Micro/Nano Manufacturing

Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales—below 100 nm. A strict borderline between micro and nano manufacturing can hardly be drawn, such that both domains are treated as complementary and mutually beneficial within a closely interconnected scientific community. Both micro and nano manufacturing can be considered as important enablers for high-end products. This Special Issue of Applied Sciences is dedicated to recent advances in research and development within the field of micro and nano manufacturing. The included papers report recent findings and advances in manufacturing technologies for producing products with micro and nano scale features and structures as well as applications underpinned by the advances in these technologies

Development and implementation of automated interferometric microscope for study of MEMS inertial sensors

Microelectromechanical systems (MEMS) are quickly becoming ubiquitous in commercial and military applications. As the use of such devices increases their reliability becomes of great importance. Although there has been significant research in the areas of MEMS errors, there is a lack of work regarding long term reliability of packaged systems. Residual thermomechanical stresses might relax over time which affects physical distances within a package, ultimately influencing the performance of a device. One reason that there has not been sufficient work performed on the long-term effects on structures might be the lack of a tool capable of characterizing the effects. MEMS devices have been measured for shape and its changes using interferometric techniques for some time now. Commercially available systems are able to make high resolution measurements, however they might lack loading options. To study aging effects on components a test might need to run continuously for days or weeks, with systematic operations performed throughout the process. Such a procedure is conducive to an automated data acquisition system. A system has been developed at WPI using a Twyman-Green interferometer and a custom software suite. The abilities of this system are demonstrated through analysis performed on MEMS tuning fork gyroscope (TFG) sensors. Specifically, shape is recorded to investigate die bond relaxation as a function of time and thermal cycle. Also presented are measurements made using stroboscopic illumination on operating gyroscopes, in situ. The effect of temperature on the performance of the sensors is investigated using a customized precision rate table

MEMS Technology for Biomedical Imaging Applications

Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community

MEASUREMENT AND ANALYSIS OF SEA WAVES NEAR A REFLECTIVE STRUCTURE

Merged with duplicate record 10026.1/2047 on 06.20.2017 by CS (TIS)Methods and equipment for the measurement of ocean waves were reviewed and their suitability assessed for the aim of this project: field measurement of sea waves near a reflective coastal structure such as a breakwater. None was found to be suitable. The functional and performance objectives are set out for a new system. The evolution of the final design, based on an array of pressure sensors, is described. The whole system is intended to be deployed on the sea-bed. It is fully self contained and independent of shore based services. Located away from the surf zone it is well placed to survive storm conditions and unauthorised interference. Theoretical methods for the re-construction of surface elevation records from measured sub-surface pressures, and the experimental findings of other workers, are presented. Available methods of estimating the wave directional spectrum from a spatial array of surface elevation records are reviewed, and the most appropriate one implemented. The system has given extensive service at a number of coastal defence sites. The results of subsequent analysis of selected data sets are presented in detail. They show the pronounced nodal structure in amplitude expected in the presence of wave reflection, clearly demonstrating that a single point measurement is likely to give misleading estimates of incident wave height. For near-calm to moderate, shore-normal incident wave conditions the results were found to agree with theoretical predictions both of wave height as a function of distance offshore, and of the structure's frequency-dependent reflection coefficient. For rougher conditions, in which both theoretical and physical models are less applicable, the results agreed with visual observations