3D complex shaped- dissolvable multi level micro/nano mould fabrication

There is growing interest in the development of fabrication techniques to cost effectively mass-produce high-resolution (micro/nano) 3D structures in a range of materials. Biomedical applications are particularly significant. This work demonstrates a novel technique to simultaneously fabricate a sacrificial mould having the inverse shape of the desired device structure and also create the desired device structure using electroplating deposition techniques. The mould is constructed of many thin layers using a photoresist material that is dissolvable and sensitive to UV light. At the same time the device is created in the emerging mould layers using Gold electroplating deposition technique. Choosing to fabricate the mould and the 3D structures in multiple thin layers allows the use of UV light and permits the potential cost-effective realization of 3D curved surfaces, the accuracy and geometric details of which are related to the number of layers used. In this work I present a novel idea to improve the LIGA process when using many masks to deposit multi thin layer over each other. Moreover, this technique can be utilized to produce a curved surface in the vertical direction with any diameter. Practically, a 2 µm thickness of layer is applied in the proposed technique. However, a layer of 0.5 µm or less can be deposited. An example is provided to explain the novel fabrication process and to outline the resulting design and fabrication constraints. With this technique, any structure could be made and any material used. The work employs conventional techniques to produce a 3D complex shape. By using conventional techniques with multi layers to produce a 3D structure, many problems are expected to occur during the process. Those problems were mentioned by many researchers in general but have not been addressed correctly. Most researchers have covered those problems by leaving the conventional and using a new technique they invented to produce the required product. However, in my work I have addressed those problems for the first time and I offered a new and effective technique to improve the MEMS technology and make this technology cheaper. This was achieved by using a research methodology requiring a rigorous review of existing processes, as outlined above, then by proposing a concept design for an improved process. This novel proposed process was then tested and validated by a series of experiments involving the manufacture of demo-devices. The conclusion is that this new process has the potential to be developed into a commercially implementable process

Silicon-on-insulator waveguide structures for electro-optic applications

Silicon based photonic devices have been demonstrated by industrial leaders in the microelectronic industry. The need for system integration has pushed the development of silicon as a photonic material to new levels. This report presents details on a silicon-on-insulator waveguide structure based on a metal Bragg reflection diffraction grating, which utilizes a change in refractive index caused by a carrier change to induce optical modulation. The motivation of the device was for use as an electrically controlled optical modulator operating in the near infrared region; an optically controlled device has been demonstrated in previous work. This study has thoroughly examined the process development and electrical characteristics of the device through use of Silvaco(TM) simulation software and experimentation. The device has exhibited excellent optical characteristics and has shown promise as an optical modulator and a sub-bandgap photon detector. A silicon-on-insulator waveguide structure specified to operate at a wavelength of 1053nm has been simulated, designed, fabricated and tested both optically and electrically. Future iterations have been simulated and designed to take advantage of advanced microelectronic processe

Fabrication of an Atom Chip for Rydberg Atom-Metal Surface Interaction Studies

This thesis outlines the fabrication of two atom chips for the study of interactions between ⁸⁷Rb Rydberg atoms and a Au surface. Atom chips yield tightly confined, cold samples of an atomic species by generating magnetic fields with high gradients using microfabricated current-carrying wires. These ground state atoms may in turn be excited to Rydberg states. The trapping wires of Chip 1 are fabricated using thermally evaporated Cr/Au and patterned using lift-off photolithography. Chip 2 uses a Ti/Pd/Au tri-layer, instead of Cr/Au, to minimize interdiffusion. The chip has a thermally evaporated Au surface layer for Rydberg atom-surface interactions, which is separated from the underlying trapping wires by a planarizing polyimide dielectric. The polyimide was patterned using reactive ion etching. Special attention was paid to the edge roughness and electrical properties of the trapping wires, the planarization of the polyimide, and the grain structure of the Au surface

Fabrication of an Atom Chip for Rydberg Atom-Metal Surface Interaction Studies

This thesis outlines the fabrication of two atom chips for the study of interactions between ⁸⁷Rb Rydberg atoms and a Au surface. Atom chips yield tightly confined, cold samples of an atomic species by generating magnetic fields with high gradients using microfabricated current-carrying wires. These ground state atoms may in turn be excited to Rydberg states. The trapping wires of Chip 1 are fabricated using thermally evaporated Cr/Au and patterned using lift-off photolithography. Chip 2 uses a Ti/Pd/Au tri-layer, instead of Cr/Au, to minimize interdiffusion. The chip has a thermally evaporated Au surface layer for Rydberg atom-surface interactions, which is separated from the underlying trapping wires by a planarizing polyimide dielectric. The polyimide was patterned using reactive ion etching. Special attention was paid to the edge roughness and electrical properties of the trapping wires, the planarization of the polyimide, and the grain structure of the Au surface

Electroluminescent devices via soft lithography

This thesis was submitted for the award of Doctor of Philosophy and was awarded by Brunel University LondonThis thesis provides a compendium for the use of microcontact printing in fabricating electrical devices. Work has been undertaken to examine the use of soft lithographic techniques for employment in electronic manufacture. This thesis focusses on the use of high electric field generators as a means to producing electroluminescent devices. These devices provide a quantifiable output in the form of light. Analysis of the electrical performance of electrode structures can be determined by their success at producing light. A prospective reduction in driving voltage would deem these devices more efficient, longer lasting and an improvement on current specification. The work focussed on the viability of using relatively crude print techniques to create high resolution structures. This was carried out successfully and demonstrated that lighting structures of 75 μm and 25 μm have been produced. Microcontact printing has been established as a method for patterning gold surfaces with a functionalising self-assembled monolayer using alkanethiol molecules. This layer is then utilised as an etch resist layer to expose gold tracks for use as electric field generator electrode arrays. Through careful analysis of each step of the printing process, techniques were developed and reported to create a robust and repeatable print mechanism for reliability and accuracy. These techniques were employed to optimise the print process culminating in the development of each stage and final electrode structures mounted on a rigid backplate for use as electroluminescent devices for characterisation. These devices were then modelled for their electrical characteristics and investigated for being used in low voltage application. In this case for the development of electroluminescent applications, a driving voltage of 65 V was achieved and represents a significant advance to the field of printed electronics and Electroluminescence

Mechanocapillary Forming of Filamentary Materials.

