CMOS Closed-loop Control of MEMS Varactors

A closed-loop capacitance sensing and control mix-mode circuit with a dedicated sensor electrode and a proportional-integral controller was designed for MEMS varactors. The control was based on tuning the bias magnitude of the MEMS varactor according to

Advances in Integrated Circuits and Systems for Wearable Biomedical Electrical Impedance Tomography

Electrical impedance tomography (EIT) is an impedance mapping technique that can be used to image the inner impedance distribution of the subject under test. It is non-invasive, inexpensive and radiation-free, while at the same time it can facilitate long-term and real-time dynamic monitoring. Thus, EIT lends itself particularly well to the development of a bio-signal monitoring/imaging system in the form of wearable technology. This work focuses on EIT system hardware advancement using complementary metal oxide semiconductor (CMOS) technology. It presents the design and testing of application specific integrated circuit (ASIC) and their successful use in two bio-medical applications, namely, neonatal lung function monitoring and human-machine interface (HMI) for prosthetic hand control. Each year fifteen million babies are born prematurely, and up to 30% suffer from lung disease. Although respiratory support, especially mechanical ventilation, can improve their survival, it also can cause injury to their vulnerable lungs resulting in severe and chronic pulmonary morbidity lasting into adulthood, thus an integrated wearable EIT system for neonatal lung function monitoring is urgently needed. In this work, two wearable belt systems are presented. The first belt features a miniaturized active electrode module built around an analog front-end ASIC which is fabricated with 0.35-µm high-voltage process technology with ±9 V power supplies and occupies a total die area of 3.9 mm². The ASIC offers a high power active current driver capable of up to 6 mAp-p output, and wideband active buffer for EIT recording as well as contact impedance monitoring. The belt has a bandwidth of 500 kHz, and an image frame rate of 107 frame/s. To further improve the system, the active electrode module is integrated into one ASIC. It contains a fully differential current driver, a current feedback instrumentation amplifier (IA), a digital controller and multiplexors with a total die area of 9.6 mm². Compared to the conventional active electrode architecture employed in the first EIT belt, the second belt features a new architecture. It allows programmable flexible electrode current drive and voltage sense patterns under simple digital control. It has intimate connections to the electrodes for the current drive and to the IA for direct differential voltage measurement providing superior common-mode rejection ratio (CMRR) up to 74 dB, and with active gain, the noise level can be reduced by a factor of √3 using the adjacent scan. The second belt has a wider operating bandwidth of 1 MHz and multi-frequency operation. The image frame rate is 122 frame/s, the fastest wearable EIT reported to date. It measures impedance with 98% accuracy and has less than 0.5 Ω and 1° variation across all channels. In addition the ASIC facilitates several other functionalities to provide supplementary clinical information at the bedside. With the advancement of technology and the ever-increasing fusion of computer and machine into daily life, a seamless HMI system that can recognize hand gestures and motions and allow the control of robotic machines or prostheses to perform dexterous tasks, is a target of research. Originally developed as an imaging technique, EIT can be used with a machine learning technique to track bones and muscles movement towards understanding the human user’s intentions and ultimately controlling prosthetic hand applications. For this application, an analog front-end ASIC is designed using 0.35-µm standard process technology with ±1.65 V power supplies. It comprises a current driver capable of differential drive and a low noise (9μVrms) IA with a CMRR of 80 dB. The function modules occupy an area of 0.07 mm². Using the ASIC, a complete HMI system based on the EIT principle for hand prosthesis control has been presented, and the user’s forearm inner bio-impedance redistribution is assessed. Using artificial neural networks, bio-impedance redistribution can be learned so as to recognise the user’s intention in real-time for prosthesis operation. In this work, eleven hand motions are designed for prosthesis operation. Experiments with five subjects show that the system can achieve an overall recognition accuracy of 95.8%

Power Management ICs for Internet of Things, Energy Harvesting and Biomedical Devices

