Conceptual designs of multi-degree of freedom compliant parallel manipulators composed of wire-beam based compliant mechanisms

This paper proposes conceptual designs of multi-degree(s) of freedom (DOF) compliant parallel manipulators (CPMs) including 3-DOF translational CPMs and 6-DOF CPMs using a building block based pseudo-rigid-body-model (PRBM) approach. The proposed multi-DOF CPMs are composed of wire-beam based compliant mechanisms (WBBCMs) as distributed-compliance compliant building blocks (CBBs). Firstly, a comprehensive literature review for the design approaches of compliant mechanisms is conducted, and a building block based PRBM is then presented, which replaces the traditional kinematic sub-chain with an appropriate multi-DOF CBB. In order to obtain the decoupled 3-DOF translational CPMs (XYZ CPMs), two classes of kinematically decoupled 3-PPPR (P: prismatic joint, R: revolute joint) translational parallel mechanisms (TPMs) and 3-PPPRR TPMs are identified based on the type synthesis of rigid-body parallel mechanisms, and WBBCMs as the associated CBBs are further designed. Via replacing the traditional actuated P joint and the traditional passive PPR/PPRR sub-chain in each leg of the 3-DOF TPM with the counterpart CBBs (i.e. WBBCMs), a number of decoupled XYZ CPMs are obtained by appropriate arrangements. In order to obtain the decoupled 6-DOF CPMs, an orthogonally-arranged decoupled 6-PSS (S: spherical joint) parallel mechanism is first identified, and then two example 6-DOF CPMs are proposed by the building block based PRBM method. It is shown that, among these designs, two types of monolithic XYZ CPM designs with extended life have been presented

Creative design and modelling of large-range translation compliant parallel manipulators

Compliant parallel mechanisms/manipulators (CPMs) are parallel manipulators that transmit motion/load by deformation of their compliant members. Due to their merits such as the eliminated backlash and friction, no need for lubrication, reduced wear and noise, and monolithic configuration, they have been used in many emerging applications as scanning tables, bio-cell injectors, nano-positioners, and etc. How to design large-range CPMs is still a challenging issue. To meet the needs for large-range translational CPMs for high-precision motion stages, this thesis focuses on the systematic conceptual design and modelling of large-range translational CPMs with distributed-compliance. Firstly, several compliant parallel modules with distributed-compliance, such as spatial multi-beam modules, are identified as building blocks of translational CPMs. A normalized, nonlinear and analytical model is then derived for the spatial multi-beam modules to address the non-linearity of load-equilibrium equations. Secondly, a new design methodology for translational CPMs is presented. The main characteristic of the proposed design approach is not only to replace kinematic joints as in the literature, but also to replace kinematic chains with appropriate multiple degrees-of-freedom (DOF) compliant parallel modules. Thirdly, novel large-range translational CPMs are constructed using the proposed design methodology and identified compliant parallel modules. The proposed novel CPMs include, for example, a 1-DOF compliant parallel gripper with auto-adaptive grasping function, a stiffness-enhanced XY CPM with a spatial compliant leg, and an improved modular XYZ CPM using identical spatial double four-beam modules. Especially, the proposed XY CPM and XYZ CPM can achieve a 10mm’s motion range along each axis in the case studies. Finally, kinematostatic modelling of the proposed translational CPMs is presented to enable rapid performance characteristic analysis. The proposed analytical models are also compared with finite element analysis

Static force capabilities and dynamic capabilities of parallel mechanisms equipped with safety clutches

