Gaussian process regression for virtual metrology of microchip quality and the resulting strategic sampling scheme

Manufacturing of integrated circuits involves many sequential processes, often ex- ecuted to nanoscale tolerances, and the yield depends on the often unmeasured quality of intermediate steps. In the high-throughput industry of fabricating microelectronics on semi-conducting wafers, scheduling measurements of product quality before the electrical test of the complete IC can be expensive. We therefore seek to predict metrics of product quality based on sensor readings describing the environment within the relevant tool during the processing of each wafer, or to apply the concept of virtual metrology (VM) to monitor these intermediate steps. We model the data using Gaussian process regression (GPR), adapted to simultaneously learn the nonlinear dynamics that govern the quality characteristic, as well as their operating space, expressed by a linear embedding of the sensor traces’ features. Such Bayesian models predict a distribution for the target metric, such as a critical dimension, so one may assess the model’s credibility through its predictive uncertainty. Assuming measurements of the quality characteristic of interest are budgeted, we seek to hasten convergence of the GPR model to a credible form through an active sampling scheme, whereby the predictive uncertainty informs which wafer’s quality to measure next. We evaluate this convergence when predicting and updating online, as if in a factory, using a large dataset for plasma-enhanced chemical vapor deposition (PECVD), with measured thicknesses for ~32,000 wafers. By approximately optimizing the information extracted from this seemingly repetitive data describing a tightly controlled process, GPR achieves ~10% greater accuracy on average than a baseline linear model based on partial least squares (PLS). In a derivative study, we seek to discern the degree of drift in the process over the several months the data spans. We express this drift by how unusual the relevant features, as embedded by the GPR model, appear as the in- puts compensate for degrading conditions. This method detects the onset of consistently unusual behavior that extends to a bimodal thickness fault, anticipating its flagging by as much as two days.Mechanical Engineerin

Damage identification in structural health monitoring: a brief review from its implementation to the Use of data-driven applications

The damage identification process provides relevant information about the current state of a structure under inspection, and it can be approached from two different points of view. The first approach uses data-driven algorithms, which are usually associated with the collection of data using sensors. Data are subsequently processed and analyzed. The second approach uses models to analyze information about the structure. In the latter case, the overall performance of the approach is associated with the accuracy of the model and the information that is used to define it. Although both approaches are widely used, data-driven algorithms are preferred in most cases because they afford the ability to analyze data acquired from sensors and to provide a real-time solution for decision making; however, these approaches involve high-performance processors due to the high computational cost. As a contribution to the researchers working with data-driven algorithms and applications, this work presents a brief review of data-driven algorithms for damage identification in structural health-monitoring applications. This review covers damage detection, localization, classification, extension, and prognosis, as well as the development of smart structures. The literature is systematically reviewed according to the natural steps of a structural health-monitoring system. This review also includes information on the types of sensors used as well as on the development of data-driven algorithms for damage identification.Peer ReviewedPostprint (published version

Data-Driven Fault Detection and Reasoning for Industrial Monitoring

This open access book assesses the potential of data-driven methods in industrial process monitoring engineering. The process modeling, fault detection, classification, isolation, and reasoning are studied in detail. These methods can be used to improve the safety and reliability of industrial processes. Fault diagnosis, including fault detection and reasoning, has attracted engineers and scientists from various fields such as control, machinery, mathematics, and automation engineering. Combining the diagnosis algorithms and application cases, this book establishes a basic framework for this topic and implements various statistical analysis methods for process monitoring. This book is intended for senior undergraduate and graduate students who are interested in fault diagnosis technology, researchers investigating automation and industrial security, professional practitioners and engineers working on engineering modeling and data processing applications. This is an open access book

