Optomechanical Devices and Sensors Based on Plasmonic Metamaterial Absorbers

Surface plasmon resonance is the resonant oscillations of the free electrons at the interface between two media with different signs in real permittivities, e.g. a metal and a dielectric, stimulated by light. Plasmonics is a promising field of study, because electron oscillations inside a subwavelength space at optical frequencies simultaneously overcome the limit of diffraction in conventional photonics and carrier mobilities in semiconductor electronics. Due to the subwavelength confinement, plasmonic resonances can strongly enhance local fields and, hence, magnify light-matter interactions. Optical absorbers based on plasmonic metamaterials can absorb light resonantly at the operating wavelengths with up to 100% efficiency. We have explored plasmonic absorbers at infrared wavelengths for thermal detectors, e.g. a gold nanostrip antenna absorber that can absorb 10-times light using only 2% of material consumption comparing to a uniform gold film. In an optomechanical device, the optical mode and mechanical mode are mutually influenced, through the optical forces exerted on the mechanical oscillator and the detuning of optical resonance by the mechanical oscillator, so that the mechanical oscillations are either amplified or suppressed by light. We designed an optomechanical device integrated with plasmonic metamaterial absorber on a membrane mechanical oscillator, wherein a tunable Fano-resonant absorption in the absorber arises from the coupling between the plasmonic and Fabry-Perot reonsances. The absorber traps the incident light and heat up the membrane, causing an increase in thermal stress and a normal plasmomechanical force on it. This is a light-absorption-dependent elastic force arising from the opto-thermo-mechanical interactions. Due to the finite thermal response time in the membrane, the elastic plasmomechanical force is delayed and, consequently, generates a viscous component modifying the damping rate of the mechanical oscillator. We have observed optomechanical amplification and cooling in the device at designed detuning conditions. In particular, on the condition that the optomechanical gain beats the intrinsic mechanical damping, the oscillation becomes coherent, i.e. phonon lasing. We successfully demonstrated phonon lasing with a threshold power of 19 μW. This device is promising as an integration-ready coherent phonon source and may set the stage for applications in fundamental studies and ultrasonic imaging modalities

MEMS tunable infrared metamaterial and mechanical sensors

Sub-wavelength resonant structures open the path for fine controlling the near-field at the nanoscale dimension. They constitute into macroscopic “metamaterials” with macroscale properties such as transmission, reflection, and absorption being tailored to exhibit a particular electromagnetic response. The properties of the resonators are often fixed at the time of fabrication wherein the tunability is demanding to overcome fabrication tolerances and afford fast signal processing. Hybridizing dynamic components such as optically active medium into the device makes tunable devices. Microelectromechanical systems (MEMS) compatible integrated circuit fabrication process is a promising platform that can be merged with photonics or novel 2D materials. The prospect of enormous freedom in integrating nanophotonics, MEMS actuators and sensors, and microelectronics into a single platform has driven the rapid development of MEMS-based sensing devices. This thesis describes the design and development of four tunable plasmonic structures based on active media or MEMS, two graphene-based MEMS sensors and a novel tape-based cost-effective nanotransfer printing techniques. First of all, we present two tunable plasmonic devices with the use of two active medium, which are electrically controlled liquid crystals and temperature-responsive hydrogels, respectively. By incorporating a nematic liquid crystal layer into quasi-3D mushroom plasmonic nanostructures and thanks to the unique coupling between surface plasmon polariton and Rayleigh anomaly, we have achieved the electrical tuning of the properties of plasmonic crystal at a low operating electric field. We also present another tunable plasmonic device with the capability to sense environmental temperature variations. The device is bowtie nanoantenna arrays coated with a submicron-thick, thermos-responsive hydrogel. The favorable scaling of plasmonic dimers at the nanometer scale and ionic diffusion at the submicron scale is leveraged to achieve strong optical resonance and rapid hydrogel response, respectively. Secondly, we present two MEMS -based tunable near-to-mid infrared metamaterials on a silicon-on-insulator wafer via electrically and thermally actuating the freestanding nanocantilevers. The two devices are developed on the basis of the same fabrication process and are easy-to-implement. The electrostatically driven metamaterial affords ultrahigh mechanical modulation (several tens of MHz) of an optical signal while the thermo-mechanically tunable metamaterial provides up to 90% optical signal modulation at a wavelength of 3.6 õm. Next, we present MEMS graphene-based pressure and gas flow sensors realized by transferring a large area and few-layered graphene onto a suspended silicon nitride thin membrane perforated with micro-through-holes. Due to the increased strain in the through-holes, the pressure sensor exhibits a very high sensitivty outperformed than most existing MEMS-based pressure sensors using graphene, silicon, and carbon nanotubes. An air flow sensor is also demonstrated via patterning graphene sheets with flow-through microholes. The flow rate of the air is measured by converting the mechanically deflection of the membrane into the electrical readout due to the graphene piezeroresistors. Finally, we present a tape-based multifunctional nanotransfer printing process based on a simple stick-and-peel procedure. It affords fast production of large-area metallic and dielectric nanophotonic sensing devices and metamaterials using Scotch tape

