Filter Design Considerations for High Performance Continuous-Time Low-Pass Sigma-Delta ADC

Continuous-time filters are critical components in the implementation of large bandwidth, high frequency, and high resolution continuous-time (CT) sigma-delta (ΣΔ) analog-to-digital converters (ADCs). The loop filter defines the noise-transfer function (NTF) and hence the quantization noise-shaping behavior of the ΣΔ modulator, and becomes the most critical performance determining part in ΣΔ ADC. This thesis work presents the design considerations for the loop filter in low-pass CT ΣΔ ADC with 12-bits resolution in 25MHz bandwidth and low power consumption using 0.18μm CMOS technology. Continuous-time filters are more suitable than discrete-time filters due to relaxed amplifier bandwidth requirements for high frequency ΣΔ ADCs. A fifth-order low-pass filter with cut-off frequency of 25 MHz was designed to meet the dynamic range requirement of the ADC. An active RC topology was chosen for the implementation of the loop filter, which can provide high dynamic range required by the ΣΔ ADC. The design of a summing amplifier and a novel method for adjusting the group delay in the fast path provided by a secondary feedback DAC of the ΣΔ ADC are presented in detail. The ADC was fabricated using Jazz 0.18μm CMOS technology. The implementation issues of OTAs with high-linearity and low-noise performance suitable for the broadband ADC applications are also analyzed in this work. Important design equations pertaining to the linearity and noise performance of the Gm-C biquad filters are presented. A Gm-C biquad with 100MHz center frequency and quality factor 10 was designed as a prototype to confirm with the theoretical design equations. Transistor level circuit implementation of all the analog modules was completed in a standard 0.18μm CMOS process

Contribution to the design of continuous -time Sigma - Delta Modulators based on time delay elements

The research carried out in this thesis is focused in the development of a new class of data converters for digital radio. There are two main architectures for communication receivers which perform a digital demodulation. One of them is based on analog demodulation to the base band and digitization of the I/Q components. Another option is to digitize the band pass signal at the output of the IF stage using a bandpass Sigma-Delta modulator. Bandpass Sigma- Delta modulators can be implemented with discrete-time circuits, using switched capacitors or continuous-time circuits. The main innovation introduced in this work is the use of passive transmission lines in the loop filter of a bandpass continuous-time Sigma-Delta modulator instead of the conventional solution with gm-C or LC resonators. As long as transmission lines are used as replacement of a LC resonator in RF technology, it seems compelling that transmission lines could improve bandpass continuous-time Sigma-Delta modulators. The analysis of a Sigma- Delta modulator using distributed resonators has led to a completely new family of Sigma- Delta modulators which possess properties inherited both from continuous-time and discretetime Sigma-Delta modulators. In this thesis we present the basic theory and the practical design trade-offs of this new family of Sigma-Delta modulators. Three demonstration chips have been implemented to validate the theoretical developments. The first two are a proof of concept of the application of transmission lines to build lowpass and bandpass modulators. The third chip summarizes all the contributions of the thesis. It consists of a transmission line Sigma-Delta modulator which combines subsampling techniques, a mismatch insensitive circuitry and a quadrature architecture to implement the IF to digital stage of a receiver

Design of Analog & Mixed Signal Circuits in Continuous-Time Sigma-Delta Modulators for System-on-Chip applications

