Vacuum mechatronics

The discipline of vacuum mechatronics is defined as the design and development of vacuum-compatible computer-controlled mechanisms for manipulating, sensing and testing in a vacuum environment. The importance of vacuum mechatronics is growing with an increased application of vacuum in space studies and in manufacturing for material processing, medicine, microelectronics, emission studies, lyophylisation, freeze drying and packaging. The quickly developing field of vacuum mechatronics will also be the driving force for the realization of an advanced era of totally enclosed clean manufacturing cells. High technology manufacturing has increasingly demanding requirements for precision manipulation, in situ process monitoring and contamination-free environments. To remove the contamination problems associated with human workers, the tendency in many manufacturing processes is to move towards total automation. This will become a requirement in the near future for e.g., microelectronics manufacturing. Automation in ultra-clean manufacturing environments is evolving into the concept of self-contained and fully enclosed manufacturing. A Self Contained Automated Robotic Factory (SCARF) is being developed as a flexible research facility for totally enclosed manufacturing. The construction and successful operation of a SCARF will provide a novel, flexible, self-contained, clean, vacuum manufacturing environment. SCARF also requires very high reliability and intelligent control. The trends in vacuum mechatronics and some of the key research issues are reviewed

International Symposium on Magnetic Suspension Technology, Part 1

The goal of the symposium was to examine the state of technology of all areas of magnetic suspension and to review related recent developments in sensors and controls approaches, superconducting magnet technology, and design/implementation practices. The symposium included 17 technical sessions in which 55 papers were presented. The technical session covered the areas of bearings, sensors and controls, microgravity and vibration isolation, superconductivity, manufacturing applications, wind tunnel magnetic suspension systems, magnetically levitated trains (MAGLEV), space applications, and large gap magnetic suspension systems

Design, Optimization, and Experimental Characterization of a Novel Magnetically Actuated Finger Micromanipulator

The ability of external magnetic fields to precisely control micromanipulator systems has received a great deal of attention from researchers in recent years due to its off-board power source. As these micromanipulators provide frictionless motion, and precise motion control, they have promising potential applications in many fields. Conversely, major drawbacks of electromagnetic micromanipulators, include a limited motion range compared to the micromanipulator volume, the inability to handle heavy payloads, and the need for a large drive unit compared to the size of the levitated object, and finally, a low ratio of the generated magnetic force to the micromanipulator weight. To overcome these limitations, we designed a novel electromagnetic finger micromanipulator that was adapted from the well-known spherical robot. The design and optimization procedures for building a three Degree of Freedoms (DOF) electromagnetic finger micromanipulator are firstly introduced. This finger micromanipulator has many potential applications, such as cell manipulation, and pick and place operations. The system consists of two main subsystems: a magnetic actuator, and an electromagnetic end-effector that is connected to the magnetic actuator by a needle. The magnetic actuator consists of four permanent magnets and four electromagnetic coils that work together to guide the micromanipulator finger in the xz plane. The electromagnetic end-effector consists of a rod shape permanent magnet that is aligned along the y axis and surrounded by an electromagnetic coil. The optimal configuration that maximizes the micromanipulator actuation force, and a closed form solution for micromanipulator magnetic actuation force are presented. The model is verified by measuring the interaction force between an electromagnet and a permanent magnet experimentally, and using Finite Element Methods (FEM) analysis. The results show an agreement between the model, the experiment, and the FEM results. The error difference between the FEM, experimental, and model data was 0.05 N. The micromanipulator can be remotely operated by transferring magnetic energy from outside, which means there is no mechanical contact between the actuator and the micromanipulator. Moreover, three control algorithms are designed in order to compute control input currents that are able to control the position of the end-effector in the x, y, and z axes. The proposed controllers are: PID controller, state-feedback controller, and adaptive controller. The experimental results show that the micromanipulator is able to track the desired trajectory with a steady-state error less than 10 µm for a payload free condition. Finally, the ability of the micromanipulator to pick-and-place unknown payloads is demonstrated. To achieve this objective, a robust model reference adaptive controller (MRAC) using the MIT rule for an adaptive mechanism to guide the micromanipulator in the workspace is implemented. The performance of the MRAC is compared with a standard PID controller and state-feedback controller. For the payload free condition, the experimental results show the ability of the micromanipulator to follow a desired motion trajectory in all control strategies with a root mean square error less than 0.2 mm. However, while there is payload variation, the PID controller response yields a non smooth motion with a large overshoot and undershoot. Similarly, the state-feedback controller suffers from variability of dynamics and disturbances due to the payload variation, which yields to non-smooth motion and large overshoot. The micromanipulator motion under the MRAC control scheme conversely follows the desired motion trajectory with the same accuracy. It is found that the micromanipulator can handle payloads up to 75 grams and it has a motion range of ∓ 15 mm in all axes

