Optical Interferometric Force Sensor based on a Buckled Beam

This paper reports a novel extrinsic Fabry-Perot interferometer (EFPI)-based fiber optic sensor for force measurement. The prototype force sensor consists of two EFPIs mounted on a stainless-steel rectangular frame. The primary sensing element, i.e., the first EFPI, is formed between the endface of a horizontally placed optical fiber and a stainless-steel buckled beam. The second EFPI, fashioned between a longitudinally placed optical fiber and a silver-coated glass beam, is arranged to demonstrate the amplification mechanism of the buckled beam structure. When the sensor is subjected to a tension force, the pre-buckled beam will deflect backward, resulting in a longitudinal/axial displacement of the pre-buckled beam. The axial displacement is further transferred and amplified to a horizontal/vertical deflection at the middle of the buckled beam, leading to a relatively significant change in the Fabry-Perot cavity length. A force sensitivity of 796 nm/ {N} (change in cavity length/Newton) is achieved with a low-temperature dependence of 0.005 {N} /°C. The stability of the sensor is also investigated with a standard deviation of ± 5 nm, corresponding to a measurement resolution of ±0.0064 N. A simulation is conducted to study the axial displacement and stress distribution of the sensor when it is subjected to a tension load of 250 N. It is demonstrated that the maximum stress of the sensor is tremendously reduced attributed to the buckled design, enabling a long service life cycle of the force sensor. The robust and simple-to-manufacture force sensor has great potential in structural health monitoring, robotics control, and oil/ gas refining systems

Advances in Fiber-Optic Extrinsic Fabry-Perot Interferometric Physical and Mechanical Sensors: A Review

Fabry-Perot Interferometers Have Found a Multitude of Scientific and Industrial Applications Ranging from Gravitational Wave Detection, High-Resolution Spectroscopy, and Optical Filters to Quantum Optomechanics. Integrated with Optical Fiber Waveguide Technology, the Fiber-Optic Fabry-Perot Interferometers Have Emerged as a Unique Candidate for High-Sensitivity Sensing and Have Undergone Tremendous Growth and Advancement in the Past Two Decades with their Successful Applications in an Expansive Range of Fields. the Extrinsic Cavity-Based Devices, I.e., the Fiber-Optic Extrinsic Fabry-Perot Interferometers (EFPIs), Enable Great Flexibility in the Design of the Sensitive Fabry-Perot Cavity Combined with State-Of-The-Art Micromachining and Conventional Mechanical Fabrication, Leading to the Development of a Diverse Array of EFPI Sensors Targeting at Different Physical Quantities. Here, We Summarize the Recent Progress of Fiber-Optic EFPI Sensors, Providing an overview of Different Physical and Mechanical Sensors based on the Fabry-Perot Interferometer Principle, with a Special Focus on Displacement-Related Quantities, Such as Strain, Force, Tilt, Vibration and Acceleration, Pressure, and Acoustic. the Working Principle and Signal Demodulation Methods Are Shown in Brief. Perspectives on Further Advancement of EFPI Sensing Technologies Are Also Discussed

An Embeddable Optical Strain Gauge based on a Buckled Beam

We report, for the first time, a low cost, compact, and novel mechanically designed extrinsic Fabry-Perot interferometer (EFPI)-based optical fiber sensor with a strain amplification mechanism for strain measurement. The fundamental design principle includes a buckled beam with a coated gold layer, mounted on two grips. A Fabry-Perot cavity is produced between the buckled beam and the endface of a single mode fiber (SMF). A ceramic ferrule is applied for supporting and orienting the SMF. The principal sensor elements are packaged and protected by two designed metal shells. The midpoint of the buckled beam will experience a deflection vertically when the beam is subjected to a horizontally/axially compressive displacement. It has been found that the vertical deflection of the beam at midpoint can be 6-17 times larger than the horizontal/axial displacement, which forms the basis of a strain amplification mechanism. The user-configurable buckling beam geometry-based strain amplification mechanism enables the strain sensor to achieve a wide range of strain measurement sensitivities. The designed EFPI was used to monitor shrinkage of a square brick of mortar. The strain was measured during the drying/curing stage. We envision that it could be a good strain sensor to be embedded in civil materials/structures under a harsh environment for a prolonged period of time

Selectively Tuning a Buckled Si/SiO\u3csub\u3e2\u3c/sub\u3e Membrane MEMS through Joule Heating Actuation and Mechanical Restriction

