Cooperative Manipulation using a Magnetically Navigated Microrobot and a Micromanipulator

The cooperative manipulation of a common object using two or more manipulators is a popular research field in both industry and institutions. Different types of manipulators are used in cooperative manipulation for carrying heavy loads and delicate operations. Their applications range from macro to micro. In this thesis, we are interested in the development of a novel cooperative manipulator for manipulation tasks in a small workspace. The resultant cooperative manipulation system consists of a magnetically navigated microrobot (MNM) and a motorized micromanipulator (MM). The MNM is a small cylinder permanent magnet with 10mm diameter and 10mm height. The MM model is MP-285 which is a commercialized product. Here, the MNM is remotely controlled by an external magnetic field. The property of non-contact manipulation makes it a suitable choice for manipulation in a confined space. The cooperative manipulation system in this thesis used a master/slave mechanism as the central control strategy. The MM is the master side. The MNM is the slave side. During the manipulation process, the master manipulator MM is always position controlled, and it leads the object translation according to the kinematic constraints of the cooperative manipulation task. The MNM is position controlled at the beginning of the manipulation. In the translation stage, the MNM is switched to force control to maintain a successful holding of the object, and at the same time to prevent damaging the object by large holding force. Under the force control mode, the motion command to the MNM is calculated from a position-based impedance controller that enforces a relationship between the position of the MNM and the force. In this research, the accurate motion control of both manipulators are firstly studied before the cooperative manipulation is conducted. For the magnetic navigation system, the magnetic field in its workspace is modeled using an experimental measurement data-driven technique. The developed model is then used to develop a motion controller for navigating of a small cylindrical permanent magnet. The accuracy of motion control is reached at 20 µm in three degrees of freedom. For the motorized micromanipulator, a standard PID controller is designed to control its motion stage. The accuracy of the MM navigation is 0.8 µm. Since the MNM is remotely manipulated by an external magnetic field in a small space, it is challenging to install an on-board force sensor to measure the contact force between the MNM and the object. Therefore, a dual-axial o_-board force determination mechanism is proposed. The force is determined according to the linear relation between the minimum magnetic potential energy point and the real position of the MNM in the workspace. For convenience, the minimum magnetic potential energy point is defined as the Bmax in the literature. In this thesis, the dual-axial Bmax position is determined by measuring the magnetic ux density passing through the workspace using four Hall-effect sensors installed at the bottom of an iron pole-piece. The force model is experimentally validated in a horizontal plane with an accuracy of 2 µN in the x- and y- direction of horizontal planes. The proposed cooperative manipulator is then used to translate a hard-shell small object in two directions of a vertical plane, while one direction is constrained with a desired holding force. During the manipulation process, a digital camera is used to capture the real-time position of the MNM, the MM end-effector, and the manipulated object. To improve the performance of force control on the MNM, the proposed dual-axial force model is used to examine the compliant force control of the MNM while it is navigated to contact with uncertain environments. Here, uncertain refers to unknown environmental stiffness. An adaptive position-based impedance controller is implemented to estimate the stiffness of the environment and the contact force. The controller is examined by navigating the MNM to push a thin aluminum beam whose stiffness is unknown. The studied cooperative manipulation system has potential applications in biomedical microsurgery and microinjection. It should be clarified that the current system setup with 10mm ×10 mm MNM is not proper for this micromanipulation. In order to conduct research on microinjection, the size of the MNM and the end-effector of the MNM should be down-scaled to micrometers. In addition, the navigation accuracy of the MNM should also be improved to adopt the micromanipulation tasks

