Nano-scale TG-FinFET: Simulation and Analysis

Transistor has been designed and fabricated in the same way since its invention more than four decades ago enabling exponential shrinking in the channel length. However, hitting fundamental limits imposed the need for introducing disruptive technology to take over. FinFET - 3-D transistor - has been emerged as the first successor to MOSFET to continue the technology scaling roadmap. In this thesis, scaling of nano-meter FinFET has been investigated on both the device and circuit levels. The studies, primarily, consider FinFET in its tri-gate (TG) structure. On the device level, first, the main TCAD models used in simulating electron transport are benchmarked against the most accurate results on the semi-classical level using Monte Carlo techniques. Different models and modifications are investigated in a trial to extend one of the conventional models to the nano-scale simulations. Second, a numerical study for scaling TG-FinFET according to the most recent International Technology Roadmap of Semiconductors is carried out by means of quantum corrected 3-D Monte Carlo simulations in the ballistic and quasi-ballistic regimes, to assess its ultimate performance and scaling behavior for the next generations. Ballisticity ratio (BR) is extracted and discussed over different channel lengths. The electron velocity along the channel is analyzed showing the physical significance of the off-equilibrium transport with scaling the channel length. On the circuit level, first, the impact of FinFET scaling on basic circuit blocks is investigated based on the PTM models. 256-bit (6T) SRAM is evaluated for channel lengths of 20nm down to 7nm showing the scaling trends of basic performance metrics. In addition, the impact of VT variations on the delay, power, and stability is reported considering die-to-die variations. Second, we move to another peer-technology which is 28nm FD-SOI as a comparative study, keeping the SRAM cell as the test block, more advanced study is carried out considering the cell‘s stability and the evolution from dynamic to static metrics

Modelling and Simulation of Silicon Nanowire-Based Electron Devices for Computation and Sensing

Silicon Nanowires (SiNWs) are considered the fundamental component blocks of future nanoelectronics. Many interesting properties have gained them such a prominent position in the investigation in recent decades. Large surface-to-volume ratio, bio-compatibility, band-gap tuning are among the most appealing features of SiNWs. More importantly, in the ongoing process of dimension miniaturization, SiNWs compatibility with the existing and reliable silicon technology stands as a fundamental advantage. Consequently, the employment of SiNWs spred in several application fields: from computational logic where SiNWs are used to realize transistors, to bio-chemical sensing and nanophotonic applications. In this thesis work we concentrate our attention on the employment of SiNWs in computational logic and bio-chemical sensing. In particular, we aim at giving a contribution in the modelling and simulation of SiNW-based electron devices. Given the current intense investigation of new devices, the modelling of their electrical behaviour is strongly required. On one side, modelling procedures could give an insight on the physical phenomena of transport in nanometer scale systems where quantum effects are dominant. On the other side, the availability of compact models for actual devices can be of undeniable help in the future design process. This work is divided into two parts. After a brief introduction on Silicon Nanowires, the main fabrication techniques and their properties, the first part is dedicated to the modelling of Multiple-Independent Gate Transistors, a new generation of devices arisen from the composition of Gate-All-Around Transistors, finFETs and Double-Gate Transistors. Interesting applications resulting from their employment are Vertically-stacked Silicon Nanowire FETs, known to have an ambipolar behaviour, and Silicon Nanowire Arrays. We will present a compact numerical model for composite Multiple-Independent Gate Transistors which allows to compute current and voltages in complex structures. Validation of the model through simulation proves the accuracy and the computational efficiency of the resulting model. The second part of the thesis work is instead devoted to Silicon Nanowires for bio-chemical sensing. In this respect, major attention is given to Porous Silicon (PS), a non-crystalline material which demonstrated peculiar features apt for sensing. Given its not regular microscopic morphology made of a complex network of crystalline and non-crystalline regions, PS has large surface-to-volume ratio and a relevant chemical reactivity at room temperature. In this work we start from the fabrication of PS nanowires at Istituto Nazionale di Ricerca Metrologica in Torino (I.N.Ri.M.) to devise two main models for PSNWs which can be used to understand the effects of porosity on electron transport in these structures. The two modelling procedures have different validity regimes and efficiently take into account quantum effects. Their description and results are presented. The last part of the thesis is devoted to the impact of surface interaction of molecular compounds and dielectric materials on the transport properties of SiNWs. Knowing how molecules interact with silicon atoms and how the conductance of the wire is affected is indeed the core of SiNWs used for bio-chemical sensing. In order to study the phenomena involved, we performed ab-initio simulations of silicon surface interacting with SO2 and NO2 via the SIESTA package, implementing DFT code. The calculations were performed at Institut de Ciencia De Materials de Barcelona (ICMAB-CSIC) using their computational resources. The results of this simulation step are then exploited to perform simulation of systems made of an enormous quantity of atoms. Due to their large dimensions, atomistic simulations are not affordable and other approaches are necessary. Consequently, calculations with physics-based softwares on a larger spatial scale were adopted. The description of the obtained results occupies the last part of the work together with the discussion of the main theoretical insight gained with the conducted study

