Smart Power Devices and ICs Using GaAs and Wide and Extreme Bandgap Semiconductors

We evaluate and compare the performance and potential of GaAs and of wide and extreme bandgap semiconductors (SiC, GaN, Ga2O3, diamond), relative to silicon, for power electronics applications. We examine their device structures and associated materials/process technologies and selectively review the recent experimental demonstrations of high voltage power devices and IC structures of these semiconductors. We discuss the technical obstacles that still need to be addressed and overcome before large-scale commercialization commences

Advanced AlGaN/GaN HEMT technology, design, fabrication and characterization

Nowadays, the microelectronics technology is based on the mature and very well established silicon (Si) technology. However, Si exhibits some important limitations regarding its voltage blocking capability, operation temperature and switching frequency. In this sense, Gallium Nitride (GaN)-based high electron mobility transistors (HEMTs) devices have the potential to make this change possible. The unique combination of the high-breakdown field, the high-channel electron mobility of the two dimensional electron gas (2DEG), and high-temperature of operation has attracted enormous interest from social, academia and industry and in this context this PhD dissertation has been made. This thesis has focused on improving the device performance through the advanced design, fabrication and characterization of AlGaN/GaN HEMTs, primarily grown on Si templates. The first milestone of this PhD dissertation has been the establishment of a know-how on GaN HEMT technology from several points of view: the device design, the device modeling, the process fabrication and the advanced characterization primarily using devices fabricated at Centre de Recherche sur l'Hétéro-Epitaxie (CRHEA-CNRS) (France) in the framework of a collaborative project. In this project, the main workhorse of this dissertation was the explorative analysis performed on the AlGaN/GaN HEMTs by innovative electrical and physical characterization methods. A relevant objective of this thesis was also to merge the nanotechnology approach with the conventional characterization techniques at the device scale to understand the device performance. A number of physical characterization techniques have been imaginatively used during this PhD determine the main physical parameters of our devices such as the morphology, the composition, the threading dislocations density, the nanoscale conductive pattern and others. The conductive atomic force microscopy (CAFM) tool have been widely described and used to understand the conduction mechanisms through the AlGaN/GaN Ohmic contact by performing simultaneously topography and electrical conductivity measurements. As it occurs with the most of the electronic switches, the gate stack is maybe the critical part of the device in terms of performance and longtime reliability. For this reason, how the AlGaN/GaN HEMT gate contact affects the overall HEMT behaviour by means of advanced characterization and modeling has been intensively investigated. It is worth mentioning that the high-temperature characterization is also a cornerstone of this PhD. It has been reported the elevated temperature impact on the forward and the reverse leakage currents for analogous Schottky gate HEMTs grown on different substrates: Si, sapphire and free-standing GaN (FS-GaN). The HEMT' forward-current temperature coefficients (T^a) as well as the thermal activation energies have been determined in the range of 25-300 ºC. Besides, the impact of the elevated temperature on the Ohmic and gate contacts has also been investigated. The main results of the gold-free AlGaN/GaN HEMTs high-voltage devices fabricated with a 4 inch Si CMOS compatible technology at the clean room of the CNM in the framework of the industrial contract with ON semiconductor were presented. We have shown that the fabricated devices are in the state-of-the-art (gold-free Ohmic and Schottky contacts) taking into account their power device figure-of-merit ((VB^2)/Ron) of 4.05×10^8 W/cm^2. Basically, two different families of AlGaN/GaN-on-Si MIS-HEMTs devices were fabricated on commercial 4 inch wafers: (i) using a thin ALD HfO2 (deposited on the CNM clean room) and (ii) thin in-situ grown Si3N4, as a gate insulator (grown by the vendor). The scientific impact of this PhD in terms of science indicators is of 17 journal papers (8 as first author) and 10 contributions at international conferences

Boundary layer flow and heat transfer over a permeable shrinking sheet with partial slip

The steady, laminar flow of an incompressible viscous fluid over a shrinking permeable sheet is investigated. The governing partial differential equations are transformed into ordinary differential equations using similarity transformation, before being solved numerically by the shooting method. The features of the flow and heat transfer characteristics for different values of the slip parameter and Prandtl number are analyzed and discussed. The results indicate that both the skin friction coefficient and the heat transfer rate at the surface increase as the slip parameter increases

Design and performance analysis of front and back Pi 6 nm gate with high K dielectric passivated high electron mobility transistor