Design, Implementation and Control of a Magnetic Levitation Device

Magnetic levitation technology has shown a great deal of promise for micromanipulation tasks. Due to the lack of mechanical contact, magnetic levitation systems are free of problems caused by friction, wear, sealing and lubrication. These advantages have made magnetic levitation systems a great candidate for clean room applications. In this thesis, a new large gap magnetic levitation system is designed, developed and successfully tested. The system is capable of levitating a 6.5(gr) permanent magnet in 3D space with an air gap of approximately 50(cm) with the traveling range of 20x20x30 cubic millimeters. The overall positioning accuracy of the system is 60 micro meters. With the aid of finite elements method, an optimal geometry for the magnetic stator is proposed. Also, an energy optimization approach is utilized in the design of the electromagnets. In order to facilitate the design of various controllers for the system, a mathematical model of the magnetic force experienced by the levitated object is obtained. The dynamic magnetic force model is determined experimentally using frequency response system identification. The response of the system components including the power amplifiers, and position measurement system are also considered in the development of the force model. The force model is then employed in the controller design for the magnetic levitation device. Through a modular approach, the controller design for the 3D positioning system is started with the controller design for the vertical direction, i.e. z, and then followed by the controller design in the horizontal directions, i.e. x and y. For the vertical direction, several controllers such as PID, feed forward and feedback linearization are designed and their performances are compared. Also a control command conditioning method is introduced as a solution to increase the control performance and the results of the proposed controller are compared with the other designs. Experimental results showed that for the magnetic levitation system, the feedback linearization controller has the shortest settling time and is capable of reducing the positioning error to RMS value of 11.56μm. The force model was also utilized in the design of a model reference adaptive feedback linearization (MRAFL) controller for the z direction. For this case, the levitated object is a small microrobot equipped with a remote controlled gripper weighting approximately 28(gr). Experimental results showed that the MRAFL controller enables the micro-robot to pick up and transport a payload as heavy as 30% of its own weight without a considerable effect on its positioning accuracy. In the presence of the payload, the MRAFL controller resulted in a RMS positioning error of 8μm compared with 27.9μm of the regular feedback linearization controller. For the horizontal position control of the system, a mathematical formula for distributing the electric currents to the multiple electromagnets of the system was proposed and a PID control approach was implemented to control the position of the levitated object in the xy-plane. The control system was experimentally tested in tracking circular and spiral trajectories with overall positioning accuracy of 60μm. Also, a new mathematical approach is presented for the prediction of magnetic field distribution in the horizontal direction. The proposed approach is named the pivot point method and is capable of predicting the two dimensional position of the levitated object in a given vertical plane for an arbitrary current distribution in the electromagnets of the levitation system. Experimental results showed that the proposed method is capable of predicting the location of the levitated object with less than 10% error

Design, Optimization, and Experimental Characterization of a Novel Magnetically Actuated Finger Micromanipulator

The ability of external magnetic fields to precisely control micromanipulator systems has received a great deal of attention from researchers in recent years due to its off-board power source. As these micromanipulators provide frictionless motion, and precise motion control, they have promising potential applications in many fields. Conversely, major drawbacks of electromagnetic micromanipulators, include a limited motion range compared to the micromanipulator volume, the inability to handle heavy payloads, and the need for a large drive unit compared to the size of the levitated object, and finally, a low ratio of the generated magnetic force to the micromanipulator weight. To overcome these limitations, we designed a novel electromagnetic finger micromanipulator that was adapted from the well-known spherical robot. The design and optimization procedures for building a three Degree of Freedoms (DOF) electromagnetic finger micromanipulator are firstly introduced. This finger micromanipulator has many potential applications, such as cell manipulation, and pick and place operations. The system consists of two main subsystems: a magnetic actuator, and an electromagnetic end-effector that is connected to the magnetic actuator by a needle. The magnetic actuator consists of four permanent magnets and four electromagnetic coils that work together to guide the micromanipulator finger in the xz plane. The electromagnetic end-effector consists of a rod shape permanent magnet that is aligned along the y axis and surrounded by an electromagnetic coil. The optimal configuration that maximizes the micromanipulator actuation force, and a closed form solution for micromanipulator magnetic actuation force are presented. The model is verified by measuring the interaction force between an electromagnet and a permanent magnet experimentally, and using Finite Element Methods (FEM) analysis. The results show an agreement between the model, the experiment, and the FEM results. The error difference between the FEM, experimental, and model data was 0.05 N. The micromanipulator can be remotely operated by transferring magnetic energy from outside, which means there is no mechanical contact between the actuator and the micromanipulator. Moreover, three control algorithms are designed in order to compute control input currents that are able to control the position of the end-effector in the x, y, and z axes. The proposed controllers are: PID controller, state-feedback controller, and adaptive controller. The experimental results show that the micromanipulator is able to track the desired trajectory with a steady-state error less than 10 µm for a payload free condition. Finally, the ability of the micromanipulator to pick-and-place unknown payloads is demonstrated. To achieve this objective, a robust model reference adaptive controller (MRAC) using the MIT rule for an adaptive mechanism to guide the micromanipulator in the workspace is implemented. The performance of the MRAC is compared with a standard PID controller and state-feedback controller. For the payload free condition, the experimental results show the ability of the micromanipulator to follow a desired motion trajectory in all control strategies with a root mean square error less than 0.2 mm. However, while there is payload variation, the PID controller response yields a non smooth motion with a large overshoot and undershoot. Similarly, the state-feedback controller suffers from variability of dynamics and disturbances due to the payload variation, which yields to non-smooth motion and large overshoot. The micromanipulator motion under the MRAC control scheme conversely follows the desired motion trajectory with the same accuracy. It is found that the micromanipulator can handle payloads up to 75 grams and it has a motion range of ∓ 15 mm in all axes

