Fabrication of micro separation column for miniaturized gas chromatography system

The emphasis of this work is on the fabrication of a micro separation column for applicaton in miniaturized gas chromatography system. The micro column was made by microchannels fabricated on the silicon wafer and sealed with a glass lid. The microchannels were fabricated by wet etching process and the channels were of length 2m , width 200 μm and depth 100 μm. The channels were closed by sealing with Pyrex glass. Silicide bonding was done for the bonding of silicon with Pyrex glass. Ti was used as an intermediate layer and bonded at a temperature of 377 ◦C and a force of 1kN. During bonding Ti forms an alloy with silicon and forms Titanium silicide and this helps to bond the glass wafer with silicom wafer with microchannels etched on it

Force-detected nuclear magnetic resonance: Recent advances and future challenges

We review recent efforts to detect small numbers of nuclear spins using magnetic resonance force microscopy. Magnetic resonance force microscopy (MRFM) is a scanning probe technique that relies on the mechanical measurement of the weak magnetic force between a microscopic magnet and the magnetic moments in a sample. Spurred by the recent progress in fabricating ultrasensitive force detectors, MRFM has rapidly improved its capability over the last decade. Today it boasts a spin sensitivity that surpasses conventional, inductive nuclear magnetic resonance detectors by about eight orders of magnitude. In this review we touch on the origins of this technique and focus on its recent application to nanoscale nuclear spin ensembles, in particular on the imaging of nanoscale objects with a three-dimensional (3D) spatial resolution better than 10 nm. We consider the experimental advances driving this work and highlight the underlying physical principles and limitations of the method. Finally, we discuss the challenges that must be met in order to advance the technique towards single nuclear spin sensitivity -- and perhaps -- to 3D microscopy of molecules with atomic resolution.Comment: 15 pages & 11 figure

A 25 micron-thin microscope for imaging upconverting nanoparticles with NIR-I and NIR-II illumination.

Rationale: Intraoperative visualization in small surgical cavities and hard-to-access areas are essential requirements for modern, minimally invasive surgeries and demand significant miniaturization. However, current optical imagers require multiple hard-to-miniaturize components including lenses, filters and optical fibers. These components restrict both the form-factor and maneuverability of these imagers, and imagers largely remain stand-alone devices with centimeter-scale dimensions. Methods: We have engineered INSITE (Immunotargeted Nanoparticle Single-Chip Imaging Technology), which integrates the unique optical properties of lanthanide-based alloyed upconverting nanoparticles (aUCNPs) with the time-resolved imaging of a 25-micron thin CMOS-based (complementary metal oxide semiconductor) imager. We have synthesized core/shell aUCNPs of different compositions and imaged their visible emission with INSITE under either NIR-I and NIR-II photoexcitation. We characterized aUCNP imaging with INSITE across both varying aUCNP composition and 980 nm and 1550 nm excitation wavelengths. To demonstrate clinical experimental validity, we also conducted an intratumoral injection into LNCaP prostate tumors in a male nude mouse that was subsequently excised and imaged with INSITE. Results: Under the low illumination fluences compatible with live animal imaging, we measure aUCNP radiative lifetimes of 600 μs - 1.3 ms, which provides strong signal for time-resolved INSITE imaging. Core/shell NaEr0.6Yb0.4F4 aUCNPs show the highest INSITE signal when illuminated at either 980 nm or 1550 nm, with signal from NIR-I excitation about an order of magnitude brighter than from NIR-II excitation. The 55 μm spatial resolution achievable with this approach is demonstrated through imaging of aUCNPs in PDMS (polydimethylsiloxane) micro-wells, showing resolution of micrometer-scale targets with single-pixel precision. INSITE imaging of intratumoral NaEr0.8Yb0.2F4 aUCNPs shows a signal-to-background ratio of 9, limited only by photodiode dark current and electronic noise. Conclusion: This work demonstrates INSITE imaging of aUCNPs in tumors, achieving an imaging platform that is thinned to just a 25 μm-thin, planar form-factor, with both NIR-I and NIR-II excitation. Based on a highly paralleled array structure INSITE is scalable, enabling direct coupling with a wide array of surgical and robotic tools for seamless integration with tissue actuation, resection or ablation

Scintillation particle detection based on microfluidics

A novel type of particle detector based on scintillation, with precise spatial resolution and high radiation hardness, is being studied. It consists of a single microfluidic channel filled with a liquid scintillator and is designed to define an array of scintillating waveguides each independently coupled to a photodetector. Prototype detectors built using an SU-8 epoxy resin have been tested with electrons from a radioactive source. The experimental results show a light yield compatible with the theoretical expectations and confirm the validity of the approach

Integrated Micro Gas Chromatographs with High-Flow Knudsen Pumps.

