Commande nonlinéaire de micromirroirs[sic] électrostatiques

MEMS and their applications -- The micromirror : State-of-the-Art and Applications -- Modeling of torsional electrostatic micromirrors -- Tools for nonlinear control systems design -- Exact Feedback linearization -- Flat systems -- Control synthesis for electrostatic micromirrors -- Experimental implementation -- Instruments Calibration and Components Tuning -- Characteristics of the Micromirrors

Linear-Quadratic Control of a MEMS Micromirror Using Kalman Filtering

The deflection limitations of electrostatic flexure-beam actuators are well known. Specifically, as the beam is actuated and the gap traversed, the restoring force necessary for equilibrium increases proportionally with the displacement to first order, while the electrostatic actuating force increases with the inverse square of the gap. Equilibrium, and thus stable open-loop voltage control, ceases at one-third the total gap distance, leading to actuator snap-in. A Kalman Filter is designed with an appropriately complex state dynamics model to accurately estimate actuator deflection given voltage input and capacitance measurements, which are then used by a Linear Quadratic controller to generate a closed-loop voltage control signal. The constraints of the latter are designed to maximize stable control over the entire gap. The design and simulation of the Kalman Filter and controller are presented and discussed, with static and dynamic responses analyzed, as applied to basic, 100 micrometer by 100 micrometer square, flexure-beam-actuated micromirrors fabricated by PolyMUMPs. Successful application of these techniques enables demonstration of smooth, stable deflections of 50% and 75% of the gap

Magnetic Levitation of Polymeric Photo-thermal Microgrippers

Precise manipulation of micro objects became great interest in engineering and science with the advancements in microengineering and microfabrication. In this thesis, a magnetically levitated microgripper is presented for microhandling tasks. The use of magnetic levitation for positioning reveals the problems associated with modeling of complex surface forces and the use of jointed parts or wires. The power required for the levitation of the microgripper is generated by an external drive unit that makes further minimization of the gripper possible. The gripper is made of a biocompatible material and can be activated remotely. These key features make the microgripper a great candidate for manipulation of micro components and biomanipulation. In order to achieve magnetic levitation of microrobots, the magnetic field generated by the magnetic levitation setup is simulated. The magnetic flux density in the air gap region is improved by the integration of permanent magnets and an additional electromagnet to the magnetic loop assembly. The levitation performance is evaluated with millimeter size permanent magnets. An eddy current damping method is implemented and the levitation accuracy is doubled by reducing the positioning error to 20.3 µm. For a MEMS-compatible microrobot design, the electrodeposition of Co-Ni-Mn-P magnetic thin films is demonstrated. Magnetic films are deposited on silicon substrate to form the magnetic portion of the microrobot. The electrodeposited films are extensively characterized. The relationship between the deposition parameters and structural properties is discussed leading to an understanding of the effect of deposition parameters on the magnetic properties. It is shown that both in-plane and out-of-plane magnetized films can be obtained using electrodeposition with slightly differentiated deposition parameters. The levitation of the electrodeposited magnetic samples shows a great promise toward the fabrication of levitating MEMS devices. The end-effector tool of the levitating microrobot is selected as a microgripper that can achieve various manipulation operations such as pulling, pushing, tapping, grasping and repositioning. The microgripper is designed based on a bent-beam actuation technique. The motion of the gripper fingers is achieved by thermal expansion through laser heat absorption. This technique provided non-contact actuation for the levitating microgripper. The analytical model of the displacement of the bent-beam actuator is developed. Different designs of microgripper are fabricated and thoroughly characterized experimentally and numerically. The two microgripper designs that lead to the maximum gripper deflection are adapted for the levitating microrobot. The experimental results show that the levitating microrobot can be positioned in a volume of 3 x 3 x 2 cm^3. The positioning error is measured as 34.3 µm and 13.2 µm when electrodeposited magnets and commercial permanent magnets are used, respectively. The gripper fingers are successfully operated on-the-fly by aligning a visible wavelength laser beam on the gripper. Micromanipulation of 100 µm diameter electrical wire, 125 µm diameter optical fiber and 1 mm diameter cable strip is demonstrated. The microgripper is also positioned in a closed chamber without sacrificing the positioning accuracy

