Electronic Nanodevices

The start of high-volume production of field-effect transistors with a feature size below 100 nm at the end of the 20th century signaled the transition from microelectronics to nanoelectronics. Since then, downscaling in the semiconductor industry has continued until the recent development of sub-10 nm technologies. The new phenomena and issues as well as the technological challenges of the fabrication and manipulation at the nanoscale have spurred an intense theoretical and experimental research activity. New device structures, operating principles, materials, and measurement techniques have emerged, and new approaches to electronic transport and device modeling have become necessary. Examples are the introduction of vertical MOSFETs in addition to the planar ones to enable the multi-gate approach as well as the development of new tunneling, high-electron mobility, and single-electron devices. The search for new materials such as nanowires, nanotubes, and 2D materials for the transistor channel, dielectrics, and interconnects has been part of the process. New electronic devices, often consisting of nanoscale heterojunctions, have been developed for light emission, transmission, and detection in optoelectronic and photonic systems, as well for new chemical, biological, and environmental sensors. This Special Issue focuses on the design, fabrication, modeling, and demonstration of nanodevices for electronic, optoelectronic, and sensing applications

Evolvable Smartphone-Based Point-of-Care Systems For In-Vitro Diagnostics

Recent developments in the life-science -omics disciplines, together with advances in micro and nanoscale technologies offer unprecedented opportunities to tackle some of the major healthcare challenges of our time. Lab-on-Chip technologies coupled with smart-devices in particular, constitute key enablers for the decentralization of many in-vitro medical diagnostics applications to the point-of-care, supporting the advent of a preventive and personalized medicine. Although the technical feasibility and the potential of Lab-on-Chip/smart-device systems is repeatedly demonstrated, direct-to-consumer applications remain scarce. This thesis addresses this limitation. System evolvability is a key enabler to the adoption and long-lasting success of next generation point-of-care systems by favoring the integration of new technologies, streamlining the reengineering efforts for system upgrades and limiting the risk of premature system obsolescence. Among possible implementation strategies, platform-based design stands as a particularly suitable entry point. One necessary condition, is for change-absorbing and change-enabling mechanisms to be incorporated in the platform architecture at initial design-time. Important considerations arise as to where in Lab-on-Chip/smart-device platforms can these mechanisms be integrated, and how to implement them. Our investigation revolves around the silicon-nanowire biological field effect transistor, a promising biosensing technology for the detection of biological analytes at ultra low concentrations. We discuss extensively the sensitivity and instrumentation requirements set by the technology before we present the design and implementation of an evolvable smartphone-based platform capable of interfacing lab-on-chips embedding such sensors. We elaborate on the implementation of various architectural patterns throughout the platform and present how these facilitated the evolution of the system towards one accommodating for electrochemical sensing. Model-based development was undertaken throughout the engineering process. A formal SysML system model fed our evolvability assessment process. We introduce, in particular, a model-based methodology enabling the evaluation of modular scalability: the ability of a system to scale the current value of one of its specification by successively reengineering targeted system modules. The research work presented in this thesis provides a roadmap for the development of evolvable point-of-care systems, including those targeting direct-to-consumer applications. It extends from the early identification of anticipated change, to the assessment of the ability of a system to accommodate for these changes. Our research should thus interest industrials eager not only to disrupt, but also to last in a shifting socio-technical paradigm

Intelligent Circuits and Systems

ICICS-2020 is the third conference initiated by the School of Electronics and Electrical Engineering at Lovely Professional University that explored recent innovations of researchers working for the development of smart and green technologies in the fields of Energy, Electronics, Communications, Computers, and Control. ICICS provides innovators to identify new opportunities for the social and economic benefits of society.　 This conference bridges the gap between academics and R&D institutions, social visionaries, and experts from all strata of society to present their ongoing research activities and foster research relations between them. It provides opportunities for the exchange of new ideas, applications, and experiences in the field of smart technologies and finding global partners for future collaboration. The ICICS-2020 was conducted in two broad categories, Intelligent Circuits & Intelligent Systems and Emerging Technologies in Electrical Engineering