Machine Learning for Fluid Mechanics

The field of fluid mechanics is rapidly advancing, driven by unprecedented volumes of data from field measurements, experiments and large-scale simulations at multiple spatiotemporal scales. Machine learning offers a wealth of techniques to extract information from data that could be translated into knowledge about the underlying fluid mechanics. Moreover, machine learning algorithms can augment domain knowledge and automate tasks related to flow control and optimization. This article presents an overview of past history, current developments, and emerging opportunities of machine learning for fluid mechanics. It outlines fundamental machine learning methodologies and discusses their uses for understanding, modeling, optimizing, and controlling fluid flows. The strengths and limitations of these methods are addressed from the perspective of scientific inquiry that considers data as an inherent part of modeling, experimentation, and simulation. Machine learning provides a powerful information processing framework that can enrich, and possibly even transform, current lines of fluid mechanics research and industrial applications.Comment: To appear in the Annual Reviews of Fluid Mechanics, 202

Data-Driven Fault Detection and Reasoning for Industrial Monitoring

This open access book assesses the potential of data-driven methods in industrial process monitoring engineering. The process modeling, fault detection, classification, isolation, and reasoning are studied in detail. These methods can be used to improve the safety and reliability of industrial processes. Fault diagnosis, including fault detection and reasoning, has attracted engineers and scientists from various fields such as control, machinery, mathematics, and automation engineering. Combining the diagnosis algorithms and application cases, this book establishes a basic framework for this topic and implements various statistical analysis methods for process monitoring. This book is intended for senior undergraduate and graduate students who are interested in fault diagnosis technology, researchers investigating automation and industrial security, professional practitioners and engineers working on engineering modeling and data processing applications. This is an open access book

An improved mixture of probabilistic PCA for nonlinear data-driven process monitoring

An improved mixture of probabilistic principal component analysis (PPCA) has been introduced for nonlinear data-driven process monitoring in this paper. To realize this purpose, the technique of a mixture of probabilistic principal component analyzers is utilized to establish the model of the underlying nonlinear process with local PPCA models, where a novel composite monitoring statistic is proposed based on the integration of two monitoring statistics in modified PPCA-based fault detection approach. Besides, the weighted mean of the monitoring statistics aforementioned is utilized as a metrics to detect potential abnormalities. The virtues of the proposed algorithm are discussed in comparison with several unsupervised algorithms. Finally, Tennessee Eastman process and an autosuspension model are employed to demonstrate the effectiveness of the proposed scheme further

Development of soft computing and applications in agricultural and biological engineering

Soft computing is a set of “inexact” computing techniques, which are able to model and analyze very complex problems. For these complex problems, more conventional methods have not been able to produce cost-effective, analytical, or complete solutions. Soft computing has been extensively studied and applied in the last three decades for scientific research and engineering computing. In agricultural and biological engineering, researchers and engineers have developed methods of fuzzy logic, artificial neural networks, genetic algorithms, decision trees, and support vector machines to study soil and water regimes related to crop growth, analyze the operation of food processing, and support decision-making in precision farming. This paper reviews the development of soft computing techniques. With the concepts and methods, applications of soft computing in the field of agricultural and biological engineering are presented, especially in the soil and water context for crop management and decision support in precision agriculture. The future of development and application of soft computing in agricultural and biological engineering is discussed

