Ordonnancement et contrôle avancé des procédés en fabrication de semi-conducteurs.

Dans cette thèse, nous avons examiné différentes possibilités d'intégration des décisions d'ordonnancement avec des informations provenant de systèmes avancés des contrôles des procédés dans la fabrication de semi-conducteurs. Nous avons développé des idées d'intégration et défini des nouveaux problèmes d'ordonnancement originales : Problème d'ordonnancement avec des contraintes de temps (PTC) et problème d'ordonnancement avec l'état de santé des équipement (PEHF). PTC et PEHF ont des fonctions objectives multicritères.PTC est un problème d'ordonnancement des familles de jobs sur des machines parallèles non identiques en tenant compte des temps de setup et des contraintes de temps. Les machines non identiques signifient que toutes les machines ne peuvent pas traités (qualifiés) tous les types de familles d'emplois. Les contraintes de temps nommés aussi Thresholds sont inspirées des besoins de l'APC. Elle est liée à l'alimentation régulière des boucles de contrôle de l'APC. L'objectif est de minimiser la somme des dates de fin et les pertes de qualification des machines lorsqu'une famille de jobs n'est pas ordonnancée sur la machine donnée avant un seuil de temps donné.D'autre part, PEHF est une extension de PTC. Il consiste d'intégrer les indices de santé des équipements (EHF). EHF est un indicateur associé à l'équipement qui donne l'état de la. L'objectif est d'ordonnancer des tâches de familles de jobs différents sur les machines tout en minimisant la somme des temps d'achèvement, les pertes de qualification de la machine et d'optimiser un rendement attendu. Ce rendement est défini comme une fonction d'EDH et de la criticité de jobs considérés.In this thesis, we discussed various possibilities of integrating scheduling decisions with information and constraints from Advanced Process Control (APC) systems in semiconductor Manufacturing. In this context, important questions were opened regarding the benefits of integrating scheduling and APC. An overview on processes, scheduling and Advanced Process Control in semiconductor manufacturing was done, where a description of semiconductor manufacturing processes is given. Two of the proposed problems that result from integrating bith systems were studied and analyzed, they are :Problem of Scheduling with Time Constraints (PTC) and Problem of Scheduling with Equipement health Factor (PEHF). PTC and PEHF have multicriteria objective functions.PTC aims at scheduling job in families on non-identical parallel machines with setup times and time constraints.Non-identical machines mean that not all miachines can (are qualified to) process all types of job families. Time constraints are inspired from APC needs, for which APC control loops must be regularly fed with information from metrology operations (inspection) within a time interval (threshold). The objective is to schedule job families on machines while minimizing the sum of completion times and the losses in machine qualifications.Moreover, PEHF was defined which is an extension of PTC where scheduling takes into account the equipement Health Factors (EHF). EHF is an indicator on the state of a machine. Scheduling is now done by considering a yield resulting from an assignment of a job to a machine and this yield is defined as a function of machine state and job state.ST ETIENNE-ENS des Mines (422182304) / SudocGARDANNE-Centre microélec. (130412301) / SudocSudocFranceF

Scheduling unrelated parallel machines with resource-assignable sequence-dependent setup times

[EN] A novel scheduling problem that results from the addition of resource-assignable setups is presented in this paper. We consider an unrelated parallel machine problem with machine and job sequence-dependent setup times. The new characteristic is that the amount of setup time does not only depend on the machine and job sequence but also on the amount of resources assigned, which can vary between a minimum and a maximum. The aim is to give solution to real problems arising in several industries where frequent setup operations in production lines have to be carried out. These operations are indeed setups whose length can be reduced or extended according to the amount of resources assigned to them. The objective function considered is a linear combination of total completion time and the total amount of resources assigned. We present a mixed integer program (MIP) model and some fast dispatching heuristics. We carry out careful and comprehensive statistical analyses to study what characteristics of the problem affect the MIP model performance. We also study the effectiveness of the different heuristics proposed. © 2011 Springer-Verlag London Limited.The authors are indebted to the referees and editor for a close examination of the paper, which has increased its quality and presentation. This work is partially funded by the Spanish Ministry of Science and Innovation, under the project "SMPA-Advanced Parallel Multiobjective Sequencing: Practical and Theoretical Advances" with reference DPI2008-03511/DPI. The authors should also thank the IMPIVA-Institute for the Small and Medium Valencian Enterprise, for the project OSC with references IMIDIC/2008/137, IMIDIC/2009/198, and IMIDIC/2010/175.Ruiz García, R.; Andrés Romano, C. (2011). Scheduling unrelated parallel machines with resource-assignable sequence-dependent setup times. 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Throughput Maximization in Multiprocessor Speed-Scaling

