Reconfigurable photonic crystal

Tunability and programmability are highly demanded for silicon photonic integrated circuits (PICs) to expand their applications in the next-generation photonics. The main objective of this thesis is to develop several reconfigurable and programmable photonic crystal (PC) devices. In Chapter 2, we developed a relatively general nanofabrication process for integrating PC devices with movable mechanical components on silicon-on-insulator (SOI) wafers. We also investigated grating coupling technology, to facilitate coupling lights into and out of PC devices. In Chapter 3, we developed an all-optical programmable PC device that integrates digital micromirror device (DMD), photo-responsive LC, and PC technologies. We demonstrated the functionality and programmability of the device, by forming a point-defect cavity, a straight waveguide, and a waveguide bend on the single device. In Chapter 4, we developed two types of reconfigurable PC devices by leveraging the strengths of optical nanobeam and nano-electro-mechanical systems (NEMS) technologies. The first device consists of an array of movable nanobeams. Each nanobeam is an electrostatically tunable photonic element in a PC waveguide. We demonstrated the capability of the device to engineer different photonic bandgaps, by tuning one unit in group of two neighboring nanobeam units, tuning one or two in group of three units, and forming two reconfigurable PCs, on the single device. To achieve a higher-level integration, we also theoretically studied another reconfigurable PC integrating an array of mechanical tunable nanobeams with an array of fixed pillars into the top silicon layer of a SOI wafer. In Chapter 5, we developed two tunable photonic crystal-cantilever cavity (PC3) resonators. The first device has an NEMS cantilever embedded into a L6 cavity in a PC slab. The second device has a similar cantilever to insert into a nanobeam-base waveguide. We studied bending characteristics of the cantilever and optical characteristics of these two devices at different applied voltages. In Chapter 6, we conducted theoretical investigation on a nano-opto-mechanical reconfigurable PIC device consisting of an array of silicon plugs and a 2D PC slab. We theoretically demonstrated that a point-defect cavity, a line-defect waveguide, and a waveguide bend can be configured in the PC slab, by inserting different plugs into an air hole, a straight line of holes, and an L-shape line of holes

MEMS tunable infrared metamaterial and mechanical sensors

Sub-wavelength resonant structures open the path for fine controlling the near-field at the nanoscale dimension. They constitute into macroscopic “metamaterials” with macroscale properties such as transmission, reflection, and absorption being tailored to exhibit a particular electromagnetic response. The properties of the resonators are often fixed at the time of fabrication wherein the tunability is demanding to overcome fabrication tolerances and afford fast signal processing. Hybridizing dynamic components such as optically active medium into the device makes tunable devices. Microelectromechanical systems (MEMS) compatible integrated circuit fabrication process is a promising platform that can be merged with photonics or novel 2D materials. The prospect of enormous freedom in integrating nanophotonics, MEMS actuators and sensors, and microelectronics into a single platform has driven the rapid development of MEMS-based sensing devices. This thesis describes the design and development of four tunable plasmonic structures based on active media or MEMS, two graphene-based MEMS sensors and a novel tape-based cost-effective nanotransfer printing techniques. First of all, we present two tunable plasmonic devices with the use of two active medium, which are electrically controlled liquid crystals and temperature-responsive hydrogels, respectively. By incorporating a nematic liquid crystal layer into quasi-3D mushroom plasmonic nanostructures and thanks to the unique coupling between surface plasmon polariton and Rayleigh anomaly, we have achieved the electrical tuning of the properties of plasmonic crystal at a low operating electric field. We also present another tunable plasmonic device with the capability to sense environmental temperature variations. The device is bowtie nanoantenna arrays coated with a submicron-thick, thermos-responsive hydrogel. The favorable scaling of plasmonic dimers at the nanometer scale and ionic diffusion at the submicron scale is leveraged to achieve strong optical resonance and rapid hydrogel response, respectively. Secondly, we present two MEMS -based tunable near-to-mid infrared metamaterials on a silicon-on-insulator wafer via electrically and thermally actuating the freestanding nanocantilevers. The two devices are developed on the basis of the same fabrication process and are easy-to-implement. The electrostatically driven metamaterial affords ultrahigh mechanical modulation (several tens of MHz) of an optical signal while the thermo-mechanically tunable metamaterial provides up to 90% optical signal modulation at a wavelength of 3.6 õm. Next, we present MEMS graphene-based pressure and gas flow sensors realized by transferring a large area and few-layered graphene onto a suspended silicon nitride thin membrane perforated with micro-through-holes. Due to the increased strain in the through-holes, the pressure sensor exhibits a very high sensitivty outperformed than most existing MEMS-based pressure sensors using graphene, silicon, and carbon nanotubes. An air flow sensor is also demonstrated via patterning graphene sheets with flow-through microholes. The flow rate of the air is measured by converting the mechanically deflection of the membrane into the electrical readout due to the graphene piezeroresistors. Finally, we present a tape-based multifunctional nanotransfer printing process based on a simple stick-and-peel procedure. It affords fast production of large-area metallic and dielectric nanophotonic sensing devices and metamaterials using Scotch tape

