Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in sub-ablation conditions

An investigation of ultrashort pulsed laser induced surface modification due to conditions that result in a superheated melted liquid layer and material evaporation are considered. To describe the surface modification occurring after cooling and resolidification of the melted layer and understand the underlying physical fundamental mechanisms, a unified model is presented to account for crater and subwavelength ripple formation based on a synergy of electron excitation and capillary waves solidification. The proposed theoretical framework aims to address the laser-material interaction in sub-ablation conditions and thus minimal mass removal in combination with a hydrodynamics-based scenario of the crater creation and ripple formation following surface irradiation with single and multiple pulses, respectively. The development of the periodic structures is attributed to the interference of the incident wave with a surface plasmon wave. Details of the surface morphology attained are elaborated as a function of the imposed conditions and results are tested against experimental data

A Dirichlet-to-Neumann approach for the exact computation of guided modes in photonic crystal waveguides

This works deals with one dimensional infinite perturbation - namely line defects - in periodic media. In optics, such defects are created to construct an (open) waveguide that concentrates light. The existence and the computation of the eigenmodes is a crucial issue. This is related to a self-adjoint eigenvalue problem associated to a PDE in an unbounded domain (in the directions orthogonal to the line defect), which makes both the analysis and the computations more complex. Using a Dirichlet-to-Neumann (DtN) approach, we show that this problem is equivalent to one set on a small neighborhood of the defect. On contrary to existing methods, this one is exact but there is a price to be paid : the reduction of the problem leads to a nonlinear eigenvalue problem of a fixed point nature

Reduced basis method for source mask optimization

Image modeling and simulation are critical to extending the limits of leading edge lithography technologies used for IC making. Simultaneous source mask optimization (SMO) has become an important objective in the field of computational lithography. SMO is considered essential to extending immersion lithography beyond the 45nm node. However, SMO is computationally extremely challenging and time-consuming. The key challenges are due to run time vs. accuracy tradeoffs of the imaging models used for the computational lithography. We present a new technique to be incorporated in the SMO flow. This new approach is based on the reduced basis method (RBM) applied to the simulation of light transmission through the lithography masks. It provides a rigorous approximation to the exact lithographical problem, based on fully vectorial Maxwell's equations. Using the reduced basis method, the optimization process is divided into an offline and an online steps. In the offline step, a RBM model with variable geometrical parameters is built self-adaptively and using a Finite Element (FEM) based solver. In the online step, the RBM model can be solved very fast for arbitrary illumination and geometrical parameters, such as dimensions of OPC features, line widths, etc. This approach dramatically reduces computational costs of the optimization procedure while providing accuracy superior to the approaches involving simplified mask models. RBM furthermore provides rigorous error estimators, which assure the quality and reliability of the reduced basis solutions. We apply the reduced basis method to a 3D SMO example. We quantify performance, computational costs and accuracy of our method.Comment: BACUS Photomask Technology 201

Real-World Repetition Estimation by Div, Grad and Curl

We consider the problem of estimating repetition in video, such as performing push-ups, cutting a melon or playing violin. Existing work shows good results under the assumption of static and stationary periodicity. As realistic video is rarely perfectly static and stationary, the often preferred Fourier-based measurements is inapt. Instead, we adopt the wavelet transform to better handle non-static and non-stationary video dynamics. From the flow field and its differentials, we derive three fundamental motion types and three motion continuities of intrinsic periodicity in 3D. On top of this, the 2D perception of 3D periodicity considers two extreme viewpoints. What follows are 18 fundamental cases of recurrent perception in 2D. In practice, to deal with the variety of repetitive appearance, our theory implies measuring time-varying flow and its differentials (gradient, divergence and curl) over segmented foreground motion. For experiments, we introduce the new QUVA Repetition dataset, reflecting reality by including non-static and non-stationary videos. On the task of counting repetitions in video, we obtain favorable results compared to a deep learning alternative

Finite-Difference Time-Domain Study of Guided Modes in Nano-plasmonic Waveguides

A conformal dispersive finite-difference time-domain (FDTD) method is developed for the study of one-dimensional (1-D) plasmonic waveguides formed by an array of periodic infinite-long silver cylinders at optical frequencies. The curved surfaces of circular and elliptical inclusions are modelled in orthogonal FDTD grid using effective permittivities (EPs) and the material frequency dispersion is taken into account using an auxiliary differential equation (ADE) method. The proposed FDTD method does not introduce numerical instability but it requires a fourth-order discretisation procedure. To the authors' knowledge, it is the first time that the modelling of curved structures using a conformal scheme is combined with the dispersive FDTD method. The dispersion diagrams obtained using EPs and staircase approximations are compared with those from the frequency domain embedding method. It is shown that the dispersion diagram can be modified by adding additional elements or changing geometry of inclusions. Numerical simulations of plasmonic waveguides formed by seven elements show that row(s) of silver nanoscale cylinders can guide the propagation of light due to the coupling of surface plasmons.Comment: 6 pages, 10 figures, accepted for publication, IEEE Trans. Antennas Propaga