Computational and experimental development of ultra-low power and sensitive micro-electro-thermal gas sensor

In this research a state-of-the-art micro-thermal conductivity detector is developed based on MEMS technology. Its efficient design include a miniaturized 100×2 µm bridge from doped polysilicon, suspended 10 µm away from the single crystalline silicon substrate through a thermally grown silicon dioxide sacrificial layer. The microbridge is covered by 200 nm silicon nitride layer to provide more life time. Analytical models were developed that describe the relationship between the sensor response and ambient gas material properties. To obtain local temperature distribution and accurate predictions of the sensor response, a computational three dimensional simulation based on real geometry and minimal simplifications was prepared. It was able to handle steady-state and transient state, include multiple physics such as flow, heat transfer, electrical current and thermal stresses. Two new methods of measurement for micro TCD were developed; a time resolved method based on transient response of the detector to a step current pulse was introduced that correlates time constant of the response to the concentration of gas mixture. The other method is based on AC excitation of the micro detector; the amplitude and phase of the third harmonic of the resulting output signal is related to gas composition. Finally, the developed micro-sensor was packaged and tested in a GC system and was compared against conventional and complex FID for the detection of a mixture of VOCs. Moreover compact electronics and telemetry modules were developed that allow for highly portable applications including microGC utilization in the field.Ph.D

A three-axis accelerometer for measuring heart wall motion

This thesis presents the work carried out in the design, simulation, fabrication and testing of miniaturised three-axis accelerometers. The work was carried out at the Faculty of Science and Engineering at Vestfold University College (Tønsberg, Norway), the MIcroSystems Engineering Centre (MISEC) at Heriot-Watt University and in collaboration with the Interventional Centre at Rikshospitalet University Hospital (Oslo, Norway). The accelerometers presented in this thesis were produced to be stitched to the surface of human hearts. In doing so they are used to measure the heart wall motion of patients that have just undergone heart bypass surgery. Results from studies carried out are presented and prove the concept of using such sensors for the detection of problems that can lead to the failure of heart bypasses. These studies were made possible using commercially available MEMS (MicroElectroMechanical Systems) three-axis accelerometers. However, the overall size of these sensors does not meet the requirements deemed necessary by the medical team (2(W) 2(H) 5(L) mm3) and fabrication activities were necessary to produce custom-made sensors. Design verification and performance modelling were carried out using Finite Element Analysis (FEA) and these results are presented alongside relevant analytical calculations. For fabrication, accelerometer designs were submitted to three foundry processes during the course of the work. The designs utilise the piezoresistive effect for the acceleration sensing and fabrication was carried out by bulk micromachining. Results of the characterisaton of the sensors are presente

