000 K) for several pressures (10-1 × 106Pa) under LTE and non-LTE conditions. The investigated non-equilibrium aspects are deviations of the neutral ground state population with respect to the equilibrium population (partial LTE). A difference between heavy particle and electron temperature is included. When the calculated total radiative loss is divided by the square of the electron density, a curve is obtained which gives the total radiative loss as a function of temperature. The influences of pressure and deviations from LTE on this curve are small and in many cases negligible. Almost all influences of pressure and deviations from equilibrium are incorporated in the electron density. Absolute measurements in an inductively-coupled plasma can be simulated with realistic values of the b factor (Boltzmann decrement)