Advanced high electron mobility transistor (HEMT) with dual front gate, back gate with silicon nitride/aluminum oxide (Si3N4/Al2O3) as passivation layer, has been designed. The dependency on DC characteristics and radio frequency characteristics due to GaN cap layers, multi gate (FG and BG), and high K dielectric material is established. Further compared single gate (SG) passivated HEMT, double gate (DG) passivated HEMT, double gate triple (DGT) tooth passivated HEMT, high K dielectric front Pi gate (FG) and back Pi gate (BG) HEMT. It is observed that there is an increased drain current (Ion) of 5.92 (A/mm), low leakage current (Ioff) 5.54E-13 (A) of transconductance (Gm) of 3.71 (S/mm), drain conductance (Gd) of 1.769 (S/mm), Cutoff frequency (fT) of 743 GHz maximum oscillation frequency (Fmax) 765 GHz, minimum threshold voltage ( ) of -4.5 V, on resistance (Ron) of 0.40 (Ohms) at V. These outstanding characteristics and transistor structure of proposed HEMT and materials involved to apply for upcoming generation high-speed GHz frequency applications

Degradation and phase noise of InAlN/AlN/GaN heterojunction field effect transistors: Implications for hot electron/phonon effects

In15.7%Al84.3%N/AlN/GaN heterojunctionfield effect transistors have been electrically stressed under four different bias conditions: on-state-low-field stress, reverse-gate-bias stress, off-state-high-field stress, and on-state-high-field stress, in an effort to elaborate on hot electron/phonon and thermal effects. DC current and phase noise have been measured before and after the stress. The possible locations of the failures as well as their influence on the electrical properties have been identified. The reverse-gate-bias stress causes trap generation around the gate area near the surface which has indirect influence on the channel. The off-state-high-field stress and the on-state-high-field stress induce deterioration of the channel, reduce drain current and increase phase noise. The channel degradation is ascribed to the hot-electron and hot-phonon effects

Conception et fabrication de FinFET GaN verticaux de puissance normalement bloqués

Abstract: The tremendous demands for high-performance systems driven by economic constraints forced the semiconductor industry to considerably scale the device's dimensions to compensate for the relatively modest Silicon physical properties. Those limitations pave the way for III-V semiconductors, which are excellent alternatives to Silicon and can be declined in many compositions. For example, Gallium Nitride (GaN) has been considered a fabulous competitor to facilitate the semiconductor industry's horizon beyond the performance limitations of Silicon due to its high mobility, wide bandgap, and high thermal conductivity properties for T>300K (Bulk GaN). It promises to trim the losses in power conversion circuits and drive a 10 % reduction in power consumption. Both lateral and vertical structures have been considered for GaN power devices. The AlGaN/GaN HEMT device's immense potential comes from the high density, high mobility electron gas formed at its heterojunction. The device is vulnerable to reliability issues resulting from the frequent exposure to high electric field collapse, temperature, and stress conditions, thus limiting its performance and reliability. Contrariwise, the vertical GaN power devices have attracted much attention because of the potential to reach high voltage and current levels without enlarging the chip's size. Furthermore, such vertical devices show superior thermal performance to their lateral counterparts. Meanwhile, Vertical GaN devices have the challenges of high leakage current and the breakdown occurring at the corners of the channel. Another challenge associated with Normally off devices is the lack of an optimized method for eliminating the magnesium diffusion from the p-GaN layer. This thesis has two strategic objectives; Firstly, a Normally-OFF GaN Power FinFET has been designed and optimized to overcome the vertical GaN FinFET challenges. It was done by optimizing the performance parameters such as threshold voltage VTH, high breakdown VBR, and the specific ON-state-resistance RON. Accordingly, the impact of both structural and physical parameters should be incorporated to have an exact optimization process. Afterward, the identification and optimization of a low-cost and high-quality fabrication process for the proposed structure underlined this thesis as the second objective.Les énormes demandes de systèmes à hautes performances motivées par des contraintes économiques ont forcé l'industrie des semi-conducteurs à réduire considérablement les dimensions des dispositifs pour compenser les propriétés physiques relativement modestes du silicium. Ces limitations ouvrent la voie aux semi-conducteurs III-V, qui sont d'excellentes alternatives au silicium et peuvent être déclinés dans de nombreuses compositions. Par exemple, le nitrure de gallium (GaN) a été considéré comme un concurrent fabuleux pour faciliter l'horizon de l'industrie des semi-conducteurs au-delà des limitations de performances du silicium en raison de sa grande mobilité, de sa large bande interdite et de ses propriétés de conductivité thermique élevées pour T>300K (Bulk GaN). Il promet de réduire les pertes dans les circuits de conversion de puissance et de réduire de 10 % la consommation d'énergie. À l'heure actuelle, les structures latérales et verticales ont été considérées pour les dispositifs de puissance en GaN. L'immense potentiel du dispositif HEMT AlGaN/GaN provient du gaz d'électrons à haute densité et à haute mobilité formé au niveau de son hétérojonction. Le dispositif est vulnérable aux problèmes de fiabilité résultant de l'exposition fréquente à des conditions d'effondrement de champ électrique, de température et de contrainte élevés, limitant ainsi ses performances et sa fiabilité. En revanche, les dispositifs de puissance verticaux en GaN ont attiré beaucoup d'attention en raison de leur capacité à atteindre des niveaux de tension et de courant élevés sans augmenter la taille de la puce. De plus, ces dispositifs verticaux présentent des performances thermiques supérieures à leurs homologues latéraux. Par ailleurs, les dispositifs GaN verticaux sont confrontés aux défis d'un courant de fuite élevée et de claquage se produisant aux coins du canal. Un autre défi associé aux dispositifs normalement bloqués est l'absence d'une méthode optimisée pour éliminer la diffusion de magnésium de la couche p-GaN. Cette thèse a deux objectifs stratégiques ; premièrement, un dispositif de puissance FinFET GaN normalement bloqué a été conçu et optimisé pour surmonter les défis du FinFET vertical en GaN. Cela a été fait en optimisant les paramètres de performance tels que la tension de seuil VTH, la tension de claquage VBR et la résistance spécifique à l'état passant RON. En conséquence, l'impact des paramètres structurels et physiques doit être incorporé pour avoir un processus d'optimisation précis. Par la suite, l'identification et l'optimisation d'un processus de fabrication à faible coût et de haute qualité pour la structure proposée à souligner cette thèse comme deuxième objectif