Design of MEMS Sensor System to Measure Spinal Fusion

Being able to determine the formation of a solid, spinal fusion after lumbar surgery continues to be one of the most difficult issues facing spinal surgeons today. Patients are fitted with a spinal brace for three to twelve months after surgery, even though the spinal implant provides internal fixation. Such a brace is not only inconvenient, as it completely immobilizes the patient, but not in the patient’s long term interest. Studies have shown that immobility leads to muscle atrophy in the spine; therefore, the best option is to minimize the amount of time for bracing. Currently, surgeons rely on radiographs to view the fusion mass. Fusions are inherently difficult to view, as the spine’s transverse processes and the spinal hardware lie within the fusion region. Thus, surgeons use their best judgment and their professional experience to decide when a fusion is solid and the patient may remove their brace. According to one study, fusion actually occurs between eight and twelve weeks in sheep, as much as eight weeks before it was indicated in their radiographs. Radiographs are delayed because they can only determine fusion when the trabecular bone of the fusion has mineralized, which occurs after the fusion -2- agglomeration has reached full size and stabilization and can bear mechanical load. Immobilization causes another cost to the patient and society. While wearing the brace, the patient cannot return to work, drive, or perform everyday activities that constitute a good quality of life. Long term disability insurance costs are thus dramatically increases, making spinal fusion surgery the most costly orthopaedic procedure. With over 300,000 predicted spinal surgeries in 2005 in a market calculated at $2.4 to$3.1 billion dollars, and at an average cost of $34,000 per surgery, plus$20,000 for professional surgeon fees, and because worker disability payments are averaging 1% of the gross domestic product, major steps need to be taken to reduce overall costs where possible. Serious progress toward the goal of controlling costs could be made by reducing the cost of disability, mainly by allowing patients to return to work sooner. Because of the importance of allowing early patient mobility to avoid muscle atrophy, and because of the equal importance of reducing costs of spinal fusion, the goal of this research is to develop a more accurate and earlier means of detecting spinal fusion. This study has developed a better diagnostic tool for surgeons based on strain to address the problems associated with the current method of bracing and radiographs. As it is known from the literature that the amount of time for fusion is significantly less than it is indicated by radiographs, and patient outcomes would be -3- improved if a superior diagnostic method were developed, this study has designed and submitted a patent application to measure strain in vivo using a capacitive sensor and a transponder to send the signal via radio frequency to an external receiver. A handheld unit would be brought into proximity of the sensor and an initial strain level would be recorded. Then, during routine office visits, the handheld sensor would again be brought into proximity of the sensor to get additional strain level recordings. Over time, the level of strain should decrease and eventually plateau at a lower level. The hypothesis was that this would occur within eight to twelve weeks following surgery, at which time the fusion could be proclaimed solid and the patient’s external bracing removed. The report outlines the evolution of a design to measure the onset of spinal fusion using a battery-free, interdigitated capacitive strain sensor that will use supplied radio frequency power from an external, handheld receiver to activate the sensor. The output data will be subsequently analyzed on a computer

Design, Fabrication, and Characterization of a Rotary Variable-Capacitance Micromotor Supported on Microball Bearings

The design, fabrication, and characterization of a rotary micromotor supported on microball bearings are reported in this dissertation. This is the first demonstration of a rotary micromachine with a robust mechanical support provided by microball-bearing technology. One key challenge in the realization of a reliable micromachine, which is successfully addressed in this work, is the development of a bearing that would result in high stability, low friction, and high resistance to wear. A six-phase, rotary, bottom-drive, variable-capacitance micromotor is designed and simulated using the finite element method. The geometry of the micromotor is optimized based on the simulation results. The development of the rotary machine is based on studies of fabrication and testing of linear micromotors. The stator and rotor are fabricated separately on silicon substrates and assembled with the stainless steel microballs. Three layers of low-k benzocyclobutene (BCB) polymer, two layers of gold, and a silicon microball housing are fabricated on the stator. The BCB dielectric film, compared to conventional silicon dioxide insulating films, reduces the parasitic capacitance between electrodes and the stator substrate. The microball housing and salient structures (poles) are etched in the rotor and are coated with a silicon carbide film to reduce friction. A characterization methodology is developed to measure and extract the angular displacement, velocity, acceleration, torque, mechanical power, coefficient of friction, and frictional force through non-contact techniques. A top angular velocity of 517 rpm corresponding to the linear tip velocity of 324 mm/s is measured. This is 44 times higher than the velocity achieved for linear micromotors supported on microball bearings. Measurement of the transient response of the rotor indicated that the torque is 5.620.5 micro N-m which is comparable to finite element simulation results predicting 6.75 micro N-m. Such a robust rotary micromotor can be used in developing micropumps which are highly demanded microsystems for fuel delivery, drug delivery, cooling, and vacuum applications. Micromotors can also be employed in micro scale surgery, assembly, propulsion, and actuation

Selected Papers from the 5th International Electronic Conference on Sensors and Applications

This Special Issue comprises selected papers from the proceedings of the 5th International Electronic Conference on Sensors and Applications, held on 15–30 November 2018, on sciforum.net, an online platform for hosting scholarly e-conferences and discussion groups. In this 5th edition of the electronic conference, contributors were invited to provide papers and presentations from the field of sensors and applications at large, resulting in a wide variety of excellent submissions and topic areas. Papers which attracted the most interest on the web or that provided a particularly innovative contribution were selected for publication in this collection. These peer-reviewed papers are published with the aim of rapid and wide dissemination of research results, developments, and applications. We hope this conference series will grow rapidly in the future and become recognized as a new way and venue by which to (electronically) present new developments related to the field of sensors and their applications

