A versatile and reconfigurable microassembly workstation

In this paper, a versatile and reconfigurable microassembly workstation designed and realized as a research tool for investigation of the problems in microassembly and micromanipulation processes and recent developments on mechanical and control structure of the system with respect to the previous workstation are presented. These developments include: (i) addition of a manipulator system to realize more complicated assembly and manipulation tasks, (ii) addition of extra DOF for the vision system and sample holder stages in order to make the system more versatile (iii) a new optical microscope as the vision system in order to visualize the microworld and determine the position and orientation of micro components to be assembled or manipulated, (iv) a modular control system hardware which allows handling more DOF. In addition several experiments using the workstation are presented in different modes of operation like tele-operated, semiautomated and fully automated by means of visual based schemes

Motion planning and assembly for microassembly workstation

In general, mechatronics systems have no standard operating system that could be used for planning and control when these complex devices are running. The goal of this paper is to formulate a work platform that can be used as a method for obtaining precision in the manipulation of micro-entities using micro-scale manipulation tools for microsystem applications. This paper provide groundwork for motion planning and assembly of the Micro-Assembly Workstation (MAW) manipulation system. To demonstrate the feasibility of the idea, the paper implements some of the motion planning algorithms; it investigates the performance of the conventional Euclidean distance algorithm (EDA), artificial potential fields’ algorithm, and A* algorithm when implemented on a virtual space

Cyber-Physical Systems for Micro-/Nano-assembly Operations: a Survey

Abstract Purpose of Review Latest requirements of the global market force manufacturing systems to a change for a new production paradigm (Industry 4.0). Cyber-Physical Systems (CPS) appear as a solution to be deployed in different manufacturing fields, especially those with high added value and technological complexity, high product variants, and short time to market. In this sense, this paper aims at reviewing the introduction level of CPS technologies in micro/nano-manufacturing and how these technologies could cope with these challenging manufacturing requirements. Recent Findings The introduction of CPS is still in its infancy on many industrial applications, but it actually demonstrates its potential to support future manufacturing paradigm. However, only few research works in micro/nano-manufacturing considered CPS frameworks, since the concept barely appeared a decade ago. Summary Some contributions have revealed the potential of CPS technologies to improve manufacturing performance which may be scaled to the micro/nano-manufacturing. IoT-based frameworks with VR/AR technologies allow distributed and collaborative systems, or agent-based architectures with advance algorithm implementations that improve the flexibility and performance of micro-/nano-assembly operations. Future research of CPS in micro-/nano-assembly operations should be followed by more studies of its technical deployment showing its implications under other perspectives, i.e. sustainable, economic, and social point of views, to take full advance of all its features

Modeling, simulation and control of microrobots for the microfactory.

Future assembly technologies will involve higher levels of automation in order to satisfy increased microscale or nanoscale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to the microelectronics and MEMS industries, but less so in nanotechnology. With the boom of nanotechnology since the 1990s, newly designed products with new materials, coatings, and nanoparticles are gradually entering everyone’s lives, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated with top-down manipulation requiring precision. However, bottom-up manufacturing methods have certain limitations, such as components needing to have predefined shapes and surface coatings, and the number of assembly components being limited to very few. For example, in the case of self-assembly of nano-cubes with an origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nanoscale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nanopositioners. To fulfill the microfactory vision, numerous challenges related to design, power, control, and nanoscale task completion by these microrobots must be overcome. In this work, we study two classes of microrobots for the microfactory: stationary microrobots and mobile microrobots. For the stationary microrobots in our microfactory application, we have designed and modeled two different types of microrobots, the AFAM (Articulated Four Axes Microrobot) and the SolarPede. The AFAM is a millimeter-size robotic arm working as a nanomanipulator for nanoparticles with four degrees of freedom, while the SolarPede is a light-powered centimeter-size robotic conveyor in the microfactory. For mobile microrobots, we have introduced the world’s first laser-driven micrometer-size locomotor in dry environments, called ChevBot to prove the concept of the motion mechanism. The ChevBot is fabricated using MEMS technology in the cleanroom, following a microassembly step. We showed that it can perform locomotion with pulsed laser energy on a dry surface. Based on the knowledge gained with the ChevBot, we refined tits fabrication process to remove the assembly step and increase its reliability. We designed and fabricated a steerable microrobot, the SerpenBot, in order to achieve controllable behavior with the guidance of a laser beam. Through modeling and experimental study of the characteristics of this type of microrobot, we proposed and validated a new type of deep learning controller, the PID-Bayes neural network controller. The experiments showed that the SerpenBot can achieve closed-loop autonomous operation on a dry substrate

Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Robust trajectory tracking and visual servoing schemes for MEMS manipulation.

International audienceThis paper focuses on the automation of manipulation and assembly of microcomponents using visual feedback controls. Trajectory planning and tracking methods are proposed in order to avoid occlusions during microparts manipulation and to increase the success rate of pick-and-place manipulation cycles. The methods proposed are validated using a five degree-of-freedom (DOF) microrobotic cell including a 3 DOF mobile platform, a 2 DOF micromanipulator, a gripping system and a top-view imaging system. Promising results on accuracy and repeatability of microballs manipulation tasks are obtained and presented

Design, evaluation, and control of nexus: a multiscale additive manufacturing platform with integrated 3D printing and robotic assembly.

