Optimization of a PVC Membrane for Reference Field Effect Transistors

For the miniaturization of ISFET sensing systems, the concept of a REFET with low ion sensitivity is proposed to replace the conventional reference electrodes through the arrangement of a quasi reference electrode and a differential readout circuit. In this study, an ion-unblocking membrane was used as the top layer of a REFET. To optimize the REFET performance, the influences of the silylating process, different plasticizers, and the composition of the PVC cocktails were investigated. A low sensitivity (10.4 ± 2.2 mV/pH) and high linearity (99.7 ± 0.3 %) in the range from pH 2.2 to pH 11.6 was obtained for the REFET with a 60 wt.% DNP/(DNP + PVC) membrane. To evaluate the long term stability, the drift coefficient was estimated, and for the best REFET, it was −0.74 mV/h. Two criteria for assessing the lifetime of REFETs were used, namely the increase in pH sensitivity to a value higher than 15 mV/pH and the degradation of linearity below 99 %. For the best REFET, it was approximately 15 days

Design of a single-chip pH sensor using a conventional 0.6-μm CMOS process

A pH sensor fabricated on a single chip by an unmodified, commercial 0.6-/spl μm CMOS process is presented. The sensor comprises a circuit for making differential measurements between an ion-sensitive field-effect transistor (ISFET) and a reference FET (REFET). The ISFET has a floating-gate structure and uses the silicon nitride passivation layer as a pH-sensitive insulator. As fabricated, it has a large threshold voltage that is postulated to be caused by a trapped charge on the floating gate. Ultraviolet radiation and bulk-substrate biasing is used to permanently modify the threshold voltage so that the ISFET can be used in a battery-operated circuit. A novel post-processing method using a single layer of photoresist is used to define the sensing areas and to provide robust encapsulation for the chip. The complete circuit, operating from a single 3-V supply, provides an output voltage proportional to pH and can be powered down when not required

ISFET Based Microsensors for Environmental Monitoring

The use of microsensors for in-field monitoring of environmental parameters is gaining interest due to their advantages over conventional sensors. Among them microsensors based on semiconductor technology offer additional advantages such as small size, robustness, low output impedance and rapid response. Besides, the technology used allows integration of circuitry and multiple sensors in the same substrate and accordingly they can be implemented in compact probes for particular applications e.g., in situ monitoring and/or on-line measurements. In the field of microsensors for environmental applications, Ion Selective Field Effect Transistors (ISFETs) have a special interest. They are particularly helpful for measuring pH and other ions in small volumes and they can be integrated in compact flow cells for continuous measurements. In this paper the technologies used to fabricate ISFETs and a review of the role of ISFETs in the environmental field are presented

Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications

Application of photocurable polymers for encapsulation of ion selective field effect transistors (ISFET) and for membrane formation in chemical sensitive field effect transistors (ChemFET) during the last 20 years is discussed. From a technological point of view these materials are quite interesting because they allow the use of standard photo-lithographic processes, which reduces significantly the time required for sensor encapsulation and membrane deposition and the amount of manual work required for this, all items of importance for sensor mass production. Problems associated with the application of this kind of polymers in sensors are analysed and estimation of future trends in this field of research are presented

Optimization of Urea-EnFET Based on Ta2O5 Layer with Post Annealing

In this study, the urea-enzymatic field effect transistors (EnFETs) were investigated based on pH-ion sensitive field effect transistors (ISFETs) with tantalum pentoxide (Ta2O5) sensing membranes. In addition, a post N2 annealing was used to improve the sensing properties. At first, the pH sensitivity, hysteresis, drift, and light induced drift of the ISFETs were evaluated. After the covalent bonding process and urease immobilization, the urea sensitivity of the EnFETs were also investigated and compared with the conventional Si3N4 sensing layer. The ISFETs and EnFETs with annealed Ta2O5 sensing membranes showed the best responses, including the highest pH sensitivity (56.9 mV/pH, from pH 2 to pH 12) and also corresponded to the highest urea sensitivity (61 mV/pCurea, from 1 mM to 7.5 mM). Besides, the non-ideal factors of pH hysteresis, time drift, and light induced drift of the annealed samples were also lower than the controlled Ta2O5 and Si3N4 sensing membranes