Particle-Based Modeling of Reliability for Millimeter-Wave GaN Devices for Power Amplifier Applications

abstract: In this work, an advanced simulation study of reliability in millimeter-wave (mm-wave) GaN Devices for power amplifier (PA) applications is performed by means of a particle-based full band Cellular Monte Carlo device simulator (CMC). The goal of the study is to obtain a systematic characterization of the performance of GaN devices operating in DC, small signal AC and large-signal radio-frequency (RF) conditions emphasizing on the microscopic properties that correlate to degradation of device performance such as generation of hot carriers, presence of material defects and self-heating effects. First, a review of concepts concerning GaN technology, devices, reliability mechanisms and PA design is presented in chapter 2. Then, in chapter 3 a study of non-idealities of AlGaN/GaN heterojunction diodes is performed, demonstrating that mole fraction variations and the presence of unintentional Schottky contacts are the main limiting factor for high current drive of the devices under study. Chapter 4 consists in a study of hot electron generation in GaN HEMTs, in terms of the accurate simulation of the electron energy distribution function (EDF) obtained under DC and RF operation, taking into account frequency and temperature variations. The calculated EDFs suggest that Class AB PAs operating at low frequency (10 GHz) are more robust to hot carrier effects than when operating under DC or high frequency RF (up to 40 GHz). Also, operation under Class A yields higher EDFs than Class AB indicating lower reliability. This study is followed in chapter 5 by the proposal of a novel π-Shaped gate contact for GaN HEMTs which effectively reduces the hot electron generation while preserving device performance. Finally, in chapter 6 the electro-thermal characterization of GaN-on-Si HEMTs is performed by means of an expanded CMC framework, where charge and heat transport are self-consistently coupled. After the electro-thermal model is validated to experimental data, the assessment of self-heating under lateral scaling is considered.Dissertation/ThesisDoctoral Dissertation Electrical Engineering 201

Temperature Dependent Analytical Modeling, Simulation and Characterizations of HEMTs in Gallium Nitride Process

Research is being conducted for a high-performance building block for high frequency and high temperature applications that combine lower costs with improved performance and manufacturability. Researchers have focused their attention on new semiconductor materials for use in device technology to address system improvements. Of the contenders, silicon carbide (SiC), gallium nitride (GaN), and diamond are emerging as the front-runners. GaN-based electronic devices, AlGaN/GaN heterojunction field effect transistors (HFETs), are the leading candidates for achieving ultra-high frequency and high-power amplifiers. Recent advances in device and amplifier performance support this claim. GaN is comparable to the other prominent material options for high-performance devices. The dissertation presents the work on analytical modeling and simulation of GaN high power HEMT and MOS gate HEMT, model verification with test data and device characterization at elevated temperatures. The model takes into account the carrier mobility, the doping densities, the saturation velocity, and the thickness of different layers. Considering the GaN material processing limitations and feedback from the simulation results, an application specific AlGaN/GaN RF power HEMT structure has been proposed. The doping concentrations and the thickness of various layers are selected to provide adequate channel charge density for the proposed devices. A good agreement between the analytical model, and the experimental data is demonstrated. The proposed temperature model can operate at higher voltages and shows stable operation of the devices at higher temperatures. The investigated temperature range is from 1000K to 6000K. The temperature models include the effect of temperature variation on the threshold voltage, carrier mobility, bandgap and saturation velocity. The calculated values of the critical parameters suggest that the proposed device can operate in the GHz range for temperature up to 6000K, which indicates that the device could survive in extreme environments. The models developed in this research will not only help the wide bandgap device researchers in the device behavioral study but will also provide valuable information for circuit designers