Performance Analysis of MEMS Based Oscillator for High Frequency Wireless Communication Systems

The frequency oscillator is a basic component found in many electrical, electronic, and communications circuits and systems. Oscillators come in a variety of shapes and sizes, depending on the frequency range employed in a given application. Some applications need oscillators that generate low frequencies and other applications need oscillators that generate extremely high and high frequencies. As a result of the expansion and speed of modern technologies, new oscillators appeared that operating at extremely high frequencies. Most wireless communication systems are constrained in their performance by the accuracy and stability of the reference frequency. Because of its compatibility with silicon, micro-electro-mechanical system (MEMS) is the preferred technology for circuit integration and power reduction. MEMS are a rapidly evolving area of advanced microelectronics. The integration of electrical and mechanical components at the micro size is referred to as a MEMS. MEMS based oscillators have demonstrated tremendous high frequency application potential in recent years. This is owing to their great characteristics such as small size, integration of CMOS IC technology, high frequency-quality factor product, low power consumption, and cheap batch manufacturing cost. This paper's primary objective is to describe the performance of MEMS oscillator technology in high-frequency applications, as well as to discuss the challenges of developing a new MEMS oscillator capable of operating at gigahertz frequencies

Data acquisition techniques based on frequency-encoding applied to capacitive MEMS microphones