Magnetic Levitation of Polymeric Photo-thermal Microgrippers

Precise manipulation of micro objects became great interest in engineering and science with the advancements in microengineering and microfabrication. In this thesis, a magnetically levitated microgripper is presented for microhandling tasks. The use of magnetic levitation for positioning reveals the problems associated with modeling of complex surface forces and the use of jointed parts or wires. The power required for the levitation of the microgripper is generated by an external drive unit that makes further minimization of the gripper possible. The gripper is made of a biocompatible material and can be activated remotely. These key features make the microgripper a great candidate for manipulation of micro components and biomanipulation. In order to achieve magnetic levitation of microrobots, the magnetic field generated by the magnetic levitation setup is simulated. The magnetic flux density in the air gap region is improved by the integration of permanent magnets and an additional electromagnet to the magnetic loop assembly. The levitation performance is evaluated with millimeter size permanent magnets. An eddy current damping method is implemented and the levitation accuracy is doubled by reducing the positioning error to 20.3 µm. For a MEMS-compatible microrobot design, the electrodeposition of Co-Ni-Mn-P magnetic thin films is demonstrated. Magnetic films are deposited on silicon substrate to form the magnetic portion of the microrobot. The electrodeposited films are extensively characterized. The relationship between the deposition parameters and structural properties is discussed leading to an understanding of the effect of deposition parameters on the magnetic properties. It is shown that both in-plane and out-of-plane magnetized films can be obtained using electrodeposition with slightly differentiated deposition parameters. The levitation of the electrodeposited magnetic samples shows a great promise toward the fabrication of levitating MEMS devices. The end-effector tool of the levitating microrobot is selected as a microgripper that can achieve various manipulation operations such as pulling, pushing, tapping, grasping and repositioning. The microgripper is designed based on a bent-beam actuation technique. The motion of the gripper fingers is achieved by thermal expansion through laser heat absorption. This technique provided non-contact actuation for the levitating microgripper. The analytical model of the displacement of the bent-beam actuator is developed. Different designs of microgripper are fabricated and thoroughly characterized experimentally and numerically. The two microgripper designs that lead to the maximum gripper deflection are adapted for the levitating microrobot. The experimental results show that the levitating microrobot can be positioned in a volume of 3 x 3 x 2 cm^3. The positioning error is measured as 34.3 µm and 13.2 µm when electrodeposited magnets and commercial permanent magnets are used, respectively. The gripper fingers are successfully operated on-the-fly by aligning a visible wavelength laser beam on the gripper. Micromanipulation of 100 µm diameter electrical wire, 125 µm diameter optical fiber and 1 mm diameter cable strip is demonstrated. The microgripper is also positioned in a closed chamber without sacrificing the positioning accuracy

