Multiphysics modelling and experimental validation of microelectromechanical resonator dynamics

The modelling of microelectromechanical systems provides a very challenging task in microsystems engineering. This field of research is inherently multiphysics of nature, since different physical phenomena are tightly intertwined at microscale. Typically, up to four different physical domains are usually considered in the analysis of microsystems: mechanical, electrical, thermal and fluidic. For each of these separate domains, well-established modelling and analysis techniques are available. However, one of the main challenges in the field of microsystems engineering is to connect models for the behavior of the device in each of these domains to equivalent lumped or reduced-order models without making unacceptably inaccurate assumptions and simplifications and to couple these domains correctly and efficiently. Such a so-called multiphysics modelling framework is very important for simulation of microdevices, since fast and accurate computational prototyping may greatly shorten the design cycle and thus the time-to-market of new products. This research will focus on a specific class of microsystems: microelectromechanical resonators. MEMS resonators provide a promising alternative for quartz crystals in time reference oscillators, due to their small size and on-chip integrability. However, because of their small size, they have to be driven into nonlinear regimes in order to store enough energy for obtaining an acceptable signal-to-noise ratio in the oscillator. Since these resonators are to be used as a frequency reference in the oscillator circuits, their steady-state (nonlinear) dynamic vibration behaviour is of special interest. A heuristic modelling approach is investigated for two different MEMS resonators, a clamped-clamped beam resonator and a dog-bone resonator. For the clamped-clamped beam resonator, the simulations with the proposed model shows a good agreement with experimental results, but the model is limited in its predictive capabilities. For the dogbone resonator, the proposed heuristic modelling approach does not lead to a match between simulations and experiments. Shortcomings of the heuristic modelling approach serve as a motivation for a first-principles based approach. The main objective of this research is to derive a multiphysics modelling framework for MEMS resonators that is based on first-principles formulations. The framework is intended for fast and accurate simulation of the steady-state nonlinear dynamic behaviour of MEMS resonators. Moreover, the proposed approach is validated by means of experiments. Although the multiphysics modelling framework is proposed for MEMS resonators, it is not restricted to this application field within microsystems engineering. Other fields, such as (resonant) sensors, switches and variable capacitors, allow for a similar modelling approach. In the proposed framework, themechanical, electrical and thermal domains are included. Since the resonators considered are operated in vacuum, the fluidic domain (squeeze film damping) is not included. Starting from a first-principles description, founded on partial differential equations (PDEs), characteristic nonlinear effects from each of the included domains are incorporated. Both flexural and bulk resonators can be considered. Next, Galerkin discretization of the coupled PDEs takes place, to construct reduced-order models while retaining the nonlinear effects. The multiphysics model consists of the combined reduced-order models from the different domains. Designated numerical tools are used to solve for the steady-state nonlinear dynamic behaviour of the combined model. The proposed semi-analytical (i.e. analytical-numerical) multiphysics modeling framework is illustrated for a full case study of an electrostatically actuated single-crystal silicon clamped-clamped beam MEMS resonator. By means of the modelling framework, multiphysics models of varying complexity have been derived for this resonator, including effects like electrostatic actuation, fringing fields, shear deformation, rotary inertia, thermoelastic damping and nonlinear material behaviour. The first-principles based approach allows for addressing the relevance of individual effects in a straightforward way, such that the models can be used as a (pre-)design tool for dynamic response analysis. The method can be considered complementary to conventional finite element simulations. The multiphysics model for the clamped-clamped beam resonator is validated by means of experiments. A good match between the simulations and experiments is obtained, thereby giving confidence in the proposed modelling framework. Finally, next to themodelling approach for MEMS resonators, a technique for using these nonlinear resonators in an oscillator circuit setting is presented. This approach, called phase feedback, allows for operation of the resonator in its nonlinear regime. The closedloop technique enables control of both the frequency of oscillation and the output power of the signal. Additionally, optimal operation points for oscillator circuits incorporating a nonlinear resonator can be defined

Development of MEMS Piezoelectric Vibration Energy Harvesters with Wafer-Level Integrated Tungsten Proof-Mass for Ultra Low Power Autonomous Wireless Sensors