Vertical Heterostructure III-V MOSFETs for CMOS, RF and Memory Applications

This thesis focuses mainly on the co-integration of vertical nanowiren-type InAs and p-type GaSb MOSFETs on Si (Paper I & II), whereMOVPE grown vertical InAs-GaSb heterostructure nanowires areused for realizing monolithically integrated and co-processed all-III-V CMOS.Utilizing a bottom-up approach based on MOVPE grown nanowires enablesdesign flexibilities, such as in-situ doping and heterostructure formation,which serves to reduce the amount of mask steps during fabrication. By refiningthe fabrication techniques, using a self-aligned gate-last process, scaled10-20 nm diameters are achieved for balanced drive currents at Ion ∼ 100μA/μm, considering Ioff at 100 nA/μm (VDD = 0.5 V). This is enabledby greatly improved p-type MOSFET performance reaching a maximumtransconductance of 260 μA/μm at VDS = 0.5 V. Lowered power dissipationfor CMOS circuits requires good threshold voltage VT matching of the n- andp-type device, which is also demonstrated for basic inverter circuits. Thevarious effects contributing to VT-shifts are also studied in detail focusing onthe InAs channel devices (with highest transconductance of 2.6 mA/μm), byusing Electron Holography and a novel gate position variation method (PaperV).The advancements in all-III-V CMOS integration spawned individual studiesinto the strengths of the n- and p-type III-V devices, respectively. Traditionallymaterials such as InAs and InGaAs provide excellent electrontransport properties, therefore they are frequently used in devices for highfrequency RF applications. In contrast, the III-V p-type alternatives have beenlacking performance mostly due to the difficult oxidation properties of Sb-based materials. Therefore, a study of the GaSb properties, in a MOSFETchannel, was designed and enabled by new manufacturing techniques, whichallowed gate-length scaling from 40 to 140 nm for p-type Sb-based MOSFETs(Paper III). The new fabrication method allowed for integration of deviceswith symmetrical contacts as compared to previous work which relied on atunnel-contact at the source-side. By modelling based on measured data fieldeffecthole mobility of 70 cm2/Vs was calculated, well in line with previouslyreported studies on GaSb nanowires. The oxidation properties of the GaSbgate-stack was further characterized by XPS, where high intensities of xraysare achieved using a synchrotron source allowed for characterization ofnanowires (Paper VI). Here, in-situ H2-plasma treatment, in parallel with XPSmeasurements, enabled a study of the time-dependence during full removalof GaSb native oxides.The last focus of the thesis was building on the existing strengths of verticalheterostructure III-V n-type (InAs-InGaAs graded channel) devices. Typically,these devices demonstrate high-current densities (gm >3 mS/μm) and excellentmodulation properties (off-state current down to 1 nA/μm). However,minimizing the parasitic capacitances, due to various overlaps originatingfrom a low access-resistance design, has proven difficult. Therefore, newmethods for spacers in both the vertical and planar directions was developedand studied in detail. The new fabrication methods including sidewall spacersachieved gate-drain capacitance CGD levels close to 0.2 fF/μm, which isthe established limit by optimized high-speed devices. The vertical spacertechnology, using SiO2 on the nanowire sidewalls, is further improved inthis thesis which enables new co-integration schemes for memory arrays.Namely, the refined sidewall spacer method is used to realize selective recessetching of the channel and reduced capacitance for large array memoryselector devices (InAs channel) vertically integrated with Resistive RandomAccess Memory (RRAM) memristors. (Paper IV) The fabricated 1-transistor-1-memristor (1T1R) demonstrator cell shows excellent endurance and retentionfor the RRAM by maintaining constant ratio of the high and low resistive state(HRS/LRS) after 106 switching cycles