Software-defined radio receivers (SDRs) have become popular to accommodate multi-standard wireless services using a single chip-set solution in mobile telecommunication systems. In SDRs, the signal is down-converted to an intermediate frequency and then digitalized. This approach relaxes the specifications for most of the analog front-end building blocks by performing most of the signal processing in the digital domain. However, since the analog-to-digital converter (ADC) is located as close as possible to the antenna in SDR architectures, the ADC specification requirements are very stringent because a large amount of interference signals are present at the ADC input due to the removal of filtering blocks, which particularly affects the dynamic range (DR) specification. Sigma-delta (ΣΔ) ADCs have several benefits such as low implementation cost, especially when the architecture contains mostly digital circuits. Furthermore, continuous-time (CT) ΣΔ ADCs allow elimination of the anti‐aliasing filter because input signals are sampled after the integrator. The bandwidth requirements for the amplifiers in CT ΣΔ ADCs can be relaxed due to the continuous operation without stringing settling time requirements. Therefore, they are suitable for high‐speed and low‐power applications. In addition, CT ΣΔ ADCs achieve high resolution due to the ΣΔ modulator’s noise shaping property. However, the in-band quantization noise is shaped by the analog loop filter and the distortions of the analog loop filter directly affect the system output. Hence, highly linear low-noise loop filters are required for high-performance ΣΔ modulators. The first task in this research focused on using CMOS 90 nm technology to design and fabricate a 5^(TH)–order active-RC loop filter with a cutoff frequency of 20 MHz for a low pass (LP) CT ΣΔ modulator. The active-RC topology was selected because of the high DR requirement in SDR applications. The amplifiers in the first stage of the loop filter were implemented with linearization techniques employing anti-parallel cancellation and source degeneration in the second stage of the amplifiers. These techniques improve the third-order intermodulation (IM3) by approximately 10 dB; while noise, area, and power consumption do not increase by more than 10%. Second, a current-mode adder-flash ADC was also fabricated as part of a LP CT ΣΔ modulator. The new current-mode operation developed through this research makes possible a 53% power reduction. The new technology also lessens existing problems associated with voltage-mode flash ADCs, which are mainly related to voltage headroom restrictions, speed of operation, offsets, and power efficiency of the latches. The core of the current-mode adder-flash ADC was fabricated in CMOS 90 nm technology with 1.2 V supply; it dissipates 3.34 mW while operating at 1.48 GHz and consumes a die area of 0.0276 mm^(2). System-on chip (SoC) solutions are becoming more popular in mobile telecommunication systems to improve the portability and competitiveness of products. Since the analog/RF and digital blocks often share the same external power supply in SoC solutions, the on-chip generation of clean power supplies is necessary to avoid system performance degradation due to supply noises. Finally, the critical design issues for external capacitor-less low drop-out (LDO) regulators for SoC applications are addressed in this dissertation, especially the challenges related to power supply rejection at high frequencies as well as loop stability and transient response. The paths of the power supply noise to the LDO output were analyzed, and a power supply noise cancellation circuit was developed. The power supply rejection (PSR) performance was improved by using a replica circuit that tracks the main supply noise under process-voltage-temperature variations and all operating conditions. Fabricated in a 0.18 μm CMOS technology with 1.8 V supply, the entire proposed LDO consumes 55 μA of quiescent current while in standby operation, and it has a drop-out voltage of 200 mV when providing 50 mA to the load. Its active core chip area is 0.14 mm2. Compared to a conventional uncompensated LDO, the proposed architecture presents a PSR improvement of 34 dB and 25 dB at 1 MHz and 4 MHz, respectively

Clock Generation Design for Continuous-Time Sigma-Delta Analog-To-Digital Converter in Communication Systems

Software defined radio, a highly digitized wireless receiver, has drawn huge attention in modern communication system because it can not only benefit from the advanced technologies but also exploit large digital calibration of digital signal processing (DSP) to optimize the performance of receivers. Continuous-time (CT) bandpass sigma-delta (ΣΔ) modulator, used as an RF-to-digital converter, has been regarded as a potential solution for software defined ratio. The demand to support multiple standards motivates the development of a broadband CT bandpass ΣΔ which can cover the most commercial spectrum of 1GHz to 4GHz in a modern communication system. Clock generation, a major building block in radio frequency (RF) integrated circuits (ICs), usually uses a phase-locked loop (PLL) to provide the required clock frequency to modulate/demodulate the informative signals. This work explores the design of clock generation in RF ICs. First, a 2-16 GHz frequency synthesizer is proposed to provide the sampling clocks for a programmable continuous-time bandpass sigma-delta (ΣΔ) modulator in a software radio receiver system. In the frequency synthesizer, a single-sideband mixer combines feed-forward and regenerative mixing techniques to achieve the wide frequency range. Furthermore, to optimize the excess loop delay in the wideband system, a phase-tunable clock distribution network and a clock-controlled quantizer are proposed. Also, the false locking of regenerative mixing is solved by controlling the self-oscillation frequency of the CML divider. The proposed frequency synthesizer performs excellent jitter performance and efficient power consumption. Phase noise and quadrature phase accuracy are the common tradeoff in a quadrature voltage-controlled oscillator. A larger coupling ratio is preferred to obtain good phase accuracy but suffer phase noise performance. To address these fundamental trade-offs, a phasor-based analysis is used to explain bi-modal oscillation and compute the quadrature phase errors given by inevitable mismatches of components. Also, the ISF is used to estimate the noise contribution of each major noise source. A CSD QVCO is first proposed to eliminate the undesired bi-modal oscillation and enhance the quadrature phase accuracy. The second work presents a DCC QVCO. The sophisticated dynamic current-clipping coupling network reduces injecting noise into LC tank at most vulnerable timings (zero crossing points). Hence, it allows the use of strong coupling ratio to minimize the quadrature phase sensitivity to mismatches without degrading the phase noise performance. The proposed DCC QVCO is implemented in a 130-nm CMOS technology. The measured phase noise is -121 dBc/Hz at 1MHz offset from a 5GHz carrier. The QVCO consumes 4.2mW with a 1-V power supply, resulting in an outstanding Figure of Merit (FoM) of 189 dBc/Hz. Frequency divider is one of the most power hungry building blocks in a PLL-based frequency synthesizer. The complementary injection-locked frequency divider is proposed to be a low-power solution. With the complimentary injection schemes, the dividers can realize both even and odd division modulus, performing a more than 100% locking range to overcome the PVT variation. The proposed dividers feature excellent phase noise. They can be used for multiple-phase generation, programmable phase-switching frequency dividers, and phase-skewing circuits