Bilateral Macro-Micro Teleoperation Using A Magnetic Actuation Mechanism

In recent years, there has been increasing interest in the advancement of microrobotic systems in micro-engineering, micro-fabrication, biological research and biomedical applications. Untethered magnetic-based microrobotic systems are one of the most widely developing groups of microrobotic systems that have been extensively explored for biological and biomedical micro-manipulations. These systems show promise in resolving problems related to on-board power supply limitations as well as mechanical contact sealing and lubrication. In this thesis, a high precision magnetic untethered microrobotic system is demonstrated for micro-handling tasks. A key aspect of the proposed platform concerns the integration of magnetic levitation technology and bilateral macro-micro teleoperation for human intervention to avoid imperceptible failures in poorly observed micro-domain environments. The developed platform has three basic subsystems: a magnetic untethered microrobotic system (MUMS), a haptic device, and a scaled bilateral teleoperation system. The MUMS produces and regulates a magnetic field for non-contact propelling of a microrobot. In order to achieve a controlled motion of the magnetically levitated microrobot, a mathematical force model of the magnetic propulsion mechanism is developed and used to design various control systems. In the workspace of 30 × 32 × 32 mm 3, both PID and LQG\LTR controllers perform similarly the position accuracy of 10 µ m in a vertical direction and 2 µ m in a horizontal motion. The MUMS is equipped with an eddy-current damper to enhance its inherent damping factor in the microrobot's horizontal motions. This paper deals with the modeling and analysis of an eddy-current damper that is formed by a conductive plate placed below the levitated microrobot to overcome inherent dynamical vibrations and improve motion precision. The modeling of eddy-current distribution in the conductive plate is investigated by solving the diffusion equation for vector magnetic potential, and an analytical expression for the horizontal damping force is presented and experimentally validated. It is demonstrated that eddy-current damping is a crucial technique for increasing the damping coefficient in a non-contact way and for improving levitation performance. The damping can be widely used in applications of magnetic actuation systems in micro-manipulation and micro-fabrication. To determine the position of the microrobot in a workspace, the MUMS uses high-accuracy laser sensors. However, laser positioning techniques can only be used in highly transparent environments. A novel technique based on real-time magnetic flux measurement has been proposed for the position estimation of the microrobot in case of laser beam blockage, whereby a combination of Hall-effect sensors is employed to find the microrobot's position in free motion by using the produced magnetic flux. In free motion, the microrobot tends to move toward the horizontally zero magnetic field gradient, Bmax location. As another key feature of the magnetic flux measurement, it was realized that the applied force from the environment to the microrobot can be estimated as linearly proportional to the distance of the microrobot from the Bmax location. The developed micro-domain force estimation method is verified experimentally with an accuracy of 1.27 µ N. A bilateral macro-micro teleoperation technique is employed in the MUMS for the telepresence of a human operator in the task environment. A gain-switching position-position teleoperation scheme is employed and a human operator controls the motion of the microrobot via a master manipulator for dexterous micro-manipulation tasks. The operator can sense a strong force during micro-domain tasks if the microrobot encounters a stiff environment, and the effect of hard contact is fed back to the operator's hand. The position-position method works for both free motion and hard contact. However, to enhance the feeling of a micro-domain environment in the human operator, the scaled force must be transferred to a human, thereby realizing a direct-force-reflection bilateral teleoperation. Additionally, a human-assisted virtual reality interface is developed to improve a human operator's skills in using the haptic-enabled platform, before carrying out an actual dexterous task.1 yea

Constructive interconnection and damping assignment passivity-based control with applications

Energy-based modeling and control of dynamical systems is crucial since energy is a fundamental concept in Science and Engineering theory and practice. While Interconnection and Damping Assignment Passivity-based Control (IDA-PBC) is a powerful theoretical tool to control port-controlled Hamiltonian (PCH) systems that arise from energy balancing principles, sensorless operation of energy harvesters is a promising practical solution for low-power energy generation. The thesis addresses these two problems of energy-based control and efficient energy generation. The design via IDA-PBC hinges on the solution of the so-called matching equation which is the stumbling block in making this method widely applicable. In the first part of the thesis, a constructive approach for IDA-PBC for PCH systems that circumvents the solution of the matching equation is presented. A new notion of solution for the matching equation, called algebraic solution, is introduced. This notion is instrumental for the construction of an energy function defined on an extended state-space. This yields, differently from the classical solution, a dynamic state-feedback that stabilizes a desired equilibrium point. In addition, conditions that preserve the PCH structure in the extended closed-loop system have been provided. The theory is validated on four examples: a two-dimensional nonlinear system, a magnetic levitated ball, an electrostatic microactuator and a third order food-chain system. For these systems damping structures that cannot be imposed with the standard approach are assigned. In the second part of the thesis, the design of a nonlinear observer and of an energy-based controller for sensorless operation of a rotational energy harvester is presented. A mathematical model of the harvester with its power electronic interface is developed. This model is used to design an observer that estimates the mechanical quantities from the measured electrical quantities. The gains of the observer depend on the solution of a modified Riccati equation. The estimated mechanical quantities are used in a feedback control law that sustains energy generation across a range of source rotation speeds. The proposed observer-controller scheme is assessed through simulations and experiments.Open Acces

Microrobots for wafer scale microfactory: design fabrication integration and control.

