Experimental investigation of the tip based micro/nano machining

Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5 μm/s and feed 0.06 μm, some more micro structures including stair, sinusoidal groove, Chinese character ‘田’, ‘TJU’ and Chinese panda have been fabricated on the silicon substrate

Probe system design for three dimensional micro/nano scratching machine

This paper presents the design and testing methodologies for a probe system used in a tip-based three dimensional micro/nano scratching machine. The probe system is one of the most important components of the scratching machine, including an electromagnetic device and a probe suspension mechanism. The electromagnetic device is used to generate electromagnetic force to drive the probe suspension mechanism, and further scratch the sample. The probe suspension mechanism is utilized to support the diamond probe and form the capacitor plates with the aluminum film. Both analytical modeling and finite element analysis are conducted to improve the static and dynamic characteristics of the proposed scratching machine. A prototype has been developed to validate the established design methodologies. A number of experimental tests have been conducted to examine the prototype performance. From the experimental results, it is noted that the developed probe system has a force resolution of 78.4 μN, a displacement resolution of 60 nm, and the first natural frequency of 465 Hz. This indicates that it can be used for the development of the three dimensional submicron or even nano scratching

Experimental assessment of thermal and rheological properties of coconut oil-silica as green additives in drilling performance based on minimum quantity of cutting fluids

Conventional metal working fluids are prepared from petroleum based mineral oils with toxic, carcinogenic, non- biodegradable and unsustainable additives, which can cause serious environmental contamination and health risks to operators. Formulations with non-toxic emulsifiers and natural additives such as vegetable oils are currently being considered for further development and use of non-toxic tribological products. This study is concerned with the thermal and flow properties of a cutting fluid (taladrine, T) mixed with a phase change material (PCM) coconut oil (CO) in a proportion of 1:9 (CO-0.1T) and hydrophilic silica in 0.01, 0.03 and 0.05 vol fractions. The thermal properties were evaluated by differential scanning calorimetry (DSC) and thermal conductivity measurements while the flow properties were assessed by viscosity temperature curves. The addition of solid particles has demonstrated an enhancement of the thermal conductivities with small differences in the latent heat. The microstructure of the suspensions was established from the DSC cooling dynamic ther- mogram and the rheological measurements. These results were confirmed by the images of optical polarized microscopy in which plate-like needles were observed. The suspension of 0.03 silica in CO-0.1T demonstrated an adequate gel strength and produced a reduction of 11 ◦C in drilling performance. A Minimum Quantity of Cutting Fluid (MQCF) of 2 g as an alternative for dry machining and flood cooling. It also prevented evaporative loss and removed metal chips, as a high viscosity complex fluid. In this work the use of phase change materials filled with solid particles as a way of sustainable eco-friendly toxic waste removal in drilling was justified.Funding for open access charge: Universidad de Málag

A Linear Multiplexed Electrospray Thin Film Deposition System

Liquid spray is essential to industries requiring processes such as spray coating, spray drying, spray pyrolysis, or spray cooling. This thesis reports the design, fabrication, and characterization of a thin film deposition system which utilizes a linear multiplexed electrospray (LINES) atomizer. First, a thorough review of the advantages and limitations of prior multiplexed electrospray systems leads to discussion of the design rationale for this work. Next, the line of charge model was extended to prescribe the operating conditions for the experiments and to estimate the spray profile. The spray profile was then simulated using a Lagrangian model and solved using a desktop supercomputer based on Graphics Processing Units (GPUs). The simulation was extended to estimate the droplet number density flux during deposition. Pure ethanol was electrosprayed in the cone-jet mode from a 51-nozzle aluminum LINES atomizer with less than 3% relative standard deviation in the D10 average droplet diameter as characterized using Phase Doppler Interferometry (PDI). Finally a 25-nozzle LINES was integrated into a thin film deposition system with a heated, motion controlled stage, to deposit TiO2 thin films onto silicon wafers from an ethanol based nanoparticle suspension. The resulting deposition pattern was analyzed using SEM, optical profilometry, and macro photography and compared with the numerical simulation results. The LINES tool developed here is a step forward to enabling the power of electrospray for industrial manufacturing applications in clean energy, health care, and electronic

A three-dimensional electrostatic actuator with a locking mechanism for a new generation of atom chips

A micromachined three-dimensional electrostatic actuator that is optimized for aligning and tuning optical microcavities on atom chips is presented. The design of the 3D actuator is outlined in detail, and its characteristics are verified by analytical calculations and finite element modelling. Furthermore, the fabrication process of the actuation device is described and preliminary fabrication results are shown. The actuation in the chip plane which is used for mirror positioning has a working envelope of 17.5 ?m. The design incorporates a unique locking mechanism which allows the out-of-plane actuation that is used for cavity tuning to be carried out once the in-plane actuation is completed. A maximum translation of 7 ?m can be achieved in the out-of-plane direction