La génération d’énergie localisée et à petite échelle, par transformation de l’énergie vibratoire disponible dans l’environnement, est une solution attrayante pour améliorer l’autonomie de certains noeuds de capteurs sans-fil pour l’Internet des objets (IoT). Grâce à des microdispositifs inertiels résonants piézoélectriques, il est possible de transformer l’énergie mécanique en électricité. Cette thèse présente une étude exhaustive de cette technologie et propose un procédé pour fabriquer des microgénérateurs MEMS offrant des performances surpassant l’état de l’art. On présente d’abord une revue complète des limites physiques et technologiques pour identifier le meilleur chemin d’amélioration. En évaluant les approches proposées dans la littérature (géométrie, architecture, matériaux, circuits, etc.), nous suggérons des métriques pour comparer l’état de l’art. Ces analyses démontrent que la limite fondamentale est l’énergie absorbée par le dispositif, car plusieurs des solutions existantes répondent déjà aux autres limites. Pour un générateur linéaire résonant, l’absorption d’énergie dépend donc des vibrations disponibles, mais aussi de la masse du dispositif et de son facteur de qualité. Pour orienter la conception de prototypes, nous avons réalisé une étude sur le potentiel des capteurs autonomes dans une automobile. Nous avons évalué une liste des capteurs présents sur un véhicule pour leur compatibilité avec cette technologie. Nos mesures de vibrations sur un véhicule en marche aux emplacements retenus révèlent que l’énergie disponible pour un dispositif linéaire résonant MEMS se situe entre 30 à 150 Hz. Celui-ci pourrait produire autour de 1 à 10 μW par gramme. Pour limiter la taille d’un générateur MEMS pouvant produire 10 μW, il faut une densité supérieure à celle du silicium, ce qui motive l’intégration du tungstène. L’effet du tungstène sur la sensibilité du dispositif est évident, mais nous démontrons également que l’usage de ce matériau permet de réduire l’impact de l’amortissement fluidique sur le facteur de qualité mécanique Qm. En fait, lorsque l’amortissement fluidique domine, ce changement peut améliorer Qm d’un ordre de grandeur, passant de 103 à 104 dans l’air ambiant. Par conséquent, le rendement du dispositif est amélioré sans utiliser un boîtier sous vide. Nous proposons ensuite un procédé de fabrication qui intègre au niveau de la tranche des masses de tungstène de 500 μm d’épais. Ce procédé utilise des approches de collage de tranches et de gravure humide du métal en deux étapes. Nous présentons chaque bloc de fabrication réalisé pour démontrer la faisabilité du procédé, lequel a permis de fabriquer plusieurs prototypes. Ces dispositifs ont été testés en laboratoire, certains démontrant des performances records en terme de densité de puissance normalisée. Notre meilleur design se démarque par une métrique de 2.5 mW-s-1/(mm3(m/s2)2), soit le meilleur résultat répertorié dans l’état de l’art. Avec un volume de 3.5 mm3, il opère à 552.7 Hz et produit 2.7 μW à 1.6 V RMS à partir d’une accélération de 1 m/s2. Ces résultats démontrent que l’intégration du tungstène dans les microgénérateurs MEMS est très avantageuse et permet de s’approcher davantage des requis des applications réelles.Small scale and localized power generation, using vibration energy harvesting, is considered as an attractive solution to enhance the autonomy of some wireless sensor nodes used in the Internet of Things (IoT). Conversion of the ambient mechanical energy into electricity is most often done through inertial resonant piezoelectric microdevices. This thesis presents an extensive study of this technology and proposes a process to fabricate MEMS microgenerators with record performances compared to the state of the art. We first present a complete review of the physical and technological limits of this technology to asses the best path of improvement. Reported approaches (geometries, architectures, materials, circuits) are evaluated and figures of merit are proposed to compare the state of the art. These analyses show that the fundamental limit is the absorbed energy, as most proposals to date partially address the other limits. The absorbed energy depends on the level of vibrations available, but also on the mass of the device and its quality factor for a linear resonant generator. To guide design of prototypes, we conducted a study on the potential of autonomous sensors in vehicles. A survey of sensors present on a car was realized to estimate their compatibility with energy harvesting technologies. Vibration measurements done on a running vehicle at relevant locations showed that the energy available for MEMS devices is mostly located in a frequency range of 30 to 150 Hz and could generate power in the range of 1-10 μW per gram from a linear resonator. To limit the size of a MEMS generator capable of producing 10 μW, a higher mass density compared to silicon is needed, which motivates the development of a process that incorporates tungsten. Although the effect of tungsten on the device sensitivity is well known, we also demonstrate that it reduces the impact of the fluidic damping on the mechanical quality factor Qm. If fluidic damping is dominant, switching to tungsten can improve Qm by an order of magnitude, going from 103 to 104 in ambient air. As a result, the device efficiency is improved despite the lack of a vacuum package. We then propose a fabrication process flow to integrate 500 μm thick tungsten masses at the wafer level. This process combines wafer bonding with a 2-step wet metal etching approach. We present each of the fabrication nodes realized to demonstrate the feasibility of the process, which led to the fabrication of several prototypes. These devices are tested in the lab, with some designs demonstrating record breaking performances in term of normalized power density. Our best design is noteworthy for its figure of merit that is around 2.5 mW-s-1/(mm3(m/s2)2), which is the best reported in the state of the art. With a volume of 3.5 mm3, it operates at 552.7 Hz and produces 2.7 μW at 1.6 V RMS from an acceleration of 1 m/s2. These results therefore show that tungsten integration in MEMS microgenerators is very advantageous, allowing to reduce the gap with needs of current applications