Mención Internacional en el título de doctorThis thesis focuses on the development of capacitive sensor readout circuits and data converters based on frequency-encoding. This research has been motivated by the needs of consumer electronics industry, which constantly demands more compact readout circuit for MEMS microphones and other sensors. Nowadays, data acquisition is mainly based on encoding signals in voltage or current domains, which is becoming more challenging in modern deep submicron CMOS technologies. Frequency-encoding is an emerging signal processing technique based on encoding signals in the frequency domain. The key advantage of this approach is that systems can be implemented using mostly-digital circuitry, which benefits from CMOS technology scaling. Frequencyencoding can be used to build phase referenced integrators, which can replace classical integrators (such as switched-capacitor based integrators) in the implementation of efficient analog-to-digital converters and sensor interfaces. The core of the phase referenced integrators studied in this thesis consists of the combination of different oscillator topologies with counters and highly-digital circuitry. This work addresses two related problems: the development of capacitive MEMS sensor readout circuits based on frequency-encoding, and the design and implementation of compact oscillator-based data converters for audio applications. In the first problem, the target is the integration of the MEMS sensor into an oscillator circuit, making the oscillation frequency dependent on the sensor capacitance. This way, the sound can be digitized by measuring the oscillation frequency, using digital circuitry. However, a MEMS microphone is a complex structure on which several parasitic effects can influence the operation of the oscillator. This work presents a feasibility analysis of the integration of a MEMS microphone into different oscillator topologies. The conclusion of this study is that the parasitics of the MEMS limit the performance of the microphone, making it inefficient. In contrast, replacing conventional ADCs with frequency-encoding based ADCs has proven a very efficient solution, which motivates the next problem. In the second problem, the focus is on the development of high-order oscillator-based Sigma-Delta modulators. Firstly, the equivalence between classical integrators and phase referenced integrators has been studied, followed by an overview of state-of-art oscillator-based converters. Then, a procedure to replace classical integrators by phase referenced integrators is presented, including a design example of a second-order oscillator based Sigma-Delta modulator. Subsequently, the main circuit impairments that limit the performance of this kind of implementations, such as phase noise, jitter or metastability, are described. This thesis also presents a methodology to evaluate the impact of phase noise and distortion in oscillator-based systems. The proposed method is based on periodic steady-state analysis, which allows the rapid estimation of the system dynamic range without resorting to transient simulations. In addition, a novel technique to analyze the impact of clock jitter in Sigma-Delta modulators is described. Two integrated circuits have been implemented in 0.13 μm CMOS technology to demonstrate the feasibility of high-order oscillator-based Sigma-Delta modulators. Both chips have been designed to feature secondorder noise shaping using only oscillators and digital circuitry. The first testchip shows a malfunction in the digital circuitry due to the complexity of the multi-bit counters. The second chip, implemented using single-bit counters for simplicity, shows second-order noise shaping and reaches 103 dB-A of dynamic range in the audio bandwidth, occupying only 0.04 mm2.Esta tesis se centra en el desarrollo de conversores de datos e interfaces para sensores capacitivos basados en codificación en frecuencia. Esta investigación está motivada por las necesidades de la industria, que constantemente demanda reducir el tamaño de este tipo de circuitos. Hoy en día, la adquisición de datos está basada principalmente en la codificación de señales en tensión o en corriente. Sin embargo, la implementación de este tipo de soluciones en tecnologías CMOS nanométricas presenta varias dificultades. La codificación de frecuencia es una técnica emergente en el procesado de señales basada en codificar señales en el dominio de la frecuencia. La principal ventaja de esta alternativa es que los sistemas pueden implementarse usando circuitos mayoritariamente digitales, los cuales se benefician de los avances de la tecnología CMOS. La codificación en frecuencia puede emplearse para construir integradores referidos a la fase, que pueden reemplazar a los integradores clásicos (como los basados en capacidades conmutadas) en la implementación de conversores analógico-digital e interfaces de sensores. Los integradores referidos a la fase estudiados en esta tesis consisten en la combinación de diferentes topologías de osciladores con contadores y circuitos principalmente digitales. Este trabajo aborda dos cuestiones relacionadas: el desarrollo de circuitos de lectura para sensores MEMS capacitivos basados en codificación temporal, y el diseño e implementación de conversores de datos compactos para aplicaciones de audio basados en osciladores. En el primer caso, el objetivo es la integración de un sensor MEMS en un oscilador, haciendo que la frecuencia de oscilación depe capacidad del sensor. De esta forma, el sonido puede ser digitalizado midiendo la frecuencia de oscilación, lo cual puede realizarse usando circuitos en su mayor parte digitales. Sin embargo, un micrófono MEMS es una estructura compleja en la que múltiples efectos parasíticos pueden alterar el correcto funcionamiento del oscilador. Este trabajo presenta un análisis de la viabilidad de integrar un micrófono MEMS en diferentes topologías de oscilador. La conclusión de este estudio es que los parasíticos del MEMS limitan el rendimiento del micrófono, causando que esta solución no sea eficiente. En cambio, la implementación de conversores analógico-digitales basados en codificación en frecuencia ha demostrado ser una alternativa muy eficiente, lo cual motiva el estudio del siguiente problema. La segunda cuestión está centrada en el desarrollo de moduladores Sigma-Delta de alto orden basados en osciladores. En primer lugar se ha estudiado la equivalencia entre los integradores clásicos y los integradores referidos a la fase, seguido de una descripción de los conversores basados en osciladores publicados en los últimos años. A continuación se presenta un procedimiento para reemplazar integradores clásicos por integradores referidos a la fase, incluyendo un ejemplo de diseño de un modulador Sigma-Delta de segundo orden basado en osciladores. Posteriormente se describen los principales problemas que limitan el rendimiento de este tipo de sistemas, como el ruido de fase, el jitter o la metaestabilidad. Esta tesis también presenta un nuevo método para evaluar el impacto del ruido de fase y de la distorsión en sistemas basados en osciladores. El método propuesto está basado en simulaciones PSS, las cuales permiten la rápida estimación del rango dinámico del sistema sin necesidad de recurrir a simulaciones temporales. Además, este trabajo describe una nueva técnica para analizar el impacto del jitter de reloj en moduladores Sigma-Delta. En esta tesis se han implementado dos circuitos integrados en tecnología CMOS de 0.13 μm, con el fin de demostrar la viabilidad de los moduladores Sigma-Delta de alto orden basados en osciladores. Ambos chips han sido diseñados para producir conformación espectral de ruido de segundo orden, usando únicamente osciladores y circuitos mayoritariamente digitales. El primer chip ha mostrado un error en el funcionamiento de los circuitos digitales debido a la complejidad de las estructuras multi-bit utilizadas. El segundo chip, implementado usando contadores de un solo bit con el fin de simplificar el sistema, consigue conformación espectral de ruido de segundo orden y alcanza 103 dB-A de rango dinámico en el ancho de banda del audio, ocupando solo 0.04 mm2.Programa Oficial de Doctorado en Ingeniería Eléctrica, Electrónica y AutomáticaPresidente: Georges G.E. Gielen.- Secretario: José Manuel de la Rosa.- Vocal: Ana Rus