This dissertation focuses on the power management unit (PMU) and integrated circuits (ICs) for the internet of things (IoT), energy harvesting and biomedical devices. Three monolithic power harvesting methods are studied for different challenges of smart nodes of IoT networks. Firstly, we propose that an impedance tuning approach is implemented with a capacitor value modulation to eliminate the quiescent power consumption. Secondly, we develop a hill-climbing MPPT mechanism that reuses and processes the information of the hysteresis controller in the time-domain and is free of power hungry analog circuits. Furthermore, the typical power-performance tradeoff of the hysteresis controller is solved by a self-triggered one-shot mechanism. Thus, the output regulation achieves high-performance and yet low-power operations as low as 12 µW. Thirdly, we introduce a reconfigurable charge pump to provide the hybrid conversion ratios (CRs) as 1⅓× up to 8× for minimizing the charge redistribution loss. The reconfigurable feature also dynamically tunes to maximum power point tracking (MPPT) with the frequency modulation, resulting in a two-dimensional MPPT. Therefore, the voltage conversion efficiency (VCE) and the power conversion efficiency (PCE) are enhanced and flattened across a wide harvesting range as 0.45 to 3 V. In a conclusion, we successfully develop an energy harvesting method for the IoT smart nodes with lower cost, smaller size, higher conversion efficiency, and better applicability. For the biomedical devices, this dissertation presents a novel cost-effective automatic resonance tracking method with maximum power transfer (MPT) for piezoelectric transducers (PT). The proposed tracking method is based on a band-pass filter (BPF) oscillator, exploiting the PT’s intrinsic resonance point through a sensing bridge. It guarantees automatic resonance tracking and maximum electrical power converted into mechanical motion regardless of process variations and environmental interferences. Thus, the proposed BPF oscillator-based scheme was designed for an ultrasonic vessel sealing and dissecting (UVSD) system. The sealing and dissecting functions were verified experimentally in chicken tissue and glycerin. Furthermore, a combined sensing scheme circuit allows multiple surgical tissue debulking, vessel sealer and dissector (VSD) technologies to operate from the same sensing scheme board. Its advantage is that a single driver controller could be used for both systems simplifying the complexity and design cost. In a conclusion, we successfully develop an ultrasonic scalpel to replace the other electrosurgical counterparts and the conventional scalpels with lower cost and better functionality

Mixed-signal integrated circuits design and validation for automotive electronics applications

Automotive electronics is a fast growing market. In a field primarily dominated by mechanical or hydraulic systems, over the past few decades there has been exponential growth in the number of electronic components incorporated into automobiles. Partly thanks to the advance in high voltage smart power processes in nowadays cars is possible to integrate both power/high voltage electronics and analog/digital signal processing circuitry thus allowing to replace a lot of mechanical systems with electro-mechanical or fully electronic ones. High level modeling of complex electronic systems is gaining importance relatively to design space exploration, enabling shorter design and verification cycles, allowing reduced time-to-market. A high level model of a resistor string DAC to evaluate nonlinearities has been developed in MATLAB environment. As a test case for the model, a 10 bit resistive DAC in 0.18um is designed and the results were compared with the traditional transistor level approach. Then we face the analysis and design of a fundamental block: the bandgap voltage reference. Automotive requirements are tough, so the design of the voltage reference includes a pre-regulation part of the battery voltage that allows to enhance overall performances. Moreover an analog integrated driver for an automotive application whose architecture exploits today’s trends of analog-digital integration allowing a greater range of flexibility allowing high configurability and fast prototipization is presented. We covered also the mixed-signal verification approach. In fact, as complexity increases and mixed-signal systems become more and more pervasive, test and verification often tend to be the bottleneck in terms of time effort. A complete flow for mixed-signal verification using VHDL-AMS modeling and Python scripting is presented as an alternative to complex transistor level simulations. Finally conclusions are drawn

Advances in Solid State Circuit Technologies

This book brings together contributions from experts in the fields to describe the current status of important topics in solid-state circuit technologies. It consists of 20 chapters which are grouped under the following categories: general information, circuits and devices, materials, and characterization techniques. These chapters have been written by renowned experts in the respective fields making this book valuable to the integrated circuits and materials science communities. It is intended for a diverse readership including electrical engineers and material scientists in the industry and academic institutions. Readers will be able to familiarize themselves with the latest technologies in the various fields

Area- and Energy- Efficient Modular Circuit Architecture for 1,024-Channel Parallel Neural Recording Microsystem.