Universal Framework for Linear Motors and Multi-Axis Stages with Magnetic Levitation

This dissertation presents the electromagnetic design and experimental validation of a new framework for linear permanent-magnet (PM) machines with targeted applications in precision motion control. In this framework, a single forcer, which can generate two independent force components in two perpendicular directions, consists of a stationary Halbach magnet array and two Lorentz coils with a phase difference of 90° or 270°. Any number of coil pairs can be attached on the same moving frame to work with a common magnet array or matrix, forming a linear or planar PM motor. Key advantages of this framework are simple force calculation, a linear system model, and a reduced number of coils for force generation and allocation in multi-axis positioners. The proposed framework effectively allows for decoupled dynamics, simplifying the linear controller design and real-time implementation. To experimentally verify the theoretical framework proposed herein, a high-precision 6-axis magnetically levitated (maglev) stage is designed, constructed, and controlled. The development of this 6-axis positioning system is an integrated work, including magnetic-force calculation and analysis, mechanical design, fabrication, assembly, system modeling, system identification, and control system design. The mechanical components of the system include a stationary superimposed Halbach magnet matrix, which was previously built, and a moving platen with a plastic frame, four sets of 2-phase coils, and two precision mirrors. For position measurements, there are three laser interferometers for in-plane position measurements, three laser displacement sensors for out-of-plane position sensing, and two 2-channel Hall-effect sensors for the position feedback to initialize the position and expand the travel ranges of the platen in the XY plane. The positioning resolutions of 10 nm in the xy plane and in the vertical axis are demonstrated. In out-of-plane rotation about the two horizontal axes, experimental results show the unprecedented positioning resolution of 0.1 μrad. The maximum travel range in X and Y with nanoscale positioning resolution is 56 mm × 35 mm, limited by the lengths of the precision mirrors attached to the platen. With the trapezoidal-velocity input shaping, achieved performance specifications include the maximum acceleration and velocity of 0.6 m/s2 and 0.06 m/s, respectively, in translations in the horizontal plane. With the platen supported by the air bearings, the maximum acceleration and speed are 1.5 m/s2 and 0.15 m/s, respectively. A load test is performed with the platen carrying a load of 0.54 kg, which is 72% of its total mass, magnetically levitated in 6- axis closed-loop control. Experimental results show the reduced coupled dynamics between different axes in magnetic levitation. This framework of 2-phase Lorentz coils and linear Halbach arrays is highly applicable in precision-positioning linear motors and multi-axis stages, steppers, scanners, nano-scale manipulation and alignment systems, and vibration isolators