Ultra-Low Power Wake Up Receiver For Medical Implant Communications Service Transceiver

This thesis explores the specific requirements and challenges for the design of a dedicated wake-up receiver for medical implant communication services equipped with a novel “uncertain-IF†architecture combined with a high – Q filtering MEMS resonator and a free running CMOS ring oscillator as the RF LO. The receiver prototype, implements an IBM 0.18μm mixed-signal 7ML RF CMOS technology and achieves a sensitivity of -62 dBm at 404MHz while consuming \u3c100 μW from a 1 V supply

An analytical formulation for phase noise in MEMS oscillators.

In recent years, there has been much interest in the design of low-noise MEMS oscillators. This paper presents a new analytical formulation for noise in a MEMS oscillator encompassing essential resonator and amplifier nonlinearities. The analytical expression for oscillator noise is derived by solving a second-order nonlinear stochastic differential equation. This approach is applied to noise modeling of an electrostatically addressed MEMS resonator-based square-wave oscillator in which the resonator and oscillator circuit nonlinearities are integrated into a single modeling framework. By considering the resulting amplitude and phase relations, we derive additional noise terms resulting from resonator nonlinearities. The phase diffusion of an oscillator is studied and the phase diffusion coefficient is proposed as a metric for noise optimization. The proposed nonlinear phase noise model provides analytical insight into the underlying physics and a pathway toward the design optimization for low-noise MEMS oscillators.The authors would like to thank the UK-Indian Education and Research Initiative (grant SA06-250) and the Cambridge Trusts for funding support.This is the author accepted manuscript. The final version is available from IEEE via http://dx.doi.org/10.1109/TUFFC.2014.00651

RF MEMS reference oscillators platform for wireless communications

A complete platform for RF MEMS reference oscillator is built to replace bulky quartz from mobile devices, thus reducing size and cost. The design targets LTE transceivers. A low phase noise 76.8 MHz reference oscillator is designed using material temperature compensated AlN-on-silicon resonator. The thesis proposes a system combining piezoelectric resonator with low loading CMOS cross coupled series resonance oscillator to reach state-of-the-art LTE phase noise specifications. The designed resonator is a two port fundamental width extensional mode resonator. The resonator characterized by high unloaded quality factor in vacuum is designed with low temperature coefficient of frequency (TCF) using as compensation material which enhances the TCF from - 3000 ppm to 105 ppm across temperature ranges of -40˚C to 85˚C. By using a series resonant CMOS oscillator, phase noise of -123 dBc/Hz at 1 kHz, and -162 dBc/Hz at 1MHz offset is achieved. The oscillator’s integrated RMS jitter is 106 fs (10 kHz–20 MHz), consuming 850 μA, with startup time is 250μs, achieving a Figure-of-merit (FOM) of 216 dB. Electronic frequency compensation is presented to further enhance the frequency stability of the oscillator. Initial frequency offset of 8000 ppm and temperature drift errors are combined and further addressed electronically. A simple digital compensation circuitry generates a compensation word as an input to 21 bit MASH 1 -1-1 sigma delta modulator incorporated in RF LTE fractional N-PLL for frequency compensation. Temperature is sensed using low power BJT band-gap front end circuitry with 12 bit temperature to digital converter characterized by a resolution of 0.075˚C. The smart temperature sensor consumes only 4.6 μA. 700 MHz band LTE signal proved to have the stringent phase noise and frequency resolution specifications among all LTE bands. For this band, the achieved jitter value is 1.29 ps and the output frequency stability is 0.5 ppm over temperature ranges from -40˚C to 85˚C. The system is built on 32nm CMOS technology using 1.8V IO device

