A micro-positioning motion system to enhance lithography in semiconductor manufacturing machines

This study proposes a novel precision micro-motion system to enhance the lithography process in the semiconductor manufacturing machines. This proposed micro-motion system is a new smart-materials stage that integrates piezoelectric actuators in the reticle stage of the future semiconductor manufacturing machines. The proposed smart-materials based reticle (SMBR) implements piezoelectric actuators to a novel flexure hinge-based mechanism to enhance the precision of the reticle stage; such that it reduces the relative in-plane micro-positioning errors in the synchronization motion between the reticle stage and the wafer stage in a time period less than the current settling time in lithography machines, 10 ms. The proposed SMBR can provide in-plane translational motions along x- and y-axes, and in-plane θz-rotational motion around z-axis with an amount of 11:7462 μm x 11:7462 μm x 0:4713 mrad, respectively, to correct the orientation of the reticle stage which governs the pattern of the integrated circuit being printed. The proposed SMBR considers the current dynamic performance of reticle stage of the semiconductor manufacturing machines; such that (i) it corrects the in-plane synchronization errors in a time period less than the settling time of the short-stroke, and (ii) the working frequency bandwidth remains above 550 Hz. The proposed SMBR can be integrated with the precision motion systems of the semiconductor manufacturing machines to enhance the storage capacity, the functionality of the devices, and the CPU processing capability

21st century manufacturing machines: Design, fabrication and controls

Advances in nanotechnology, microfabrication and new manufacturing processes, the revolution of open electronics, and the emerging internet of things will influence the design, manufacture, and control of manufacturing machines in the future. For instance, miniaturization will change manufacturing processes; additive and rapid prototyping will change the production of machine components; and open electronics offer a platform for new control architectures for manufacturing systems that are open, modular, and easy to reconfigure. Combined with the latest trends in cyber-physical systems and the internet of things, open architecture controllers for CNC systems can become platforms, oriented for numerical control as a service (NCaaS) and manufacturing as a service, tailored to the creation of cyber-manufacturing networks of shared resources and web applications. With this potential in mind, this research presents new design-for-fabrication methodologies and control strategies to facilitate the creation of next generation machine tools. It provides a discussion and examples of the opportunities that the present moment offers. The first portion of this dissertation focuses on the design of complex 3D MEMS machines realized from conventional 2.5D microfabrication processes. It presents an analysis of an example XYZ-MEMS parallel kinematics stage as well as of designs of the individual components of the manipulator, integrated into a design approach for PK-XYZ-MEMS stages. It seems likely that this design-for-fabrication methodology will enable higher functionality in MEMS micromachines and result in new devices that interact, in three full dimensions, with their surroundings. Novel and innovative research exemplifies the opportunities new and economical manufacturing technologies offer for the design and fabrication of modern machine tools. The second portion of this dissertation describes the demonstration of a new flexural joint designed with both traditional and additive manufacturing processes. It extrapolates principles based on the design of this joint that alleviate the effects of low accuracy and poor surface finishing, anisotropy, reductions in material properties of components, and small holding forces. Based on these results, the next section presents case examples of the construction of mesoscale devices and machine components using multilayered composites and hybrid flexures for precision engineering, medical training, and machine tools for reduced life applications and tests design-for-fabrication strategies. The results suggest the strategies effectively address existing problems, providing a repertory of creative solutions applicable to the design of devices with hybrid flexures. The implications for medical industry, micro robotics, soft robotics, flexible electronics, and metrology systems are positive. Chapter number five examines to positive impact of open architectures of control for CNC systems, given the current availability of micro-processing power and open-source electronics. It presents a new modular architecture controller based on open-source electronics. This component-based approach offers the possibility of adding micro-processing units and an axis of motion without modification of the control programs. This kind of software and hardware modularity is important for the reconfiguration of new manufacturing units. The flexibility of this architecture makes it a convenient testbed for the implementation of new control algorithms on different electromechanical systems. This research provides general purpose, open architecture for the design of a CNC system based on open electronics and detailed information to experiment with these platforms. This dissertation’s final chapter describes how applying the latest trends to the classical concepts of modular and open architecture controllers for CNC systems results in a control platform, oriented for numerical control as a service (NCaaS) and manufacturing as a service (MaaS), tailored to the creation of cyber-manufacturing networks of shared resources and web applications. Based on this technology, this chapter introduces new manufacturing network for numerical control (NC) infrastructure, provisioned and managed over the internet. The proposed network architecture has a hardware, a virtualization, an operating system, and a network layer. With a new operating system necessary to service and virtualize manufacturing resources, and a micro service architecture of manufacturing nodes and assets, this network is a new paradigm in cloud manufacturing