Room Temperature VOx Air-Bridge Bolometer integrated with Metal-Insulator-Metal Resonant Absorbers

Spectrally-selective un-cooled micro-bolometers have many military and industrial applications for infrared sensing and imaging, e.g. target acquisition and chemical analysis. In this work, a micro-bolometer was fabricated with integrated wavelength-selective absorber based on subwavelength metal-insulator-metal (MIM) resonators. The fabricated air-bridge structure used a vanadium oxide thin film as the bolometric element. A novel aqueous deposition method of depositing vanadium oxide was investigated and compared to traditional sputtered vanadium oxide to determine achievable temperature coefficient of resistance. The MIM absorber itself was investigated as a function of the dielectric used, and the strong dependence of the resonance spectrum on dispersion was revealed. Finally, the completed bolometers were characterized, and usual figures of merit for thermal infrared detectors were determined. Unlike previous efforts this research is aimed at putting the bolometer inside of the MIM absorber, thereby reducing thermal mass and the thermal time constant compared to those bolometers where the absorbers are just put on top

Nanoplasmonics In Two-dimensional Dirac and Three-dimensional Metallic Nanostructure Systems

Surface plasmons are collective oscillation of electrons which are coupled to the incident electric field. Excitation of surface plasmon is a route to engineer the behavior of light in nanometer length scale and amplifying the light-matter interaction. This interaction is an outcome of near-field enhancement close to the metal surface which leads to plasmon damping through radiative decay to outgoing photons and nonradiative decay inside and on the surface of the material to create an electron-hole pair via interband or intraband Landau damping. Plasmonics in Dirac systems such as graphene show novel features due to massless electrons and holes around the Dirac cones. Linear band structure of Dirac materials in the low-momentum limit gives rise to the unprecedented optical and electrical properties. Electronical tunability of the plasmon resonance frequency through applying a gate voltage, highly confined electric field, and low plasmon damping are the other special propoerties of the Dirac plasmons. In this work, I will summarize the theoretical and experimental aspects of the electrostatical tunable systems made from monolayer graphene working in mid-infrared regime. I will demonstrate how a cavity-coupled nanopatterned graphene excites Dirac plasmons and enhances the light-matter interaction. The resonance frequency of the Dirac plasmons is tunable by applying a gate voltage. I will show how different gate-dielectrics, and the external conditions like the polarization and angle of incident light affect on the optical response of the nanostructure systems. I will then show the application of these nanodevices in infrared detection at room temperature by using plasmon-assisted hot carriers generation. An asymmetric nanopatterned graphene shows a high responsivity at room temperature which is unprecedented. At the end, I will demonstrate the properties of surface plasmons on 3D noble metals and its applications in light-funneling, photodetection, and light-focusing

Reconfigurable electronics based on metal-insulator transition:steep-slope switches and high frequency functions enabled by Vanadium Dioxide

The vast majority of disruptive innovations in science and technology has been originated from the discovery of a new material or the way its properties have been exploited to create novel devices and systems. New advanced nanomaterials will have a lasting impact over the next decades, providing breakthroughs in all scientific domains addressing the main challenges faced by the world today, including energy efficiency, sustainability, climate and health. The electronics industry relied over the last decades on the miniaturization process based on the scaling laws of complementary metal-oxide semiconductors (CMOS). As this process is approaching fundamental limitations, new materials or physical principles must be exploited to replace or supplement CMOS technology. The aim of the work in this thesis is to propose the abrupt metal-insulator transition in functional oxides as a physical phenomenon enabling new classes of Beyond CMOS devices. In order to provide an experimental validation of the proposed designs, vanadium dioxide (VO2) has been selected among functional oxides exhibiting a metal-insulator transition, due to the possibility to operate at room temperature and the high contrast between the electrical properties of its two structural phases. A CMOS-compatible sputtering process for uniform large scale deposition of stoichiometric polycrystalline VO2 has been optimized, enabling high yield and low variability for the devices presented in the rest of the thesis. The high quality of the film has been confirmed by several electrical and structural characterization techniques. The first class of devices based on the MIT in VO2 presented in this work is the steep-slope electronic switch. A quantitative study of the slope of the electrically induced MIT (E-MIT) in 2-terminal VO2 switches is reported, including its dependence on temperature. Moreover, the switches present excellent ON-state conduction independently of temperature, suggesting MIT VO2 switches as promising candidates for steep-slope, highly conductive, temperature stable electronic switches. A novel design for the shape of the electrodes used in VO2 switches has been proposed, targeting a reduction in the actuation voltage necessary to induce the E-MIT. The electrothermal simulations addressing this effect have been validated by measurements. The potential of the MIT in VO2 for reconfigurable electronics in the microwave frequency range has been expressed by the design, fabrication and characterization of low-loss, highly reliable, broadband VO2 radio-frequency (RF) switches, novel VO2 tunable capacitors and RF tunable filters. The newly proposed tunable capacitors overcome the frequency limitations of conventional VO2 RF switches, enabling filters working at a higher frequency range than the current state-of-the-art. An alternative actuation method for the tunable capacitors has been proposed by integrating microheaters for local heating of the VO2 region, and the design tradeoffs have been discussed by coupled electrothermal and electromagnetic simulations. The last device presented in this work operates in the terahertz (THz) range; the MIT in VO2 has been exploited to demonstrate for the first time the operation of a modulated scatterer (MST) working at THz frequencies. The proposed MST is the first THz device whose working principle is based on the actuation of a single VO2 junction, in contrast to commonly employed VO2 metasurfaces