Bilateral Macro-Micro Teleoperation Using A Magnetic Actuation Mechanism

In recent years, there has been increasing interest in the advancement of microrobotic systems in micro-engineering, micro-fabrication, biological research and biomedical applications. Untethered magnetic-based microrobotic systems are one of the most widely developing groups of microrobotic systems that have been extensively explored for biological and biomedical micro-manipulations. These systems show promise in resolving problems related to on-board power supply limitations as well as mechanical contact sealing and lubrication. In this thesis, a high precision magnetic untethered microrobotic system is demonstrated for micro-handling tasks. A key aspect of the proposed platform concerns the integration of magnetic levitation technology and bilateral macro-micro teleoperation for human intervention to avoid imperceptible failures in poorly observed micro-domain environments. The developed platform has three basic subsystems: a magnetic untethered microrobotic system (MUMS), a haptic device, and a scaled bilateral teleoperation system. The MUMS produces and regulates a magnetic field for non-contact propelling of a microrobot. In order to achieve a controlled motion of the magnetically levitated microrobot, a mathematical force model of the magnetic propulsion mechanism is developed and used to design various control systems. In the workspace of 30 × 32 × 32 mm 3, both PID and LQG\LTR controllers perform similarly the position accuracy of 10 µ m in a vertical direction and 2 µ m in a horizontal motion. The MUMS is equipped with an eddy-current damper to enhance its inherent damping factor in the microrobot's horizontal motions. This paper deals with the modeling and analysis of an eddy-current damper that is formed by a conductive plate placed below the levitated microrobot to overcome inherent dynamical vibrations and improve motion precision. The modeling of eddy-current distribution in the conductive plate is investigated by solving the diffusion equation for vector magnetic potential, and an analytical expression for the horizontal damping force is presented and experimentally validated. It is demonstrated that eddy-current damping is a crucial technique for increasing the damping coefficient in a non-contact way and for improving levitation performance. The damping can be widely used in applications of magnetic actuation systems in micro-manipulation and micro-fabrication. To determine the position of the microrobot in a workspace, the MUMS uses high-accuracy laser sensors. However, laser positioning techniques can only be used in highly transparent environments. A novel technique based on real-time magnetic flux measurement has been proposed for the position estimation of the microrobot in case of laser beam blockage, whereby a combination of Hall-effect sensors is employed to find the microrobot's position in free motion by using the produced magnetic flux. In free motion, the microrobot tends to move toward the horizontally zero magnetic field gradient, Bmax location. As another key feature of the magnetic flux measurement, it was realized that the applied force from the environment to the microrobot can be estimated as linearly proportional to the distance of the microrobot from the Bmax location. The developed micro-domain force estimation method is verified experimentally with an accuracy of 1.27 µ N. A bilateral macro-micro teleoperation technique is employed in the MUMS for the telepresence of a human operator in the task environment. A gain-switching position-position teleoperation scheme is employed and a human operator controls the motion of the microrobot via a master manipulator for dexterous micro-manipulation tasks. The operator can sense a strong force during micro-domain tasks if the microrobot encounters a stiff environment, and the effect of hard contact is fed back to the operator's hand. The position-position method works for both free motion and hard contact. However, to enhance the feeling of a micro-domain environment in the human operator, the scaled force must be transferred to a human, thereby realizing a direct-force-reflection bilateral teleoperation. Additionally, a human-assisted virtual reality interface is developed to improve a human operator's skills in using the haptic-enabled platform, before carrying out an actual dexterous task.1 yea

Optimal control for a prototype of an active magnetic bearing system

First applications of the electromagnetic suspension principle have been in experimental physics, and suggestions to use this principle for suspending transportation vehicles for high-speed trains go back to 1937. There are various ways of designing magnetic suspensions for a contact free support, the magnetic bearing is just one of them [BCK+09]. Most bearings are used in applications involving rotation. Nowadays, the use of contact bearings solves problems in the consumer products, industrial machinery, or transportation equipment (cars, trucks, bicycles, etc). Bearings allow the transmition of power from a motor to moving parts of a rotating machine [M+92]. For a variety of rotating machines, it would be advantageous to replace the mechanical bearings for magnetic bearings, which rely on magnetic elds to perform the same functions of levitation, centering, and thrust control of the rotating parts as those performed by a mechanical bearing. An advantage of the magnetic bearings (controlled or not) against purely mechanical is that magnetic bearings are contactless [BHP12]. As a consequence these properties allow novel constructions, high speeds with the possibility of active vibration control, operation with no mechanical wear, less maintenance and therefore lower costs. On the other hand, the complexity of the active (controlled) and passive (not controlled) magnetic bearings requires more knowledge from mechanics, electronics and control [LJKA06]. The passive magnetic bearing (PMB) presents low power loss because of the absence of current, lack of active control ability and low damping sti ness [FM01, SH08]. On the other hand, active magnetic bearing (AMB) has better control ability and high sti ness, whereas it su ers from high power loss due to the biased current [JJYX09]. Scientists of the 1930s began investigating active systems using electromagnets for high-speed ultracentrifuges. However, not controlled magnetic bearings are physically unstable and controlled systems only provide proper sti ness and damping through sophisticated controllers and algorithms. This is precisely why, until the last decade, magnetic bearings did not become a practical alternative to rolling element bearings. Today, magnetic bearing technology has become viable because of advances in microprocessing controllers that allow for con dent and robust active control [CJM04]. Magnetic bearings operate contactlessly and are therefore free of lubricant and wear. They are largely immune to heat, cold and aggressive substances and are operational in vacuum. Because of their low energy losses they are suited for applications with high rotation speeds. The forces act through an air gap, which allows magnetic suspension through hermetic encapsulations [Bet00].Tesi

