171 research outputs found

    High-accuracy Motion Estimation for MEMS Devices with Capacitive Sensors

    Full text link
    With the development of micro-electro-mechanical system (MEMS) technologies, emerging MEMS applications such as in-situ MEMS IMU calibration, medical imaging via endomicroscopy, and feedback control for nano-positioning and laser scanning impose needs for especially accurate measurements of motion using on-chip sensors. Due to their advantages of simple fabrication and integration within system level architectures, capacitive sensors are a primary choice for motion tracking in those applications. However, challenges arise as often the capacitive sensing scheme in those applications is unconventional due to the nature of the application and/or the design and fabrication restrictions imposed, and MEMS sensors are traditionally susceptible to accuracy errors, as from nonlinear sensor behavior, gain and bias drift, feedthrough disturbances, etc. Those challenges prevent traditional sensing and estimation techniques from fulfilling the accuracy requirements of the candidate applications. The goal of this dissertation is to provide a framework for such MEMS devices to achieve high-accuracy motion estimation, and specifically to focus on innovative sensing and estimation techniques that leverage unconventional capacitive sensing schemes to improve estimation accuracy. Several research studies with this specific aim have been conducted, and the methodologies, results and findings are presented in the context of three applications. The general procedure of the study includes proposing and devising the capacitive sensing scheme, deriving a sensor model based on first principles of capacitor configuration and sensing circuit, analyzing the sensor’s characteristics in simulation with tuning of key parameters, conducting experimental investigations by constructing testbeds and identifying actuation and sensing models, formulating estimation schemes is to include identified actuation dynamics and sensor models, and validating the estimation schemes and evaluating their performance against ground truth measurements. The studies show that the proposed techniques are valid and effective, as the estimation schemes adopted either fulfill the requirements imposed or improve the overall estimation performance. Highlighted results presented in this dissertation include a scale factor calibration accuracy of 286 ppm for a MEMS gyroscope (Chapter 3), an improvement of 15.1% of angular displacement estimation accuracy by adopting a threshold sensing technique for a scanning micro-mirror (Chapter 4), and a phase shift prediction error of 0.39 degree for a electrostatic micro-scanner using shared electrodes for actuation and sensing (Chapter 5).PHDMechanical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttps://deepblue.lib.umich.edu/bitstream/2027.42/147568/1/davidsky_1.pd

    Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

    Get PDF
    A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures about 500 μm using UV-LIGA by successful removal of SU-8 photoresist mold, DRIE of silicon proof mass in thickness of 450 μm, microassembly and solder bonding, were employed to fabricate this prototype microdevice. A levitation experiment system for the fabricated microaccelerometer chip is introduced, and levitation results show that fast initial levitation within 10 ms and stable full suspension of the proof mass have been successfully demonstrated

    Design of a tri-axial surface micromachined MEMS vibrating gyroscope

    Get PDF
    Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per year, have been calling for low-cost gyroscopes. Bulk silicon is a promising candidate for low-cost gyroscopes due to its large scale availability and maturity of its manufacturing industry. Nevertheless, it is not suitable for a real monolithic IC integration and requires a dedicated packaging. New designs are supposed to eliminate the need for magnets and metal case package, and allow for a real monolithic MEMS-IC (Integrated Circuit) electronic system. In addition, a drastic cost reduction could be achieved by utilizing off-the-shelf plastic packaging with lead frames for the final assembly. The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators. The comb-drives are comprised of a single monolithic moving component (rotor) and fixed parts (stators). The former is made out of different concentrated masses connected by curved silicon beams in order to decouple the motion signals. The sensor was devised to be fabricated through the PolyMUMPs® process and it is intended for working in air in order to semplify the MEMS-IC monolithic integration

    Flight Control and Hardware Design of Multi-Rotor Systems

    Get PDF
    This thesis overviews crucial concepts involved in achieving quadcopter flight such as orientation estimation and control system implementation. This thesis also presents researchers with comprehensive hardware and software specifications for a quadcopter system. The primary application for this system would be for research with regards to the implementation of advance control techniques as well as data acquisition. Key constructs of this system include hardware software specifications for a flight controller, the radio system, and the sensorless brushless motor controllers. Firstly, the thesis starts by developing a reference frame and a mathematical model for the quadcotper system. Next, flight orientation estimation is determined through an assortment of MEMS sensors such as an accelerometer, gyroscope, and magnetometer. Each sensor will be individually addressed as to its strengths and weaknesses with regards to orientation estimation. An algorithm will then be proposed for the data fusion of these various sensors. This fused data will then be fed into a control system that will efficiently stabilize the quadcopter. Finally, this thesis will overview methods of integrating lidar data directly into the quadcopter\u27s control system. Real-world lidar data is used and a computational geometry algorithm, ICL, is employed to translate the point cloud data into relevant control parameters