This research focuses to develop system architectures and associated electronic circuits for a next generation neuroscience research tool, a massive-parallel neural recording system capable of recording 1,024 channels simultaneously. Three interdependent prototypes have been developed to address major challenges in realization of the massive-parallel neural recording microsystems: minimization of energy and area consumption while preserving high quality in recordings. First, a modular 128-channel Δ-ΔΣ AFE using the spectrum shaping has been designed and fabricated to propose an area-and energy efficient solution for neural recording AFEs. The AFE achieved 4.84 fJ/C−s·mm2 figure of merit that is the smallest the area-energy product among the state-of-the-art multichannel neural recording systems. It also features power and area consumption of 3.05 µW and 0.05 mm2 per channel, respectively while exhibiting 63.3 dB signal-to-noise ratio with 3.02 µVrms input referred noise. Second, an on-chip mixed signal neural signal compressor was built to reduce the energy consumption in handling and transmission of the recorded data since this occupies a large portion of the total energy consumption as the number of parallel recording increases. The compressor reduces the data rates of two distinct groups of neural signals that are essential for neuroscience research: LFP and AP without loss of informative signals. As a result, the power consumptions for the data handling and transmissions of the LFP and AP were reduced to about 1/5.35 and 1/10.54 of the uncompressed cases, respectively. In the total data handling and transmission, the measured power consumption per channel is 11.98 µW that is about 1/9 of 107.5 µW without the compression. Third, a compact on-chip dc-to-dc converter with constant 1 MHz switching frequency has been developed to provide reliable power supplies and enhance energy delivery efficiency to the massive-parallel neural recording systems. The dc-to-dc converter has only predictable tones at the output and it exhibits > 80% power conversion efficiency at ultra-light loads, < 100 µW that is relevant power most of the multi-channel neural recording systems consume. The dc-to-dc converter occupies 0.375 mm2 of area which is less than 1/20 of the area the first prototype consumes (8.64 mm2).PhDElectrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/133244/1/sungyun_1.pd

Digital CMOS ISFET architectures and algorithmic methods for point-of-care diagnostics

Over the past decade, the surge of infectious diseases outbreaks across the globe is redefining how healthcare is provided and delivered to patients, with a clear trend towards distributed diagnosis at the Point-of-Care (PoC). In this context, Ion-Sensitive Field Effect Transistors (ISFETs) fabricated on standard CMOS technology have emerged as a promising solution to achieve a precise, deliverable and inexpensive platform that could be deployed worldwide to provide a rapid diagnosis of infectious diseases. This thesis presents advancements for the future of ISFET-based PoC diagnostic platforms, proposing and implementing a set of hardware and software methodologies to overcome its main challenges and enhance its sensing capabilities. The first part of this thesis focuses on novel hardware architectures that enable direct integration with computational capabilities while providing pixel programmability and adaptability required to overcome pressing challenges on ISFET-based PoC platforms. This section explores oscillator-based ISFET architectures, a set of sensing front-ends that encodes the chemical information on the duty cycle of a PWM signal. Two initial architectures are proposed and fabricated in AMS 0.35um, confirming multiple degrees of programmability and potential for multi-sensing. One of these architectures is optimised to create a dual-sensing pixel capable of sensing both temperature and chemical information on the same spatial point while modulating this information simultaneously on a single waveform. This dual-sensing capability, verified in silico using TSMC 0.18um process, is vital for DNA-based diagnosis where protocols such as LAMP or PCR require precise thermal control. The COVID-19 pandemic highlighted the need for a deliverable diagnosis that perform nucleic acid amplification tests at the PoC, requiring minimal footprint by integrating sensing and computational capabilities. In response to this challenge, a paradigm shift is proposed, advocating for integrating all elements of the portable diagnostic platform under a single piece of silicon, realising a ``Diagnosis-on-a-Chip". This approach is enabled by a novel Digital ISFET Pixel that integrates both ADC and memory with sensing elements on each pixel, enhancing its parallelism. Furthermore, this architecture removes the need for external instrumentation or memories and facilitates its integration with computational capabilities on-chip, such as the proposed ARM Cortex M3 system. These computational capabilities need to be complemented with software methods that enable sensing enhancement and new applications using ISFET arrays. The second part of this thesis is devoted to these methods. Leveraging the programmability capabilities available on oscillator-based architectures, various digital signal processing algorithms are implemented to overcome the most urgent ISFET non-idealities, such as trapped charge, drift and chemical noise. These methods enable fast trapped charge cancellation and enhanced dynamic range through real-time drift compensation, achieving over 36 hours of continuous monitoring without pixel saturation. Furthermore, the recent development of data-driven models and software methods open a wide range of opportunities for ISFET sensing and beyond. In the last section of this thesis, two examples of these opportunities are explored: the optimisation of image compression algorithms on chemical images generated by an ultra-high frame-rate ISFET array; and a proposed paradigm shift on surface Electromyography (sEMG) signals, moving from data-harvesting to information-focused sensing. These examples represent an initial step forward on a journey towards a new generation of miniaturised, precise and efficient sensors for PoC diagnostics.Open Acces