Spray freeze drying of nanozirconia powders

Nanozirconia ceramics have great potential to be used in a range of applications from dental implants to petrochemical valves due to their enhanced mechanical properties and superior hydrothermal ageing resistance. Unlike conventional ceramic components that are normally produced in large quantities with low costs using various conventional dry forming or wet forming methods, industry scale processing of nanoceramics has not yet been achieved. Concentration and granulation of nanostructured 3 mol% yttria stabilised zirconia via a spray freeze drying (SFD) technique was investigated to determine whether large scale dry forming of nanoceramics would be possible. Commercial nanosuspension with a primary particle size of 16 nm was concentrated to 55 wt% solids content using an electrosteric dispersant, β-alanine, whilst retaining low viscosities of ~20 mPa s at a 200 s-1 shear rate. The nanosuspensions concentrated using the β-alanine also displayed good ageing resistance and it has been proven that a large scale vacuum assisted rotary evaporator can be used to perform concentration in industry. [Continues.

Understanding the Mechanism of Abrasive-Based Finishing Processes Using Mathematical Modeling and Numerical Simulation

Recent advances in technology and refinement of available computational resources paved the way for the extensive use of computers to model and simulate complex real-world problems difficult to solve analytically. The appeal of simulations lies in the ability to predict the significance of a change to the system under study. The simulated results can be of great benefit in predicting various behaviors, such as the wind pattern in a particular region, the ability of a material to withstand a dynamic load, or even the behavior of a workpiece under a particular type of machining. This paper deals with the mathematical modeling and simulation techniques used in abrasive-based machining processes such as abrasive flow machining (AFM), magnetic-based finishing processes, i.e., magnetic abrasive finishing (MAF) process, magnetorheological finishing (MRF) process, and ball-end type magnetorheological finishing process (BEMRF). The paper also aims to highlight the advances and obstacles associated with these techniques and their applications in flow machining. This study contributes the better understanding by examining the available modeling and simulation techniques such as Molecular Dynamic Simulation (MDS), Computational Fluid Dynamics (CFD), Finite Element Method (FEM), Discrete Element Method (DEM), Multivariable Regression Analysis (MVRA), Artificial Neural Network (ANN), Response Surface Analysis (RSA), Stochastic Modeling and Simulation by Data Dependent System (DDS). Among these methods, CFD and FEM can be performed with the available commercial software, while DEM and MDS performed using the computer programming-based platform, i.e., "LAMMPS Molecular Dynamics Simulator," or C, C++, or Python programming, and these methods seem more promising techniques for modeling and simulation of loose abrasive-based machining processes. The other four methods (MVRA, ANN, RSA, and DDS) are experimental and based on statistical approaches that can be used for mathematical modeling of loose abrasive-based machining processes. Additionally, it suggests areas for further investigation and offers a priceless bibliography of earlier studies on the modeling and simulation techniques for abrasive-based machining processes. Researchers studying mathematical modeling of various micro- and nanofinishing techniques for different applications may find this review article to be of great help

Design and Applications of Coordinate Measuring Machines

Coordinate measuring machines (CMMs) have been conventionally used in industry for 3-dimensional and form-error measurements of macro parts for many years. Ever since the first CMM, developed by Ferranti Co. in the late 1950s, they have been regarded as versatile measuring equipment, yet many CMMs on the market still have inherent systematic errors due to the violation of the Abbe Principle in its design. Current CMMs are only suitable for part tolerance above 10 μm. With the rapid advent of ultraprecision technology, multi-axis machining, and micro/nanotechnology over the past twenty years, new types of ultraprecision and micro/nao-CMMs are urgently needed in all aspects of society. This Special Issue accepted papers revealing novel designs and applications of CMMs, including structures, probes, miniaturization, measuring paths, accuracy enhancement, error compensation, etc. Detailed design principles in sciences, and technological applications in high-tech industries, were required for submission. Topics covered, but were not limited to, the following areas: 1. New types of CMMs, such as Abbe-free, multi-axis, cylindrical, parallel, etc. 2. New types of probes, such as touch-trigger, scanning, hybrid, non-contact, microscopic, etc. 3. New types of Micro/nano-CMMs. 4. New types of measuring path strategy, such as collision avoidance, free-form surface, aspheric surface, etc. 5. New types of error compensation strategy