III-V Nanowire MOSFET High-Frequency Technology Platform

This thesis addresses the main challenges in using III-V nanowireMOSFETs for high-frequency applications by building a III-Vvertical nanowire MOSFET technology library. The initial devicelayout is designed, based on the assessment of the current III-V verticalnanowire MOSFET with state-of-the-art performance. The layout providesan option to scale device dimensions for the purpose of designing varioushigh-frequency circuits. The nanowire MOSFET device is described using1D transport theory, and modeled with a compact virtual source model.Device assessment is performed at high frequencies, where sidewall spaceroverlaps have been identified and mitigated in subsequent design iterations.In the final stage of the design, the device is simulated with fT > 500 GHz,and fmax > 700 GHz.Alongside the III-V vertical nanowire device technology platform, adedicated and adopted RF and mm-wave back-end-of-line (BEOL) hasbeen developed. Investigation into the transmission line parameters revealsa line attenuation of 0.5 dB/mm at 50 GHz, corresponding to state-ofthe-art values in many mm-wave integrated circuit technologies. Severalkey passive components have been characterized and modeled. The deviceinterface module - an interconnect via stack, is one of the prominentcomponents. Additionally, the approach is used to integrate ferroelectricMOS capacitors, in a unique setting where their ferroelectric behavior iscaptured at RF and mm-wave frequencies.Finally, circuits have been designed. A proof-of-concept circuit, designedand fabricated with III-V lateral nanowire MOSFETs and mm-wave BEOL, validates the accuracy of the BEOL models, and the circuit design. Thedevice scaling is shown to be reflected into circuit performance, in aunique device characterization through an amplifier noise-matched inputstage. Furthermore, vertical-nanowire-MOSFET-based circuits have beendesigned with passive feedback components that resonate with the devicegate-drain capacitance. The concept enables for device unilateralizationand gain boosting. The designed low-noise amplifiers have matching pointsindependent on the MOSFET gate length, based on capacitance balancebetween the intrinsic and extrinsic capacitance contributions, in a verticalgeometry. The proposed technology platform offers flexibility in device andcircuit design and provides novel III-V vertical nanowire MOSFET devicesand circuits as a viable option to future wireless communication systems

Reliability Investigations of MOSFETs using RF Small Signal Characterization

Modern technology needs and advancements have introduced various new concepts such as Internet-of-Things, electric automotive, and Artificial intelligence. This implies an increased activity in the electronics domain of analog and high frequency. Silicon devices have emerged as a cost-effective solution for such diverse applications. As these silicon devices are pushed towards higher performance, there is a continuous need to improve fabrication, power efficiency, variability, and reliability. Often, a direct trade-off of higher performance is observed in the reliability of semiconductor devices. The acceleration-based methodologies used for reliability assessment are the adequate time-saving solution for the lifetime's extrapolation but come with uncertainty in accuracy. Thus, the efforts to improve the accuracy of reliability characterization methodologies run in parallel. This study highlights two goals that can be achieved by incorporating high-frequency characterization into the reliability characteristics. The first one is assessing high-frequency performance throughout the device's lifetime to facilitate an accurate description of device/circuit functionality for high-frequency applications. Secondly, to explore the potential of high-frequency characterization as the means of scanning reliability effects within devices. S-parameters served as the high-frequency device's response and mapped onto a small-signal model to analyze different components of a fully depleted silicon-on-insulator MOSFET. The studied devices are subjected to two important DC stress patterns, i.e., Bias temperature instability stress and hot carrier stress. The hot carrier stress, which inherently suffers from the self-heating effect, resulted in the transistor's geometry-dependent magnitudes of hot carrier degradation. It is shown that the incorporation of the thermal resistance model is mandatory for the investigation of hot carrier degradation. The property of direct translation of small-signal parameter degradation to DC parameter degradation is used to develop a new S-parameter based bias temperature instability characterization methodology. The changes in gate-related small-signal capacitances after hot carrier stress reveals a distinct signature due to local change of flat-band voltage. The measured effects of gate-related small-signal capacitances post-stress are validated through transient physics-based simulations in Sentaurus TCAD.:Abstract Symbols Acronyms 1 Introduction 2 Fundamentals 2.1 MOSFETs Scaling Trends and Challenges 2.1.1 Silicon on Insulator Technology 2.1.2 FDSOI Technology 2.2 Reliability of Semiconductor Devices 2.3 RF Reliability 2.4 MOSFET Degradation Mechanisms 2.4.1 Hot Carrier Degradation 2.4.2 Bias Temperature Instability 2.5 Self-heating 3 RF Characterization of fully-depleted Silicon on Insulator devices 3.1 Scattering Parameters 3.2 S-parameters Measurement Flow 3.2.1 Calibration 3.2.2 De-embedding 3.3 Small-Signal Model 3.3.1 Model Parameters Extraction 3.3.2 Transistor Figures of Merit 3.4 Characterization Results 4 Self-heating assessment in Multi-finger Devices 4.1 Self-heating Characterization Methodology 4.1.1 Output Conductance Frequency dependence 4.1.2 Temperature dependence of Drain Current 4.2 Thermal Resistance Behavior 4.2.1 Thermal Resistance Scaling with number of fingers 4.2.2 Thermal Resistance Scaling with finger spacing 4.2.3 Thermal Resistance Scaling with GateWidth 4.2.4 Thermal Resistance Scaling with Gate length 4.3 Thermal Resistance Model 4.4 Design for Thermal Resistance Optimization 5 Bias Temperature Instability Investigation 5.1 Impact of Bias Temperature Instability stress on Device Metrics 5.1.1 Experimental Details 5.1.2 DC Parameters Drift 5.1.3 RF Small-Signal Parameters Drift 5.2 S-parameter based on-the-fly Bias Temperature Instability Characterization Method 5.2.1 Measurement Methodology 5.2.2 Results and Discussion 6 Investigation of Hot-carrier Degradation 6.1 Impact of Hot-carrier stress on Device performance 6.1.1 DC Metrics Degradation 6.1.2 Impact on small-signal Parameters 6.2 Implications of Self-heating on Hot-carrier Degradation in n-MOSFETs 6.2.1 Inclusion of Thermal resistance in Hot-carrier Degradation modeling 6.2.2 Convolution of Bias Temperature Instability component in Hot-carrier Degradation 6.2.3 Effect of Source and Drain Placement in Multi-finger Layout 6.3 Vth turn-around effect in p-MOSFET 7 Deconvolution of Hot-carrier Degradation and Bias Temperature Instability using Scattering parameters 7.1 Small-Signal Parameter Signatures for Hot-carrier Degradation and Bias Temperature Instability 7.2 TCAD Dynamic Simulation of Defects 7.2.1 Fixed Charges 7.2.2 Interface Traps near Gate 7.2.3 Interface Traps near Spacer Region 7.2.4 Combination of Traps 7.2.5 Drain Series Resistance effect 7.2.6 DVth Correction 7.3 Empirical Modeling based deconvolution of Hot-carrier Degradation 8 Conclusion and Recommendations 8.1 General Conclusions 8.2 Recommendations for Future Work A Directly measured S-parameters and extracted Y-parameters B Device Dimensions for Thermal Resistance Modeling C Frequency response of hot-carrier degradation (HCD) D Localization Effect of Interface Traps Bibliograph