Architectural Alternatives to Implement High-Performance Delta-Sigma Modulators

RÉSUMÉ Le besoin d’appareils portatifs, de téléphones intelligents et de systèmes microélectroniques implantables médicaux s’accroît remarquablement. Cependant, l’optimisation de l’alimentation de tous ces appareils électroniques portables est l’un des principaux défis en raison du manque de piles à grande capacité utilisées pour les alimenter. C’est un fait bien établi que le convertisseur analogique-numérique (CAN) est l’un des blocs les plus critiques de ces appareils et qu’il doit convertir efficacement les signaux analogiques au monde numérique pour effectuer un post-traitement tel que l’extraction de caractéristiques. Parmi les différents types de CAN, les modulateurs Delta Sigma (��M) ont été utilisés dans ces appareils en raison des fonctionnalités alléchantes qu’ils offrent. En raison du suréchantillonnage et pour éloigner le bruit de la bande d’intérêt, un CAN haute résolution peut être obtenu avec les architectures ��. Il offre également un compromis entre la fréquence d’échantillonnage et la résolution, tout en offrant une architecture programmable pour réaliser un CAN flexible. Ces CAN peuvent être implémentés avec des blocs analogiques de faible précision. De plus, ils peuvent être efficacement optimisés au niveau de l’architecture et circuits correspondants. Cette dernière caractéristique a été une motivation pour proposer différentes architectures au fil des ans. Cette thèse contribue à ce sujet en explorant de nouvelles architectures pour optimiser la structure ��M en termes de résolution, de consommation d’énergie et de surface de silicium. Des soucis particuliers doivent également être pris en compte pour faciliter la mise en œuvre du ��M. D’autre part, les nouveaux procédés CMOS de conception et fabrication apportent des améliorations remarquables en termes de vitesse, de taille et de consommation d’énergie lors de la mise en œuvre de circuits numériques. Une telle mise à l’échelle agressive des procédés, rend la conception de blocs analogiques tel que un amplificateur de transconductance opérationnel (OTA), difficile. Par conséquent, des soins spéciaux sont également pris en compte dans cette thèse pour surmonter les problèmes énumérés. Ayant mentionné ci-dessus que cette thèse est principalement composée de deux parties principales. La première concerne les nouvelles architectures implémentées en mode de tension et la seconde partie contient une nouvelle architecture réalisée en mode hybride tension et temps.----------ABSTRACT The need for hand-held devices, smart-phones and medical implantable microelectronic sys-tems, is remarkably growing up. However, keeping all these electronic devices power optimized is one of the main challenges due to the lack of long life-time batteries utilized to power them up. It is a well-established fact that analog-to-digital converter (ADC) is one of the most critical building blocks of such devices and it needs to efficiently convert analog signals to the digital world to perform post processing such as channelizing, feature extraction, etc. Among various type of ADCs, Delta Sigma Modulators (��Ms) have been widely used in those devices due to the tempting features they offer. In fact, due to oversampling and noise-shaping technique a high-resolution ADC can be achieved with �� architectures. It also offers a compromise between sampling frequency and resolution while providing a highly-programmable approach to realize an ADC. Moreover, such ADCs can be implemented with low-precision analog blocks. Last but not the least, they are capable of being effectively power optimized at both architectural and circuit levels. The latter has been a motivation to proposed different architectures over the years.This thesis contributes to this topic by exploring new architectures to effectively optimize the ��M structure in terms of resolution, power consumption and chip area. Special cares must also be taken into account to ease the implementation of the ��M. On the other hand, advanced node CMOS processes bring remarkable improvements in terms of speed, size and power consumption while implementing digital circuits. Such an aggressive process scaling, however, make the design of analog blocks, e.g. operational transconductance amplifiers (OTAs), cumbersome. Therefore, special cares are also taken into account in this thesis to overcome the mentioned issues. Having had above mentioned discussion, this thesis is mainly split in two main categories. First category addresses new architectures implemented in a pure voltage domain and the second category contains new architecture realized in a hybrid voltage and time domain. In doing so, the thesis first focuses on a switched-capacitor implementation of a ��M while presenting an architectural solution to overcome the limitations of the previous approaches. This limitations include a power hungry adder in a conventional feed-forward topology as well as power hungry OTAs