Bandpass delta-sigma modulators for radio receivers

This thesis concerns discrete-time (DT) bandpass (BP) ΔΣ modulators targeted for intermediate frequency (IF) analog-to-digital (A/D) conversion in radio receivers. The receiver architecture adopted has to be capable of operating with different radio frequencies, channel bandwidths, and modulation techniques. This is necessary in order to achieve an extensive operating area and the possibility of utilizing a local mobile phone standard or a standard suitable for a specific service. The digital IF receiver is a good choice for a multi-mode and multi-band mobile phone receiver, because the signal demodulation and channel filtering are performed in the digital domain. This increases the flexibility of the receiver and relieves the design of the baseband part, but an A/D conversion with high dynamic range and low power dissipation is required. BP ΔΣ modulators are capable of converting a high-frequency narrow band signal and are therefore suitable for signal digitization in an IF receiver. First, the theory of BP ΔΣ modulators is introduced. It has been determined that resonators are the most critical circuit blocks in the implementation of a high performance BP ΔΣ modulator. Different DT resonator topologies are studied and a double-delay (DD) resonator is found to be the best candidate for a high quality resonator. A new DD switched-capacitor (SC) resonator structure has been designed. Furthermore, two evolution versions of the designed SC resonator are presented and their nonidealities are analyzed. The three designed DD SC resonator structures are a main point of the thesis, together with the experimental results. Five different DT BP ΔΣ modulator circuit structures have been implemented and measured. All three of the designed SC resonators are used in the implemented circuits. The experimental work consists of both single-bit and multi-bit structures, as well as both single-loop and cascade architectures. The circuits have been implemented with a 0.35 μm (Bi)CMOS technology and operate with a 3.0 V supply. The measured maximum signal-to-noise-and-distortion ratios (SNDRs) are 78 dB over 270 kHz (GSM), 75 dB over 1.25 MHz (IS-95), 69 dB over 1.762 MHz (DECT), and 48 dB over 3.84 MHz (WCDMA) bandwidths using a 60 MHz IF signal.reviewe

Design of RF/IF analog to digital converters for software radio communication receivers

Software radio architecture can support multiple standards by performing analogto- digital (A/D) conversion of the radio frequency (RF) signals and running reconfigurable software programs on the backend digital signal processor (DSP). A slight variation of this architecture is the software defined radio architecture in which the A/D conversion is performed on intermediate frequency (IF) signals after a single down conversion. The first part of this research deals with the design and implementation of a fourth order continuous time bandpass sigma-delta (CT BP) C based on LC filters for direct RF digitization at 950 MHz with a clock frequency of 3.8 GHz. A new ADC architecture is proposed which uses only non-return to zero feedback digital to analog converter pulses to mitigate problems associated with clock jitter. The architecture also has full control over tuning of the coefficients of the noise transfer function for obtaining the best signal to noise ratio (SNR) performance. The operation of the architecture is examined in detail and extra design parameters are introduced to ensure robust operation of the ADC. Measurement results of the ADC, implemented in IBM 0.25 µm SiGe BiCMOS technology, show SNR of 63 dB and 59 dB in signal bandwidths of 200 kHz and 1 MHz, respectively, around 950 MHz while consuming 75 mW of power from ± 1.25 V supply. The second part of this research deals with the design of a fourth order CT BP ADC based on gm-C integrators with an automatic digital tuning scheme for IF digitization at 125 MHz and a clock frequency of 500 MHz. A linearized CMOS OTA architecture combines both cross coupling and source degeneration in order to obtain good IM3 performance. A system level digital tuning scheme is proposed to tune the ADC performance over process, voltage and temperature variations. The output bit stream of the ADC is captured using an external DSP, where a software tuning algorithm tunes the ADC parameters for best SNR performance. The IF ADC was designed in TSMC 0.35 µm CMOS technology and it consumes 152 mW of power from ± 1.65 V supply

