Wafer scale manufacturing of high precision micro-optical components through X-ray lithography yielding 1800 Gray Levels in a fingertip sized chip

We present a novel x-ray lithography based micromanufacturing methodology that offers scalable manufacturing of high precision optical components. It is accomplished through simultaneous usage of multiple stencil masks made moveable with respect to one another through custom made micromotion stages. The range of spectral flux reaching the sample surface at the LiMiNT micro/nanomanufacturing facility of Singapore Synchrotron Light Source (SSLS) is about 2 keV to 10 keV, offering substantial photon energy to carry out deep x-ray lithography. In this energy range, x-rays penetrate through resist materials with only little scattering. The highly collimated rectangular beam architecture of the x-ray source enables a full 4″ wafer scale fabrication. Precise control of dose deposited offers determined chain scission in the polymer to required depth enabling 1800 discrete gray levels in a chip of area 20 mm$^{2}$ and with more than 2000 within our reach. Due to its parallel processing capability, our methodology serves as a promising candidate to fabricate micro/nano components of optical quality on a large scale to cater for industrial requirements. Usage of these fine components in analytical devices such as spectrometers and multispectral imagers transforms their architecture and shrinks their size to pocket dimension. It also reduces their complexity and increases affordability while also expanding their application areas. Consequently, equipment based on these devices is made available and affordable for consumers and businesses expanding the horizon of analytical applications. Mass manufacturing is especially vital when these devices are to be sold in large quantities especially as components for original equipment manufacturers (OEM), which has also been demonstrated through our work. Furthermore, we also substantially improve the quality of the micro-components fabricated, 3D architecture generated, throughput, capability and availability for industrial application. Manufacturing 1800 Gray levels or more through other competing techniques is either limited due to multiple process steps involved or due to unacceptably long time required owing to their pencil beam architecture. Our manufacturing technique presented here overcomes both these shortcomings in terms of the maximum number of gray levels that can be generated, and the time required to generate the same

Nanofabrication Using Electron Beam Lithography: Novel Resist and Applications

This thesis addresses nanostructure fabrication techniques based on electron beam lithography, which is the most widely employed nanofabrication techniques for R&D and for the prototyping or production of photo-mask or imprint mold. The focus is on the study of novel resist and development process, as well as pattern transfer procedure after lithography. Specifically, this thesis investigates the following topics that are related to either electron beam resists, their development, or pattern transfer process after electron beam lithography: (1) The dry thermal development (contrary to conventional solvent development) of negative electron beam resists polystyrene (PS) to achieve reasonably high contrast and resolution. (2) The solvent development for polycarbonate electron beam resist, which is more desirable than the usual hot aqueous solution of NaOH developer, to achieve a low contrast that is ideal for grayscale lithography. (3) The fabrication of metal nanostructure by electron beam lithography and dry liftoff (contrary to the conventional liftoff using a strong solvent or aqueous solution), to achieved down to ~50 nm resolution. (4) The study a novel electron beam resist poly(sodium 4-styrenesulfonate) (sodium PSS) that is water soluble and water developable, to fabricate the feature size down to ~ 40 nm. And finally, (5) The fabrication of gold nanostructure on a thin membrane, which will be used as an object for novel x-ray imaging, where we developed the fabrication process for silicon nitride membrane, electroplating of gold, and pattern transfer after electron beam lithography using single layer resist and tri-layer resist stack

An Optofluidic Lens Biochip and an x-ray Readable Blood Pressure Microsensor: Versatile Tools for in vitro and in vivo Diagnostics.

Three different microfabricated devices were presented for use in vivo and in vitro diagnostic biomedical applications: an optofluidic-lens biochip, a hand held digital imaging system and an x-ray readable blood pressure sensor for monitoring restenosis. An optofluidic biochip–termed the ‘Microfluidic-based Oil-Immersion Lens’ (mOIL) biochip were designed, fabricated and test for high-resolution imaging of various biological samples. The biochip consists of an array of high refractive index (n = 1.77) sapphire ball lenses sitting on top of an oil-filled microfluidic network of microchambers. The combination of the high optical quality lenses with the immersion oil results in a numerical aperture (NA) of 1.2 which is comparable to the high NA of oil immersion microscope objectives. The biochip can be used as an add-on-module to a stereoscope to improve the resolution from 10 microns down to 0.7 microns. It also has a scalable field of view (FOV) as the total FOV increases linearly with the number of lenses in the biochip (each lens has ~200 microns FOV). By combining the mOIL biochip with a CMOS sensor, a LED light source in 3D printed housing, a compact (40 grams, 4cmx4cmx4cm) high resolution (~0.4 microns) hand held imaging system was developed. The applicability of this system was demonstrated by counting red and white blood cells and imaging fluorescently labelled cells. In blood smear samples, blood cells, sickle cells, and malaria-infected cells were easily identified. To monitor restenosis, an x-ray readable implantable blood pressure sensor was developed. The sensor is based on the use of an x-ray absorbing liquid contained in a microchamber. The microchamber has a flexible membrane that is exposed to blood pressure. When the membrane deflects, the liquid moves into the microfluidic-gauge. The length of the microfluidic-gauge can be measured and consequently the applied pressure exerted on the diaphragm can be calculated. The prototype sensor has dimensions of 1x0.6x10mm and adequate resolution (19mmHg) to detect restenosis in coronary artery stents from a standard chest x-ray. Further improvements of our prototype will open up the possibility of measuring pressure drop in a coronary artery stent in a non-invasively manner.PhDMacromolecular Science and EngineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/111384/1/toning_1.pd