Cette thèse étudie les forces potentielles des mécanismes parallèles plans à deux degrés de liberté équipés d'embrayages de sécurité (limiteur de couple). Les forces potentielles sont étudiées sur la base des matrices jacobienne. La force maximale qui peut être appliquée à l'effecteur en fonction des limiteurs de couple ainsi que la force maximale isotrope sont déterminées. Le rapport entre ces deux forces est appelé l'efficacité de la force et peut être considéré ; comme un indice de performance. Enfin, les résultats numériques proposés donnent un aperçu sur la conception de robots coopératifs reposant sur des architectures parallèles. En isolant chaque lien, les modèles dynamiques approximatifs sont obtenus à partir de l'approche Newton-Euler et des équations de Lagrange pour du tripteron et du quadrupteron. La plage de l'accélération de l'effecteur et de la force externe autorisée peut être trouvée pour une plage donnée de forces d'actionnement.This thesis investigates the force capabilities of two-degree-of-freedom planar parallel mechanisms that are equipped with safety clutches (torque limiters). The force capabilities are studied based on the Jacobian matrices. The maximum force that can be applied at the end-effector for given torque limits (safety index) is determined together with the maximum isotropic force that can be produced. The ratio between these two forces, referred to as the force effectiveness, can be considered as a performance index. Finally, some numerical results are proposed which can provide insight into the design of cooperation robots based on parallel architectures. Considering each link and slider system as a single body, approximate dynamic models are derived based on the Newton-Euler approach and Lagrange equations for the tripteron and the quadrupteron. The acceleration range or the external force range of the end-effector are determined and given as a safety consideration with the dynamic models

DETC2005/MECH-85241 DYNAMIC MODELING AND CONTROLLER DESIGN OF A PLANAR PARALLEL 3-RRR COMPLIANT MICROMANIPULATOR

ABSTRACT This paper presents control system formulations of a planar parallel 3-RRR parallel compliant micromanipulator. The design methodology is illustrated with one of such designs constructed at Beijing University of Aeronautics and Astronautics, China. Compliant joints and motion-amplifying mechanism allow rapid and accurate response as well as larger workspace. The three PZT actuators attached on the linkages produce the bending moments. The sensor is a CCD camera feeding back the tool point position. The plant is the equations of motion which can be formulated using the Lagrangian method and dynamics software. The system dynamic model was developed with ADAMS which can export the nonlinear and linearized control plant to Matlab Simulink. Overall dynamic behavior of the manipulator will be illustrated through simulations with Matlab Simulink Toolbox. After comparison of two different control plans, the controller obtained from LQR method was chosen to achieve the control objectives. Closed-loop performance in response to a step reference was plotted. Bode plots of the sensitivity and complementary sensitivity showed their relation to the step response. Gain and phase margins was computed

Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation

Nano-positioning is widely used in Micro-electromechanical Systems (MEMS), micromanipulator and biomedicine, coupling errors and tiny output displacements are the main disadvantages of the one. A totally uncoupled micro/nano-positioning stage with lever amplifiers is designed and tested in this paper. It is fully symmetrical along with the x- and y-directions. For obtaining large output displacements, two fully symmetric two-stage lever displacement amplifiers are utilized to amplify output displacements of piezoelectric actuators (PZTs). The established models for performances evaluation of the stage, in terms of kinetostatics, amplification ratio, reachable workspace, the input and output stiffness, are verified by finite element analysis (FEA). After that, the dimensional optimization is also carried out through the genetic optimization algorithm.The prototype of the mechanism is fabricated by using Wire-Electrical-Discharge-Machining (WEDM) process. Testing results indicate that the proposed micromanipulator demonstrates good performance.</p

Workshop on "Robotic assembly of 3D MEMS".

Proceedings of a workshop proposed in IEEE IROS'2007.The increase of MEMS' functionalities often requires the integration of various technologies used for mechanical, optical and electronic subsystems in order to achieve a unique system. These different technologies have usually process incompatibilities and the whole microsystem can not be obtained monolithically and then requires microassembly steps. Microassembly of MEMS based on micrometric components is one of the most promising approaches to achieve high-performance MEMS. Moreover, microassembly also permits to develop suitable MEMS packaging as well as 3D components although microfabrication technologies are usually able to create 2D and "2.5D" components. The study of microassembly methods is consequently a high stake for MEMS technologies growth. Two approaches are currently developped for microassembly: self-assembly and robotic microassembly. In the first one, the assembly is highly parallel but the efficiency and the flexibility still stay low. The robotic approach has the potential to reach precise and reliable assembly with high flexibility. The proposed workshop focuses on this second approach and will take a bearing of the corresponding microrobotic issues. Beyond the microfabrication technologies, performing MEMS microassembly requires, micromanipulation strategies, microworld dynamics and attachment technologies. The design and the fabrication of the microrobot end-effectors as well as the assembled micro-parts require the use of microfabrication technologies. Moreover new micromanipulation strategies are necessary to handle and position micro-parts with sufficiently high accuracy during assembly. The dynamic behaviour of micrometric objects has also to be studied and controlled. Finally, after positioning the micro-part, attachment technologies are necessary

