Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction

A top-down clamped-clamped beam integrated in a CMOS technology with a cross section of 500 nm × 280 nm has been electrostatic actuated and sensed using two different transduction methods: capacitive and piezoresistive. The resonator made from a single polysilicon layer has a fundamental in-plane resonance at 27 MHz. Piezoresistive transduction avoids the effect of the parasitic capacitance assessing the capability to use it and enhance the CMOS-NEMS resonators towards more efficient oscillator. The displacement derived from the capacitive transduction allows to compute the gauge factor for the polysilicon material available in the CMOS technology

DEVELOPMENT OF PIEZORESISTIVE SILICON NANOWIRES (SINWS) AND THE APPLICATIONS IN NEMS TECHNOLOGY.

Ph.DDOCTOR OF PHILOSOPH

Etude de NEMS à nanofils polycristallins pour la détection et l’intégration hétérogène 3D ultra-dense

Recently, technological advances lead to a very large scale integration (VLSI) of microelectronics components at the nanoscale. Faced with the traditional miniaturization limits, the three dimensions (3D) integration open the door to heterogeneous miniaturized devices, with new chip generations. At the same time, new concepts such as junctionless nanowires and polycrystalline silicon nanowires allow to imagine low temperature processes and low-cost devices for a 3D integration on a stabilized CMOS. Poly-silicon nanowire based NEMS on CMOS for mass detection is a new "More-Than-Moore" opportunity. The NEMS could be arranged in a dense network like memory and image sensor architectures. The individual addressing of each NEMS, the functionalization for the detection of specific molecules within a large area (VLSI), allow the implementation of a new type of Multi-physics sensors, compact and highly sensitive. The purpose of this thesis has been the manufacturing and the performance evaluation of poly-silicon nanowire based NEMS. The challenge was to find the best processes with a back-end compatible thermal budget. A rigorous study of the layer physicochemical properties has been correlated with the electrical, mechanical performances and the yield of poly-silicon NEMS. This allowed us to make a selection of the best fabrication processes. NEMS manufactured at very low temperature with an active layer deposited at room temperature and recrystallized by a laser annealing exhibited high performances in terms of transduction (piezoresistivity) and frequency stability comparable to monocrystalline references. Polycrystalline silicon.Les progrès technologiques de ces dernières années ont permis une très forte intégration des composants de la microélectronique à l'échelle nanométrique. Face aux limites de la miniaturisation classique, les technologies d'intégration en trois dimensions (3D) ouvrent la voie vers des dispositifs miniaturisés hétérogènes avec de nouvelles générations de puces. En parallèle, de nouveaux concepts tels que les nanofils sans jonction et les nanofils en silicium polycristallins permettent à terme d'imaginer des procédés froids et des dispositifs à faible coût permettant une intégration 3D hyperdense sur un CMOS stabilisé. La fabrication de NEMS à base de nanofils polycristallins pour la détection de masse sur CMOS est donc une nouvelle opportunité « More-Than-Moore ». Les capteurs pourraient être disposés en réseau dense en s'inspirant des architectures mémoires et imageurs. L'adressage individuel de chaque NEMS, la possibilité de les fonctionnaliser à la détection de molécules particulières, et la multiplication des capteurs sur une grande surface (« Very Large Integration » (VLSI)) permettraient la mise en œuvre d'un nouveau genre de capteur multi-physique, compact et ultrasensible. Le but de ces travaux de thèse a donc été la fabrication et l'évaluation des performances de NEMS à base de nanofils en poly-silicium. L'enjeu fut de trouver des procédés avec un budget thermique compatible à une intégration sur back-end. Une étude rigoureuse sur les propriétés physico-chimiques de la couche a été corrélée aux performances électriques, mécaniques, ainsi qu'au rendement des NEMS poly-Silicium, ce qui nous a permis de faire une sélection des meilleurs procédés de fabrication. Les NEMS fabriqués à basse température avec une couche active déposée à température ambiante et recristallisée par laser ont montré des performances, que ce soit au niveau de la transduction (piézorésistivité), ou de la stabilité du résonateur compétitives par rapports aux références monocristallines

