Conceptual designs of multi-degree of freedom compliant parallel manipulators composed of wire-beam based compliant mechanisms

This paper proposes conceptual designs of multi-degree(s) of freedom (DOF) compliant parallel manipulators (CPMs) including 3-DOF translational CPMs and 6-DOF CPMs using a building block based pseudo-rigid-body-model (PRBM) approach. The proposed multi-DOF CPMs are composed of wire-beam based compliant mechanisms (WBBCMs) as distributed-compliance compliant building blocks (CBBs). Firstly, a comprehensive literature review for the design approaches of compliant mechanisms is conducted, and a building block based PRBM is then presented, which replaces the traditional kinematic sub-chain with an appropriate multi-DOF CBB. In order to obtain the decoupled 3-DOF translational CPMs (XYZ CPMs), two classes of kinematically decoupled 3-PPPR (P: prismatic joint, R: revolute joint) translational parallel mechanisms (TPMs) and 3-PPPRR TPMs are identified based on the type synthesis of rigid-body parallel mechanisms, and WBBCMs as the associated CBBs are further designed. Via replacing the traditional actuated P joint and the traditional passive PPR/PPRR sub-chain in each leg of the 3-DOF TPM with the counterpart CBBs (i.e. WBBCMs), a number of decoupled XYZ CPMs are obtained by appropriate arrangements. In order to obtain the decoupled 6-DOF CPMs, an orthogonally-arranged decoupled 6-PSS (S: spherical joint) parallel mechanism is first identified, and then two example 6-DOF CPMs are proposed by the building block based PRBM method. It is shown that, among these designs, two types of monolithic XYZ CPM designs with extended life have been presented

Creative design and modelling of large-range translation compliant parallel manipulators

Compliant parallel mechanisms/manipulators (CPMs) are parallel manipulators that transmit motion/load by deformation of their compliant members. Due to their merits such as the eliminated backlash and friction, no need for lubrication, reduced wear and noise, and monolithic configuration, they have been used in many emerging applications as scanning tables, bio-cell injectors, nano-positioners, and etc. How to design large-range CPMs is still a challenging issue. To meet the needs for large-range translational CPMs for high-precision motion stages, this thesis focuses on the systematic conceptual design and modelling of large-range translational CPMs with distributed-compliance. Firstly, several compliant parallel modules with distributed-compliance, such as spatial multi-beam modules, are identified as building blocks of translational CPMs. A normalized, nonlinear and analytical model is then derived for the spatial multi-beam modules to address the non-linearity of load-equilibrium equations. Secondly, a new design methodology for translational CPMs is presented. The main characteristic of the proposed design approach is not only to replace kinematic joints as in the literature, but also to replace kinematic chains with appropriate multiple degrees-of-freedom (DOF) compliant parallel modules. Thirdly, novel large-range translational CPMs are constructed using the proposed design methodology and identified compliant parallel modules. The proposed novel CPMs include, for example, a 1-DOF compliant parallel gripper with auto-adaptive grasping function, a stiffness-enhanced XY CPM with a spatial compliant leg, and an improved modular XYZ CPM using identical spatial double four-beam modules. Especially, the proposed XY CPM and XYZ CPM can achieve a 10mm’s motion range along each axis in the case studies. Finally, kinematostatic modelling of the proposed translational CPMs is presented to enable rapid performance characteristic analysis. The proposed analytical models are also compared with finite element analysis

Design and control of a 6-degree-of-freedom precision positioning system

This paper presents the design and test of a6-degree-of-freedom (DOF) precision positioning system, which is assembledby two different 3-DOF precision positioning stages each driven by three piezoelectric actuators (PEAs). Based on the precision PEAs and flexure hinge mechanisms, high precision motion is obtained.The design methodology and kinematic characteristics of the6-DOF positioning system areinvestigated. According to an effective kinematic model, the transformation matrices are obtained, which is used to predict the relationship between the output displacement from the system arrangement and the amountof PEAsexpansion. In addition, the static and dynamic characteristics of the 6-DOF system have been evaluated by finite element method (FEM) simulation andexperiments. The design structure provides a high dynamic bandwidth withthe first naturalfrequency of 586.3 Hz.Decoupling control is proposed to solve the existing coupling motion of the 6-DOF system. Meanwhile, in order to compensate for the hysteresis of PEAs, the inverse Bouc-Wen model was applied as a feedforward hysteresis compensator in the feedforward/feedback hybrid control method. Finally, extensive experiments were performed to verify the tracking performance of the developed mechanism

Development of a XYZ scanner for home-made atomic force microscope based on FPAA control