Subsampling receivers with applications to software defined radio systems

Este trabajo de tesis propone la utilización sistemas basados en submuestreo como una alternativa para la implementación de la etapa de down-conversion de los receptores de radio frecuencia (RF) empleados para aplicaciones multi-estándar y SDR (Software Defined Radio). El objetivo principal será el de optimizar el diseño en cuanto a flexibilidad y simplicidad, las cuales son propiedades inherentes en los sistemas basados en submuestreo. Por tanto, como reducir el número de componentes al mínimo es clave cuando un mismo receptor procesa diferentes estándares de comunicación, las arquitecturas basadas en submuestreo han sido seleccionadas, donde la reusabilidad de los componentes empleados es posible, así como la reducción de los costes totales de los receptores de comunicación y de los equipos de certificación que emplean estas arquitecturas. Un motivo adicional por el que los sistemas basados en submuestreo han sido seleccionados es el concerniente a la topología del receptor. Como la idea de la tecnología SDR es implementar todas las funcionalidades del receptor (filtrado, amplificación) en el dominio digital, el convertidores analógico-digital (ADC) deberá estar localizado en la cadena de recepción lo más cerca posible a la antena, siendo el objetivo final el convertir la señal directamente de RF a digital. Sin embargo, con los actuales ADC no es posible implementar esta idea debido al alto ancho de banda que necesitarían sin perder resolución para cubrir las especificaciones de los estándares de comunicaciones inalámbricas. Por tanto, los sistemas basados en submuestreo se presentan como la opción más adecuada para implementar este tipo de sistemas debido a que pueden muestrear la señal de entrada por debajo de la tasa de Nyquist, si se cumplen ciertas restricciones en cuanto a la elección de la frecuencia de muestreo. De este modo, los requerimientos del ADC serán relajados ya que, usando estas arquitecturas, este componente procesará la señal a frecuencias intermedias. Una vez se han introducido los conceptos principales de las técnicas de submuestreo, esta tesis doctoral presenta el diseño de una tarjeta de adquisición de datos basada en submuestreo con la finalidad de ser implementada como un receptor de test y certificación de banda ancha. El sistema propuesto proporciona una alta resolución para un elevado ancho de banda, a partir del uso de un S&H de bajo jitter y de un convertidor analógico digital ADC que trabaja a frecuencias intermedias. El sistema es implementado usando dispositivos comerciales en una placa de circuito impreso diseñada y fabricada, y cuya caracterización experimental muestra una resolución de más 8 bits para un ancho de banda analógico de 20 MHz. Concretamente, la resolución medida será mayor de 9 bits hasta una frecuencia de entrada de 2.9 GHz y mayor de 8 bits para una frecuencia de entrada de hasta 6.5 GHz, lo cual resulta suficiente para cubrir los requerimientos de la mayor parte de los actuales estándares de comunicaciones inalámbricas (GPS, GSM, GPRS, UMTS, Bluetooth, Wi-Fi, WiMAX). Sin embargo, los receptores basados en submuestreo presentan algunos importantes inconvenientes, como son adicionales fuentes de ruido (jitter y plegado de ruido térmico) y una dificultad añadida para implementarlo en escenarios multi-banda y no lineales. Acerca del plegado de ruido en la banda de interés, esta tesis propone el uso de una técnica basada en una arquitectura de reloj múltiple con el objetivo de aumentar la resolución y cubrir un número mayor de estándares para su test y certificación. Empleando una frecuencia de muestreo mayor para el caso del S&H, se conseguirá reducir este efecto, aumentando la resolución en aproximadamente 0.5-1 bit respecto al caso de sólo usar una fuente de reloj. Las expresiones teóricas de esta mejora son desarrolladas y presentadas en esta tesis, siendo posteriormente corroboradas de modo experimental. Por otra parte, esta tesis también propone novedosas técnicas para la aplicación de estos sistemas de submuestreo en entornos multi-banda y no lineales, los cuales presentan desafíos adicionales por el hecho de existir la posibilidad de solapamiento entre la señal de interés y los otros canales de comunicación, así como de solapamiento con sus armónicos. De este modo, esta tesis extiende el uso de los sistemas basados en submuestreo para este tipo de entornos, proponiendo técnicas para la elección de la frecuencia óptima de muestreo que evitan el solapamiento entre señales, a la vez que consiguen incrementar la resolución del receptor. Finalmente, se presentará la optimización en cuanto a características de ruido de un receptor concreto para aplicaciones de banda dual en entornos no lineales. Dicho receptor estará basado en las técnicas de reloj múltiple presentadas anteriormente y en una estructura de multi-filtro entre el S&H y el ADC. El sistema diseñado podrá emplearse para diversas aplicaciones a ambos lados de la cadena de comunicación, tal como en receptores de detección de espectro para radio cognitiva, o implementando el bucle de realimentación de un transmisor para la linealización de amplificadores de potencia. Por tanto, la presente tesis doctoral cuenta con tres contribuciones diferenciadas. La primera de ellas es la dedicada al diseño de un prototipo de recepción multi-estándar basado en submuestreo para aplicaciones de test y certificación. La segunda aportación es la dedicada a la optimización de las especificaciones de ruido a partir de las técnicas presentadas basadas en reloj múltiple. Por último, la tercera contribución principal es la relacionada con la extensión de este tipo de técnicas a sistemas multi-banda en entornos no lineales. Todas estas contribuciones han sido estudiadas teóricamente y experimentalmente validadas

