Approche industrielle aux boîtes quantiques dans des dispositifs de silicium sur isolant complètement déplété pour applications en information quantique

La mise en oeuvre des qubits de spin électronique à base de boîtes quantiques réalisés en utilisant une technologie avancée de métal-oxyde-semiconducteur complémentaire (en anglais: CMOS ou Complementary Metal-Oxide-Semiconductor) fonctionnant à des températures cryogéniques permet d’envisager la fabrication industrielle reproductible et à haut rendement de systèmes de qubits de spin à grande échelle. Le développement d’une architecture de boîtes quantiques à base de silicium fabriquées en utilisant exclusivement des techniques de fabrication industrielle CMOS constitue une étape majeure dans cette direction. Dans cette thèse, le potentiel de la technologie UTBB (en anglais: Ultra-Thin Body and Buried oxide) silicium sur isolant complétement déplété (en anglais: FD-SOI ou Fully Depleted Silicon-On-Insulator) 28 nm de STMicroelectronics (Crolles, France) a été étudié pour la mise en oeuvre de boîtes quantiques bien définies, capables de réaliser des systèmes de qubit de spin. Dans ce contexte, des mesures d’effet Hall ont été réalisées sur des microstructures FD-SOI à 4.2 K afin de déterminer la qualité du noeud technologique pour les applications de boîtes quantiques. De plus, un flot du processus d’intégration, optimisé pour la mise en oeuvre de dispositifs quantiques utilisant exclusivement des méthodes de fonderie de silicium pour la production de masse est présenté, en se concentrant sur la réduction des risques de fabrication et des délais d’exécution globaux. Enfin, deux géométries différentes de dispositifs à boîtes quantiques FD-SOI de 28nm ont été conçues et leurs performances ont été étudiées à 1.4 K. Dans le cadre d’une collaboration entre Nanoacademic Technologies, Institut quantique et STMicroelectronics, un modèle QTCAD (en anglais: Quantum Technology Computer-Aided Design) en 3D a été développé pour la modélisation de dispositifs à boîtes quantiques FD-SOI. Ainsi, en complément de la caractérisation expérimentale des structures de test via des mesures de transport et de spectroscopie de blocage de Coulomb, leur performance est modélisée et analysée à l’aide du logiciel QTCAD. Les résultats présentés ici démontrent les avantages de la technologie FD-SOI par rapport à d’autres approches pour les applications de calcul quantique, ainsi que les limites identifiées du noeud 28 nm dans ce contexte. Ce travail ouvre la voie à la mise en oeuvre des nouvelles générations de dispositifs à boîtes quantiques FD-SOI basées sur des noeuds technologiques inférieurs.Abstract: Electron spin qubits based on quantum dots implemented using advanced Complementary Metal-Oxide-Semiconductor (CMOS) technology functional at cryogenic temperatures promise to enable reproducible high-yield industrial manufacturing of large-scale spin qubit systems. A milestone in this direction is to develop a silicon-based quantum dot structure fabricated using exclusively CMOS industrial manufacturing techniques. In this thesis, the potential of the industry-standard process 28 nm Ultra-Thin Body and Buried oxide (UTBB) Fully Depleted Silicon-On-Insulator (FD-SOI) technology of STMicroelectronics (Crolles, France) was investigated for the implementation of well-defined quantum dots capable to realize spin qubit systems. In this context, Hall effect measurements were performed on FD-SOI microstructures at 4.2 K to determine the quality of the technology node for quantum dot applications. Moreover, an optimized integration process flow for the implementation of quantum devices, using exclusively mass-production silicon-foundry methods is presented, focusing on reducing manufacturing risks and overall turnaround times. Finally, two different geometries of 28 nm FD-SOI quantum dot devices were conceived, and their performance was studied at 1.4 K. In the framework of a collaboration between Nanoacademic Technologies, Institut quantique, and STMicroelectronics, a 3D Quantum Technology Computer-Aided Design (QTCAD) model was developed for FD-SOI quantum dot device modeling. Therefore, along with the experimental characterization of the test structures via transport and Coulomb blockade spectroscopy measurements, their performance is modeled and analyzed using the QTCAD software. The results reported here demonstrate the advantages of the FD-SOI technology over other approaches for quantum computing applications, as well as the identified limitations of the 28 nm node in this context. This work paves the way for the implementation of the next generations of FD-SOI quantum dot devices based on lower technology nodes

Energy-Efficient Time-Based Encoders and Digital Signal Processors in Continuous Time

Continuous-time (CT) data conversion and continuous-time digital signal processing (DSP) are an interesting alternative to conventional methods of signal conversion and processing. This alternative proposes time-based encoding that may not suffer from aliasing; shows superior spectral properties (e.g. no quantization noise floor); and enables time-based, event-driven, flexible signal processing using digital circuits, thus scaling well with technology. Despite these interesting features, this approach has so far been limited by the CT encoder, due to both its relatively poor energy efficiency and the constraints it imposes on the subsequent CT DSP. In this thesis, we present three principles that address these limitations and help improve the CT ADC/DSP system. First, an adaptive-resolution encoding scheme that achieves first-order reconstruction with simple circuitry is proposed. It is shown that for certain signals, the scheme can significantly reduce the number of samples generated per unit of time for a given accuracy compared to schemes based on zero-order-hold reconstruction, thus promising to lead to low dynamic power dissipation at the system level. Presented next is a novel time-based CT ADC architecture, and associated encoding scheme, that allows a compact, energy-efficient circuit implementation, and achieves first-order quantization error spectral shaping. The design of a test chip, implemented in a 0.65-V 28-nm FDSOI process, that includes this CT ADC and a 10-tap programmable FIR CT DSP to process its output is described. The system achieves 32 dB – 42 dB SNDR over a 10 MHz – 50 MHz bandwidth, occupies 0.093 mm2, and dissipates 15 µW–163 µW as the input amplitude goes from zero to full scale. Finally, an investigation into the possibility of CT encoding using voltage-controlled oscillators is undertaken, and it leads to a CT ADC/DSP system architecture composed primarily of asynchronous digital delays. The latter makes the system highly digital and technology-scaling-friendly and, hence, is particularly attractive from the point of view of technology migration. The design of a test chip, where this delay-based CT ADC/DSP system architecture is used to implement a 16-tap programmable FIR filter, in a 1.2-V 28-nm FDSOI process, is described. Simulations show that the system will achieve a 33 dB – 40 dB SNDR over a 600 MHz bandwidth, while dissipating 4 mW