Device and circuit-level models for carbon nanotube and graphene nanoribbon transistors

Metal-oxide semiconductor field-effect transistor (MOSFET) scaling throughout the years has enabled us to pack million of MOS transistors on a single chip to keep in pace with Moore’s Law. After forty years of advances in integrated circuit (IC) technology, the scaling of silicon (Si) MOSFET has entered the nanometer dimension with the introduction of 90 nm high volume manufacturing in 2004. The latest technological advancement has led to a low power, high-density and high-speed generation of processor. Nevertheless, the scaling of the Si MOSFET below 22 nm may soon meet its’ fundamental physical limitations. This threshold makes the possible use of novel devices and structures such as carbon nanotube field-effect transistors (CNTFETs) and graphene nanoribbon field-effect transistors (GNRFETs) for future nanoelectronics. The investigation explores the potential of these amazing carbon structures that exceed MOSFET capabilities in term of speed, scalability and power consumption. The research findings demonstrate the potential integration of carbon based technology into existing ICs. In particular, a simulation program with integrated circuit emphasis (SPICE) model for CNTFET and GNRFET in digital logic applications is presented. The device performance of these circuit models and their design layout are then compared to 45 nm and 90 nm MOSFET for benchmarking. It is revealed through the investigation that CNT and GNR channels can overcome the limitations imposed by Si channel length scaling and associated short channel effects while consuming smaller channel area at higher current density

Analytical predictive 2d modeling of pinch-off behavior in nanoscale multi-gate mosfets

In this thesis the pinch-off behavior in nanoscale Multi-Gate MOSFETs was reviewed and with compact models described. For this a 2D approach with Schwarz-Christoffel conformal mapping technique was used. A model to calculate the current in single gate MOSFETs was derived and compared to device simulations from TCAD Sentaurus down to 50nm. For the DoubleGate MOSFET a new way to define the saturation point was found. A fully 2D closed-form model to locate this point was created. It was also found that with quantum mechanics effects a pinch-off point can occur and can be described with the same model. Furthermore the model was extended to describe the coupled pinch-off points in an asymmetrical biased DoubleGate MOSET with an even an odd mode. Also the saturation point behavior in FinFETs was examinated

Compact modeling of the rf and noise behavior of multiple-gate mosfets

La reducción de la tecnología MOSFET planar ha sido la opción tecnológica dominante en las últimas décadas. Sin embargo, hemos llegado a un punto en el que los materiales y problemas en los dispositivos surgen, abriendo la puerta para estructuras alternativas de los dispositivos. Entre estas estructuras se encuentran los dispositivos DG, SGT y Triple-Gate. Estas tres estructuras están estudiadas en esta tesis, en el contexto de rducir las dimensiones de los dispositivos a tamaños tales que los mecanismos cuánticos y efectos de calan coro deben tenerse n cuenta. Estos efectos vienen con una seria de desafíos desde el pun to de vista de modelación, unos de los más grandes siendo el tiempo y los recursos comprometidos para ejecutar las simulaciones. para resolver este problema, esta tesis propone modelos comlets analíticos y compactos para cada una de las geometrías, validos desde DC hasta el modo de operación en Rf para los nodos tecnológicos futuros. Dichos modelos se han extendido para analizar el ruido de alta frecuencia en estos diapositivos

Two dimensional quantum and reliability modelling for lightly doped nanoscale devices

The downscaling of MOSFET devices leads to well-studied short channel effects and more complex quantum mechanical effects. Both quantum and short channel effects not only alter the performance but they also affect the reliability. This continued scaling of the MOS device gate length puts a demand on the reduction of the gate oxide thickness and the substrate doping density. Quantum mechanical effects give rise to the quantization of energy in the conduction band, which consequently creates a larger effective bandgap and brings a displacement of the inversion layer charge out of the Si/SiO2 interface. Such a displacement of charge is equivalent to an increase in the effective oxide layer thickness, a growth in the threshold voltage, and a decrease in the current level. Therefore, using the classical analysis approach without including the quantum effects may lead to perceptible errors in the prognosis of the performance of modern deep submicron devices. In this work, compact Verilog-A compatible 2D models including quantum short channel effects and confinement for the potential, threshold voltage, and the carrier charge sheet density for symmetrical lightly doped double-gate MOSFETs are developed. The proposed models are not only applicable to ultra-scaled devices but they have also been derived from analytical 2D Poisson and 1D Schrodinger equations including 2D electrostatics, in order to incorporate quantum mechanical effects. Electron and hole quasi-Fermi potential effects were considered. The models were further enhanced to include negative bias temperature instability (NBTI) in order to assess the reliability of the device. NBTI effects incorporated into the models constitute interface state generation and hole-trapping. The models are continuous and have been verified by comparison with COMSOL and BALMOS numerical simulations for channel lengths down to 7nm; very good agreement within ±5% has been observed for silicon thicknesses ranging from 3nm to 20nm at 1 GHz operation after 10 years