Magnetic suspension and vibration control of flexible structures for non-contact processing

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.Includes bibliographical references (p. 365-372).This thesis presents the design, analysis, and experimental testing of systems for noncontact suspension and control of flexible structures. Our particular focus is on the use of such suspensions in manufacturing processes which can be facilitated by the ability to control workpiece motion without contact. This can be of significant utility in processes such as coating, painting, heat treating, and web handling. We develop a novel approach for the control of such non-contact suspensions through what we term sensor averaging and actuator averaging. The difficult stability and robustness problems imposed by the flexible dynamics of the workpiece can be overcome by taking a properly-weighted average of the outputs of a distributed array of N motion sensors (sensor averaging), and/or by applying a properly-weighted distributed array of M forces (actuator averaging) to the workpiece. The theory for these dual techniques is developed in detail in the thesis. These approaches are shown to be independent of the specific boundary conditions or the longitudinal dimensions of the workpiece. These approaches are thus generally applicable to a wide range of structural control problems. We present both analytical and numerical analyses of the structural dynamics for typical flexible workpieces such as strings, beams, membranes, and plates. The analyses include axial translation of the workpiece. We have experimentally demonstrated the utility of our theory by application in the successful magnetic suspension of a 3 m long, 6.35 mm diameter, 0.89 mm wall thickness steel tube with varying boundary conditions. This is a very challenging problem due to the extremely light damping of the modes (< 0.001 with free ends). The experiment uses a set of 8 sensors and 8 actuators to measure and control the motion of the tube in the two lateral degrees of freedom. We present the details of the developed electromagnetic actuators, position sensors, modeling of the structural dynamics, the relevant vibration control techniques, and develop the associated theory for choosing sensor and actuator locations. Our results experimentally confirm the value of our averaging techniques, and suggest the wide future application of these ideas in industrial processes which require non-contact handling of workpieces.by Ming-chih Weng.Ph.D

Volume 3 – Conference

We are pleased to present the conference proceedings for the 12th edition of the International Fluid Power Conference (IFK). The IFK is one of the world’s most significant scientific conferences on fluid power control technology and systems. It offers a common platform for the presentation and discussion of trends and innovations to manufacturers, users and scientists. The Chair of Fluid-Mechatronic Systems at the TU Dresden is organizing and hosting the IFK for the sixth time. Supporting hosts are the Fluid Power Association of the German Engineering Federation (VDMA), Dresdner Verein zur Förderung der Fluidtechnik e. V. (DVF) and GWT-TUD GmbH. The organization and the conference location alternates every two years between the Chair of Fluid-Mechatronic Systems in Dresden and the Institute for Fluid Power Drives and Systems in Aachen. The symposium on the first day is dedicated to presentations focused on methodology and fundamental research. The two following conference days offer a wide variety of application and technology orientated papers about the latest state of the art in fluid power. It is this combination that makes the IFK a unique and excellent forum for the exchange of academic research and industrial application experience. A simultaneously ongoing exhibition offers the possibility to get product information and to have individual talks with manufacturers. The theme of the 12th IFK is “Fluid Power – Future Technology”, covering topics that enable the development of 5G-ready, cost-efficient and demand-driven structures, as well as individual decentralized drives. Another topic is the real-time data exchange that allows the application of numerous predictive maintenance strategies, which will significantly increase the availability of fluid power systems and their elements and ensure their improved lifetime performance. We create an atmosphere for casual exchange by offering a vast frame and cultural program. This includes a get-together, a conference banquet, laboratory festivities and some physical activities such as jogging in Dresden’s old town.:Group 8: Pneumatics Group 9 | 11: Mobile applications Group 10: Special domains Group 12: Novel system architectures Group 13 | 15: Actuators & sensors Group 14: Safety & reliabilit