Design and Simulation of a Ring-Shaped Linear Array for Microultrasound Capsule Endoscopy

Video capsule endoscopy (VCE) has significantly advanced visualization of the gastrointestinal tract (GI tract) since its introduction in the last 20 years. Work is now under way to combine VCE with microultrasound imaging. However, small maximum capsule dimensions, coupled with the electronics required to integrate ultrasound imaging capabilities, pose significant design challenges. This paper describes a simulation process for testing transducer geometries and imaging methodologies to achieve satisfactory imaging performance within the physical limitations of the capsule size and outlines many of the trade-offs needed in the design of this new class of ultrasound capsule endoscopy (USCE) device. A hybrid MATLAB model is described, incorporating KLM circuit elements and digitizing and beamforming elements to render a grey-scale B-mode. This model is combined with a model of acoustic propagation to generate images of point scatterers. The models are used to demonstrate the performance of a USCE transducer configuration comprising a single, unfocused transmit ring of radius 5 mm separated into eight segments for electrical impedance control and a 512-element receive linear array, also formed into a ring. The MATLAB model includes an ultrasonic pulser circuit connected to a piezocrystal composite transmit transducer with a center frequency of 25 MHz. B-scan images are simulated for wire target phantoms, multilayered phantoms, and a gut wall model. To demonstrate the USCE system’s ability to image tissue, a digital phantom was created from single-element ultrasonic transducer scans of porcine small bowel ex vivo obtained at a frequency of 45 MHz

Air-coupled Capacitive Micromachined Ultrasonic Transducers based on Annular Cell Geometry

Air-coupled ultrasound is gaining increasing industry momentum due to the demands and development of non-destructive evaluation (NDE) of aerospace composite materials. Currently, the micromachining technology has advanced such that vacuum cavities sealed by thin plates, known as Capacitive Micromachined Ultrasonic Transducers (CMUTs), can be fabricated through silicon micromachining processes in a low cost manner. Given the thin plates, a CMUT is able to vibrate with a low mechanical impedance and thus a high coupling efficiency with the ambient atmosphere. Nevertheless, air-coupled applications are still highly limited by the transmit power of air-coupled CMUTs. A circle is the routine geometry in most CMUT cell designs. Even though efforts have been put forward to address the limitations of circular design in terms of sensitivity, more investigation about other cell geometries is prudent. In this work, a novel air-coupled CMUT design with annular cell geometry is proposed. Finite element analysis and experimental studies demonstrated its significant improvement in transmit efficiency over the conventional circular-cell CMUTs. A lumped element model was constructed to facilitate a better understanding and provide an efficient design technique of the annular CMUT. Three optimization schemes were developed to optimize the transmit efficiency and achieve a reasonable comparison between the novel annular and conventional circular CMUT cells. Based on the lumped models, a design optimization flow chart was constructed to facilitate the analytical optimization of the three schemes. To further enhance the transmit power as well as offer depth focusing, a 9-element concentric annular-cell array was designed, fabricated, and characterized. A pillar-free etching process was developed to create the deep large-area cavities. The cross-talk between neighbouring cells and the plate-cracking phenomenon were discussed with suggestions for improvement being provided. This study provides a systematic framework for designing and studying annular-cell CMUTs and demonstrates their great potential in transmitting high-power ultrasound in air

A BCB Diaphragm Based Adhesive Wafer Bonded CMUT Probe for Biomedical Application

This dissertation presents the design methodology, fabrication procedure, and key experimental characterization results of a linear array of capacitive micromachined ultrasonic transducers (CMUT) for possible ophthalmic anterior segment imaging application. The design methodology involves analytical, 3-D electromechanical finite element analysis, and Verasonics Vantage 128 ultrasonic research platform based diagnostic imaging simulations to develop a technique that minimizes electrical charging and center frequency drift while improving the transduction efficiency. In the design, Bisbenzocyclobutene (BCB), a low K polymer from Dow Chemical Company, has been innovatively used for the first time to fabricate the structural layer of the CMUT diaphragm, realize the interelectrode dielectric spacer, and to act as a low temperature adhesive bonding agent. Additionally, the top CMUT electrode has been placed at the bottom of the diaphragm to affect higher capacitance change that increases sensitivity and provides additional decoupling of the electrical charging effects. Several arrays with element count ranging from 8 to 128 elements and a center frequency range of 5 MHz to 40 MHz have been designed and fabricated. Due to an unforeseen adhesion issue during wirebonding, a 32 channel 40 MHz CMUT array has been packaged manually to validate the fabrication process and CMUT operation. Extensive SEM inspections of the CMUT cross-sections show good agreement with the design specifications. Static and dynamic measurements using a Polytec laser Doppler vibrometer, impedance measurement using an Agilent vector network analyzer, and LCR measurement results are in excellent agreement with analytical and FEA analysis using IntelliSuite. The frequency analysis exhibits high electromechanical coupling coefficient of 0.66 at a low bias voltage of 20 V and high uniformity. A successful measurement of the lower drift of the center frequency 0.32% and higher coupling coefficient verifies the hypothesis that the excellent electrical, structural, and processing characteristics of BCB is a viable option to mitigate the dielectric charging and improve the transduction efficiency of CMUTs

