On chip optical sensing

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Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever

The principle, fabrication and characterization of a dielectric MEMS cantilever located a few 100 nm above a racetrack ring resonator are presented. After fabrication of the resonators on silicon-on-insulator (SOI) wafers in a foundry process, the cantilevers were integrated by surface micromachining techniques. Off-state deflections of the cantilevers have been optimized to appropriately position them near the evanescent field of the resonator. Using electrostatic actuation, moving the cantilevers into this evanescent field, the propagation properties of the ring waveguide are modulated. We demonstrate 122 pm tuning of the resonance wavelength of the optical ring resonator (in the optical C-band) without change of the optical quality factor, on application of 9 V to a 40 µm long cantilever. This compact integrated device can be used for tuning/switching a specific wavelength, with very little energy for operation and negligible cross talk with surrounding device

Real-time label-free biosensing with integrated planar waveguide ring resonators

We review the use of planar integrated optical waveguide ring resonators for label free bio-sensing and present recent results from two European biosensor collaborations: SABIO and InTopSens. Planar waveguide ring resonators are attractive for label-free biosensing due to their small footprint, high Q-factors, and compatibility with on-chip optics and microfluidics. This enables integrated sensor arrays for compact labs-on-chip. One application of label-free sensor arrays is for point-of-care medical diagnostics. Bringing such powerful tools to the single medical practitioner is an important step towards personalized medicine, but requires addressing a number of issues: improving limit of detection, managing the influence of temperature, parallelization of the measurement for higher throughput and on-chip referencing, efficient light-coupling strategies to simplify alignment, and packaging of the optical chip and integration with microfluidics. From the SABIO project we report refractive index measurement and label-free biosensing in an 8-channel slotwaveguide ring resonator sensor array, within a compact cartridge with integrated microfluidics. The sensors show a volume sensing detection limit of 5 × 10-6 RIU and a surface sensing detection limit of 0.9 pg/mm2. From the InTopSens project we report early results on silicon-on-insulator racetrack resonators

Ring-resonator-based wavelength filters

Microring resonators (MR) represent a class of filters with characteristics very similar to those of Fabry–Perot filters. However, they offer the advantage that the injected and reflected signals are separated in individual waveguides, and in addition, their design does not require any facets or gratings and is thus particularly simple. MRs evolved from the fields of fibre optic ring resonators and micron scale droplets. Their inherently small size (with typical diameters in the range between several to tens of micrometres), their filter characteristics and their potential for being used in complex and flexible configurations make these devices particularly attractive for integrated optics or VLSI photonics applications.\ud MRs for filter applications, delay lines, as add/drop multiplexers, and modulators will be covered in detail in this chapter, while other applications such as in optical sensing, in spectroscopy or for coherent light generation (MR lasers) are outside the scope of this chapter.\ud This chapter focuses primarily on 4-port microrings, while 2-port devices will play a minor role here and are covered in more detail in Chap. 9. The present chapter starts with design considerations, the functional behaviour, and key characteristics of a single microring resonator and continues with the design of cascaded MRs allowing the implementation of higher order filters. Finally, complex devices like add-drop filters, tuneable dispersion compensators, all-optical wavelength converters, and tuneable cross-connects are treated.\u

Optical resonators based on Bloch surface waves

A few recent works suggest the possibility of controlling light propagation at the interface of periodic multilayers supporting Bloch surface waves (BSWs), but optical resonators based on BSWs are yet to demonstrate. Here we discuss the feasibility of exploiting guided BSWs in a ring resonator configuration. In particular, we investigate the main issues related to the design of these structures, and we discuss about their limitations in terms of quality factors and dimensions. We believe these results might be useful for the development of a complete BSW-based platform for application ranging from optical sensing to the study of the light-matter interaction in micro and nano structures.Comment: 10 pages, 10 figures. To be published in JOSA

Technologies for single chip integrated optical gyroscopes

Optical gyroscopes are being employed for navigational purposes for decades now and have achieved comparable or better reliability and performance than rotor-based gyroscopes. Mechanical gyros are however generally bulky, heavy and consume more power which make them unsuitable for miniaturized applications such as cube satellites and drones etc. Therefore, much effort is being expended worldwide to fabricate optical gyros having tactical grade robustness and reliability, small size, weight, cost and power consumption with minimal sacrifice of sensitivity. Integrated optics is an obvious approach to achieving this. This work comprises detailed comparative analysis of different types and structures of integrated optical gyroscopes to find out the suitable option for applications which require a resolution of <10 o/h. Based on the numerical analysis, Add-drop ring resonator-based gyro is found to be a suitable structure for integration which has a predicted shot noise limited resolution of 27 o/h and 2.71 o/h for propagation losses of 0.1 dB/cm and 0.01 dB/cm respectively. An integrated gyro is composed of several optical components which include a laser, 3dB couplers, phase/frequency modulators, sensing cavity and photodetectors. This requires hybrid integration of multiple materials technologies and so choices about which component should be implemented in which technology. This project also undertakes theoretical optimization of few of the above-mentioned optical components in materials systems that might offer the most convenient/tolerant option, this including 3dB coupler, thermo-optic phase modulator and sensing cavity (resonator and waveguide loop). In particular, the sensing element requires very low propagation loss waveguides which can best be realised from Si3N4 or Ta2O5. The optimised Si3N4 or Ta2O5 waveguides however are not optimal for other functions and this is shown and alternatives explored where the Si3N4 or Ta2O5 can easily be co-integrated. The fabrication process of low loss Si3N4 and Ta2O5 waveguides are also reported in this thesis. Si3N4 films were grown by using low pressure chemical vapor deposition (LPCVD) technique. Dry etching of Si3N4 films have been optimized to produce smooth and vertical sidewalls. Experimental results predicted that the propagation loss of 0.009 dB/cm is achievable by using optimum waveguide dimensions and silica cladding with the relatively standard processes available within the Laser Physics Centre at the Australian National University. A CMOS back end of line compatible method was developed to deposit good quality Ta2O5 films and silica claddings through ion beam sputtering (IBS) method. Plasma etching of Ta2O5 waveguides has been demonstrated by using a gas combination of CHF3/SF6/Ar/O2. Oxygen was introduced into the chamber to produce non-vertical sidewalls, so the waveguides could be cladded without voids with IBS silica. Average propagation losses of 0.17 dB/cm were achieved from Ta2O5 waveguides which appeared after extensive investigation to be limited by the spatial inhomogeneity of the processing. Lastly, a detailed theoretical and experimental analysis was performed to find out the possible causes of the higher average propagation loss in Ta2O5 waveguides, some sections being observed with 0.02 dB/cm or lower losses