Design, Optimization, and Experimental Characterization of a Novel Magnetically Actuated Finger Micromanipulator

The ability of external magnetic fields to precisely control micromanipulator systems has received a great deal of attention from researchers in recent years due to its off-board power source. As these micromanipulators provide frictionless motion, and precise motion control, they have promising potential applications in many fields. Conversely, major drawbacks of electromagnetic micromanipulators, include a limited motion range compared to the micromanipulator volume, the inability to handle heavy payloads, and the need for a large drive unit compared to the size of the levitated object, and finally, a low ratio of the generated magnetic force to the micromanipulator weight. To overcome these limitations, we designed a novel electromagnetic finger micromanipulator that was adapted from the well-known spherical robot. The design and optimization procedures for building a three Degree of Freedoms (DOF) electromagnetic finger micromanipulator are firstly introduced. This finger micromanipulator has many potential applications, such as cell manipulation, and pick and place operations. The system consists of two main subsystems: a magnetic actuator, and an electromagnetic end-effector that is connected to the magnetic actuator by a needle. The magnetic actuator consists of four permanent magnets and four electromagnetic coils that work together to guide the micromanipulator finger in the xz plane. The electromagnetic end-effector consists of a rod shape permanent magnet that is aligned along the y axis and surrounded by an electromagnetic coil. The optimal configuration that maximizes the micromanipulator actuation force, and a closed form solution for micromanipulator magnetic actuation force are presented. The model is verified by measuring the interaction force between an electromagnet and a permanent magnet experimentally, and using Finite Element Methods (FEM) analysis. The results show an agreement between the model, the experiment, and the FEM results. The error difference between the FEM, experimental, and model data was 0.05 N. The micromanipulator can be remotely operated by transferring magnetic energy from outside, which means there is no mechanical contact between the actuator and the micromanipulator. Moreover, three control algorithms are designed in order to compute control input currents that are able to control the position of the end-effector in the x, y, and z axes. The proposed controllers are: PID controller, state-feedback controller, and adaptive controller. The experimental results show that the micromanipulator is able to track the desired trajectory with a steady-state error less than 10 µm for a payload free condition. Finally, the ability of the micromanipulator to pick-and-place unknown payloads is demonstrated. To achieve this objective, a robust model reference adaptive controller (MRAC) using the MIT rule for an adaptive mechanism to guide the micromanipulator in the workspace is implemented. The performance of the MRAC is compared with a standard PID controller and state-feedback controller. For the payload free condition, the experimental results show the ability of the micromanipulator to follow a desired motion trajectory in all control strategies with a root mean square error less than 0.2 mm. However, while there is payload variation, the PID controller response yields a non smooth motion with a large overshoot and undershoot. Similarly, the state-feedback controller suffers from variability of dynamics and disturbances due to the payload variation, which yields to non-smooth motion and large overshoot. The micromanipulator motion under the MRAC control scheme conversely follows the desired motion trajectory with the same accuracy. It is found that the micromanipulator can handle payloads up to 75 grams and it has a motion range of ∓ 15 mm in all axes