    Autonomous Vehicle and Smart Traffic

    Get PDF
    Long-term forecasting of technology has become extremely difficult due to the rapid realization of any suggested idea. Communication and software technologies can compensate for the problems that may arise during the transition period between idea generation and realization. However, this rapid process can cause problems for the automotive industry and transportation systems.Autonomous vehicles are currently a hot topic within the transportation sector. This development is related to the compatibility of vehicles of the near future with the development of the infrastructure on which these vehicles will be based. There are certain problems regarding the solutions that are currently being worked on, such as how autonomous should vehicles be, their control mechanisms, driving safety, energy requirements, and environmental use. The problem is not just about the design of autonomous vehicles. The user transportation systems of these vehicles also need problem-free solutions. The problem should not only be seen as financial because sociological effects are an important part of this feature.In this book, valuable research on the modeling, systems, transportation, technological necessity, and logistics of autonomous vehicles is presented. The content of the book will help researchers to create ideas for their future studies and to open up the discussion of autonomous vehicles

    MEMS Accelerometers

    Get PDF
    Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc

    Development of Deflection Angle Stabilizing System for Balancing Robot

    Get PDF
    This paper performs determination of a mathematical model of the balancing robot, its linearization and algorithm for calculation of stabilization of the deflection angle from the vertical modal method. This algorithm also makes determination of the angle of deviation from the use of either alpha-beta filter and the angle of rotation of the wheels by means of encoders

    Testing of MEMS gyroscopes

    Get PDF
    Tato diplomová práce se zabývá teoretickými poznatky o konstrukcích a parametrech MEMS gyroskopů. Dále je prezentován navržený měřicí řetězec pro testování MEMS gyroskopů ve společnosti Honeywell International s.r.o. a to zejména s použitím systémů: Polytec MSA-500, goniometrických plošin a kontroléru od firmy Standa a kontroléru pro řízení Peltierových článků. Praktická část diplomové práce obsahuje popis navrženého kontroléru pro řízení teploty testovaného zařízení a také popis aplikace v prostředí LabVIEW („Measurement systém“), která se používá pro řízení pozice dvou goniometrických plošin a pro řízení Peltierových článků. Tento systém je schopen plně řídit pozici goniometrických plošin, zarovnat povrch testovaného zařízení do ideálně kolmé pozice vůči optické hlavě analyzátoru Polytec MSA-500 a také kontrolovat teplotu testovaného zařízení. Závěrečná část diplomové práce je věnována testům základních parametrů MEMS gyroskopů se zaměřením na závislost tzv. Angle Random Walk a offsetu MEMS gyroskopu na kvalitě vakua v prostředí struktury.This diploma thesis presents theoretical information regarding MEMS gyroscopes their parameters and designs. The description of measurement chain be used for testing of MEMS gyroscopes in Honeywell International s.r.o. is presented. Special focus is devoted to: the Polytec MSA-500 system, the Standa goniometers and their controller, Peltier cell and its driver. The practical part of this thesis contains the description of the thermal control system and also the description of the developed “Measurement system” in the LabVIEW software which is used for controlling the goniometers position and the Peltier cell. The system is able to fully control two goniometer stages, align the surface of tested MEMS device to orthogonal position with respect to the Polytec MSA-500 measurement head and also control the temperature of the tested device. The last part of this thesis presents the tests of the MEMS gyroscope parameters with special focus to the MEMS gyroscope angle random walk and the bias dependence on the vacuum quality of the structure environment.