Design, Implementation and Control of a Magnetic Levitation Device

Magnetic levitation technology has shown a great deal of promise for micromanipulation tasks. Due to the lack of mechanical contact, magnetic levitation systems are free of problems caused by friction, wear, sealing and lubrication. These advantages have made magnetic levitation systems a great candidate for clean room applications. In this thesis, a new large gap magnetic levitation system is designed, developed and successfully tested. The system is capable of levitating a 6.5(gr) permanent magnet in 3D space with an air gap of approximately 50(cm) with the traveling range of 20x20x30 cubic millimeters. The overall positioning accuracy of the system is 60 micro meters. With the aid of finite elements method, an optimal geometry for the magnetic stator is proposed. Also, an energy optimization approach is utilized in the design of the electromagnets. In order to facilitate the design of various controllers for the system, a mathematical model of the magnetic force experienced by the levitated object is obtained. The dynamic magnetic force model is determined experimentally using frequency response system identification. The response of the system components including the power amplifiers, and position measurement system are also considered in the development of the force model. The force model is then employed in the controller design for the magnetic levitation device. Through a modular approach, the controller design for the 3D positioning system is started with the controller design for the vertical direction, i.e. z, and then followed by the controller design in the horizontal directions, i.e. x and y. For the vertical direction, several controllers such as PID, feed forward and feedback linearization are designed and their performances are compared. Also a control command conditioning method is introduced as a solution to increase the control performance and the results of the proposed controller are compared with the other designs. Experimental results showed that for the magnetic levitation system, the feedback linearization controller has the shortest settling time and is capable of reducing the positioning error to RMS value of 11.56μm. The force model was also utilized in the design of a model reference adaptive feedback linearization (MRAFL) controller for the z direction. For this case, the levitated object is a small microrobot equipped with a remote controlled gripper weighting approximately 28(gr). Experimental results showed that the MRAFL controller enables the micro-robot to pick up and transport a payload as heavy as 30% of its own weight without a considerable effect on its positioning accuracy. In the presence of the payload, the MRAFL controller resulted in a RMS positioning error of 8μm compared with 27.9μm of the regular feedback linearization controller. For the horizontal position control of the system, a mathematical formula for distributing the electric currents to the multiple electromagnets of the system was proposed and a PID control approach was implemented to control the position of the levitated object in the xy-plane. The control system was experimentally tested in tracking circular and spiral trajectories with overall positioning accuracy of 60μm. Also, a new mathematical approach is presented for the prediction of magnetic field distribution in the horizontal direction. The proposed approach is named the pivot point method and is capable of predicting the two dimensional position of the levitated object in a given vertical plane for an arbitrary current distribution in the electromagnets of the levitation system. Experimental results showed that the proposed method is capable of predicting the location of the levitated object with less than 10% error

Modeling and Control of a Magnetically Levitated Microrobotic System

Magnetically levitated microrobotic systems have shown a great deal of promise for micromanipulation tasks. A new large-gap magnetic suspension system has recently been developed at the University of Waterloo in order to develop microrobotic systems for various applications. In order to achieve motion with the system, a model is needed in order to facilitate the design of various aspects of the system, such as the microrobot and the controller. In order to derive equations of motion for the system attempts were made to characterize the force produced by the magnetic drive unit in terms of a simple analytical equation. The force produced by the magnetic drive unit was estimated with the aid of a finite element model. The derived equations were able to predict the general trend of the force curves, and with sufficient parameter tweaking the error between the force estimated by the finite element model and the force estimated by the analytical equation could be minimized. System models describing the motion of the system in the horizontal and vertical directions are identified and compared to the actual system response. The vertical position response is identified through a least squares parameter estimate of the closed loop response combined with a partial reconstruction of the root locus diagram, with the model structure based on the known dynamics of a simplified form of magnetic levitation. This model was able to provide a reasonable prediction of the system response for a variety of PID controllers under a variety of input conditions. The horizontal models are identified using a least-squares parameter estimate of the open loop characteristics of the system. The horizontal models are able to provide a reasonable prediction of the system response under PD and PID control. Full spatial motion of a microrobot prototype is demonstrated over a working range of 20x22x30 mm3, with PID controller parameters and reference trajectories adjusted to minimize disturbances. The RMS error at steady state is on the order of 0. 020 mm for vertical positioning and 0. 008 mm for horizontal positioning. A linear quadratic regulator implemented for vertical position control was able to reduce the vertical position RMS error to 0. 014 mm