Design and modelling of solidly mounted resonators for low-cost particle sensing

This work presents the design and fabrication of Solidly Mounted Resonator (SMR) devices for the detection of particulate matter (PM2.5 and PM10) in order to develop a smart low-cost particle sensor for air quality. These devices were designed to operate at a resonant frequency of either 870 MHz or 1.5 GHz, employing zinc oxide as the piezoelectric layer and an acoustic mirror made from molybdenum and silicon dioxide layers. Finite element analysis of the acoustic resonators was performed using COMSOL Multiphysics software in order to evaluate the frequency response of the devices and the performance of the acoustic mirror. The zinc oxide based acoustic resonators were fabricated on a silicon substrate using a five mask process. The mass sensitivity of the acoustic resonators was estimated using a 3-D finite element model and preliminary testing has been performed. The theoretical and observed mass sensitivity were similar at ca. 145 kHz/ng for the 870 MHz resonator when detecting PM2.5 suggesting that SMR devices have potential to be used as part of a miniature smart sensor system for airborne particle detection.This work was funded under the European Commission 7th Framework Programme, Project No. 611887, “Multi-Sensor-Platform for Smart Building Management: MSP”. F.H.Villa-Lopez thanks the financial support from the National Mexican Council of Science and Technology (CONACYT). G. Rughoobur wishes to acknowledge financial support from the Cambridge Trusts.This is the author accepted manuscript. The final version is available from IOP via http://dx.doi.org/10.1088/0957-0233/27/2/02510

Wearable Sensors and Smart Devices to Monitor Rehabilitation Parameters and Sports Performance: An Overview

A quantitative evaluation of kinetic parameters, the joint’s range of motion, heart rate, and breathing rate, can be employed in sports performance tracking and rehabilitation monitoring following injuries or surgical operations. However, many of the current detection systems are expensive and designed for clinical use, requiring the presence of a physician and medical staff to assist users in the device’s positioning and measurements. The goal of wearable sensors is to overcome the limitations of current devices, enabling the acquisition of a user’s vital signs directly from the body in an accurate and non–invasive way. In sports activities, wearable sensors allow athletes to monitor performance and body movements objectively, going beyond the coach’s subjective evaluation limits. The main goal of this review paper is to provide a comprehensive overview of wearable technologies and sensing systems to detect and monitor the physiological parameters of patients during post–operative rehabilitation and athletes’ training, and to present evidence that supports the efficacy of this technology for healthcare applications. First, a classification of the human physiological parameters acquired from the human body by sensors attached to sensitive skin locations or worn as a part of garments is introduced, carrying important feedback on the user’s health status. Then, a detailed description of the electromechanical transduction mechanisms allows a comparison of the technologies used in wearable applications to monitor sports and rehabilitation activities. This paves the way for an analysis of wearable technologies, providing a comprehensive comparison of the current state of the art of available sensors and systems. Comparative and statistical analyses are provided to point out useful insights for defining the best technologies and solutions for monitoring body movements. Lastly, the presented review is compared with similar ones reported in the literature to highlight its strengths and novelties