RF MEMS/NEMS RESONATORS FOR WIRELESS COMMUNICATION SYSTEMS AND ADSORPTION-DESORPTION PHASE NOISE

During the past two decades a considerable effort has been made to develop radio-frequency (RF) resonators which are fabricated using the micro/nanoelectro-mechanical systems (MEMS/NEMS) technologies, in order to replace conventional large off-chip components in wireless transceivers and other high-speed electronic systems.The first part of the paper presents an overview of RF MEMS and NEMS resonators, including those based on two-dimensional crystals (e.g. graphene). The frequency tuning in MEMS/NEMS resonators is then analyzed. Improvements that would be necessary in order for MEMS/NEMS resonators to meet the requirements of wireless systems are also discussed.The analysis of noise of RF MEMS/NEMS resonators and oscillators is especially important in modern wireless communication systems due to increasingly stringent requirements regarding the acceptable noise level in every next generation. The second part of the paper presents the analysis of adsorption-desorption (AD) noise in RF MEMS/NEMS resonators, which becomes pronounced with the decrease of components' dimensions, and is not sufficiently elaborated in the existing literature about such components. Finally, a theoretical model of phase noise in RF MEMS/NEMS oscillators will be presented, with a special emphasize on the influence of the resonator AD noise on the oscillator phase noise

Investigation and Integration of Piezoresistive Silicon Nanowires for MEMS applications

Ph.DDOCTOR OF PHILOSOPH

Ultra-High Frequency Nanoelectromechanical Systems with Low-Noise Technologies for Single-Molecule Mass Sensing

Advancing today's very rudimentary nanodevices toward functional nanosystems with considerable complexity and advanced performance imposes enormous challenges. This thesis presents the research on ultra-high frequency (UHF) nanoelectromechanical systems (NEMS) in combination with low-noise technologies that enable single-molecule mass sensing and offer promises for NEMS-based mass spectrometry (MS) with single-Dalton sensitivity. The generic protocol for NEMS resonant mass sensing is based on real-time locking and tracking of the resonance frequency as it is shifted by the mass-loading effect. This has been implemented in two modes: (i) creating an active self-sustaining oscillator based on the NEMS resonator, and (ii) a higher-precision external oscillator phase-locking to and tracking the NEMS resonance. The first UHF low-noise self-sustaining NEMS oscillator has been demonstrated by using a 428MHz vibrating NEMS resonator as the frequency reference. This stable UHF NEMS oscillator exhibits ~0.3ppm frequency stability and ~50zg (1zg = 10-21 g) mass resolution with its excellent wideband-operation (~0.2MHz) capability. Given its promising phase noise performance, the active NEMS oscillator technology also offers important potentials for realizing NEMS-based radio-frequency (RF) local oscillators, voltage-controlled oscillators (VCOs), and synchronized oscillators and arrays that could lead to nanomechanical signal processing and communication. The demonstrated NEMS oscillator operates at much higher frequency than conventional crystal oscillators and their overtones do, which opens new possibilities for the ultimate miniaturization of advanced crystal oscillators. Low-noise phase-locked loop (PLL) techniques have been developed and engineered to integrate with the resonance detection circuitry for the passive UHF NEMS resonators. Implementations of the NEMS-PLL mode with generations of low-loss UHF NEMS resonators demonstrate improving performance, namely, reduced noise and enhanced dynamic range. Very compelling frequency stability of ~0.02ppm and unprecedented mass sensitivity approaching 1zg has been achieved with a typical 500MHz device in the narrow-band NEMS-PLL operation. Retaining high quality factors (Q's) while scaling up frequency has become crucial for UHF NEMS resonators. Extensive measurements, together with theoretical modeling, have been performed to investigate various energy loss mechanisms and their effects on UHF devices. This leads to important insights and guidelines for device Q-engineering. The first VHF/UHF silicon nanowire (NW) resonators have been demonstrated based on single-crystal Si NWs made by bottom-up chemical synthesis nanofabrication. Pristine Si NWs have well-faceted surfaces and exhibit high Q's (Q ≈ 13100 at 80MHz and Q ≈ 5750 at 215MHz). Given their ultra-small active mass and very high mass responsivity, these Si NWs also offer excellent mass sensitivity in the ~10?50zg range. These UHF NEMS and electronic control technologies have demonstrated promising mass sensitivity for kilo-Dalton-range single-biomolecule mass sensing. The achieved performance roadmap, and that extended by next generations of devices, clearly indicates realistic and viable paths toward the single-Dalton mass sensitivity. With further elaborate engineering, prototype NEMS-MS is optimistically within reach.</p