Scalability study for robotic hand platform

The goal of this thesis project was to determine the lower limit of scale for the RIT robotic grasping hand. This was accomplished using a combination of computer simulation and experimental studies. A force analysis was conducted to determine the size of air muscles required to achieve appropriate contact forces at a smaller scale. Input variables, such as the actuation force and tendon return force, were determined experimentally. A dynamic computer model of the hand system was then created using Recurdyn. This was used to predict the contact (grasping) force of the fingers at full-scale, half-scale, and quarter-scale. Correlation between the computer model and physical testing was achieved for both a life-size and half-scale finger assembly. To further demonstrate the scalability of the hand design, both half and quarter-scale robotic hand rapid prototype assemblies were built using 3D printing techniques. This thesis work identified the point where further miniaturization would require a change in the manufacturing process to micro-fabrication. Several techniques were compared as potential methods for making a production intent quarter-scale robotic hand. Investment casting, Swiss machining, and Selective Laser Sintering were the manufacturing techniques considered. A quarter-scale robotic hand tested the limits of each technology. Below this scale, micro-machining would be required. The break point for the current actuation method, air muscles, was also explored. Below the quarter-scale, an alternative actuation method would also be required. Electroactive Polymers were discussed as an option for the micro-scale. In summary, a dynamic model of the RIT robotic grasping hand was created and validated as scalable at full and half-scales. The model was then used to predict finger contact forces at the quarter-scale. The quarter-scale was identified as the break point in terms of the current RIT robotic grasping hand based on both manufacturing and actuation. A novel, prototype quarter-scale robotic hand assembly was successfully built by an additive manufacturing process, a high resolution 3D printer. However, further miniaturization would require alternate manufacturing techniques and actuation mechanisms

Hybrid intelligent machine systems : design, modeling and control

To further improve performances of machine systems, mechatronics offers some opportunities. Traditionally, mechatronics deals with how to integrate mechanics and electronics without a systematic approach. This thesis generalizes the concept of mechatronics into a new concept called hybrid intelligent machine system. A hybrid intelligent machine system is a system where two or more elements combine to play at least one of the roles such as sensor, actuator, or control mechanism, and contribute to the system behaviour. The common feature with the hybrid intelligent machine system is thus the presence of two or more entities responsible for the system behaviour with each having its different strength complementary to the others. The hybrid intelligent machine system is further viewed from the system’s structure, behaviour, function, and principle, which has led to the distinction of (1) the hybrid actuation system, (2) the hybrid motion system (mechanism), and (3) the hybrid control system. This thesis describes a comprehensive study on three hybrid intelligent machine systems. In the case of the hybrid actuation system, the study has developed a control method for the “true” hybrid actuation configuration in which the constant velocity motor is not “mimicked” by the servomotor which is treated in literature. In the case of the hybrid motion system, the study has resulted in a novel mechanism structure based on the compliant mechanism which allows the micro- and macro-motions to be integrated within a common framework. It should be noted that the existing designs in literature all take a serial structure for micro- and macro-motions. In the case of hybrid control system, a novel family of control laws is developed, which is primarily based on the iterative learning of the previous driving torque (as a feedforward part) and various feedback control laws. This new family of control laws is rooted in the computer-torque-control (CTC) law with an off-line learned torque in replacement of an analytically formulated torque in the forward part of the CTC law. This thesis also presents the verification of these novel developments by both simulation and experiments. Simulation studies are presented for the hybrid actuation system and the hybrid motion system while experimental studies are carried out for the hybrid control system

Power-Scavenging MEMS Robots

This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was identified. It also was determined that the actuator-wing configuration with maximum deflection and surface area yet minimum mass had the greatest lift-to-weight ratio. Powered testing results showed that the microrobots successfully scavenged power from a remote 660-nm laser. These microrobots also demonstrated rapid downward flapping, but none achieved flight. The results show that the microrobots were too heavy and lacked sufficient wing surface area. It was determined that a successfully flying microrobot can be achieved by adding a robust, light-weight material to the optimum actuator-wing configuration—similar to insect wings. The ultimate objective of the flying microrobot project is an autonomous, fully maneuverable flying microrobot that is capable of sensing and acting upon a target. Such a microrobot would be capable of precise lethality, accurate battle-damage assessment, and successful penetration of otherwise inaccessible targets

Design, Fabrication and Characterization of Micro Opto-Electro-Mechanical Systems