Review of nonlinear vibration energy harvesting: Duffing, bistability, parametric, stochastic and others

Vibration energy harvesting typically involves a mechanical oscillatory mechanism to accumulate ambient kinetic energy, prior to the conversion to electrical energy through a transducer. The convention is to use a simple linear mass-spring-damper oscillator with its resonant frequency tuned towards that of the vibration source. In the past decade, there has been a rapid expansion in research of vibration energy harvesting into various nonlinear vibration principles such as Duffing nonlinearity, bistability, parametric oscillators, stochastic oscillators and other nonlinear mechanisms. The intended objectives for using nonlinearity include broadening of frequency bandwidth, enhancement of power amplitude and improvement in responsiveness to non-sinusoidal noisy excitations. However, nonlinear vibration energy harvesting also comes with its own challenges and some of the research pursuits have been less than fruitful. Previous reviews in the literature have either focussed on bandwidth enhancement strategies or converged on select few nonlinear mechanisms. This article reviews eight major types of nonlinear vibration energy harvesting reported over the past decade, covering underlying principles, advantages and disadvantages, and application-specific guidance for researchers and designers

Low-Voltage Closed Loop MEMS Actuators

An efficient electrostatic resonator is designed by adding a low voltage controller to an electrostatic actuator. The closedloop actuator shows stable, and bi-sable behaviors with bounded chaotic oscillations as large as 117% of the capacitor gap. The controller voltage is decreased from a previously designed resonator to less than 9 V thereby reducing the load on the controller circuit components. Bifurcation diagrams are obtained showing the frequency and magnitude of AC voltage required for chaotic oscillations to develop. The information entropy, a measure of chaotic characteristic, is calculated for the micro-resonator and is found to be 0.732

Interface Circuits for Microsensor Integrated Systems

ca. 200 words; this text will present the book in all promotional forms (e.g. flyers). Please describe the book in straightforward and consumer-friendly terms. [Recent advances in sensing technologies, especially those for Microsensor Integrated Systems, have led to several new commercial applications. Among these, low voltage and low power circuit architectures have gained growing attention, being suitable for portable long battery life devices. The aim is to improve the performances of actual interface circuits and systems, both in terms of voltage mode and current mode, in order to overcome the potential problems due to technology scaling and different technology integrations. Related problems, especially those concerning parasitics, lead to a severe interface design attention, especially concerning the analog front-end and novel and smart architecture must be explored and tested, both at simulation and prototype level. Moreover, the growing demand for autonomous systems gets even harder the interface design due to the need of energy-aware cost-effective circuit interfaces integrating, where possible, energy harvesting solutions. The objective of this Special Issue is to explore the potential solutions to overcome actual limitations in sensor interface circuits and systems, especially those for low voltage and low power Microsensor Integrated Systems. The present Special Issue aims to present and highlight the advances and the latest novel and emergent results on this topic, showing best practices, implementations and applications. The Guest Editors invite to submit original research contributions dealing with sensor interfacing related to this specific topic. Additionally, application oriented and review papers are encouraged.

Autonomous Navigation for Mars Exploration

The autonomous navigation technology uses the multiple sensors to percept and estimate the spatial locations of the aerospace prober or the Mars rover and to guide their motions in the orbit or the Mars surface. In this chapter, the autonomous navigation methods for the Mars exploration are reviewed. First, the current development status of the autonomous navigation technology is summarized. The popular autonomous navigation methods, such as the inertial navigation, the celestial navigation, the visual navigation, and the integrated navigation, are introduced. Second, the application of the autonomous navigation technology for the Mars exploration is presented. The corresponding issues in the Entry Descent and Landing (EDL) phase and the Mars surface roving phase are mainly discussed. Third, some challenges and development trends of the autonomous navigation technology are also addressed

Enhancement of an indium phosphide resonator sensor microsystem through the development of an adaptive feedback circuit and electrospray deposition

Cantilever resonator sensor enhancement through the development of an adaptive feedback circuit and the use of electrospray deposition is presented. The feedback system adapts to a wide range of resonators by implementing a hill climbing algorithm, locking onto the cantilever's resonance condition. Eight different cantilever-based sensors (Length=40-75μm), resonating at 201.0kHz to 592.1kHz, with a minimum standard deviation of 11.8Hz, corresponding to a mass resolution limit of 123fg for the device, have been dynamically detected using a single circuit. Electrospray deposition of thin-films on multiple substrate materials and released microstructures has been performed. An average deposition rate of 9.5±5nm/min was achieved with an average surface roughness of 4.5nm on a 197nm thick film. This technology will enable a post-processing method for depositing absorbing layers for sensing applications. With the development of these two technologies, the practical functionality of a chip-scale sensor microsystem will be more readily realized