Dirty RF Signal Processing for Mitigation of Receiver Front-end Non-linearity

Moderne drahtlose Kommunikationssysteme stellen hohe und teilweise gegensätzliche Anforderungen an die Hardware der Funkmodule, wie z.B. niedriger Energieverbrauch, große Bandbreite und hohe Linearität. Die Gewährleistung einer ausreichenden Linearität ist, neben anderen analogen Parametern, eine Herausforderung im praktischen Design der Funkmodule. Der Fokus der Dissertation liegt auf breitbandigen HF-Frontends für Software-konfigurierbare Funkmodule, die seit einigen Jahren kommerziell verfügbar sind. Die praktischen Herausforderungen und Grenzen solcher flexiblen Funkmodule offenbaren sich vor allem im realen Experiment. Eines der Hauptprobleme ist die Sicherstellung einer ausreichenden analogen Performanz über einen weiten Frequenzbereich. Aus einer Vielzahl an analogen Störeffekten behandelt die Arbeit die Analyse und Minderung von Nichtlinearitäten in Empfängern mit direkt-umsetzender Architektur. Im Vordergrund stehen dabei Signalverarbeitungsstrategien zur Minderung nichtlinear verursachter Interferenz - ein Algorithmus, der besser unter "Dirty RF"-Techniken bekannt ist. Ein digitales Verfahren nach der Vorwärtskopplung wird durch intensive Simulationen, Messungen und Implementierung in realer Hardware verifiziert. Um die Lücken zwischen Theorie und praktischer Anwendbarkeit zu schließen und das Verfahren in reale Funkmodule zu integrieren, werden verschiedene Untersuchungen durchgeführt. Hierzu wird ein erweitertes Verhaltensmodell entwickelt, das die Struktur direkt-umsetzender Empfänger am besten nachbildet und damit alle Verzerrungen im HF- und Basisband erfasst. Darüber hinaus wird die Leistungsfähigkeit des Algorithmus unter realen Funkkanal-Bedingungen untersucht. Zusätzlich folgt die Vorstellung einer ressourceneffizienten Echtzeit-Implementierung des Verfahrens auf einem FPGA. Abschließend diskutiert die Arbeit verschiedene Anwendungsfelder, darunter spektrales Sensing, robuster GSM-Empfang und GSM-basiertes Passivradar. Es wird gezeigt, dass nichtlineare Verzerrungen erfolgreich in der digitalen Domäne gemindert werden können, wodurch die Bitfehlerrate gestörter modulierter Signale sinkt und der Anteil nichtlinear verursachter Interferenz minimiert wird. Schließlich kann durch das Verfahren die effektive Linearität des HF-Frontends stark erhöht werden. Damit wird der zuverlässige Betrieb eines einfachen Funkmoduls unter dem Einfluss der Empfängernichtlinearität möglich. Aufgrund des flexiblen Designs ist der Algorithmus für breitbandige Empfänger universal einsetzbar und ist nicht auf Software-konfigurierbare Funkmodule beschränkt.Today's wireless communication systems place high requirements on the radio's hardware that are largely mutually exclusive, such as low power consumption, wide bandwidth, and high linearity. Achieving a sufficient linearity, among other analogue characteristics, is a challenging issue in practical transceiver design. The focus of this thesis is on wideband receiver RF front-ends for software defined radio technology, which became commercially available in the recent years. Practical challenges and limitations are being revealed in real-world experiments with these radios. One of the main problems is to ensure a sufficient RF performance of the front-end over a wide bandwidth. The thesis covers the analysis and mitigation of receiver non-linearity of typical direct-conversion receiver architectures, among other RF impairments. The main focus is on DSP-based algorithms for mitigating non-linearly induced interference, an approach also known as "Dirty RF" signal processing techniques. The conceived digital feedforward mitigation algorithm is verified through extensive simulations, RF measurements, and implementation in real hardware. Various studies are carried out that bridge the gap between theory and practical applicability of this approach, especially with the aim of integrating that technique into real devices. To this end, an advanced baseband behavioural model is developed that matches to direct-conversion receiver architectures as close as possible, and thus considers all generated distortions at RF and baseband. In addition, the algorithm's performance is verified under challenging fading conditions. Moreover, the thesis presents a resource-efficient real-time implementation of the proposed solution on an FPGA. Finally, different use cases are covered in the thesis that includes spectrum monitoring or sensing, GSM downlink reception, and GSM-based passive radar. It is shown that non-linear distortions can be successfully mitigated at system level in the digital domain, thereby decreasing the bit error rate of distorted modulated signals and reducing the amount of non-linearly induced interference. Finally, the effective linearity of the front-end is increased substantially. Thus, the proper operation of a low-cost radio under presence of receiver non-linearity is possible. Due to the flexible design, the algorithm is generally applicable for wideband receivers and is not restricted to software defined radios