We are given a set of $n$ jobs that have to be executed on a set of $m$ speed-scalable machines that can vary their speeds dynamically using the energy model introduced in [Yao et al., FOCS'95]. Every job $j$ is characterized by its release date $r_j$, its deadline $d_j$, its processing volume $p_{i,j}$ if $j$ is executed on machine $i$ and its weight $w_j$. We are also given a budget of energy $E$ and our objective is to maximize the weighted throughput, i.e. the total weight of jobs that are completed between their respective release dates and deadlines. We propose a polynomial-time approximation algorithm where the preemption of the jobs is allowed but not their migration. Our algorithm uses a primal-dual approach on a linearized version of a convex program with linear constraints. Furthermore, we present two optimal algorithms for the non-preemptive case where the number of machines is bounded by a fixed constant. More specifically, we consider: {\em (a)} the case of identical processing volumes, i.e. $p_{i,j}=p$ for every $i$ and $j$, for which we present a polynomial-time algorithm for the unweighted version, which becomes a pseudopolynomial-time algorithm for the weighted throughput version, and {\em (b)} the case of agreeable instances, i.e. for which $r_i \le r_j$ if and only if $d_i \le d_j$, for which we present a pseudopolynomial-time algorithm. Both algorithms are based on a discretization of the problem and the use of dynamic programming

A survey of scheduling problems with setup times or costs

Author name used in this publication: C. T. NgAuthor name used in this publication: T. C. E. Cheng2007-2008 > Academic research: refereed > Publication in refereed journalAccepted ManuscriptPublishe

Scheduling job families on non identical parallel machines under Run-To-Run control constraints

International audienceNew challenges are arising when solving scheduling problems in semiconductor manufacturing plants (fabs) with Advanced Process Control (APC) constraints. In particular, a Run-To-Run (R2R) control loop for a given product on a machine requires to regularly collect data for the product on the machine. This paper aims at introducing and modeling a new scheduling problem in which there is a time constraint on jobs of the same product, i.e. the time interval between two consecutive jobs of the same product should be smaller than a given threshold. Two Mixed Integer Linear Programming models are presented for scheduling jobs on non-identical parallel machines with setup times

AN ALGORITHM TO SOLVE THE ASSOCIATIVE PARALLEL MACHINE SCHEDULING PROBLEM

Effective production scheduling is essential for improved performance. Scheduling strategies for various shop configurations and performance criteria have been widely studied. Scheduling in parallel machines (PM) is one among the many scheduling problems that has received considerable attention in the literature. An even more complex scheduling problem arises when there are several PM families and jobs are capable of being processed in more than one such family. This research addresses such a situation, which is defined as an Associative Parallel Machine scheduling (APMS) problem. This research presents the SAPT-II algorithm that solves a highly constrained APMS problem with the objective to minimize average flow time. A case example from a make-to-order industrial product manufacturer is used to illustrate the complexity of the problem and evaluate the effectiveness of the scheduling algorithm

The Integration of Process Planning and Shop Floor Scheduling in Small Batch Part Manufacturing

In this paper we explore possibilities to cut manufacturing leadtimes and to improve delivery performance in a small batch part manufacturing shop by integrating process planning and shop floor scheduling. Using a set of initial process plans (one for each order in the shop), we exploit a resource decomposition procedure to determine schedules to determine schedules which minimize the maximum lateness, given these process plans. If the resulting schedule is still unsatisfactory, a critical path analysis is performed to select jobs as candidates for alternative process plans. In this way, an excellent due date performance can be achieved, with a minimum of process planning and scheduling effort