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated to top-down manipulation with the required precision. However, the bottom-up manufacturing methods have certain limitations, such as components need to have pre-define shapes and surface coatings, and the number of assembly components is limited to very few. For example, in the case of self-assembly of nano-cubes with origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nano scale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nano positioners. To fulfill the microfactory vision, numerous challenges related to design, power, control and nanoscale task completion by these microrobots must be overcome. In this work, we study three types of microrobots for the microfactory: a world’s first laser-driven micrometer-size locomotor called ChevBot，a stationary millimeter-size robotic arm, called Solid Articulated Four Axes Microrobot (sAFAM), and a light-powered centimeter-size crawler microrobot called SolarPede. The ChevBot can perform autonomous navigation and positioning on a dry surface with the guidance of a laser beam. The sAFAM has been designed to perform nano positioning in four degrees of freedom, and nanoscale tasks such as indentation, and manipulation. And the SolarPede serves as a mobile workspace or transporter in the microfactory environment

Magnetic field assisted milli-scale robotic assembly machine: an approach to massively parallel swarm robotic automation systems

The vision of highly parallel, automated manufacturing systems that can build macroscopic products by heterogeneous assembly of many small devices will have a major impact in manufacturing. In this study, a novel milli-scale robotic assembly machine with parallel capabilities, assisted with programmable magnetic field, is developed. The machine prototype consists of a 16x16 array of electromagnets. The dimensions of the electromagnets are 5mm high with an inner diameter of 1.1mm and outer diameter of 2.5mm. All the electromagnets are driven by a 16x16 array of H-Bridges, and an Arduino microcontroller is used to control and program the arrays. Using the machine to manipulate up to nine milli-scale robots simultaneously is demonstrated. The robot is designed with a 3x3 electromagnets array to operate and it consists of two parts: a polycarbonate chassis and five grade N42 NdFeB permanent magnets located at four corners and center of the chassis. The capability of pick-and-place millimeter size devices, such as SMD (Surface Mounted Device) LEDs (Light Emitting Diodes), specifically 0805 LEDs, is demonstrated by using the prototype machine. A milli-scale tweezer is designed using AutoCAD Fusion 360 and simulated with COMSOL Multiphysics. The milli-scale tweezer is fabricated using a home-built Computer Numerical Control (CNC) machine. The tweezer is subsequently mounted to the robots. For proof-of-concept, simultaneous operation for pick-and-place two LEDs is carried out by two milli robots. Furthermore, an 8x8 LED array is assembled by operating a single robot, which proves the potential capability of assembling an LED screen with the presented technology. The problems and challenges as well as the future outlook are discussed in the last chapter

A Magnetic Localization Technique Designed for use with Magnetic Levitation Systems.

M.S. Thesis. University of Hawaiʻi at Mānoa 2017

Development of novel high-performance six-axis magnetically levitated instruments for nanoscale applications

This dissertation presents two novel 6-axis magnetic-levitation (maglev) stages that are capable of nanoscale positioning. These stages have very simple and compact structure that is advantageous to meet requirements in the next-generation nanomanufacturing. The 6-axis motion generation is accomplished by the minimum number of actuators and sensors. The first-generation maglev stage is capable of generating translation of 300 ??m in x, y and z, and rotation of 3 mrad about the three orthogonal axes. The stage demonstrates position resolution better than 5 nm rms and position noise less than 2 nm rms. It has a light moving-part mass of 0.2126 kg. The total power consumption by all the actuators is only around a watt. Experimental results show that the stage can carry, orient, and precisely position an additional payload as heavy as 0.3 kg. The second-generation maglev stage is capable of positioning at the resolution of a few nanometers over a planar travel range of several millimeters. A novel actuation scheme was developed for the compact design of this stage that enables 6-axis force generation with just 3permanent-magnet pieces. Electromagnetic forces were calculated and experimentally verified. The complete design and construction of the second-generation maglev stage was performed. All the mechanical part and assembly fixtures were designed and fabricated at the mechanical engineering machine shop. The single moving part is modeled as a pure mass due to the negligible effect of the magnetic spring and damping. Classical as well as advanced controllers were designed and implemented for closed-loop feedback control. A nonlinear model of the force was developed and applied to cancel the nonlinearity of the actuators over the large travel range. Various experiments were conducted to test positioning, loading, and vibration-isolation capabilities. This maglev stage has a moving-part mass of 0.267 kg. Its position resolution is 4 nm over a travel range of 5 ?? 5 mm in the x-y plane. Its actuators are designed to carry and precisely position an additional payload of 2 kg. Its potential applications include semiconductor manufacturing, micro-fabrication and assembly, nanoscale profiling, and nano-indentation