High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators with Piezoresistive Readout

Over the past decades there has been a great deal of research on developing high frequency micromechanical resonators. As the two most common and conventional MEMS resonators, piezoelectric and electrostatic resonators have been at the center of attention despite having some drawbacks. Piezoelectric resonators provide low impedances that make them compatible with other low impedance electronic components, however they have low quality factors and complicated fabrication processes. In case of electrostatic resonators, they have higher quality factors but the need for smaller transductions gaps complicates their fabrication process and causes squeezed film damping in Air. In addition, the operation of both these resonators deteriorates at higher frequencies. In this presented research, thermally actuated resonators with piezoresistive readout have been developed. It has been shown that not only do such resonators require a simple fabrication process, but also their performance improves at higher frequencies by scaling down all the dimensions of the structure. In addition, due to the internal thermo-electro-mechanical interactions, these active resonators can turn some of the consumed electronic power back into the mechanical structure and compensate for the mechanical losses. Therefore, such resonators can provide self-Q-enhancement and self-sustained-oscillation without the need for any electronic circuitry. In this research these facts have been shown both experimentally and theoretically. In addition, in order to further simplify the fabrication process of such structures, a new controlled batch fabrication method for fabricating silicon nanowires has been developed. This unique fabrication process has been utilized to fabricate high frequency, low power thermal-piezoresistive resonators. Finally, a new thermal-piezoresistive resonant structure has been developed that can operate inside liquid. This resonant structure can be utilized as an ultra sensitive biomedical mass sensor