Optimization of Computer generated holography rendering and optical design for a compact and large eyebox Augmented Reality glass

Thesis (Master of Science in Informatics)--University of Tsukuba, no. 41288, 2019.3.2

A NOVEL MICROFABRICATION TECHNIQUE FOR DEVELOPMENT OF A 3D PYRAMIDAL POROUS MEMBRANE

Ph.DDOCTOR OF PHILOSOPH

Strategies and techniques for fabricating MEMS bistable thermal actuators.

Bistable elements are beginning to appear in the field of MEMS as they allow engineers to design sensors and actuators which require no electrical power and possess mechanical memory. This research focuses on the development of novel strategies and techniques for fabricating MEMS bistable structures to serve as no electrical power thermal actuators. Two parallel strategies were explored for the design and fabrication of the critical bistable element. Both strategies involved an extensive material study on candidate thin film materials to determine their temperature coefficient of expansion and as-deposited internal stress properties. Materials investigated included titanium tungsten, Invar, silicon nitride and amorphous silicon deposited using either sputtering or PECVD. Deposition parameters were experimentally determined to produce tensile, compressive and stress-free films. A full set of graphs are presented. To address the 3D MEMS topology challenge required for bistability, this research explored two different strategies for fabricating 3D non-planar hemispherical dome structures using minimal processing steps. The first approach used the thermal/chemical reflow of resist, along with traditional binary lithography with a single photomask. Specific thermal/chemical reflow conditions were experimentally developed to produce hemispherical dome over a wide range. The second approach introduced a novel maskless procedure for fabricating the dome using grayscale lithography. After evaluating the above results, it was decided to use engineered compressive stress in released thin film sandwiches to form the 3D dome structures required for bistable actuation. Three different types of released multi-layer diaphragms were studied: 1) oxide-polyimide diaphragms, 2) oxide-aluminum diaphragms, and 3) oxide-aluminum-polyimide diaphragms

Multiphase flows in polymer microfluidic systems

Continuous delivery of segmented reagents using pressure-driven multiphase flow in microchannels is a promising technology for high throughput microfluidic bioassays. Separation and encapsulation of the target reagents with another inert fluid provide many advantages over single phase flow in microfluidic applications of biotechnology. In order to achieve these advantages and control these multiphase flows, it is necessary to understand their generation and transport characteristics as influenced by geometrical miniaturization, channel wall properties, the effects of surfactants and operating conditions. For gas-liquid two-phase flow, dry air and deionized water were driven into hot embossed PMMA microchannels with 200 μm square test microchannels. Flow regimes, flow maps and the lengths of the gas bubbles and liquid plugs in terms of the liquid volumetric flow ratio (βL) were determined. Continuous generation of regular segmented flow was also discussed. Three sub-regimes of the Segmented flow were identified based on the statistical phase length scales observed over a substantial test channel length. For the liquid-liquid segmented flow, deionized water and perfluorocarbon with a surfactant were used as test fluids in the hot embossed polycarbonate microchannels. The effects of three expansion ratios from the injection to the test channels of 2, 4, and 16 were investigated comparing the flow regimes, transitions and maps in terms of a fixed carrier fluid volumetric flow ratio. The length of the dispersed fluids and the distance between consecutive droplets or plugs in terms of the carrier fluid volumetric flow ratio (βC) were determined. Velocities of the dispersed droplets and plugs were measured using double-pulsed laser illumination and were found to be 1.46 ± 0.08 and 1.25 ± 0.05 times faster than the superficial velocity of the segmented flow, respectively. The multiphase flow pressure drops were measured for all of the flow regimes in gas-liquid two-phase and liquid-liquid segmented flows. Each flow regime identified on the basis of topological observations, including the length scale of each fluid phase and the number of the gas bubbles or dispersed droplets in unit length with respect to the volumetric flow ratio, was associated with different trends in the pressure drop variation

Studying the glial cell response to biomaterials and surface topography for improving the neural electrode interface