Artificial Tactile System and Signal Processing for Haptic applications

Human have the ability to interact with the external environment through five main senses which are vision, hearing, smell, taste and touch. Most of all, the sensation like vision or hearing have been well developed and the use of various applications like TV, Camera, or artificial cochlear have been widely generalized. As the next steps, recently, the tactile sensor to mimic the tactile system of human have been attracted by many groups. Especially, after the development of Apple’s iPhone, the public interest about touch sensing applications have been increased explosively. Other researches for tactile sensing have focused on enhancing the performance of tactile sensor like the sensitivity, stability, response time and so on. As a result, there are some researches that the sensor performance of certain criteria is better than that of human tactile system. However, a human tactile system is not only very sensitive but also complex. In other words, ultimately, the tactile system mimicking the human tactile sensation should detect various parameters such as the pressure, temperature, hardness or roughness and also decide the psychological feeling like the pain by a hot material in touching or the smooth/roughness feeling in sliding the certain material. Therefore, in this thesis, it has been studied for the development of multifunctional tactile sensing system detecting various tactile parameters and deciding the kinds of psychological tactile feeling by measured stimulation. As the first step for the development of tactile system, we have studied the tactile sensor using ZnO nanowire. Therefore, in this chapter, the basic characteristics of ZnO nanowire are investigated to confirm the possibility for the tactile sensor. In addition, structural design factors of sensor units have been studied in order to enhance the sensitivity of ZnO nanowire-based tactile sensor. We have primarily demonstrated the effect of a square pattern array design in a pressure sensor using ZnO nanowires. Nanowires grown on the edge of cells can be bent easily because of growth direction, density of nanowires, and buckling effect. Since smaller square pattern arrays induce a higher circumference to cell area ratio, if one sensor unit consists of many micro-level square pattern arrays, the design enhances the piezoelectric efficiency and the sensitivity. As a result, 20um × 20um cell arrays showed three times higher pressure sensitivity than 250um × 250um cell array structures at a pressure range from 4kPa to 14kPa. The induced piezoelectric voltage with the same pressure level also increased drastically. Therefore, the smaller pattern array design is more appropriate for a high-sensitive pressure sensor than a simple one-body cell design for tactile systems, and it has the advantage of better power efficiency, which is also important for artificial tactile systems. Even if, in previous experiments, the possibility of piezoelectric materials as the tactile sensor and the method for the enhancement of pressure sensitivity are confirmed well, the tactile sensor for mimicking the human tactile sensation should measure various parameters as well as the pressure. However, many studies about ‘smooth-rough’ sensation depend on the machine learning technology with simple tactile sensors rather than developing the sensors that can measure various parameters like surface topography, hardness, quality of materials at the same time. Therefore, after the development of the pressure sensor, specific structures based on PDMS are proposed to measure and analyze above-mentioned parameters related to ‘smooth-rough’ decision, as like fingerprint of human. To find the optimized structure, three kinds of the structure shape (cone, cylinder and dome) are fabricated and the pressure sensitivity according to the shape are also measured. FEM simulation is also carried out to support the experimental result. Our tactile sensor with optimized dome structure (500um height) provides high shear force sensitivity, fast response time, stability, and durability. The high sensitivity about the shear force enables better the tactile sensor to measure the various surface information such as the pitch of pattern, the depth, the sliding velocity, the hardness and so on. In addition, after the study to measure the various surface information by dome structure, the research to measure the other surface information is also followed. In our previous study, we confirmed that the surface topography can be reconstructed by mapping the piezoelectric signals according to the location. In this research, to reduce the number of measurements from dozens to once and minimize the data loss at the empty space between adjacent sensors, the electrode array of Zig-Zag type is applied to the tactile sensor. As a result, with just one measurement, the surface topography of broad region can be successfully reconstructed by our tactile sensor as the high-resolution image. Additionally, the temperature sensor based on the resistive mechanism is fabricated between the Zig-Zag electrode lines to measures the temperature of surface materials when the tactile sensor rubs on the materials in real time. Over the development of the tactile sensing applications, the demand for an artificial system like human tactile sensation have been much more increased. Therefore, in this study, as a surrogate for human tactile sensation, we propose an artificial tactile sensing system based on the developed sensors in previous sections. For this, the piezoelectric tactile signal generated by touching and rubbing the material is transferred to DAQ system connected with our tactile sensor. First, the system decides whether the contacted material is dangerous or not. If dangerous like sharp or hot materials, the warning signal is generated by our artificial tactile system. If not, the sensor connected with the system rubs the materials and detects the roughness of the materials. Especially, the human test data related to ‘soft-rough’ detection is applied to a deep learning structure allowing personalization of the system, because tactile responses vary among humans. This approach could be applied to electronic devices with tactile emotional exchange capabilities, as well as various advanced digital experiences. In this thesis, human-like tactile sensing system based on the piezoelectric effect is successfully confirmed through various experiments. Although there are still some issues that need to be improved, this research is expected to be fundamental results for human-like tactile sensing system detecting a variety of the parameters such as the pressure, temperature, surface morphology, hardness, roughness and so on. In the future, through collaborative research with other fields like brain science, signal processing, we hope that this research can mimic psychological tactile sensations and communicate emotional exchange with external environment like real human skin.YList of Contents Abstract i List of contents iii List of tables vi List of figures vii Ⅰ. INTRODUCTION 1 1.1 Motivation 1 1.2 Various transduction mechanisms for the tactile sensor 5 1.2.1 Capacitive mechanism 5 1.2.2 Resistive mechanism 6 1.2.3 Triboelectric effect 7 1.2.4 Piezoelectric effect 9 1.3 Objectives 12 1.4 Reference 13 II. BASIC CHARACTERISTICS AND THE METHOD FOR ENHANC-ING THE PRESSURE SENSITIVITY OF THE TACTILE SENSOR BASED ON ZnO NANOWIRE 19 2.1 Introduction 19 2.2 Basic characteristics of ZnO nanowire 22 2.3 Device Fabrication 31 2.4 Morphological and Electrical characteristics 33 2.5 Pattern structure for enhanced for pressure sensitivity 38 2.6 Simulation result of piezoelectric effect for pattern structure 42 2.7 Reference 46 III. DOME STRUCTURE TO MEAUSRE THE SURFACE INFOR-MATION 52 3.1 Introduction 52 3.2 Basic characteristics of P(VDF-TrFE) 53 3.3 Device fabrication 61 3.4 Interaction mechanism between dome structure and surface material 63 3.5 Simulation and Experimental result comparing cone, cylinder, and dome structure 64 3.6 Simulation and Experimental result of the sensitivity enhancement ef-fect by dome structure 66 3.7 Depth measurement by tactile sensor with dome structure 72 3.8 Pattern of pitch by multi-array tactile sensor with dome structure 77 3.9 Hardness measurement by the tactile sensor with dome structure 79 3.10 Reference 83 IV. ZIG-ZAG ARRAYED TACTILE SENSOR BASED ON PIEZOE-LECTRIC-RESISTIVE MECHANISM TO DETECT THE SURFACE TOPOG-RAPHY AND TEMPERATURE 87 4.1 Introduction 87 4.2 Device fabrication 88 4.3 Piezoelectric characteristics of fabricated tactile sensor 90 4.4 Surface rendering method by the piezoelectric effect 95 4.5 Surface rendering result of 3D printed materials 96 4.6 Temperature sensing in sliding the high temperature material on Zig-Zag tactile sensor 99 4.7 Reference 103 V. TACTILE SENSING SYSTEM FOR PAIN AND SMOOTH/ROUGH DETECTION 105 5.1 Introduction 105 5.2 Components of the tactile sensing system 107 5.3 Artificial tactile sensing system for generating the pain warning 108 5.4 Artificial tactile sensing system for smooth/rough sensing 112 5.5 Reference 117 VⅠ. CONCLUSION 120DoctordCollectio

