A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

International audienceThere are wafer fabrication processes in cluster tools that require wafer revisiting. The adoption of a swap strategy for such tools forms a 3-wafer cyclic (3-WC) period with three wafers completed in each period. It has been shown that, by such a scheduling strategy, the minimal cycle time cannot be reached for some cases. This raises a question of whether there is a scheduling method such that the performance can be improved. To answer this question, a dual-arm cluster tool with wafer revisiting is modeled by a Petri net. Based on the model, the dynamical behavior of the process is analyzed. Then, a 2-wafer cyclic (2-WC) scheduling strategy is revealed for the first time. Cycle time analysis is conducted for the proposed strategy to evaluate its performance. It shows that, for some cases, the performance obtained by a 2-WC schedule is better than that obtained by any existing 3-WC ones. Thus, they can be used to complement each other in scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are given

Modeling of quad-station module cluster tools using petri nets

The semiconductor industry is highly competitive, and with the recent chip shortage, the throughput of wafers has become more important than ever. One of the tools that the industry has deployed is to use of quad-station modules instead of the traditional single-station modules that allow for higher throughput and better wafer consistency by processing multiple wafers at the same time and distributing work. The industry trend is to use multiple transfer chamber robots to stack the quad-station modules in a series, particularly for etch products. In this work, the quad-station cluster tool wafer movement is modeled by using Petri net as a process-bounded system. The system analysis and simulations are performed by using timed and colored Petri nets. The results are useful to deepen our understanding of the discrete-event dynamics of quad-station module cluster tools and offer the highly needed insight into their efficient and deadlock-free operation

Technology 2001: The Second National Technology Transfer Conference and Exposition, volume 2

Proceedings of the workshop are presented. The mission of the conference was to transfer advanced technologies developed by the Federal government, its contractors, and other high-tech organizations to U.S. industries for their use in developing new or improved products and processes. Volume two presents papers on the following topics: materials science, robotics, test and measurement, advanced manufacturing, artificial intelligence, biotechnology, electronics, and software engineering

Maximal good step graph methods for reducing the generation of the state space

This paper proposes an effective method based on the two main partial order techniques which are persistent sets and covering step graph techniques, to deal with the state explosion problem. First, we introduce a new definition of sound steps, the firing of which enables to extremely reduce the state space. Then, we propose a weaker sufficient condition about how to find the set of sound steps at each current marking. Next, we illustrate the relation between maximal sound steps and persistent sets, and propose a concept of good steps. Based on the maximal sound steps and good steps, a construction algorithm for generating a maximal good step graph (MGSG) of a Petri net (PN) is established. This algorithm first computes the maximal good step at each marking if there exists one, otherwise maximal sound steps are fired at the marking. Furthermore, we have proven that an MGSG can effectively preserve deadlocks of a Petri net. Finally, the change performance evaluation is made to demonstrate the superiority of our proposed method, compared with other related partial order techniques

Graduate Catalog, 1999-2002, New Jersey Institute of Technology

https://digitalcommons.njit.edu/coursecatalogs/1004/thumbnail.jp

Graduate Catalog, 1996-1999, New Jersey Institute of Technology

https://digitalcommons.njit.edu/coursecatalogs/1003/thumbnail.jp

Fourth NASA Goddard Conference on Mass Storage Systems and Technologies

This report contains copies of all those technical papers received in time for publication just prior to the Fourth Goddard Conference on Mass Storage and Technologies, held March 28-30, 1995, at the University of Maryland, University College Conference Center, in College Park, Maryland. This series of conferences continues to serve as a unique medium for the exchange of information on topics relating to the ingestion and management of substantial amounts of data and the attendant problems involved. This year's discussion topics include new storage technology, stability of recorded media, performance studies, storage system solutions, the National Information infrastructure (Infobahn), the future for storage technology, and lessons learned from various projects. There also will be an update on the IEEE Mass Storage System Reference Model Version 5, on which the final vote was taken in July 1994

2022 roadmap on neuromorphic computing and engineering

Modern computation based on von Neumann architecture is now a mature cutting-edge science. In the von Neumann architecture, processing and memory units are implemented as separate blocks interchanging data intensively and continuously. This data transfer is responsible for a large part of the power consumption. The next generation computer technology is expected to solve problems at the exascale with 10$^{18}$ calculations each second. Even though these future computers will be incredibly powerful, if they are based on von Neumann type architectures, they will consume between 20 and 30 megawatts of power and will not have intrinsic physically built-in capabilities to learn or deal with complex data as our brain does. These needs can be addressed by neuromorphic computing systems which are inspired by the biological concepts of the human brain. This new generation of computers has the potential to be used for the storage and processing of large amounts of digital information with much lower power consumption than conventional processors. Among their potential future applications, an important niche is moving the control from data centers to edge devices. The aim of this roadmap is to present a snapshot of the present state of neuromorphic technology and provide an opinion on the challenges and opportunities that the future holds in the major areas of neuromorphic technology, namely materials, devices, neuromorphic circuits, neuromorphic algorithms, applications, and ethics. The roadmap is a collection of perspectives where leading researchers in the neuromorphic community provide their own view about the current state and the future challenges for each research area. We hope that this roadmap will be a useful resource by providing a concise yet comprehensive introduction to readers outside this field, for those who are just entering the field, as well as providing future perspectives for those who are well established in the neuromorphic computing community

The 1995 NASA guide to graduate support

The future of the United States is in the classrooms of America and tomorrow's scientific and technological capabilities are derived from today's investments in research. In 1980, NASA initiated the Graduate Student Researchers Program (GSRP) to cultivate additional research ties to the academic community and to support promising students pursuing advanced degrees in science and engineering. Since then, approximately 1300 students have completed the program's requirements. In 1987, the program was expanded to include the Underrepresented Minority and Disabled Focus (UMDF) Component. This program was designed to increase participation of underrepresented groups in graduate study and research and, ultimately, in space science and aerospace technology careers. Approximately 270 minority students have completed the program's requirements while making significant contributions to the nation's aerospace efforts. Continuing to expand fellowship opportunities, NASA announced the Graduate Student Fellowships in Global Change Research in 1990. Designed to support the rapid growth in the study of earth as a system, more than 250 fellowships have been awarded. And, in 1992, NASA announced opportunities in the multiagency High Performance Computing and Communications (HPCC) Program designed to accelerate the development and application of massively parallel processing. Approximately five new fellowships will be awarded yearly. This booklet will guide you in your efforts to participate in programs for graduate student support