This research followed previous work and attempted to modify the spring in two ways. First, a Ti/Au meander resistor was deposited atop the membrane in an effort to actuate the membrane and change the spring constant. Secondly, a series of overhanging cantilevers were attached to the bulk substrate surrounding the membrane in an effort to constrain the membrane buckling deflection to the negative stiffness region. Membrane buckling was investigated through Finite Element analysis (FEA) and analytical equations. Deflections were measured using an interferometric microscope (IFM) and force/deflection measurements were captured using a unique measurement scheme. The results concluded that by introducing a thermal stress, the membrane could be actuated with a corresponding 3x increase in spring constant. Additionally, the overhanging beams restricted the membrane deflection by up to 30%, but, because of a lack in beam stiffness, failed to restrict the membrane to the negative stiffness region. This research laid the ground work for future work in this area

An Embeddable Strain Sensor with 30 Nano-Strain Resolution based on Optical Interferometry

A cost-effective, robust and embeddable optical interferometric strain sensor with nanoscale strain resolution is presented in this paper. The sensor consists of an optical fiber, a quartz rod with one end coated with a thin gold layer, and two metal shells employed to transfer the strain and orient and protect the optical fiber and the quartz rod. The optical fiber endface, combining with the gold-coated surface, forms an extrinsic Fabry—Perot interferometer. The sensor was firstly calibrated, and the result showed that our prototype sensor could provide a measurement resolution of 30 nano-strain (nε) and a sensitivity of 10.01 µε/ µm over a range of 1000 µε. After calibration of the sensor, the shrinkage strain of a cubic brick of mortar in real time during the drying process was monitored. The strain sensor was compared with a commercial linear variable displacement transducer, and the comparison results in four weeks demonstrated that our sensor had much higher measurement resolution and gained more detailed and useful information. Due to the advantages of the extremely simple, robust and cost-effective configuration, it is believed that the sensor is significantly beneficial to practical applications, especially for structural health monitoring

Photonic Crystal Directional Coupler Based Optomechanical Sensor

An extremely small ($6.5\times6.5\mu$m) optomechanical sensor is proposed that utilizes a photonic crystal (PC) etched onto silicon-on-insulator (SOI) using adapted complimentary metal-oxide-semiconductor fabrication technology. The destructive interference of light with the periodic structure can forbid its propagation inside the crystal across a range of frequencies and can be used to confine light near edge of a PC slab. By placing two PC edges near each other, a directional coupler is formed where light is periodically exchanged between the two waveguides. Wet-etching away the buried oxide residing beneath the photonic crystal directional coupler (PCDC), a membrane is formed. Exerting force on the PCDC alters the separation between the two PC edges and modulates the observed transmission at the coupler outputs. Buckle-mitigating structures are also demonstrated here which relieve the unpredictable compressive stress built into the top silicon layer of SOI during wafer fabrication. The PCDC sensors attempt to overcome some of the shortcomings of existing micromechanical sensors such as area constraints, material restrictions, stiction, and EM interference. PCDC sensors are also highly parallelizable due to their small size and wide optical bandwidth. PCDC sensors are envisaged to be used in microfluidic integration and are capable of 149kPa full scale pressure measurement ranges

Distributed Fiber-Optic Pressure Sensor based on Bourdon Tubes Metered by Optical Frequency-Domain Reflectometry

We report a distributed fiber-optic pressure sensor based on Bourdon tubes using Rayleigh backscattering metered by optical frequency-domain reflectometry (OFDR). In the proposed sensor, a piece of single-mode fiber (SMF) is attached to the concave surfaces of Bourdon tubes using a thin layer of epoxy. The strain profiles along the concave surface of the Bourdon tube vary with applied pressure, and the strain variations are transferred to the attached SMF through the epoxy layer, resulting in spectral shifts in the local Rayleigh backscattering signals. By monitoring the local spectral shifts of the OFDR system, the pressure applied to the Bourdon tube can be determined. By cascading multiple Bourdon tubes and correspondingly attaching SMF sections (i.e., a series of SMF-modified Bourdon tubes), distributed pressure measurements can be realized. Three Bourdon tubes are employed to demonstrate the proposed spatially distributed sensing scheme. The experimental results showed that linear relationships between spectral shift and pressure were obtained in all three SMF-Bourdon tubes (i.e., at three spatial locations). It is expected that the proposed sensing device, the SMF-Bourdon tube, can be used in applications where distributed/multipoint pressure measurements are needed

Fundamentals and applications of fluid- structure interactions in compliant microchannels