The hierarchical structure and organization of filaments within natural materials determine their collective chemical and physical functionalities. Synthetic nanoscale filaments such as carbon nanotubes (CNTs) are known for their outstanding properties including high stiffness and strength at low density, and high electrical conductivity and current carrying capacity. Ordered assemblies of densely packed CNTs are therefore expected to enable the synthesis of new materials having outstanding multifunctional performance. However, current methods of CNT synthesis have inadequate control of quality, density and order. In pursuit of these needs, a new technique called capillary forming is used to manipulate vertically aligned (VA-) CNTs, and to enable their integration in applications ranging from microsystems to macroscale functional films. Capillary forming relies on shape-directed capillary rise during solvent condensation; followed by evaporation-induced shrinkage. Three-dimensional geometric transformations result from the heterogeneous strain distribution within the microstructures during the vapor-liquid-solid interface shrinkage. A portfolio of microscale CNT assemblies with highly ordered internal structure and freeform geometries including straight, bent, folded and helical profiles, are fabricated using this technique. The mechanical stiffness and electrical conductivity of capillary formed CNT micropillars are 5 GPa and 104 S/m respectively. These values are at least hundred-fold higher than as-grown CNT properties, and exceed the properties of typical microfabrication polymers. Responsive CNT-hydrogel composites are prototyped by combining isotropic moisture-induced swelling of the hydrogel with the anisotropic stiffness of CNTs to induce reversible self-directed shape changes of up to 30% stroke. Centimeter scale sheets are fabricated by mechanical rolling and capillary assisted joining of CNTs. The mechanical stiffness, strength and electrical conductivity of CNT sheets are comparable to those of continuous CNT microstructures; and can be tuned by engineering the morphology of the CNT joints. Finally, the applicability of mechanocapillary forming to other nanoscale filaments is demonstrated using silicon nanowires synthesized by metal assisted chemical etching. Further work using the methods developed in this dissertation could enable applications such as directional liquid transport, adhesives, and biosensors; toward an end goal of creating multifunctional surfaces having arbitrary structural, interfacial, and optical responsiveness.Ph.D.Mechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/91466/1/stawfick_1.pdfhttp://deepblue.lib.umich.edu/bitstream/2027.42/91466/2/stawfick_2.pd

Integration of Benzocyclobutene Polymers and Silicon Micromachined Structures Fabricated with Anisotropic Wet Etching

Integration of low dielectric constant Benzocyclobutene (BCB) film with deep etched structures in silicon allows the fabrication of MEMS devices with low parasitic loss. A fabrication process is developed for integration of thin BCB film and deep anisotropically-etched grooves in silicon using potassium hydroxide (KOH). Gold (Au) is used as an etch mask to protect the low-k film during the highly-corrosive, long, and high-temperature KOH etching process. Metal/BCB adhesion is a key parameter in this masking design. Adhesion of the BCB and metal mask was improved by cure management of the BCB before and after metallization, surface treatment of the BCB before metallization, and high-temperature metallization. Test structures were fabricated to demonstrate the feasibility of this fabrication process. Adhesion improvement was successfully verified by studying BCB/metal interface using time-of-flight secondary ion mass spectroscopy and Auger electron spectroscopy. This study enables the development of the next generation micromotors/microgenerators

Thermal and Mechanical Energy Harvesting Using Lead Sulfide Colloidal Quantum Dots

The human body is an abundant source of energy in the form of heat and mechanical movement. The ability to harvest this energy can be useful for supplying low-consumption wearable and implantable devices. Thermoelectric materials are usually used to harvest human body heat for wearable devices; however, thermoelectric generators require temperature gradient across the device to perform appropriately. Since they need to attach to the heat source to absorb the heat, temperature equalization decreases their efficiencies. Moreover, the electrostatic energy harvester, working based on the variable capacitor structure, is the most compatible candidate for harvesting low-frequency-movement of the human body. Although it can provide a high output voltage and high-power density at a small scale, they require an initial start-up voltage source to charge the capacitor for initiating the conversion process. The current methods for initially charging the variable capacitor suffer from the complexity of the design and fabrication process. In this research, a solution-processed photovoltaic structure was proposed to address the temperature equalization problem of the thermoelectric generators by harvesting infrared radiations emitted from the human body. However, normal photovoltaic devices have the bandgap limitation to absorb low energy photons radiated from the human body. In this structure, mid-gap states were intentionally introduced to the absorbing layer to activate the multi-step photon absorption process enabling electron promotion from the valence band to the conduction band. The fabricated device showed promising performance in harvesting low energy thermal radiations emitted from the human body. Finally, in order to increase the generated power, a hybrid structure was proposed to harvest both mechanical and heat energy sources available in the human body. The device is designed to harvest both the thermal radiation of the human body based on the proposed solution-processed photovoltaic structure and the mechanical movement of the human body based on an electrostatic generator. The photovoltaic structure was used to charge the capacitor at the initial step of each conversion cycle. The simple fabrication process of the photovoltaic device can potentially address the problem associated with the charging method of the electrostatic generators. The simulation results showed that the combination of two methods can significantly increase the harvested energy