Koneoppimiskehys petrokemianteollisuuden sovelluksille

Machine learning has many potentially useful applications in process industry, for example in process monitoring and control. Continuously accumulating process data and the recent development in software and hardware that enable more advanced machine learning, are fulfilling the prerequisites of developing and deploying process automation integrated machine learning applications which improve existing functionalities or even implement artificial intelligence. In this master's thesis, a framework is designed and implemented on a proof-of-concept level, to enable easy acquisition of process data to be used with modern machine learning libraries, and to also enable scalable online deployment of the trained models. The literature part of the thesis concentrates on studying the current state and approaches for digital advisory systems for process operators, as a potential application to be developed on the machine learning framework. The literature study shows that the approaches for process operators' decision support tools have shifted from rule-based and knowledge-based methods to machine learning. However, no standard methods can be concluded, and most of the use cases are quite application-specific. In the developed machine learning framework, both commercial software and open source components with permissive licenses are used. Data is acquired over OPC UA and then processed in Python, which is currently almost the de facto standard language in data analytics. Microservice architecture with containerization is used in the online deployment, and in a qualitative evaluation, it proved to be a versatile and functional solution.Koneoppimisella voidaan osoittaa olevan useita hyödyllisiä käyttökohteita prosessiteollisuudessa, esimerkiksi prosessinohjaukseen liittyvissä sovelluksissa. Jatkuvasti kerääntyvä prosessidata ja toisaalta koneoppimiseen soveltuvien ohjelmistojen sekä myös laitteistojen viimeaikainen kehitys johtavat tilanteeseen, jossa prosessiautomaatioon liitettyjen koneoppimissovellusten avulla on mahdollista parantaa nykyisiä toiminnallisuuksia tai jopa toteuttaa tekoälysovelluksia. Tässä diplomityössä suunniteltiin ja toteutettiin prototyypin tasolla koneoppimiskehys, jonka avulla on helppo käyttää prosessidataa yhdessä nykyaikaisten koneoppimiskirjastojen kanssa. Kehys mahdollistaa myös koneopittujen mallien skaalautuvan käyttöönoton. Diplomityön kirjallisuusosa keskittyy prosessioperaattoreille tarkoitettujen digitaalisten avustajajärjestelmien nykytilaan ja toteutustapoihin, avustajajärjestelmän tai sen päätöstukijärjestelmän ollessa yksi mahdollinen koneoppimiskehyksen päälle rakennettava ohjelma. Kirjallisuustutkimuksen mukaan prosessioperaattorin päätöstukijärjestelmien taustalla olevat menetelmät ovat yhä useammin koneoppimiseen perustuvia, aiempien sääntö- ja tietämyskantoihin perustuvien menetelmien sijasta. Selkeitä yhdenmukaisia lähestymistapoja ei kuitenkaan ole helposti pääteltävissä kirjallisuuden perusteella. Lisäksi useimmat tapausesimerkit ovat sovellettavissa vain kyseisissä erikoistapauksissa. Kehitetyssä koneoppimiskehyksessä on käytetty sekä kaupallisia että avoimen lähdekoodin komponentteja. Prosessidata haetaan OPC UA -protokollan avulla, ja sitä on mahdollista käsitellä Python-kielellä, josta on muodostunut lähes de facto -standardi data-analytiikassa. Kehyksen käyttöönottokomponentit perustuvat mikropalveluarkkitehtuuriin ja konttiteknologiaan, jotka osoittautuivat laadullisessa testauksessa monipuoliseksi ja toimivaksi toteutustavaksi

On-line anomaly detection with advanced independent component analysis of multi-variate residual signals from causal relation networks.

Anomaly detection in todays industrial environments is an ambitious challenge to detect possible faults/problems which may turn into severe waste during production, defects, or systems components damage, at an early stage. Data-driven anomaly detection in multi-sensor networks rely on models which are extracted from multi-sensor measurements and which characterize the anomaly-free reference situation. Therefore, significant deviations to these models indicate potential anomalies. In this paper, we propose a new approach which is based on causal relation networks (CRNs) that represent the inner causes and effects between sensor channels (or sensor nodes) in form of partial sub-relations, and evaluate its functionality and performance on two distinct production phases within a micro-fluidic chip manufacturing scenario. The partial relations are modeled by non-linear (fuzzy) regression models for characterizing the (local) degree of influences of the single causes on the effects. An advanced analysis of the multi-variate residual signals, obtained from the partial relations in the CRNs, is conducted. It employs independent component analysis (ICA) to characterize hidden structures in the fused residuals through independent components (latent variables) as obtained through the demixing matrix. A significant change in the energy content of latent variables, detected through automated control limits, indicates an anomaly. Suppression of possible noise content in residuals—to decrease the likelihood of false alarms—is achieved by performing the residual analysis solely on the dominant parts of the demixing matrix. Our approach could detect anomalies in the process which caused bad quality chips (with the occurrence of malfunctions) with negligible delay based on the process data recorded by multiple sensors in two production phases: injection molding and bonding, which are independently carried out with completely different process parameter settings and on different machines (hence, can be seen as two distinct use cases). Our approach furthermore i.) produced lower false alarm rates than several related and well-known state-of-the-art methods for (unsupervised) anomaly detection, and ii.) also caused much lower parametrization efforts (in fact, none at all). Both aspects are essential for the useability of an anomaly detection approach