Integrated interface electronics for capacitive MEMS inertial sensors

This thesis is composed of 13 publications and an overview of the research topic, which also summarizes the work. The research presented in this thesis concentrates on integrated circuits for the realization of interface electronics for capacitive MEMS (micro-electro-mechanical system) inertial sensors, i.e. accelerometers and gyroscopes. The research focuses on circuit techniques for capacitive detection and actuation and on high-voltage and clock generation within the sensor interface. Characteristics of capacitive accelerometers and gyroscopes and the electronic circuits for accessing the capacitive information in open- and closed-loop configurations are introduced in the thesis. One part of the experimental work, an accelerometer, is realized as a continuous-time closed-loop sensor, and is capable of achieving sub-micro-g resolution. The interface electronics is implemented in a 0.7-µm high-voltage technology. It consists of a force feedback loop, clock generation circuits, and a digitizer. Another part of the experimental work, an analog 2-axis gyroscope, is optimized not only for noise, but predominantly for low power consumption and a small chip area. The implementation includes a pseudo-continuous-time sense readout, analog continuous-time drive loop, phase-locked loop (PLL) for clock generation, and high-voltage circuits for electrostatic excitation and high-voltage detection. The interface is implemented in a 0.35-µm high-voltage technology within an active area of 2.5 mm². The gyroscope achieves a spot noise of 0.015 °/s/√H̅z̅ for the x-axis and 0.041 °/s/√H̅z̅ for the y-axis. Coherent demodulation and discrete-time signal processing are often an important part of the sensors and also typical examples that require clock signals. Thus, clock generation within the sensor interfaces is also reviewed. The related experimental work includes two integrated charge pump PLLs, which are optimized for compact realization but also considered with regard to their noise performance. Finally, this thesis discusses fully integrated high-voltage generation, which allows a higher electrostatic force and signal current in capacitive sensors. Open- and closed-loop Dickson charge pumps and high-voltage amplifiers have been realized fully on-chip, with the focus being on optimizing the chip area and on generating precise spurious free high-voltage signals up to 27 V