Plate Vibration Dispalcement Curve Measurement Using PVDF

Beam and plate dynamics are often measured using accelerometers and in some cases laserbased systems. Natural frequencies, mode shapes, and deflections are then derived from these measurements. The work presented here describes a method to directly measure the deflection curve of a vibrating beam and plate using piezoelectric films. The sensor consists of constant shape segment of PolyVinyliDene Fluoride (PVDF) films bonded to the surface of the structure. We show in here that each segment of the sensor measures the deflection slope at its particular location. The overall lateral displacement curve of the structure (beam/plate) is calculated from these slopes using central difference formulas. In this work, the equations of the sensor are presented along with the results of the numerical verifications. Numerical simulations are executed through MATLAB, whereas Multiphysics simulation is accomplished through ANSYS, and the results of these simulations are compared to the experimental results. The results indicate that the proposed sensors can be used to efficiently and respectively measure the lateral vibration displacements curves of beams and plates with various boundary conditions

NASA Tech Briefs, February 2004

Topics include: Simulation Testing of Embedded Flight Software; Improved Indentation Test for Measuring Nonlinear Elasticity; Ultraviolet-Absorption Spectroscopic Biofilm Monitor; Electronic Tongue for Quantitation of Contaminants in Water; Radar for Measuring Soil Moisture Under Vegetation; Modular Wireless Data-Acquisition and Control System; Microwave System for Detecting Ice on Aircraft; Routing Algorithm Exploits Spatial Relations; Two-Finger EKG Method of Detecting Evasive Responses; Updated System-Availability and Resource-Allocation Program; Routines for Computing Pressure Drops in Venturis; Software for Fault-Tolerant Matrix Multiplication; Reproducible Growth of High-Quality Cubic-SiC Layers; Nonlinear Thermoelastic Model for SMAs and SMA Hybrid Composites; Liquid-Crystal Thermosets, a New Generation of High-Performance Liquid-Crystal Polymers; Formulations for Stronger Solid Oxide Fuel-Cell Electrolytes; Simulation of Hazards and Poses for a Rocker-Bogie Rover; Autonomous Formation Flight; Expandable Purge Chambers Would Protect Cryogenic Fittings; Wavy-Planform Helicopter Blades Make Less Noise; Miniature Robotic Spacecraft for Inspecting Other Spacecraft; Miniature Ring-Shaped Peristaltic Pump; Compact Plasma Accelerator; Improved Electrohydraulic Linear Actuators; A Software Architecture for Semiautonomous Robot Control; Fabrication of Channels for Nanobiotechnological Devices; Improved Thin, Flexible Heat Pipes; Miniature Radioisotope Thermoelectric Power Cubes; Permanent Sequestration of Emitted Gases in the Form of Clathrate Hydrates; Electrochemical, H2O2-Boosted Catalytic Oxidation System; Electrokinetic In Situ Treatment of Metal-Contaminated Soil; Pumping Liquid Oxygen by Use of Pulsed Magnetic Fields; Magnetocaloric Pumping of Liquid Oxygen; Tailoring Ion-Thruster Grid Apertures for Greater Efficiency; and Lidar for Guidance of a Spacecraft or Exploratory Robot

State-of-the-Art of (Bio)Chemical Sensor Developments in Analytical Spanish Groups

(Bio)chemical sensors are one of the most exciting fields in analytical chemistry today. The development of these analytical devices simplifies and miniaturizes the whole analytical process. Although the initial expectation of the massive incorporation of sensors in routine analytical work has been truncated to some extent, in many other cases analytical methods based on sensor technology have solved important analytical problems. Many research groups are working in this field world-wide, reporting interesting results so far. Modestly, Spanish researchers have contributed to these recent developments. In this review, we summarize the more representative achievements carried out for these groups. They cover a wide variety of sensors, including optical, electrochemical, piezoelectric or electro-mechanical devices, used for laboratory or field analyses. The capabilities to be used in different applied areas are also critically discussed

Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

DEVELOPMENT OF PIEZOELECTRIC MEMS DEVICES

Ph.DDOCTOR OF PHILOSOPH