Environmental gas sensing typically requires both sensitivity and specificity; target vapor species must not only be detected and quantified, but also differentiated from interferents. This mission can be accomplished by micro gas chromatographs (μGCs), which allow preconcentration of samples and subsequent separation of complex vapor mixtures into individual constituents by their specific retention times. This thesis focuses on the system-level design, fabrication, and integration of μGCs, with the ultimate goal of fully microfabricated systems that can be easily manufactured and distributed to end-users. This thesis also explores the optimization of a micro gas pump – a critical μGC component, and generally recognized as a challenge for microsystems. Three generations of integrated µGC systems have been designed, fabricated, and evaluated. The iGC1 system demonstrates the feasibility of a low-cost three-mask fabrication approach for a µGC including a Knudsen pump, a preconcentrator, a separation column and a microdischarge-based detector, which are integrated in a 4-cc stack. The iGC2 system demonstrates a valveless µGC architecture, in which a bi-directional Knudsen pump provides reversible gas flow for (multi-stage) preconcentrators, which is essential for quantitative analysis. The iGC3 system replaces the microdischarge-based detectors in iGC1 and iGC2 with complementary capacitive detectors, facilitating a purely electronic interface for the fluidics. Additionally, it is compatible with the use of room air as the carrier gas. The quantitative analysis of 19 chemicals with concentration levels of well below 100 ppb is demonstrated, showing the promise of automated, continuous monitoring of indoor air pollutants. The pumps used in the iGCx systems are Knudsen pumps that use thermal transpiration provided by nanoporous media and have no moving parts. This thesis also describes an exploratory effort in which lithographically fabricated channels in silicon substrates provide the thermal transpiration. The Si-micromachined Knudsen pumps demonstrate >200 sccm flow rate. To increase the output pressure head, these pumps are arrayed in series, using both a stacked configuration and a planar one. The results show that the pressure and flow characteristics can be tailored over a wide performance range, extending the possible applications beyond µGC systems.PhDElectrical EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/113581/1/yutaoqin_1.pd

An amorphous silicon photodiode array for glass-based optical MEMS application

A highly sensitive photo-detector array deposited on a glass substrate with an optional integrated optical filter have been presented. The active element is a vertically integrated hydrogenated amorphous silicon photodiode featuring a dark current of less than 1e-10 A/cm2 for -3V polarization and a maximal quantum efficiency of 80% near 580 nm. The prototype was encapsulated and successfully tested optically. It has a fill factor of only 44% which, however, can be easily increased to 90% using flip-chip bonding to an integrated electronic circuit for signal conditioning. The sensor is biocompatible and can be integrated with other glass-based and glass compatible micro-fabricated devices such as optical, microfluidic, lab-on-a-chip, chemical and biological devices in which photo-detection is a desired feature. ©2009 IEEE

Development of a metallic magnetic calorimeter with integrated SQUID readout

This thesis describes the development of a high-resolution soft X-ray detector based on metallic magnetic calorimeters (MMCs). MMCs are cryogenic, energy dispersive particle detectors which consist of a particle absorber that is thermally coupled to a paramagnetic temperature sensor. The latter is placed in a weak magnetic field, hence exhibiting a temperature dependent magnetization M(T). Upon X-ray photon absorption, the rise of detector temperature causes a change of sensor magnetization, which is usually read out with a current-sensing dc-SQUID via a superconducting flux transformer. Here, an imperfect transformer matching, as well as a transformer intrinsic energy coupling losses, limit the achievable energy resolution. To challenge this limit, a novel integrated detector was developed, in which the temperature sensor is integrated into a custom-designed dc-SQUID to maximize signal coupling. A major challenge of this configuration is the Joule heating of the SQUID, since heating effects prevent cooling of the detector and thus limit its performance. For this reason, the developed 32 pixel detector makes use of a newly developed thermalization scheme for the SQUID’s shunt resistors, resulting in operation temperatures below 20 mK for the detector. With this kind of detector, a baseline energy resolution of dE = 1.3 eV, and dE = 1.8 eV at 5.9 keV was achieved