MEMS for Photonic Integrated Circuits

The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications

Dual-Drive Directional Couplers for Programmable Integrated Photonics

A novel class of photonic integrated circuits employs large-scale integration of combined beam splitters and waveguides loaded with phase actuators to provide complex linear processing functionalities that can be reconfigured dynamically. Here, we propose and experimentally demonstrate a thermally-actuated Dual-Drive Directional Coupler (DD-DC) design, integrated in a silicon nitride platform, functioning both as a standalone optical component providing arbitrary optical beam splitting and common phase as well as for its use in waveguide mesh arrangements. We analyze the experimental demonstration of the first integration of a triangular waveguide mesh arrangement, and the first DD-DC based arrangement along with an extended analysis of its performance and scalability

Principles, fundamentals, and applications of programmable integrated photonics

[EN] Programmable integrated photonics is an emerging new paradigm that aims at designing common integrated optical hardware resource configurations, capable of implementing an unconstrained variety of functionalities by suitable programming, following a parallel but not identical path to that of integrated electronics in the past two decades of the last century. Programmable integrated photonics is raising considerable interest, as it is driven by the surge of a considerable number of new applications in the fields of telecommunications, quantum information processing, sensing, and neurophotonics, calling for flexible, reconfigurable, low-cost, compact, and low-power-consuming devices that can cooperate with integrated electronic devices to overcome the limitation expected by the demise of Moore¿s Law. Integrated photonic devices exploiting full programmability are expected to scale from application-specific photonic chips (featuring a relatively low number of functionalities) up to very complex application-agnostic complex subsystems much in the same way as field programmable gate arrays and microprocessors operate in electronics. Two main differences need to be considered. First, as opposed to integrated electronics, programmable integrated photonics will carry analog operations over the signals to be processed. Second, the scale of integration density will be several orders of magnitude smaller due to the physical limitations imposed by the wavelength ratio of electrons and light wave photons. The success of programmable integrated photonics will depend on leveraging the properties of integrated photonic devices and, in particular, on research into suitable interconnection hardware architectures that can offer a very high spatial regularity as well as the possibility of independently setting (with a very low power consumption) the interconnection state of each connecting element. Integrated multiport interferometers and waveguide meshes provide regular and periodic geometries, formed by replicating unit elements and cells, respectively. In the case of waveguide meshes, the cells can take the form of a square, hexagon, or triangle, among other configurations. Each side of the cell is formed by two integrated waveguides connected by means of a Mach¿Zehnder interferometer or a tunable directional coupler that can be operated by means of an output control signal as a crossbar switch or as a variable coupler with independent power division ratio and phase shift. 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Electro-optic routing of photons from single quantum dots in photonic integrated circuits

Recent breakthroughs in solid-state photonic quantum technologies enable generating and detecting single photons with near-unity efficiency as required for a range of photonic quantum technologies. The lack of methods to simultaneously generate and control photons within the same chip, however, has formed a main obstacle to achieving efficient multi-qubit gates and to harness the advantages of chip-scale quantum photonics. Here we propose and demonstrate an integrated voltage-controlled phase shifter based on the electro-optic effect in suspended photonic waveguides with embedded quantum emitters. The phase control allows building a compact Mach-Zehnder interferometer with two orthogonal arms, taking advantage of the anisotropic electro-optic response in gallium arsenide. Photons emitted by single self-assembled quantum dots can be actively routed into the two outputs of the interferometer. These results, together with the observed sub-microsecond response time, constitute a significant step towards chip-scale single-photon-source de-multiplexing, fiber-loop boson sampling, and linear optical quantum computing.Comment: 7 pages, 4 figues + supplementary informatio