Robust control framework for piezoelectric actuation systems in micro/nano manipulation

Micro/nano manipulation has been identified as one of the key enabling technologies for many emerging challenges. Within this scope, piezoelectric actuators have played major roles in achieving the required nano-resolution motion. This paper proposes a robust control framework for piezoelectric actuation systems to follow specified motion trajectories. The basic concept associated with this methodology lies in the specification of a target performance and the robust control scheme formulation for piezoelectric actuation systems to ensure the convergence of the position tracking error to zero. This control methodology is attractive as its implementation requires only the knowledge of the estimated system parameters and their corresponding bounds, including bound of hysteresis and external disturbances. Feasibility study of the framework for piezoelectric actuation systems in micro/nano manipulation is described. Simulation results validated the suitability of the proposed control approach

Robust motion tracking control of piezoelectric actuation systems

This paper proposes a robust control methodology for piezoelectric actuation systems to track specified motion trajectories. This is motivated by the search for an effective control strategy to deal with the problem of nonlinear behaviour in the piezoelectric actuation systems. The basic concept associated with this approach lies in the specification of a target performance and the formulation of a robust control scheme for the system to ensure the convergence of the position tracking error to zero in the presence of parametric uncertainties and hysteresis effect inclusive of other un-modelled disturbances. Stability of the control system is proven theoretically and the robust control methodology is demonstrated to possess a promising tracking ability through the control experiments. Implementation of the control law requires only a knowledge of the estimated parameters and their corresponding bounds as well as the bound of the hysteresis effect including disturbances. Being capable of handling uncertainties and disturbances, the robust control methodology is very attractive in the field of micro/nanomanipulation in which high-precision control applications could be realised

Robust Control Framework for Piezoelectric Actuation Systems in Micro/Nano Manipulation

Micro/nano manipulation has been identified as one of the key enabling technologies for many emerging challenges. Within this scope, piezoelectric actuators have played major roles in achieving the required nano-resolution motion. This paper proposes a robust control framework for piezoelectric actuation systems to follow specified motion trajectories. The basic concept associated with this methodology lies in the specification of a target performance and the robust control scheme formulation for piezoelectric actuation systems to ensure the convergence of the position tracking error to zero. This control methodology is attractive as its implementation requires only the knowledge of the estimated system parameters and their corresponding bounds, including bound of hysteresis and external disturbances. Feasibility study of the framework for piezoelectric actuation systems in micro/nano manipulation is described. Simulation results validated the suitability of the proposed control approach

Sliding-mode control of a flexure based mechanism using piezoelectric actuators

The position control of designed 3 PRR flexure based mechanism is examined in this paper. The aims of the work are to eliminate the parasitic motions of the stage, misalignments of the actuators, errors of manufacturing and hysteresis of the system by having a redundant mechanism with the implementation of a sliding mode control and a disturbance observe. x-y motion of the end-effector is measured by using a laser position sensor and the necessary references for the piezoelectric actuators are calculated using the pseudo inverse of the transformation matrix coming from the experimentally determined kinematics of the mechanism. The effect of the observer and closed loop control is presented by comparing the results with open loop control. The system is designed to be redundant to enhance the position control. In order to see the effects of the redundant system firstly the closed loop control for active 2 piezoelectric actuators experiments then for active 3 piezoelectric actuators experiments are presented. As a result, our redundant mechanism tracks the desired trajectory accurately and its workspace is bigger

Continuous time controller based on SMC and disturbance observer for piezoelectric actuators

Abstract – In this work, analog application for the Sliding Mode Control (SMC) to piezoelectric actuators (PEA) is presented. DSP application of the algorithm suffers from ADC and DAC conversions and mainly faces limitations in sampling time interval. Moreover piezoelectric actuators are known to have very large bandwidth close to the DSP operation frequency. Therefore, with the direct analog application, improvement of the performance and high frequency operation are expected. Design of an appropriate SMC together with a disturbance observer is suggested to have continuous control output and related experimental results for position tracking are presented with comparison of DSP and analog control application

Sliding mode based piezoelectric actuator control

In this paper a control of method for a piezoelectric stack actuator control is proposed. In addition briefly the usage of the same methods for estimation of external force acting to the actuator in contact with environment is discussed. The method uses sliding mode framework to design both the observer and the controller based on an electromechanical lumped model of the piezoelectric actuator. Furthermore, using a nonlinear differential equation the internal hysteresis disturbance is removed from the total disturbance in an attempt to estimate the external force acting on the actuator. It is then possible to use this external force estimate as a means of force control of the actuator. Simulation and experiments are compared for validating the disturbance and external force estimation technique. Some experiments that incorporate disturbance compensation in a closed-loop SMC control algorithm are also presented to prove the effectiveness of this method in producing high precision motion

Micro position control of a 3-RRR compliant mechanism

A 3-RRR compliant mechanism is designed to be used as a micro positioning stage. The stage displacements are analyzed by using structural FEA. However the experimental results for the manufactured mechanism are not compatible with the FEA which are mostly accepted as ideal while designing. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. The motion of the center is measured by using a laser position sensor and the necessary references for the piezoelectric actuators are calculated using the pseudo inverse of the transformation matrix coming from the experimentally determined kinematics of the mechanism. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has big errors in manufacturing, assembly etc

Micro position control of a designed 3-PRR compliant mechanism using experimental models

A new compliant stage based on 3-PRR kinematic structure is designed to be used as a planar micro positioner. The mechanism is actuated by using piezoelectric actuators and center position of the stage is measured using a dual laser position sensor. It's seen that manufactured mechanism has unpredictable motion errors due to manufacturing and assembly faults. Thus, sliding mode control with disturbance observer is chosen to be implemented as position control in x-y axes of the center of the mechanism. Instead of piezoelectric actuator models, experimental models are extracted for each actuation direction in order to be used as nominal plants for the disturbance observer. The position control results are compared with the previous position control using linear piezoelectric actuator models and it's seen that the implemented control methodology is better in terms of errors in x and y axes. Besides, the position errors are lowered down to ±0.06 microns, which is the accuracy of the dual laser position sensor