Alternative Lithographic Methods for Variable Aspect Ratio Vias

The foundation of semiconductor industry has historically been driven by scaling. Device size reduction is enabled by increased pattern density, enhancing functionality and effectively reducing cost per chip. Aggressive reductions in memory cell size have resulted in systems with diminishing area between parallel bit/word lines. This affords an even greater challenge in the patterning of contact level features that are inherently difficult to resolve because of their relatively small area, a product of their two domain critical dimension image. To accommodate these trends there has been a shift toward the implementation of elliptical contact features. This empowers designers to maximize the use of free space between bit/word lines and gate stacks while preserving contact area; effectively reducing the minor via axis dimension while maintaining a patternable threshold in increasingly dense circuitry. It is therefore critical to provide methods that enhance the resolving capacity of varying aspect ratio vias for implementation in electronic design systems. This work separately investigates two unique, non-traditional lithographic techniques in the integration of an optical vortex mask as well as a polymer assembly system as means to augment ellipticity while facilitating contact feature scaling. This document affords a fundamental overview of imaging theory, details previous literature as to the technological trends enabling the resolving of contact features and demonstrates simulated & empirical evidence that the described methods have great potential to extend the resolution of variable aspect ratio vias using lithographic technologies

Tunable Terahertz Metamaterials with Germanium Telluride Components

Terahertz (THz) technology is an emerging field with many exciting applications. THz waves can be used to locate explosives and illicit drugs in security applications, or DNA and other molecule resonances in medical applications. THz frequencies represent the next level of modern, high-speed computing, but they also can be used for covert battlefield communications links. Metamaterials are an integral part of THz technology because they can be used to create exotic material properties—permittivities and permeabilities—in a part of the frequency spectrum that is otherwise rather empty and passive. This work aims to acquire a fuller understanding of THz metamaterials in terms of background and theory, and then use this understanding to create a few novel, actively tunable structures using the phase-change material germanium telluride

Assessing the performance of Digital Micromirror Devices for use in space-based multi-object spectrometers

A current need in space-based instrumentation is a reconfigurable slit mask. Several techniques for slit masks have been employed for ground-based astronomical spectrographs. These ground-based instruments have used large discrete components, which are impractical for remote operation in space-based deployment. The Texas Instruments\u27 Digital Micromirror Device (DMD) was originally conceived purely for display purposes, but is a viable candidate to be use as a slit mask in a space-based multi-object spectrograph (MOS). The Integrated Circuit (IC) manufacturing industry has enabled the robust integration of both silicon transistors and Micro-Electrical Mechanical Systems (MEMS) optical components into a very reliable monolithic chip (the DMD). The focus of this work was in three areas that addressed the suitability of proposing DMDs for future space missions. The DMDs were optically characterized to assess their utility in a spectrograph. The DMDs were also cooled in a liquid nitrogen dewar to determine their minimum operating temperature. The low temperature tests indicated that the DMD can operate to temperatures as low as 130 K. In addition, several DMDs were irradiated with high-energy protons at the LBNL 88 Cyclotron to determine how robust the devices are to ionizing radiation (protons). The radiation testing results indicate that DMDs would survive medium to long duration space missions with full operability. Based on preliminary tests in these three areas, the DMD should be considered as an excellent candidate for deployment in future space missions

Index to NASA Tech Briefs, 1972

Abstracts of 1972 NASA Tech Briefs are presented. Four indexes are included: subject, personal author, originating center, and Tech Brief number

NASA Tech Briefs, May 1997

Topics covered include: Advanced Composites, Plastics and Metals; Electronic Components and Circuits; Electronic Systems; Physical Sciences; Materials; Computer Programs; Mechanics; Machinery/Automation; Manufacturing/Fabrication; Mathematics and Information Sciences; Life Sciences; Books and Reports