Investigation on Performance Metrics of Nanoscale Multigate MOSFETs towards RF and IC Applications

Silicon-on-Insulator (SOI) MOSFETs have been the primary precursor for the CMOS technology since last few decades offering superior device performance in terms of package density, speed, and reduced second order harmonics. Recent trends of investigation have stimulated the interest in Fully Depleted (FD) SOI MOSFET because of their remarkable scalability efficiency. However, some serious issues like short channel effects (SCEs) viz drain induced barrier lowering (DIBL), Vth roll-off, subthreshold slope (SS), and hot carrier effects (HCEs) are observed in nanoscale regime. Numerous advanced structures with various engineering concepts have been addressed to reduce the above mentioned SCEs in SOI platform. Among them strain engineering, high-k gate dielectric with metal gate technology (HKMG), and non-classical multigate technologies are most popular models for enhancement in carrier mobility, suppression of gate leakage current, and better immunization to SCEs. In this thesis, the performance of various emerging device designs are analyzed in nanoscale with 2-D modeling as well as through calibrated TCAD simulation. These attempts are made to reduce certain limitations of nanoscale design and to provide a significant contribution in terms of improved performances of the miniaturized devices. Various MOS parameters like gate work function (_m), channel length (L), channel thickness (tSi), and gate oxide thickness (tox) are optimized for both FD-SOI and Multiple gate technology. As the semiconductor industries migrate towards multigate technology for system-on-chip (SoC), system-in-package (SiP), and internet-of-things (IoT) applications, an appropriate examination of the advanced multiple gate MOFETs is required for the analog/RF application keeping reliability issue in mind. Various non-classical device structures like gate stack engineering and halo doping in the channel are extensively studied for analog/RF applications in double gate (DG) platform. A unique attempt has been made for detailed analysis of the state-of-the-art 3-D FinFET on dependency of process variability. The 3-D architecture is branched as Planar or Trigate or FinFET according to the aspect ratio (WFin=HFin). The evaluation of zero temperature coefficient (ZTC) or temperature inflection point (TCP) is one of the key investigation of the thesis for optimal device operation and reliability. The sensitivity of DG-MOSFET and FinFET performances have been addressed towards a wide range of temperature variations, and the ZTC points are identified for both the architectures. From the presented outcomes of this work, some ideas have also been left for the researchers for design of optimum and reliable device architectures to meet the requirements of high performance (HP) and/or low standby power (LSTP) applications

