Modeling of quad-station module cluster tools using petri nets

The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net as a process-bounded system. The system analysis and simulations are performed by using timed and colored Petri nets. The results are useful to deepen our understanding of the discrete-event dynamics of quad-station module cluster tools and offer the highly needed insight into their efficient and deadlock-free operation

Analysis and Evaluation of the Impacts of Predictive Analytics on Production System Performances in the Semiconductor Industry

Problem Statement: Predictive Analytics (PA) may effectively support semiconductor industry (SI) companies in order to manage the special challenges in SI value chains. To discover the implications of PA, the realistic benefits as well as its limitations of its application to semiconductor manufacturing, it is necessary to assess in which ways the application of PA affects the production system (PS) performances. However, based on the literature survey, the influences of PA on the various performance characteristics of an SI PS are not as clear as expected for the efficiently operative application. Besides, the existing performance models are not effective to predict the impacts of PA on the SI PS performances. Therefore, the overall aim of this thesis is to analyse and evaluate the impacts of PA on the SI PS performances and to identify under which conditions a PA application would generate the most significant performance improvements. The focus of this thesis is predictive maintenance (PdM). Research Methodology: Based on a post-positivist philosophy, the thesis applies a deductive research approach using mixed-methods for data collection. The research design has the following stages: (1) theory, (2) hypothesis, (3) state of research, (4) case study and (5) verification. Main Achievements: (1) The systematic literature review is carried out to identify the gaps of the existing research and based on these findings, a conceptual framework is proposed and developed. (2) The existing performance models are analysed and evaluated against their applicability to this study. (3) A causal loop model for SI PS is generated based on the assessment of experts with industrial engineering and equipment maintenance expertise. (4) An expert system is developed and evaluated in order to investigate transitive and contradictory effects of PdM on SI PS performances. (5) A simulation model is developed and validated for investigating the strengths and limitations of PdM regarding SI PS performances under different circumstances. Results: The results of the logical inference study show that PdM has 34 positive effects as well as 4 contradictory effects on SI PS performance characteristics. Based on the various simulation experiments, it has been found that (1) ’Mean Time to Repair’ decreases only if PdM supports proportionate reduction of failures and repair times. (2) Logistics performance improves only if the underlying workcenter is limited in capacity or the four partners are nonsynchronous. (3) PdM supports optimal cost decreases for workcenters where the degree of exhausting wear limits can be most effectively improved and (4) the degree of yield improvement gained by PdM is dependent on the operation scrap rate. However, (5) if a workcenter has overcapacity, PdM will potentially worsen PS performances, even if the particular workcenter performance can be improved. These new insights advance existing knowledge in production managements when adopting predictive technologies at SI PS in order to improve PS performances. The findings above enable SI practitioners to justify a PdM investment and to select suitable workcenters in order to improve SI PS performances by applying the proposed PdM. Contributions: The main contributions of this PhD project can be divided into practical application and theoretical work. The contributions from the theoretical perspective are: 1) The critical review and evaluation of the state of the research for PA in the context of semiconductor manufacturing and the models for predicting and evaluating SI PS performances. 2) A new framework for investigating the implications of PA on the challenges such as gaining high utilizations and controlling the variability in production processes in SI value chains. 3) The new knowledge about transitive and contradictory effects of PdM on SI PS performances, which indicates that PdM can be used to improve PS performances beyond a single machine. 4) The new knowledge about strengths and limitations of PdM in order to improve SI PS performances under particular circumstances. The contributions from the practical application perspective are: 1) A practical method for identifying workcenters where PdM delivers the most significant benefits for SI PS performances. 2) An expert system that provides a comprehensive knowledge base about causes and effects within SI PS in order to justify a PdM investment. 3) A concise review of important PA applications, their capabilities for the wafer fabrication and the most suited PA methods. These findings can be adopted by SI practitioners

Technology 2003: The Fourth National Technology Transfer Conference and Exposition, volume 2

Proceedings from symposia of the Technology 2003 Conference and Exposition, Dec. 7-9, 1993, Anaheim, CA, are presented. Volume 2 features papers on artificial intelligence, CAD&E, computer hardware, computer software, information management, photonics, robotics, test and measurement, video and imaging, and virtual reality/simulation

Technology 2001: The Second National Technology Transfer Conference and Exposition, volume 2

Proceedings of the workshop are presented. The mission of the conference was to transfer advanced technologies developed by the Federal government, its contractors, and other high-tech organizations to U.S. industries for their use in developing new or improved products and processes. Volume two presents papers on the following topics: materials science, robotics, test and measurement, advanced manufacturing, artificial intelligence, biotechnology, electronics, and software engineering

Maps of Lessons Learnt in Requirements Engineering

Both researchers and practitioners have emphasized the importance of learning from past experiences and its consequential impact on project time, cost, and quality. However, from the survey we conducted of requirements engineering (RE) practitioners, over 70\% of the respondents stated that they seldom use RE lessons in the RE process, though 85\% of these would use such lessons if readily available. Our observation, however, is that RE lessons are scattered, mainly implicitly, in the literature and practice, which obviously, does not help the situation. We, therefore, present ``maps” of RE lessons which would highlight weak (dark) and strong (bright) areas of RE (and hence RE theories). Such maps would thus be: (a) a driver for research to ``light up” the darker areas of RE and (b) a guide for practice to benefit from the brighter areas. To achieve this goal, we populated the maps with over 200 RE lessons elicited from literature and practice using a systematic literature review and survey. The results show that approximately 80\% of the elicited lessons are implicit and that approximately 70\% of the lessons deal with the elicitation, analysis, and specification RE phases only. The RE Lesson Maps, elicited lessons, and the results from populating the maps provide novel scientific groundings for lessons learnt in RE as this topic has not yet been systematically studied in the field

Research reports: 1987 NASA/ASEE Summer Faculty Fellowship Program

For the 23rd consecutive year, a NASA/ASEE Summer Faculty Fellowship Program was conducted at the Marshall Space Flight Center (MSFC). The program was conducted by the University of Alabama in Huntsville and MSFC during the period 1 June to 7 August 1987. Operated under the auspices of the American Society for Engineering Education, the MSFC program, as well as those at other NASA Centers, was sponsored by the Office of University Affairs, NASA Headquarters, Washington, D.C. The basic objectives of the program are: (1) to further the professional knowledge of qualified engineering and science faculty members; (2) to stimulate an exchange of ideas between participants and NASA; (3) to enrich and refresh the research and teaching activities of the participant's institutions; and (4) to contribute to the research objectives of the NASA Centers. This document is a compilation of Fellow's reports on their research during the Summer of 1987