Several micro-opto-electro-mechanical structures were designed using the Multi-User MEMS Process (MUMPS). Specific design techniques were investigated for improving the capabilities of elevating flip up structures. The integration of several flip up microoptical structures into a microoptical system was explored with emphasis on the development of a microinterferometer. The thermal effects on the Modulus of Elasticity were determined by detecting the resonant frequency for a square Flexure Beam Micromirror Device. The resonance of the device was found to match theory to within 0.1 % and the Modulus of Elasticity was found to decrease by 0.041 GPa/K from 290 to 450 K. Thermal testing on each of the polysilicon MUMPS layers yielded a linear increase in resistivity of .000001 to .000002 Ohm-cm/K from 290 to 450 K. Several designs of a surface microoptical structure known as a variable grating were developed and characterized. The device yielded modulation intensities of up to 6.4 and 9.0 dB for the first two diffracted orders, respectively. The devices utilize heat drive actuator(s) to deflect a Poly 2 grating laterally, up to 4 micrometers, over a Poly 1 stationary grating which changes the period dimensions of the composite grating. This device can be effectively used for multichannel optical switching

Design and Fabrication of Electrothermal Micromotors and Compliant Mechanisms for Spatial Parallel Micromanipulators

In this dissertation a new class of spatial micromechanisms employing compliant joints and electrothermal motors has been developed. The spatial micromechanisms contain three limbs driven by individual electrothermal linear motors to form multiple degree-of-freedom (DOF) manipulators. At the coaxial point of the actuated limbs, a platform acts as the end effector of the device. Each limb in this spatial mechanism interconnects compliant pseudo-revolute joints, which are capable of providing either in-plane or out-of-plane rotations. Mechanisms are demonstrated using polysilicon surface micromachining, and a new four-layer UV-LIGA fabrication process is also presented for future production of high aspect ratio spatial micromechanisms. Linear motors are developed to provide bi-directional continuous motions to drive the spatial mechanism. Individual electrothermal actuators within a linear motor employ saw-toothed impactors to provide a synchronized locking/pushing motion without needing a secondary clamping actuator. These saw-toothed linear motors provide a platform for accurate open-loop position control, continuously smooth motion, high motion resolution, and long life operation. Electrothermal V-beam actuators using multiple arrayed beams have been shown to provide large output forces up to several mN, sufficient for the spatial micromechanisms developed in this work. Taking advantage of a modeling approach based on the pseudo-rigid-body model, a new force and displacement model for the electrothermal V-beam actuators is developed and shown to provide good agreement with experimental results. The optimization design for the thermal actuators is also discussed to reduce actuation power. Pseudo-rigid-body modeling is used to simplify the designed compliant spatial mechanisms, allowing the well-known rigid body method to replace the cumbersome matrix method for compliant mechanism analysis. Based on the pseudo-rigid-body model, inverse kinematics is used to find the workspace of a typical microscale mechanism, together with the required movement for each linear motor to allow the end effector to reach a desired position. Dynamic analysis of the mechanism is applied to determine the maximum required forces for each actuator. The manipulator workspace volume defined by maximum link lengths and joint rotation angles is determined by using the Monte Carlo method. A systematic design procedure is finally proposed to enable effective compliant micromanipulator designs

Design and realization of a microassembly workstation

With the miniaturization of products to the levels of micrometers and the recent developments in microsystem fabrication technologies, there is a great need for an assembly process for the formation of complex hybrid microsystems. Integration of microcomponents made up of different materials and manufactured using different micro fabrication techniques is still a primary challenge since some of the fundamental problems originating from the small size of parts to be manipulated, high precision necessity and specific problems of the microworld in that field are still not fully investigated. In this thesis, design and development of an open-architecture and reconfigurable microassembly workstation for efficient and reliable assembly of micromachined parts is presented. The workstation is designed to be used as a research tool for investigation of the problems in microassembly. The development of such a workstation includes the design of: (i) a manipulation system consisting of motion stages providing necessary travel range and precision for the realization of assembly tasks, (ii) a vision system to visualize the microworld and the determination of the position and orientation of micro components to be assembled, (iii) a robust control system and necessary fixtures for the end effectors that allow easy change of manipulation tools and make the system ready for the desired task. In addition tele-operated and semi-automated assembly concepts are implemented. The design is verified by implementing tasks in various ranges for micro-parts manipulation. The versatility of the workstation is demonstrated and high accuracy of positioning is shown