MEMS Accelerometers

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc

Reusable Reentry Satellite (RRS) system design study

The Reusable Reentry Satellite (RRS) is intended to provide investigators in several biological disciplines with a relatively inexpensive method to access space for up to 60 days with eventual recovery on Earth. The RRS will permit totally intact, relatively soft, recovery of the vehicle, system refurbishment, and reflight with new and varied payloads. The RRS is to be capable of three reflights per year over a 10-year program lifetime. The RRS vehicle will have a large and readily accessible volume near the vehicle center of gravity for the Payload Module (PM) containing the experiment hardware. The vehicle is configured to permit the experimenter late access to the PM prior to launch and rapid access following recovery. The RRS will operate in one of two modes: (1) as a free-flying spacecraft in orbit, and will be allowed to drift in attitude to provide an acceleration environment of less than 10(exp -5) g. the acceleration environment during orbital trim maneuvers will be less than 10(exp -3) g; and (2) as an artificial gravity system which spins at controlled rates to provide an artificial gravity of up to 1.5 Earth g. The RRS system will be designed to be rugged, easily maintained, and economically refurbishable for the next flight. Some systems may be designed to be replaced rather than refurbished, if cost effective and capable of meeting the specified turnaround time. The minimum time between recovery and reflight will be approximately 60 days. The PMs will be designed to be relatively autonomous, with experiments that require few commands and limited telemetry. Mass data storage will be accommodated in the PM. The hardware development and implementation phase is currently expected to start in 1991 with a first launch in late 1993

JPL Quarterly Technical Review, Volume 2, No. 1, April 1972

Mariner spacecraft equipment, propulsion systems, telemetry, and spacecraft trackin