Mechanical Properties of Low Dimensional Materials

Recent advances in low dimensional materials (LDMs) have paved the way for unprecedented technological advancements. The drive to reduce the dimensions of electronics has compelled researchers to devise newer techniques to not only synthesize novel materials, but also tailor their properties. Although micro and nanomaterials have shown phenomenal electronic properties, their mechanical robustness and a thorough understanding of their structure-property relationship are critical for their use in practical applications. However, the challenges in probing these mechanical properties dramatically increase as their dimensions shrink, rendering the commonly used techniques inadequate. This Dissertation focuses on developing techniques for accurate determination of elastic modulus of LDMs and their mechanical responses under tensile and shear stresses. Fibers with micron-sized diameters continuously undergo tensile and shear deformations through many phases of their processing and applications. Significant attention has been given to their tensile response and their structure-tensile properties relations are well understood, but the same cannot be said about their shear responses or the structure-shear properties. This is partly due to the lack of appropriate instruments that are capable of performing direct shear measurements. In an attempt to fill this void, this Dissertation describes the design of an inexpensive tabletop instrument, referred to as the twister, which can measure the shear modulus (G) and other longitudinal shear properties of micron-sized individual fibers. An automated system applies a pre-determined twist to the fiber sample and measures the resulting torque using a sensitive optical detector. The accuracy of the instrument was verified by measuring G for high purity copper and tungsten fibers. Two industrially important fibers, IM7 carbon fiber and Kevlar® 119, were found to have G = 17 and 2.4 GPa, respectively. In addition to measuring the shear properties directly on a single strand of fiber, the technique was automated to allow hysteresis, creep and fatigue studies. Zinc oxide (ZnO) semiconducting nanostructures are well known for their piezoelectric properties and are being integrated into several nanoelectro-mechanical (NEMS) devices. In spite of numerous studies on the mechanical response of ZnO nanostructures, there is not a consensus in its measured bending modulus (E). In this Dissertation, by employing an all-electrical Harmonic Detection of Resonance (HDR) technique on ZnO nanowhisker (NW) resonators, the underlying origin for electrically-induced mechanical oscillations in a ZnO NW was elucidated. Based on visual detection and electrical measurement of mechanical resonances under a scanning electron microscope (SEM), it was shown that the use of an electron beam as a resonance detection tool alters the intrinsic electrical character of the ZnO NW, and makes it difficult to identify the source of the charge necessary for the electrostatic actuation. A systematic study of the amplitude of electrically actuated as-grown and gold-coated ZnO NWs in the presence (absence) of an electron beam using an SEM (dark-field optical microscope) suggests that the oscillations seen in our ZnO NWs are due to intrinsic static charges. In experiments involving mechanical resonances of micro and nanostructured resonators, HDR is a tool for detecting transverse resonances and E of the cantilever material. To add to this HDR capability, a novel method of measuring the G using HDR is presented. We used a helically coiled carbon nanowire (HCNW) in singly-clamped cantilever configuration, and analyzed the complex (transverse and longitudinal) resonance behavior of the nonlinear geometry. Accordingly, a synergistic protocol was developed which (i) integrated analytical, numerical (i.e., finite element using COMSOL ®) and experimental (HDR) methods to obtain an empirically validated closed form expression for the G and resonance frequency of a singly-clamped HCNW, and (ii) provided an alternative for solving 12th order differential equations. A visual detection of resonances (using in situ SEM) combined with HDR revealed intriguing non-planar resonance modes at much lower driving forces relative to those needed for linear carbon nanotube cantilevers. Interestingly, despite the presence of mechanical and geometrical nonlinearities in the HCNW resonance behavior, the ratio of the first two transverse modes f2/f1 was found to be similar to the ratio predicted by the Euler-Bernoulli theorem for linear cantilevers

Simulation and Fabrication of Three Novel Micromechanical Sensors

This work focuses on the simulation, fabrication and characterization of novel microdevices for chemical and biological sensors for improved sensitivity, enhanced performance and applicability. Specifically, microbridge and microcoil sensors have been fabricated via advanced microfabrication technologies. Due to the potential application in chemical and biological sensing, the growth of gold and platinum nanowires during an electrolysis process have also been investigated. A microbridge can be considered as the head-to-head fusion of two cantilevers and the middle of the bridge would deform in a way similar to a microcantilever. The microbridge sensing device is more stable than the microcantilever, especially in turbulent or vibrational conditions, since both ends are fixed. The trade-off is the low ΔR/R change (sensitivity) of the microbridge compared to that of the microcantilever. Simulation of the microbridge has been conducted via Finite Element Analysis (FEA). The width, thickness and doping level of the piezoresistor play an important part in the sensitivity of the microbridge. Based on the simulation results and following standard microfabrication technology, microbridges have been fabricated. The detection of Hg2+ based on the microbridge platform was investigated for sensor validation. The microcoil hygrometer can be used as a universal tool for the detection of chemical species by depositing a chemical specific coating on one side of the coil. The coil movement can be readily observed by the human eye and it advances as a cost-effective and power-free device. A micro- or nano-scale sized coil provides an outstanding sensor platform with improved dynamic response, greatly reduced size, and the integration of micromechanical components with on-chip electronic circuitry. Following standard microfabrication techniques, an SiO2/Si/SU-8 microcoil has been fabricated. After surface modification by treating the coil with aminopropyltriethoxysilane (APS), the microcoil was exposed to acetic acid vapor in air for characterization. This microcoil device has a potential to be used as a novel microsensor for the detection of chemical and biological species both in air and in solutions. A self-assembled approach to grow gold and platinum nanowires across the gap of two electrodes on a surface using an electrolysis process has been investigated. In this process, the anode electrode is oxidized to form nanowires on the cathode. The DC offset, AC signal frequency and the space between the two electrodes all play important roles in the growth of the nanowires