    High performance 3-folded symmetric decoupled MEMS gyroscopes

    Get PDF
    This thesis reports, for the first time, on a novel design and architecture for realizing inertial grade gyroscope based on Micro-Electro-Mechanical Systems (MEMS) technology. The proposed device is suitable for high-precision Inertial Navigation Systems (INS). The new design has been investigated analytically and numerically by means of Finite Element Modeling (FEM) of the shapes, resonance frequencies and decoupling of the natural drive and sense modes of the various implementations. Also, famous phenomena known as spring softening and spring hardening are studied. Their effect on the gyroscope operation is modeled numerically in Matlab/Simulink platform. This latter model is used to predict the drive/sense mode matching capability of the proposed designs. Based on the comparison with the best recently reported performance towards inertial grade operation, it is expected that the novel architecture further lowers the dominant Brownian (thermo-mechanical) noise level by more than an order of magnitude (down to 0.08º/hr). Moreover, the gyroscope\u27s figure of merit, such as output sensitivity (150 mV/º/s), is expected to be improved by more than two orders of magnitude. This necessarily results in a signal to noise ratio (SNR) which is up to three orders of magnitude higher (up to 1,900mV/ º/hr). Furthermore, the novel concept introduced in this work for building MEMS gyroscopes allows reducing the sense parasitic capacitance by up to an order of magnitude. This in turn reduces the drive mode coupling or quadrature errors in the sensor\u27s output signal. The new approach employs Silicon-on-Insulator (SOI) substrates that allows the realization of large mass (\u3e1.6mg), large sense capacitance (\u3e2.2pF), high quality factors (\u3e21,000), large drive amplitude (~2-4 µm) and low resonance frequency (~3-4 KHz) as well as the consequently suppressed noise floor and reduced support losses for high-performance vacuum operation. Several challenges were encountered during fabrication that required developing high aspect ratio (up to 1:20) etching process for deep trenches (up to 500 µm). Frequency Response measurement platform was built for devices characterization. The measurements were performed at atmospheric pressures causing huge drop of the devices performance. Therefore, various MEMS gyroscope packaging technologies are studied. Wafer Level Packaging (WLP) is selected to encapsulate the fabricated devices under vacuum by utilizing wafer bonding. Through Silicon Via (TSV) technology was developed (as connections) to transfer the electrical signals (of the fabricated devices) outside the cap wafers

    MEMS sensors as physical unclonable functions

    Get PDF
    A fundamental requirement of any crypto system is that secret-key material remains securely stored so that it is robust in withstanding attacks including physical tampering. In this context, physical unclonable functions (PUFs) have been proposed to store cryptographic secrets in a particularly secure manner. In this thesis, the feasibility of using microelectromechanical systems (MEMS) sensors for secure key storage purposes is evaluated for the first time. To this end, we investigated an off-the-shelf 3-axis MEMS gyroscope design and used its properties to derive a unique fingerprint from each sensor. We thoroughly examined the robustness of the derived fingerprints against temperature variation and aging. We extracted stable keys with nearly full entropy from the fingerprints. The security level of the extracted keys lies in a range between 27 bits and 150 bits depending on the applied test conditions and the used entropy estimation method. Moreover, we provide experimental evidence that the extractable key length is higher in practice when multiple wafers are considered. In addition, it is shown that further improvements could be achieved by using more precise measurement techniques and by optimizing the MEMS design. The robustness of a MEMS PUF against tampering and malicious read-outs was tested by three different types of physical attacks. We could show that MEMS PUFs provide a high level of protection due to the sensitivity of their characteristics to disassembly.Eine grundlegende Anforderung jedes Kryptosystems ist, dass der verwendete geheime Schlüssel sicher und geschützt aufbewahrt wird. Vor diesem Hintergrund wurden physikalisch unklonbare Funktionen (PUFs) vorgeschlagen, um kryptographische Geheimnisse besonders sicher zu speichern. In dieser Arbeit wird erstmals die Verwendbarkeit von mikroelektromechanischen Systemen (MEMS) für die sichere Schlüsselspeicherung anhand eines 3-achsigen MEMS Drehratensensor gezeigt. Dabei werden die Eigenschaften der Sensoren zur Ableitung eines eindeutigen Fingerabdrucks verwendet. Die Temperatur- und Langzeitstabilität der abgeleiteten Fingerabdrücke wurde ausführlich untersucht. Aus den Fingerabdrücken wurden stabile Schlüssel mit einem Sicherheitsniveau zwischen 27 Bit und 150 Bit, abhängig von den Testbedingungen und der verwendeten Entropie-Schätzmethode, extrahiert. Außerdem konnte gezeigt werden, dass die Schlüssellänge ansteigt, je mehr Wafer betrachtet werden. Darüber hinaus wurde die Verwendung einer präziseren Messtechnik und eine Optimierung des MEMS-Designs als potentielle Verbesserungsmaßnahmen identifiziert. Die Robustheit einer MEMS PUF gegen Manipulationen und feindseliges Auslesen durch verschiedene Arten von physikalischen Angriffen wurde untersucht. Es konnte gezeigt werden, dass MEMS PUFs aufgrund der Empfindlichkeit ihrer Eigenschaften hinsichtlich einer Öffnung des Mold-Gehäuses eine hohe Widerstandsfähigkeit gegenüber invasiven Angriffen aufweisen
    corecore