Atomic force microscopy (AFM) is one of the useful tools in the fields of nanoscale measurement and manipulation. High speed scanning is one of the crucial requirements for live cell imaging and soft matter characterization. The scanning speed is limited by the bandwidth of the AFM’s detection and actuation components. Generally, the bandwidth of a traditional scanner is too low to conduct the live cell imaging. This paper presents a simple and integrated compact home-made AFM for high speed imaging. To improve the bandwidth of the scanner, a parallel kinematics mechanism driven by piezoelectric actuators (PZTs) is proposed for the fast positioning in the X, Y and Z directions. The mechanical design optimization, modeling and analysis, and experimental testing have been conducted to validate the performance of the proposed scanner. A number of experimental results showed that the developed scanner has the capability for broad bandwidth with low coupling errors in the actuation directions. A hybrid control strategy including feedforward and feedback loops has been designed to significantly improve the dynamic tracking performance of the scanner and a field programmable analog array (FPAA) system is utilized to implement the control algorithm for excellent and stable tracking capability. Further, a number of high speed measurements have been conducted to verify the performance of the developed AFM

Modeling of corner-filleted flexure hinges under various loads

Compliant mechanisms are widely applied in precision engineering, measurement technology and microtechnology, due to their potential for the reduction of mass and assembly effort through the integration of functions into fewer parts and an increasing motion repeatability through less backlash and wear, if designed appropriately. However, a challenge during the design process is the handling of the multitude of geometric parameters and the complex relations between loads, deformations and strains. Furthermore, some tasks such as the dimensioning by means of optimization or the modeling for a controller design require a high number of analysis calculations. From this arises the need for sufficient computational analysis models with low calculation time. Existing studies of analysis models are mostly based on selected load cases, which may limits their general validity. The scope of this article is the comparison of models for the analysis of corner-filleted flexure hinges under various loads, to determine their advantages, disadvantages and application fields. The underlying methods of the study can further be used to evaluate future models based on a broad selection of possible load cases

Design and computational optimization of a flexure-based XY nano-positioning stage

This thesis presents the design and computational optimization of a two-axis nano-positioning stage. The devised stage relies on double parallelogram flexure bearings with under-constraint eliminating linkages to enable motion in the primary degrees-of-freedom. The structural parameters of the underlying flexures were optimized to provide a large-range and high bandwidth with sub-micron resolution while maintaining a compact size. A finite element model was created to establish a functional relationship between the geometry of the flexure elements and the stiffness behavior. Then, a neural network was trained from the simulation results to explore the design space with a low computational expense. The neural net was integrated with a genetic algorithm to optimize the design of the flexures for compactness and dynamic performance. The optimal solutions resulted in a reduction of stage footprint by 14% and an increase in the first natural frequency by 75% relative to a baseline design, all while preserving the same 50mm range in each axis with a factor of safety of 2. This confirms the efficacy of the proposed approach in improving stage performance through an optimization of its constituent flexures.Mechanical Engineerin

Approaches to the synthesis, modelling and optimisation of spatial translational compliant parallel mechanisms

The main facets of designing compliant mechanisms are synthesis, modelling and optimization. This thesis focuses on these three aspects of designing compliant mechanisms with a particular emphasis on spatial translational compliant parallel mechanisms (XYZ CPMs). In this thesis, a constraint and position identification (CPI) synthesis approach, a constraint‐force‐based (CFB) modelling approach and a position‐spacereconfiguration (PSR) approach are proposed. Subsequently, two PSR‐based optimization approaches are presented. A large number of XYZ CPMs can be synthesized using the proposed CPI approach. Each of the synthesized XYZ CPMs can provide decoupled translations along the X‐, Y‐ and Z‐axes, and can be actuated by three groundmounted linear actuators. Furthermore, the motion characteristics of a synthesized XYZ CPM can be analysed, based on an analytical model that can be derived using the proposed CFB approach. Such motion characteristics can include cross‐axis coupling, lost motion, parasitic motion and actuation stiffness. If the motion characteristics of an XYZ CPM need to be improved, the XYZ CPM can be reconfigured using the PSR approach. For example, two PSR‐based optimization approaches are detailed, which are used to reduce parasitic motions of XYZ CPMs and to reconfigure a non‐symmetric XYZ CPM into a symmetric XYZ CPM, respectively. Such PSR‐based optimization approaches can be employed to optimize both the geometrical dimension and the geometrical shape of an XYZ CPM. Therefore, an XYZ CPM can be synthesized using the CPI approach, modelled using the CFB approach, and then optimized using the PSR‐based approaches. In order to demonstrate the use of these proposed approaches, several examples of XYZ CPMs are synthesized, modelled and optimized. These design examples are also verified by FEA simulations and/or experimental tests. Several prototypes of the obtained XYZ CPMs are fabricated, and a control system for one of the prototypes is also presented. It is important to note that the proposed CFB approach, PSR approach and PSR‐based optimization approaches can also be employed to model, reconfigure and optimize other types of compliant mechanisms in addition to XYZ CPMs

Modelling, Control and Performance Evaluation of a Single-Axis Compliant Nano-Positioning System

This thesis presents the results from a preliminary activity devoted to the implementation of high-performance controller for a single axis compliant nano-positioning system. Preliminarily, this work discusses the mechanical design of the system, its peculiar features, and presents a system transfer function. After a detailed description of the design, the thesis discusses both theoretical and practical aspects of three control techniques used and the experimental results obtaine