Study and development of low power consumption SRAMs on 28 nm FD-SOI CMOS process

Since analog circuit designs in CMOS nanometer (< 90 nm) nodes can be substantially affected by manufacturing process variations, circuit performance becomes more challenging to achieve efficient solutions by using analytical models. Extensive simulations are thus commonly required to provide a high yield. On the other hand, due to the fact that the classical bulk MOS structure is reaching scaling limits (< 32 nm), alternative approaches are being developed as successors, such as fully depleted silicon-oninsulator (FD-SOI), Multigate MOSFET, FinFETs, among others, and new design techniques emerge by taking advantage of the improved features of these devices. This thesis focused on the development of analytical expressions for the major performance parameters of the SRAM cache implemented in 28 nm FD-SOI CMOS, mainly to explore the transistor dimensions at low computational cost, thereby producing efficient designs in terms of energy consumption, speed and yield. By taking advantage of both low computational cost and close agreement results of the developed models, in this thesis we were able to propose a non-traditional sizing procedure for the simple 6T-SRAM cell, that unlike the traditional thin-cell design, transistor lengths are used as a design variable in order to reduce the static leakage. The single-P-well (SPW) structure in combination with reverse-body-biasing (RBB) technique were used to achieve a better balance between P-type and N-type transistors. As a result, we developed a 128 kB SRAM cache, whose post-layout simulations show that the circuit consumes an average energy per operation of 0.604 pJ/word-access (64 I/O bits) at supply voltage of 0.45 V and operation frequency of 40 MHz. The total chip area of the 128 kB SRAM cache is 0.060 mm2 .O projeto de circuitos analogicos em processos nanométricos CMOS ( < 90 nm) per substancialmente afetado pelas variacões do processo de fabricacão, sendo cada vez mais desafiador para os projetistas alcançar soluções eficientes no desempenho dos circuitos mediante o uso de modelos analíticos. Simulacões extensas com alto custo com- putacional sao normalmente requeridas para providenciar um correto funcionamento do circuito. Por outro lado, devido ao fato que a estrutura bulk-CMOS esta alcançando seus limites de escala (< 32 nm), outros transistores foram desenvolvidos como sucessores, tais como o fully depleted silicon-on-insulator (FD-SOI), Multigate MOSFET, entre outros, surgindo novas tecnicas de projeto que utilizam as características aprimoradas destes dispositivos. Dessa forma, esta tese de doutorado se foca no desenvolvimento de modelos analíticos dos parametros mais importantes do cache SRAM implementado em processo CMOS FD-SOI de 28 nm, principalmente para explorar as dimensõoes dos transistores com baixo custo computacional, e assim produzir solucões eficientes em termos de consumo de energia, velocidade e rendimento. Aproveitando o baixo custo computacional e a alta concordância dos modelos analíticos, nesta tese fomos capazes de propor um dimensionamento nao tradicional para a célula de memória 6T-SRAM, em que diferentemente é do classico dimensionamento "thin-cell”, os comprimentos dos transistores são utilizados como variável de projeto com o fim de reduzir o consumo estático de corrente. A estrutura single-P-well (SPW), combinada com a técnica reverse-body-biasing (RBB) foram utilizadas para alcançar um melhor balanço entre as correntes específicas dos transistores do tipo P e N

Low power digital baseband core for wireless Micro-Neural-Interface using CMOS sub/near-threshold circuit

This thesis presents the work on designing and implementing a low power digital baseband core with custom-tailored protocol for wirelessly powered Micro-Neural-Interface (MNI) System-on-Chip (SoC) to be implanted within the skull to record cortical neural activities. The core, on the tag end of distributed sensors, is designed to control the operation of individual MNI and communicate and control MNI devices implanted across the brain using received downlink commands from external base station and store/dump targeted neural data uplink in an energy efficient manner. The application specific protocol defines three modes (Time Stamp Mode, Streaming Mode and Snippet Mode) to extract neural signals with on-chip signal conditioning and discrimination. In Time Stamp Mode, Streaming Mode and Snippet Mode, the core executes basic on-chip spike discrimination and compression, real-time monitoring and segment capturing of neural signals so single spike timing as well as inter-spike timing can be retrieved with high temporal and spatial resolution. To implement the core control logic using sub/near-threshold logic, a novel digital design methodology is proposed which considers INWE (Inverse-Narrow-Width-Effect), RSCE (Reverse-Short-Channel-Effect) and variation comprehensively to size the transistor width and length accordingly to achieve close-to-optimum digital circuits. Ultra-low-power cell library containing 67 cells including physical cells and decoupling capacitor cells using the optimum fingers is designed, laid-out, characterized, and abstracted. A robust on-chip sense-amp-less SRAM memory (8X32 size) for storing neural data is implemented using 8T topology and LVT fingers. The design is validated with silicon tapeout and measurement shows the digital baseband core works at 400mV and 1.28 MHz system clock with an average power consumption of 2.2 μW, resulting in highest reported communication power efficiency of 290Kbps/μW to date