Modelling, Simulation and Data Analysis in Acoustical Problems

Modelling and simulation in acoustics is currently gaining importance. In fact, with the development and improvement of innovative computational techniques and with the growing need for predictive models, an impressive boost has been observed in several research and application areas, such as noise control, indoor acoustics, and industrial applications. This led us to the proposal of a special issue about “Modelling, Simulation and Data Analysis in Acoustical Problems”, as we believe in the importance of these topics in modern acoustics’ studies. In total, 81 papers were submitted and 33 of them were published, with an acceptance rate of 37.5%. According to the number of papers submitted, it can be affirmed that this is a trending topic in the scientific and academic community and this special issue will try to provide a future reference for the research that will be developed in coming years

Stress analysis, dielectric, piezoelectric, and ferroelectric properties of PZT thick films. Fabrication of a 50MHz Tm-pMUT annular array

PZT films up to 35 μm thick were fabricated, using a composite sol gel route combining a PZT powder and a PZT sol. The maximum temperature for the process was 710°C. A demonstration of single layer and multilayer structures was given to show the flexibility of this technology. With Stoney’s Equation, studies of the in-situ film stress development as a function of the film thickness and density was effectuated. It helped to understand that the internal forces increase considerably with the film thickness and density. This study yields to set up experimental conditions in which a crack free surface finish of a 28μm thick film revealed the adaptability of the spin coating technique to fabricate thick films. The wet etching technology revealed the possibility of a great adaptability to pattern and shape innovative devices such as bars 10 μm wide of 21μm PZT thick film. The results open the way to a wide range of new industrial application requiring small features and/or multilayer PZT thick film with embedded electrodes. The single element and annular array devices have been shown to resonate at approximately 60MHz in air and 50 MHz in water. Three types of the composite thick film – 2C+4S, 2C+5S and 2C+6S – were used to fabricate the Tm-pMUT devices. In each case the most effective poling was obtained by maintaining the poling field of 8.4V/μm during cooling from the poling temperature (200ºC) to ‘freeze’ poled domains in place. This ‘freezing’ was required to prevent the tensile stresses within the film from reorienting the domains at high temperatures when the poling field is removed. Increasing values of thickness mode coupling coefficient (kt) were observed with increasing levels of sol infiltration (decreasing density). Such behaviour is thought to be due to non linear effects on the piezoelectric coefficient (e33) at high levels of porosity. For very dense thick film material a kt of 0.47 was observed which is comparable to that observed for the bulk material

CeFlowBot:A Biomimetic Flow-Driven Microrobot that Navigates under Magneto-Acoustic Fields

Aquatic organisms within the Cephalopoda family (e.g., octopuses, squids, cuttlefish) exist that draw the surrounding fluid inside their bodies and expel it in a single jet thrust to swim forward. Like cephalopods, several acoustically powered microsystems share a similar process of fluid expulsion which makes them useful as microfluidic pumps in lab-on-a-chip devices. Herein, an array of acoustically resonant bubbles are employed to mimic this pumping phenomenon inside an untethered microrobot called CeFlowBot. CeFlowBot contains an array of vibrating bubbles that pump fluid through its inner body thereby boosting its propulsion. CeFlowBots are later functionalized with magnetic layers and steered under combined influence of magnetic and acoustic fields. Moreover, acoustic power modulation of CeFlowBots is used to grasp nearby objects and release it in the surrounding workspace. The ability of CeFlowBots to navigate remote environments under magneto-acoustic fields and perform targeted manipulation makes such microrobots useful for clinical applications such as targeted drug delivery. Lastly, an ultrasound imaging system is employed to visualize the motion of CeFlowBots which provides means to deploy such microrobots in hard-to-reach environments inaccessible to optical cameras.</p