DEVELOPMENT OF A SIMPLIFIED, MASS PRODUCIBLE HYBRIDIZED AMBIENT, LOW FREQUENCY, LOW INTENSITY VIBRATION ENERGY SCAVENGER (HALF-LIVES)

Scavenging energy from environmental sources is an active area of research to enable remote sensing and microsystems applications. Furthermore, as energy demands soar, there is a significant need to explore new sources and curb waste. Vibration energy scavenging is one environmental source for remote applications and a candidate for recouping energy wasted by mechanical sources that can be harnessed to monitor and optimize operation of critical infrastructure (e.g. Smart Grid). Current vibration scavengers are limited by volume and ancillary requirements for operation such as control circuitry overhead and battery sources. This dissertation, for the first time, reports a mass producible hybrid energy scavenger system that employs both piezoelectric and electrostatic transduction on a common MEMS device. The piezoelectric component provides an inherent feedback signal and pre-charge source that enables electrostatic scavenging operation while the electrostatic device provides the proof mass that enables low frequency operation. The piezoelectric beam forms the spring of the resonant mass-spring transducer for converting vibration excitation into an AC electrical output. A serially poled, composite shim, piezoelectric bimorph produces the highest output rectified voltage of over 3.3V and power output of 145uW using ¼ g vibration acceleration at 120Hz. Considering solely the volume of the piezoelectric beam and tungsten proof mass, the volume is 0.054cm3, resulting in a power density of 2.68mW/cm3. Incorporation of a simple parallel plate structure that provides the proof mass for low frequency resonant operation in addition to cogeneration via electrostatic energy scavenging provides a 19.82 to 35.29 percent increase in voltage beyond the piezoelectric generated DC rails. This corresponds to approximately 2.1nW additional power from the electrostatic scavenger component and demonstrates the first instance of hybrid energy scavenging using both piezoelectric and synchronous electrostatic transduction. Furthermore, it provides a complete system architecture and development platform for additional enhancements that will enable in excess of 100uW additional power from the electrostatic scavenger

Energy: A continuing bibliography with indexes, issue 39

This bibliography lists 1377 reports, articles and other documents introduced into the NASA scientific and technical information system from July 1, 1983 through September 30, 1983

Summary of flat-plate solar array project documentation: Abstracts of published documents, 1975-1986, revision 1

Abstracts of final reports, or the latest quarterly or annual, of the Flat-Plate Solar Array (FSA) Project Contractor of Jet Propulsion Laboratory (JPL) in-house activities are presented. Also presented is a list of proceedings and publications, by author, of work connected with the project. The aim of the program has been to stimulate the development of technology that will enable the private sector to manufacture and widely use photovoltaic systems for the generation of electricity in residential, commercial, industrial, and Government applications at a cost per watt that is competitive with utility generated power. FSA Project activities have included the sponsoring of research and development efforts in silicon refinement processes, advanced silicon sheet growth techniques, higher efficiency solar cells, solar cell/module fabrication processes, encapsulation, module/array engineering and reliability, and economic analyses

A thin monocrystalline diaphragm pressure sensor using silicon-on-insulator technology.

The sensors market is huge and growing annually, of this a large sector is pressure sensors. With increasing demands on performance there remains a need for ultraminiature, high performance pressure sensors, particularly for medicai applications. To address this a novel capacitive pressure sensor consisting of an array of parallel connected diaphragms has been designed and fabricated from SIMOX substrates. The benefits of this include single crystal silicon diaphragms, small, well controlled dimensions, single sided processing and the opportunity for electronics integration. Theoretical modelling of this structure predicts a high sensitivity and low stress device with opportunities for scaling to suit alternative applications. A novel, process technology was developed to achieve the required structure with the inclusion of procedures to address the specific issues relating to the SIMOX material. The sensor was fully characterised and the results demonstrated high performance compared with similar reported devices. Alternative structures such as cantilevers, bridges and resonators were fabricated as a demonstrative tool to show the feasibility of this technology in a wider field of applications