Nitride semiconductors studied by atom probe tomography and correlative techniques

Optoelectronic devices fabricated from nitride semiconductors include blue and green light emitting diodes (LEDs) and laser diodes (LDs). To design efficient devices, the structure and composition of the constituent materials must be well-characterised. Traditional microscopy techniques used to examine nitride semiconductors include transmission electron microscopy (TEM), and atomic force microscopy (AFM). This thesis describes the study of nitride semiconductor materials using these traditional methods, as well as atom probe tomography (APT), a technique more usually applied to metals that provides three-dimensional (3D) compositional information at the atomic scale. By using both APT and correlative microscopy techniques, a more complete understanding of the material can be gained, which can potentially lead to higher-efficiency, longer-lasting devices. Defects, such as threading dislocations (TDs), can harm device performance. An AFM-based technique was used to show that TDs affect the local electrical properties of nitride materials. To investigate any compositional changes around the TD, APT studies of TDs were attempted, and evidence for oxygen enrichment near the TD was observed. The dopant level in nitride devices also affects their optoelectronic properties, and the combination of APT and TEM was used to show that Mg dopants were preferentially incorporated into pyramidal inversion domains, with a Mg content two orders of magnitude above the background level. Much debate has been focused on the microstructural origin of charge carrier localisation in InGaN. Alloy inhomogeneities have often been suggested to provide this localisation, yet APT has revealed InGaN quantum wells to be a statistically random alloy. Electron beam irradiation in the TEM caused damage to the InGaN, however, and a statistically significant deviation from a random alloy distribution was then observed by APT. The alloy homogeneity of InAlN was also studied, and this alloy system provided a unique opportunity to study gallium implantation damage to the APT sample caused during sample preparation by the focused ion beam (FIB). The combination of APT with traditional microscopy techniques made it possible to achieve a thorough understanding of a wide variety of nitride semiconductor materials.This work was supported by the EPSRC, Sharp Laboratories of Europe and Pembroke College, Cambridge

A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism

This paper presents a 2-degrees of freedom flexure-based micropositioning stage with a flexible decoupling mechanism. The stage is composed of an upper planar stage and four vertical support links to improve the out-of-plane stiffness. The moving platform is driven by two voice coil motors, and thus it has the capability of large working stroke. The upper stage is connected with the base through six double parallel four-bar linkages mechanisms, which are orthogonally arranged to implement the motion decoupling in the x and y directions. The vertical support links with serially connected hook joints are utilized to guarantee good planar motion with heavy-loads. The static stiffness and the dynamic resonant frequencies are obtained based on the theoretical analyses. Finite element analysis is used to investigate the characteristics of the developed stage. Experiments are carried out to validate the established models and the performance of the developed stage. It is noted that the developed stage has the capability of translational motion stroke of 1.8 mm and 1.78 mm in working axes. The maximum coupling errors in the x and y directions are 0.65% and 0.82%, respectively, and the motion resolution is less than 200 nm. The experimental results show that the developed stage has good capability for trajectory tracking

PKM mechatronic clamping adaptive device

This study proposes a novel adaptive fixturing device based on active clamping systems for smart micropositioning of thin-walled precision parts. The modular architecture and the structure flexibility make the system suitable for various industrial applications. The proposed device is realized as a Parallel Kinematic Machine (PKM), opportunely sensorized and controlled, able to perform automatic error-free workpiece clamping procedures, drastically reducing the overall fixturing set-up time. The paper describes the kinematics and dynamics of this mechatronic system. A first campaign of experimental trails has been carried out on the prototype, obtaining promising results