Carbon Nanotube Interconnect Modeling for Very Large Scale Integrated Circuits

In this research, we have studied and analyzed the physical and electrical properties of carbon nanotubes. Based on the reported models for current transport behavior in non-ballistic CNT-FETs, we have built a dynamic model for non-ballistic CNT-FETs. We have also extended the surface potential model of a non-ballistic CNT-FET to a ballistic CNT-FET and developed a current transport model for ballistic CNT-FETs. We have studied the current transport in metallic carbon nanotubes. By considering the electron-electron interactions, we have modified two-dimensional fluid model for electron transport to build a semi-classical one-dimensional fluid model to describe the electron transport in carbon nanotubes, which is regarded as one-dimensional system. Besides its accuracy compared with two-dimensional fluid model and Lüttinger liquid theory, one-dimensional fluid model is simple in mathematical modeling and easier to extend for electronic transport modeling of multi-walled carbon nanotubes and single-walled carbon nanotube bundles as interconnections. Based on our reported one-dimensional fluid model, we have calculated the parameters of the transmission line model for the interconnection wires made of single-walled carbon nanotube, multi-walled carbon nanotube and single-walled carbon nanotube bundle. The parameters calculated from these models show close agreements with experiments and other proposed models. We have also implemented these models to study carbon nanotube for on-chip wire inductors and it application in design of LC voltage-controlled oscillators. By using these CNT-FET models and CNT interconnects models, we have studied the behavior of CNT based integrated circuits, such as the inverter, ring oscillator, energy recovery logic; and faults in CNT based circuits

Modelling of field-effect transistors based on 2D materials targeting high-frequency applications

New technologies are necessary for the unprecedented expansion of connectivity and communications in the modern technological society. The specific needs of wireless communication systems in 5G and beyond, as well as devices for the future deployment of Internet of Things has caused that the International Technology Roadmap for Semiconductors, which is the strategic planning document of the semiconductor industry, considered since 2011, graphene and related materials (GRMs) as promising candidates for the future of electronics. Graphene, a one-atom-thick of carbon, is a promising material for high-frequency applications due to its intrinsic superior carrier mobility and very high saturation velocity. These exceptional carrier transport properties suggest that GRM-based field-effect transistors could potentially outperform other technologies. This thesis presents a body of work on the modelling, performance prediction and simulation of GRM-based field-effect transistors and circuits. The main goal of this work is to provide models and tools to ease the following issues: (i) gaining technological control of single layer and bilayer graphene devices and, more generally, devices based on 2D materials, (ii) assessment of radio-frequency (RF) performance and microwave stability, (iii) benchmarking against other existing technologies, (iv) providing guidance for device and circuit design, (v) simulation of circuits formed by GRM-based transistors.Comment: Thesis, 164 pages, http://hdl.handle.net/10803/40531

Radio Frequency InGaAs MOSFETs

III-V-based Indium gallium arsenide is a promising channel material for high-frequency applications due to its superior electron mobility property. In this thesis, InGaAs/InP heterostructure radio frequency MOSFETs are designed, fabricated, and characterized. Various spacer technologies, from high dielectric spacers to air spacers, are implemented to reduce parasitic capacitances, and fT/fmax are evaluated. Three types of RF MOSFETs with different spacer technologies are fabricated in this work.InP ∧-ridge spacers are integrated on InGaAs Nanowire MOSFET in an attempt to decrease parasitic capacitances; however, due to a high-dielectric constant of the spacers and smaller transistors transconductance, the fT/fmax are limited to 75/100 GHz. InGaAs quantum well MOSFETs with a sacrificial amorphous silicon spacer are fabricated, and they have capacitances of a similar magnitude to other existing high-performing RF InGaAs FETs. An 80 nm InGaAs MOSFET has fT/fmax = 243/147 GHz is demonstrated, and further optimization of the channel and layout would improve the performance. Next, InGaAs MOSFETs with nitride spacer are fabricated in a top-down approach, where the heterostructure is designed to reduce contact resistance and thus improve transconductance. In the first attempt, from the electrical characterization, it is concluded that the ON resistance of these MOSFETs is comparable to state-of-the-art HEMTs. Complete non-quasi-static small-signal modeling is performed on these transistors, and the discrepancy in the magnitude of fmax is discussed. InGaAs/InP 3D-nanosheet/nanowire FETs' high-frequency performance is studied by combining intrinsic analytical and extrinsic numerical models to estimate fT/fmax. 3D vertical stacking results in smaller parasitic capacitances due to electric field perturbance because of screening.An 8-band k⋅p model is implemented to calculate the electronic parameters of strained InxGa1-xAs/InP heterostructure-based quantum wells and nanowires. Bandgap, conduction band energy levels, and their effective masses and non-parabolicity factors are studied for various indium compositions and channel dimensions. These calculated parameters are used to model the long channel quantum well InGaAs MOSFET at cryogenic temperatures, and the importance of band tails limiting the subthreshold slope is discussed