Thesis (Ph.D.)--Boston UniversityThe development of soft lithography techniques for fabricating microfluidic channels has enabled the study of microscale flows. These studies have become an essential component of experimental research in biology, fluid dynamics, engineering and related fields. A systematic understanding of microscale flows requires that the characteristics of the flow fields be determined accurately. However, as microchannels are scaled down, the size of most experimental probes becomes comparable to or even bigger than the micro-flows themselves, making the measurement of the distribution of flow fields problematic. In this work, we take advantage of the fact that most microfluidic channels are made up of soft materials and can deform during flow. We develop a non-invasive optical measurement technique to correlate the channel deformation with the pressure field inside the microchannel; we then apply this technique to studies of biological flows and flows on superhydrophobic surfaces. [TRUNCATED

Fiber optic sensors for industry and military applications

Fiber optic sensors (FOSs) have been widely used for measuring various physical and chemical measurands owing to their unique advantages over traditional sensors such as small size, high resolution, distributed sensing capabilities, and immunity to electromagnetic interference. This dissertation focuses on the development of robust FOSs with ultrahigh sensitivity and their applications in industry and military areas. Firstly, novel fiber-optic extrinsic Fabry-Perot interferometer (EFPI) inclinometers for one- and two-dimensional tilt measurements with 20 nrad resolution were demonstrated. Compared to in-line fiber optic inclinometers, an extrinsic sensing motif was used in our prototype inclinometer. The variations in tilt angle of the inclinometer was converted into the cavity length changes of the EFPI which can be accurately measured with high resolution. The developed fiber optic inclinometers showed high resolution and great temperature stability in both experiments and practical applications. Secondly, a smart helmet was developed with a single embedded fiber Bragg grating (FBG) sensor for real-time sensing of blunt-force impact events to helmets. The combination of the transient impact data from FBG and the analyses using machine-learning model provides accurate predictions of the magnitudes, the directions and the types of the impact events. The use of the developed smart helmet system can serve as an early-stage intervention strategy for mitigating and managing traumatic brain injuries within the Golden Hour --Abstract, page iv

Integrated Additive and Subtractive Manufacturing of Glass Photonic Sensors for Harsh Environment Applications

Research and development in advanced manufacturing for sensors and devices fabrication is continuously changing the world, assisting to giving sensing solutions in the physical, chemical and biological fields. Specifically, many modern engineered systems are designed to operate under extreme conditions such as high temperature, high pressure, corrosion/erosion, strong electromagnetic interference, heavy load, long reaching distance, limited space, etc. Very often, these extreme conditions not only degrade the performance of the system but also impose risks of catastrophic failures and severe consequences. To perform reliably under these harsh conditions, the materials and components need to be properly monitored and the systems need to be optimally controlled. However, most existing sensing technologies are insufficient to work reliably under these harsh conditions. Innovations in sensor design, fabrication and packaging are needed to address the technological challenges and bridge the capability gaps. Optical fiber sensors have been widely researched and developed for energy, defense, environmental, biochemical and industry sensing applications. In general, optical fiber sensors have a number of well-known advantages such as miniature in size, high sensitivity, long reaching distance, capability of multiplexing and immunity to electromagnetic interference (EMI). In addition, optical fiber sensors are capable of operating under extreme environment conditions, such as high temperature, high pressure, and toxic/corrosive/erosive atmospheres. However, optical fiber sensors are also fragile and easy to break. It has been a challenging task to fabricate and package optical fiber sensors with predicable performance and desired reliability under harsh conditions. The latest advancements in high precision laser micromachining and three-dimensional (3D) printing techniques have opened a window of opportunity to manufacture new photonic structures and integrated sensing devices that deliver unprecedented performance. Consequently, the optical sensor field has quietly gone through a revolutionary transition from the traditional discrete bulk optics to today’s devices and structures with enhanced functionalities and improved robustness for harsh environment applications. Driven by the needs for sensors capable of operating in harsh environments, integrated additive and subtractive manufacturing (IASM) for glass photonics sensor fabrication process has been proposed and developed. In this dissertation, a series of high-performance optical fiber sensors were proposed and fabricated. In addition, several significant sensing measurements (e.g., pressure, temperature, refractive index variation) of the proposed sensors and structures with enhanced robustness were demonstrated in this dissertation. To realize measurement of above parameters, different working principles were studied, including mechanical deflection, light-material interaction and utilizing properties of fluidics. The sensing performance of the fabricated sensors and structures were characterized to demonstrate the capabilities of the developed IASM process on advanced manufacturing of glass photonic sensors with specific geometry and functions, and the realization for information integrated manufacturing purpose