Annual Report 2019 - Institute of Ion Beam Physics and Materials Research

The Institute of Ion Beam Physics and Materials Research conducts materials research for future applications in, e.g., information technology. To this end, we make use of the various possibilities offered by our Ion Beam Center (IBC) for synthesis, modification, and analysis of thin films and nanostructures, as well as of the free-electron laser FELBE at HZDR for THz spectroscopy. The analyzed materials range from semiconductors and oxides to metals and magnetic materials. They are investigated with the goal to optimize their electronic, magnetic, optical as well as structural functionality. This research is embedded in the Helmholtz Association’s programme “From Matter to Materials and Life”. Seven publications from last year are highlighted in this Annual Report to illustrate the wide scientific spectrum of our institute. After the scientific evaluation in the framework of the Helmholtz Programme-Oriented Funding (POF) in 2018 we had some time to concentrate on science again before end of the year a few of us again had to prepare for the strategic evaluation which took place in January 2020, which finally was also successful for the Institute

Compact Models for Integrated Circuit Design

This modern treatise on compact models for circuit computer-aided design (CAD) presents industry standard models for bipolar-junction transistors (BJTs), metal-oxide-semiconductor (MOS) field-effect-transistors (FETs), FinFETs, and tunnel field-effect transistors (TFETs), along with statistical MOS models. Featuring exercise problems at the end of each chapter and extensive references at the end of the book, the text supplies fundamental and practical knowledge necessary for efficient integrated circuit (IC) design using nanoscale devices. It ensures even those unfamiliar with semiconductor physics gain a solid grasp of compact modeling concepts

Annual Report 2020 - Institute of Ion Beam Physics and Materials Research

As for everybody else also for the Institute of Ion Beam Physics and Materials Research (IIM), the COVID-19 pandemic overshadowed the usual scientific life in 2020. Starting in March, home office became the preferred working environment and the typical institute life was disrupted. After a little relaxation during summer and early fall, the situation became again more serious and in early December we had to severely restrict laboratory activities and the user operation of the Ion Beam Center (IBC). For the most part of 2020, user visits were impossible and the services delivered had to be performed hands-off. This led to a significant additional work load on the IBC staff. Thank you very much for your commitment during this difficult period. By now user operation has restarted, but we are still far from business as usual. Most lessons learnt deal with video conference systems, and everybody now has extensive experience in skype, teams, webex, zoom, or any other solution available. Conferences were cancelled, workshops postponed, and seminar or colloquia talks delivered online. Since experimental work was also impeded, maybe 2020 was a good year for writing publications and applying for external funding. In total, 204 articles have been published with an average impact factor of about 7.0, which both mark an all-time high for the Institute. 13 publications from last year are highlighted in this Annual Report to illustrate the wide scientific spectrum of our institute. In addition, 20 new projects funded by EU, DFG, BMWi/AiF and SAB with a total budget of about 5.7 M€ have started. Thank you very much for making this possible. Also, in 2020 there have been a few personalia to be reported. Prof. Dr. Sibylle Gemming has left the HZDR and accepted a professor position at TU Chemnitz. Congratulations! The hence vacant position as the head of department was taken over by PD Dr. Artur Erbe by Oct. 1st. Simultaneously, the department has been renamed to “Nanoelectronics”. Dr. Alina Deac has left the institute in order to dedicate herself to new opportunities at the Dresden High Magnetic Field Laboratory. Dr. Matthias Posselt went to retirement after 36 years at the institute. We thank Matthias for his engagement and wish him all the best for the upcoming period of his life. However, also new equipment has been setup and new laboratories founded. A new 100 kV accelerator is integrated into our low energy ion nanoengineering facility and complements our ion beam technology in the lower energy regime. This setup is particularly suited to perform ion implantation into 2D materials and medium energy ion scattering (MEIS). Finally, we would like to cordially thank all partners, friends, and organizations who supported our progress in 2020. First and foremost we thank the Executive Board of the Helmholtz-Zentrum Dresden-Rossendorf, the Minister of Science and Arts of the Free State of Saxony, and the Ministers of Education and Research, and of Economic Affairs and Energy of the Federal Government of Germany. Many partners from univer¬sities, industry and research institutes all around the world contributed essentially, and play a crucial role for the further development of the institute. Last but not least, the directors would like to thank all members of our institute for their efforts in these very special times and excellent contributions in 2020