Physics and technologies of silicon LDMOSFET for radio frequency applications

This thesis is devoted to the investigation of devices and technologies of Lateral Double-Diffused- Metal-Oxide-Semiconductor-Field-Effect-Transistor for Radio Frequency (RP) applications. Theoretical analysis and extensive 2-D process and device simulation results are presented. Theoretical analysis and simulations are carried out on RESURF LDMOS in both bulk and SOI substrate in terms of breakdown characteristics, transconductance, on resistance and CV characteristics. Quasi-saturation is a common phenomenon in DMOS devices. In this work, the dependence of quasi-saturation current on device physical and geometrical parameters is investigated in SOI RP LDMOS. Physical insight is gained into quasi-saturation on SOI RP LDMOS with different top silicon thickness and the same drift dose. It reveals that the difference in thick and thin film SOI lies in the different potential drop in the drift region. The influence of RESURF effect on quasi-saturation is also presented. It is shown that quasi-saturation current level can be affected by RESURF due to its influence on the drift dose. The mechanism of self-heating is presented and the influence of top silicon thickness, buried oxide thickness, voltage bias is studied through simulations. The change of peak temperature and its location with bias is due to the shift of electric field with voltage bias. A back-etch structure and fabrication process have been proposed to achieve a superior thermal performance. The negative differential conductance is not present in the non-isothermal IV curves. The temperature rise in the back-etch structure is less than 114 of that in the bulk structure. An RP LDMOS with a step drift doping profile on SIMOX substrate is evaluated. The fabrication process for the drift formation is proposed. The presented results demonstrate that step drift device has higher breakdown voltage than the conventional uniformly doped (UD) device, which provides the possibility to integrate LDMOS with low voltage CMOS for 28V base station application. This structure also has the advantage of suppressed kink effect due to the reduced electric field within the drift region. The step drift structure also features lower capacitance, improved drain current saturation behaviour and reduced self-heating at class AB bias point. For the first time, a novel sandwich structure for lateral RF MOSFET has been analysed based on silicon-on-nothing (SON) technology. The influence of device parameters on BV, CV and thermal performance has been investigated. Partial SON structure is found preferable in terms of heat conduct ability. Comparison on the electrical and thermal performance is made between SON LDMOSFET and conventional SOI alternative with BV of 40V. It is found that SON structure shows improvement in output capacitance and substrate loss. However, the temperature rise in SON device is higher compared to SOI alternative. The performance of the proposed sandwich SON structure has also been investigated in 28V base station applications, which requires breakdown voltage of 80V

Carbon Nanotube Interconnects for End-of-Roadmap Semiconductor Technology Nodes

Advances in semiconductor technology due to aggressive downward scaling of on-chip feature sizes have led to rapid rises in resistivity and current density of interconnect conductors. As a result, current interconnect materials, Cu and W, are subject to performance and reliability constraints approaching or exceeding their physical limits. Therefore, alternative materials such as nanocarbons, metal silicides, and Ag nanowires are actively considered as potential replacements to meet such constraints. Among nanocarbons, carbon nanotube (CNT) is among the leading replacement candidate for on-chip interconnect vias due to its high aspect-ratio nanostructure and superior currentcarrying capacity to those of Cu, W, and other potential candidates. However, contact resistance of CNT with metal is a major bottleneck in device functionalization. To meet the challenge posed by contact resistance, several techniques are designed and implemented. First, the via fabrication and CNT growth processes are developed to increase the CNT packing density inside via and to ensure no CNT growth on via sidewalls. CNT vias with cross-sections down to 40 nm 40 nm are fabricated, which have linewidths similar to those used for on-chip interconnects in current integrated circuit manufacturing technology nodes. Then the via top contact is metallized to increase the total CNT area interfacing with the contact metal and to improve the contact quality and reproducibility. Current-voltage characteristics of individual fabricated CNT vias are measured using a nanoprober and contact resistance is extracted with a first-reported contact resistance extraction scheme for 40 nm linewidth. Based on results for 40 nm and 60 nm top-contact metallized CNT vias, we demonstrate that not only are their current-carrying capacities two orders of magnitude higher than their Cu and W counterparts, they are enhanced by reduced via resistance due to contact engineering. While the current-carrying capacities well exceed those projected for end-of-roadmap technology nodes, the via resistances remain a challenge to replace Cu and W, though our results suggest that further innovations in contact engineering could begin to overcome such challenge