Additive manufacturing (AM) technology is an emerging approach to creating three-dimensional (3D) objects and has seen numerous applications in medical implants, transportation, aerospace, energy, consumer products, etc. Compared with manufacturing by forming and machining, additive manufacturing techniques provide more rapid, economical, efficient, reliable, and complex manufacturing processes. However, additive manufacturing also has limitations on print strength and dimensional tolerance, while traditional additive manufacturing hardware platforms for 3D printing have limited flexibility. In particular, part geometry and materials are limited to most 3D printing hardware. In addition, for multiscale and complex products, samples must be printed, fabricated, and transferred among different additive manufacturing platforms in different locations, which leads to high cost, long process time, and low yield of products. This thesis investigates methods to design, evaluate, and control the NeXus, which is a novel custom robotic platform for multiscale additive manufacturing with integrated 3D printing and robotic assembly. NeXus can be used to prototype miniature devices and systems, such as wearable MEMS sensor fabrics, microrobots for wafer-scale microfactories, tactile robot skins, next generation energy storage (solar cells), nanostructure plasmonic devices, and biosensors. The NeXus has the flexibility to fixture, position, transport, and assemble components across a wide spectrum of length scales (Macro-Meso-Micro-Nano, 1m to 100nm) and provides unparalleled additive process capabilities such as 3D printing through both aerosol jetting and ultrasonic bonding and forming, thin-film photonic sintering, fiber loom weaving, and in-situ Micro-Electro-Mechanical System (MEMS) packaging and interconnect formation. The NeXus system has a footprint of around 4m x 3.5m x 2.4m (X-Y-Z) and includes two industrial robotic arms, precision positioners, multiple manipulation tools, and additive manufacturing processes and packaging capabilities. The design of the NeXus platform adopted the Lean Robotic Micromanufacturing (LRM) design principles and simulation tools to mitigate development risks. The NeXus has more than 50 degrees of freedom (DOF) from different instruments, precise evaluation of the custom robots and positioners is indispensable before employing them in complex and multiscale applications. The integration and control of multi-functional instruments is also a challenge in the NeXus system due to different communication protocols and compatibility. Thus, the NeXus system is controlled by National Instruments (NI) LabVIEW real-time operating system (RTOS) with NI PXI controller and a LabVIEW State Machine User Interface (SMUI) and was programmed considering the synchronization of various instruments and sequencing of additive manufacturing processes for different tasks. The operation sequences of each robot along with relevant tools must be organized in safe mode to avoid crashes and damage to tools during robots’ motions. This thesis also describes two demonstrators that are realized by the NeXus system in detail: skin tactile sensor arrays and electronic textiles. The fabrication process of the skin tactile sensor uses the automated manufacturing line in the NeXus with pattern design, precise calibration, synchronization of an Aerosol Jet printer, and a custom positioner. The fabrication process for electronic textiles is a combination of MEMS fabrication techniques in the cleanroom and the collaboration of multiple NeXus robots including two industrial robotic arms and a custom high-precision positioner for the deterministic alignment process

Precise motion control of a piezoelectric microgripper for microspectrometer assembly.

International audienceThe Fourier Transform (FTIR) microspectrometer discussed in this paper is an example of a complex Micro-Opto-Electro-Mechanical System (MOEMS) configured as an optical bench on a chip. It is an important benchmark application for microtechnology due to increased demands for the use of miniature wavelength detection instruments in bio, nano and material science. This device can be manufactured using automated microassembly and precision alignment of hybrid silicon and glass components, and in particular, of a micro-beamsplitter cube along 3 rotational degrees of freedom. In this paper, a piezoelectric microgripper with four degrees of freedom was attached to a precision robot in ordre to enhance its dexterity and align the beamsplitter to arcsecond angular tolerance. The modeling and control of the microgripper and the alignment algorithm utilizing a novel spot-Jacobian servoing technique are discussed. Experimental results obtained during joint on-going work in Texas and in France are presented demonstrating the advantage of using the microgripper for optical alignment of the microspectrometer

Planning and control for microassembly of structures composed of stress-engineered MEMS microrobots

We present control strategies that implement planar microassembly using groups of stress-engineered MEMS microrobots (MicroStressBots) controlled through a single global control signal. The global control signal couples the motion of the devices, causing the system to be highly underactuated. In order for the robots to assemble into arbitrary planar shapes despite the high degree of underactuation, it is desirable that each robot be independently maneuverable (independently controllable). To achieve independent control, we fabricated robots that behave (move) differently from one another in response to the same global control signal. We harnessed this differentiation to develop assembly control strategies, where the assembly goal is a desired geometric shape that can be obtained by connecting the chassis of individual robots. We derived and experimentally tested assembly plans that command some of the robots to make progress toward the goal, while other robots are constrained to remain in small circular trajectories (orbits) until it is their turn to move into the goal shape. Our control strategies were tested on systems of fabricated MicroStressBots. The robots are 240–280 µm × 60 µm × 7–20 µm in size and move simultaneously within a single operating environment. We demonstrated the feasibility of our control scheme by accurately assembling five different types of planar microstructures