3D printed neuromorphic sensing systems

Thanks to the high energy efficiency, neuromorphic devices are spotlighted recently by mimicking the calculation principle of the human brain through the parallel computation and the memory function. Various bio-inspired \u27in-memory computing\u27 (IMC) devices were developed during the past decades, such as synaptic transistors for artificial synapses. By integrating with specific sensors, neuromorphic sensing systems are achievable with the bio-inspired signal perception function. A signal perception process is possible by a combination of stimuli sensing, signal conversion/transmission, and signal processing. However, most neuromorphic sensing systems were demonstrated without signal conversion/transmission functions. Therefore, those cannot fully mimic the function provides by the sensory neuron in the biological system. This thesis aims to design a neuromorphic sensing system with a complete function as biological sensory neurons. To reach such a target, 3D printed sensors, electrical oscillators, and synaptic transistors were developed as functions of artificial receptors, artificial neurons, and artificial synapses, respectively. Moreover, since the 3D printing technology has demonstrated a facile process due to fast prototyping, the proposed 3D neuromorphic sensing system was designed as a 3D integrated structure and fabricated by 3D printing technologies. A novel multi-axis robot 3D printing system was also utilized to increase the fabrication efficiency with the capability of printing on vertical and tilted surfaces seamlessly. Furthermore, the developed 3D neuromorphic system was easily adapted to the application of tactile sensing. A portable neuromorphic system was integrated with a tactile sensing system for the intelligent tactile sensing application of the humanoid robot. Finally, the bio-inspired reflex arc for the unconscious response was also demonstrated by training the neuromorphic tactile sensing system

Functionalized graphene sensors for real time monitoring fermentation processes:electrochemical and chemiresistive sensors

We developed a reference-less, chemiresistive, solid-state pH sensor to determine the acidification of the fermentation liquid in real time during the growth of Lactococcus lactis. One of the crucial findings of this work was that the ERGO-PA could not be used as such. It appeared that it was necessary to protect the sensor area with a Nafion coating to measure the pH in the fermentation broth. Most likely, the change in the concentration of redox-active components in the fermentation broth influences the conductivity of the ERGO-PA. Nafion formed a cation-selective membrane on top of the ERGO-PA allowing protons to diffuse to the selective layer of the sensor but not the redox-active components in the fermentation medium. We also reported a new approach to measure the dissolved oxygen concentration (DO) in a fermentation broth. The functionality of the sensor to measure DO was demonstrated during the growth of the obligate aerobic actinomycete Amycalotopsis methanolica in miniaturized 3D-printed bioreactors. For this oxygen-sensing application, the required modifications were obtained by doping hydrothermally reduced graphene oxide with nitrogen and boron atoms (N,B-HRGO). Further, these chemiresistive sensors are housed in the 3D printed bioreactor lid and used to measure pH, DO, and biomass in 3 ml fermentation broth. Additionally, the pH-sensor was equipped with a small heating element and a temperature sensor and that could be used for temperature control of the fermentation liquid. The setup was demonstrated to measure the pH, DO, temperature and biomass concentration in four parallel bioreactors

A system-on-chip digital pH meter for use in a wireless diagnostic capsule

This paper describes the design and implementation of a system-on-chip digital pH meter, for use in a wireless capsule application. The system is organized around an 8-bit microcontroller, designed to be functionally identical to the Motorola 6805. The analog subsystem contains a floating-electrode ISFET, which is fully compatible with a commercial CMOS process. On-chip programmable voltage references and multiplexors permit flexibility with the minimum of external connections. The chip is designed in a modular fashion to facilitate verification and component re-use. The single-chip pH meter can be directly connected to a personal computer, and gives a response of 37 bits/pH, within an operating range of 7 pH units