Neural electrode devices hold great promise to help people with the restoration of lost functions, however, research is lacking in the biomaterial design of a stable, long-term device. Current devices lack long term functionality, most have been found unable to record neural activity within weeks after implantation due to the development of glial scar tissue (Polikov et al., 2006; Zhong and Bellamkonda, 2008). The long-term effect of chronically implanted electrodes is the formation of a glial scar made up of reactive astrocytes and the matrix proteins they generate (Polikov et al., 2005; Seil and Webster, 2008). Scarring is initiated when a device is inserted into brain tissue and is associated with an inflammatory response. Activated astrocytes are hypertrophic, hyperplastic, have an upregulation of intermediate filaments GFAP and vimentin expression, and filament formation (Buffo et al., 2010; Gervasi et al., 2008). Current approaches towards inhibiting the initiation of glial scarring range from altering the geometry, roughness, size, shape and materials of the device (Grill et al., 2009; Kotov et al., 2009; Kotzar et al., 2002; Szarowski et al., 2003). Literature has shown that surface topography modifications can alter cell alignment, adhesion, proliferation, migration, and gene expression (Agnew et al., 1983; Cogan et al., 2005; Cogan et al., 2006; Merrill et al., 2005). Thus, the goals of the presented work are to study the cellular response to biomaterials used in neural electrode fabrication and assess surface topography effects on minimizing astrogliosis. Initially, to examine astrocyte response to various materials used in neural electrode fabrication, astrocytes were cultured on platinum, silicon, PMMA, and SU-8 surfaces, with polystyrene as the control surface. Cell proliferation, viability, morphology and gene expression was measured for seven days in vitro. Results determined the cellular characteristics, reactions and growth rates of astrocytes grown on PMMA resembled closely to that of cells grown on the control surface, thus confirming the biocompatibility of PMMA. Additionally, the astrocyte GFAP gene expressions of cells grown on PMMA were lower than the control, signifying a lack of astrocyte reactivity. Based on the findings from the biomaterials study, it was decided to optimize PMMA by changing the surface characteristic of the material. Through the process of hot embossing, nanopatterns were placed on the surface in order to test the hypothesis that nanopattterning can improve the cellular response to the material. Results of this study agreed with current literature showing that topography effects protein and cell behavior. It was concluded that for the use in neural electrode fabrication and design, the 3600mm/gratings pattern feature sizes were optimal. The 3600 mm/gratings pattern depicted cell alignment along the nanopattern, less protein adsorption, less cell adhesion, proliferation and viability, inhibition of GFAP and MAP2k1 compared to all other substrates tested. Results from the initial biomaterials study also indicated platinum was negatively affected the cells and may not be a suitable material for neural electrodes. This lead to pursuing studies with iridium oxide and platinum alloy wires for the glial scar assay. Iridium oxide advantages of lower impedance and higher charge injection capacity would appear to make iridium oxide more favorable for neural electrode fabrication. However, results of this study demonstrate iridium oxide wires exhibited a more significant reactive response as compared to platinum alloy wires. Astrocytes cultured with platinum alloy wires had less GFAP gene expression, lower average GFAP intensity, and smaller glial scar thickness. Results from the nanopatterning PMMA study prompted a more thorough investigation of the nanopatterning effects using an organotypic brain slice model. PDMS was utilized as the substrate due to its optimal physical properties. Confocal and SEM imaging illustrated cells from the brain tissue slices were aligned along the nanopattern on the PDMS pins. Decreases in several inflammatory markers (GFAP, TNFα, IL-1β) determined from gene expression analysis, was shown with the nanopatterned PDMS pins. Results of this study confirm nanopatterning not only influences cell morphology, but alters molecular cascades within the cells as well. The results of these studies provide essential information for the neural electrode research community. There is a lack of information available in the scientific community on acceptable and effective materials for neural electrode fabrication. The results of the presented studies provide more information which could lead to classifying guidelines to create biocompatible neural electrode materials. This research project was partially supported by the Wayne State University President\u27s Translational Enhancement Award and by the Kales Scholarship for Biomedical Engineering students

Scaleable nanomanufacturing of metasurfaces using microsphere photolithography

“The cost-effective manufacturing of metasurfaces over large areas is a critical issue that limits their implementations. Microsphere photolithography (MPL) uses a scalable self-assembled microsphere array as an optical element to focus collimated light to nanoscale photonic jets in a photoresist layer. This dissertation investigates the fabrication capabilities, process control, and potential applications of MPL. First, the MPL concept is applied to the fabrication of metasurfaces with engineered IR absorption (e.g. perfect absorption with multiband/broadband and wavelength/polarization dependences). Improving the patterning of the photoresist requires a fundamental understanding the photochemical photonic jet interactions. The dissertation presents a model of the MPL process with a cellular automata algorithm to simulate the development process. The model accurately predicts the size and shape of the features generated from MPL. It enables the identification of fabrication conditions to improve the resolution for the MPL process. Finally, the dissertation discusses the potential for a reusable microsphere array. Control of the contact forces is critical for minimizing the gap in between the microsphere array and the substrate and maintaining the consistent performance. Overall, the dissertation provides a foundation for understanding the process-structure-performance relationships for the fabrication of metasurfaces using microsphere photolithography. The use of the MPL for the fabrication of metasurfaces, with application such as sensing and thermal management, is novel as is the modeling of the MPL process”--Abstract, page iv