Modellierung, Simulation und Optimierung integrierter Schaltkreise

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Plasma basic concepts and nitrogen containing plasmas

Basic concepts related to plasmas are described as well as the typical characterization methods currently available. A brief overview about some plasma applications is given, but focusing on plasma used in material processing mainly devoted to the microelectronics industry. Finally, specific applications related to plasma-assisted MBE for nitrides and dilute nitrides are given, showing some interesting research works performed to that purpose, and giving the usual characterization techniques commonly used in such processes

Active Thermal Sensor for Improved Distributed Temperature Sensing in Haptic Arrays

The efficacy of integrating temperature sensors into compliant pressure sensing technologies, such as haptic sensing arrays, is limited by thermal losses into the substrate. A solution is proposed here whereby an active heat sink is incorporated into the sensor to mitigate these losses, while still permitting the use of common VLSI manufacturing methods and materials to be used in sensor fabrication. This active sink is capable of responding to unknown fluctuations in external temperature, that is, the temperature that is to be measured, and directly compensates in real time for the thermal power loss into the substrate by supplying an equivalent amount of power back into the thermal sensor. In this paper, the thermoelectric effects of the active heat sink/thermal sensor system are described and used to reduce the complexity of the system to a simple one-dimensional numerical model. This model is incorporated into a feedback system used to control the active heat sink and monitor the sensor output. A fabrication strategy is also described to show how such a technology can be incorporated into a common bonded silicon-on-insulator- (BSOI-) based capacitive pressure sensor array such as that used in some haptic sensing systems

Microgravity science and applications bibliography, 1989 revision

This edition of the Microgravity Science and Applications (MSA) Bibliography is a compilation of government reports, contractor reports, conference proceedings, and journal articles dealing with flight experiments utilizing a low gravity environment to elucidate and control various processes, or with ground based activities that provide supported research. It encompasses literature published but not cited in the 1988 Revision and that literature which has been published in the past year. Subdivisions of the Bibliography include: electronic materials, metals, alloys, and composites; fluids, interfaces, and transport; glasses and ceramics; biotechnology; combustion science; experimental technology, facilities, and instrumentation. Also included are publications from the European, Soviet, and Japanese programs