Design and implementation of a low-power hybrid capacitive MEMS oscillator

This paper reports on the design and implementation of a low power MEMS oscillator based on capacitively transduced silicon micromachined resonators. The analysis shows how design parameters of MEMS resonator impact on the power requirement of the oscillator, particularly with a view towards informing the impact of device and interface parasitics. The analysis is based on resonators fabricated in a 2-μm gap SOI-MEMS foundry process. The sustaining circuit, which is based on a Pierce topology, is fabricated in a standard 0.35 μm process. An automatic gain control (AGC) is adopted to suppress the mechanical non-linearity so as to improve oscillator frequency stability. The 110-kHz MEMS and CMOS dies are assembled within a standard ceramic package and electrically integrated through wire bonds. The oscillator core consumes 400 nA (900 nA with parasitic readout loading) at 1.2-V dc supply while demonstrating a frequency stability of less than 0.5 ppm. The work provides a thorough analysis and design guidelines for both MEMS and CMOS circuit design with a view towards minimizing overall power consumption. The implications of the results reported in this paper are towards enabling a new class of low power resonant MEMS sensors that utilize the oscillator as a front-end building block

Um amplificador de transimpedância de ganho variável para aplicação em osciladores baseados em MEMS

Orientador: José Alexandre DinizDissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Elétrica e de ComputaçãoResumo: Um amplificador de transimpedância (TIA) de ganho variável é apresentado. Implementado em tecnologia 0,18 'mi'm, o projeto relatado possui a finalidade de prover um amplificador de sustentação para osciladores baseados em ressonadores do tipo MEMS (Micro-Electro-Mechanical System). Entre outros, as peculiaridades de projeto envolvem um desafiante compromisso entre Ganho, Largura de Banda, Ruído e Consumo de potência. Sendo assim, o amplificador foi implementado através do cascateamento de quatro estágios de ganho similares, lançando-se mão de realimentação do tipo shunt-shunt para diminuir as impedâncias de entrada e saída. Através do emprego de um estágio de ganho variável, uma alta faixa dinâmica de ganho é alcançada (53 dB), com um ganho máximo de transimpedância de 118 dB'ômega'...Observação: O resumo, na íntegra, poderá ser visualizado no texto completo da tese digitalAbstract: A variable gain Transimpedance Amplifier (TIA) is presented. Realized in 0.18 'mi'm technology, this amplifier was conceived with the purpose of providing oscillation sustaining for Micro-Electro-Mechanical System (MEMS) based oscillators. Facing a quite challenging trade-off between Gain, Bandwidth, Noise and Power consumption, the TIA was implemented through the cascade of four similar gain stages, with the application of shunt-shunt feedback to lower both input and output resistances. With the employment of a variable-gain stage, this TIA presents a large gain tunability of 53 dB, with a also large maximum transimpedance gain of 118 dB'omega'...Note: The complete abstract is available with the full electronic documentMestradoEletrônica, Microeletrônica e OptoeletrônicaMestre em Engenharia Elétric

A comprehensive high-level model for CMOS-MEMS resonators

2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.This paper presents a behavioral modeling technique for CMOS microelectromechanical systems (MEMS) microresonators that enables simulation of an MEMS resonator model in Analog Hardware Description Language format within a system-level circuit simulation. A 100-kHz CMOS-MEMS resonant pressure sensor has been modeled into Verilog-A code and successfully simulated within Cadence framework. Analysis has shown that simulation results of the reported model are in agreement with the device characterization results. As an application of the proposed methodology, simulation and results of the model together with an integrated monolithic low-noise amplifier is exemplified for detecting the position change of the resonator.Peer ReviewedPostprint (author's final draft