Terahertz Technology and Its Applications

The Terahertz frequency range (0.1 – 10)THz has demonstrated to provide many opportunities in prominent research fields such as high-speed communications, biomedicine, sensing, and imaging. This spectral range, lying between electronics and photonics, has been historically known as “terahertz gap” because of the lack of experimental as well as fabrication technologies. However, many efforts are now being carried out worldwide in order improve technology working at this frequency range. This book represents a mechanism to highlight some of the work being done within this range of the electromagnetic spectrum. The topics covered include non-destructive testing, teraherz imaging and sensing, among others

A review of silicon subwavelength gratings: building break-through devices with anisotropic metamaterials

Abstract Silicon photonics is playing a key role in areas as diverse as high-speed optical communications, neural networks, supercomputing, quantum photonics, and sensing, which demand the development of highly efficient and compact light-processing devices. The lithographic segmentation of silicon waveguides at the subwavelength scale enables the synthesis of artificial materials that significantly expand the design space in silicon photonics. The optical properties of these metamaterials can be controlled by a judicious design of the subwavelength grating geometry, enhancing the performance of nanostructured devices without jeopardizing ease of fabrication and dense integration. Recently, the anisotropic nature of subwavelength gratings has begun to be exploited, yielding unprecedented capabilities and performance such as ultrabroadband behavior, engineered modal confinement, and sophisticated polarization management. Here we provide a comprehensive review of the field of subwavelength metamaterials and their applications in silicon photonics. We first provide an in-depth analysis of how the subwavelength geometry synthesizes the metamaterial and give insight into how properties like refractive index or anisotropy can be tailored. The latest applications are then reviewed in detail, with a clear focus on how subwavelength structures improve device performance. Finally, we illustrate the design of two ground-breaking devices in more detail and discuss the prospects of subwavelength gratings as a tool for the advancement of silicon photonics

Micro-hotplate based CMOS sensor for smart gas and odour detection

Low cost, highly sensitive, miniature CMOS micro-hotplate based gas sensors have received great attention recently. The global sensor market is expanding rapidly with an expected increase of 5 ~ 8% grow thin the next five years. The application areas for a gas sensor include but are not limited to, air quality monitoring, industrial and laboratory conditions, military, and biomedical sectors. It is the key hardware component of an electronic nose, as well as the signal processing on the software side. In this thesis, both aspects of such a system were studied with new sensor technologies and improved signal processing algorithms. In addition, this thesis also described different applications and research projects using these sensor technologies and algorithms. A novel plasmonic structure was employed as an infrared source for anon- dispersive infrared gas sensor. This structure was based on a CMOS micro hot plate with three metal layers and periodic cylindrical dots to induce plasmon resonance, that allowed a tunable narrow band infrared radiation with high sensitivity and selectivity. Five gases were studied as target gases, namely, carbon monoxide, carbon dioxide, acetone, ammonia and hydrogen sulfide. These emitter sources were fabricated and characterised with a gascell, optical filters and commercial detectors under different gas concentrations and humidity levels. The results were promising with the lowest detection limit for ammonia at 10 ppm with 5 ppm resolution. On the data processing side, various signal processing methods were explored both on-board and on-board. Temperature modulation was the on-board method by switching the operating temperatures of a micro hotplate. This technique was proven to over come and reduce some typical sensor issues, such as drift, slow re-sponse/recovery speed (from tens of seconds to a few seconds) and even cross sensitivities. Off-board post processing methods were also studied, including principal component analysis, k-nearest neighbours, self-organising maps and shallow/deep neural networks. The results from these algorithms were compared and overall an 85% or higher classification accuracy could be achieved. This work showed the potential to discriminate gases/odours, which could lead to the development of a real-time discrimination algorithm for low cost wearable devices

3D mapping of nanoscale physical properties of VCSEL devices

There is clear lack of methods that allows studies of the nanoscale structure of the VCSEL devices1 that are mainly focused on the roughness of the DBR, or using FIB cross-sectioning and TEM analysis of failed devices to observe the mechanism of the degradation. Here we present a recently developed advanced approach that combines Ar-ion nano-cross-sectioning with material sensitive SPM2 to reveal the internal structure of the VCSEL across the whole stack of top and bottom DBR including active area. We report for the first time the direct observation of local mechanical properties, electric potential and conductance through the 3D VCSEL stack. In order to achieve this, we use beam exit cross-section polishing that creates an oblique section with sub-nm surface roughness through the whole VCSEL structure that is fully suitable for the subsequent cross-sectional SPM (xSPM) studies. We used three different SPM measurement modes – nanomechanical local elastic moduli mapping via Ultrasonic Force Microscopy (UFM) 3, surface potential mapping via Kelvin Probe Force Microscopy (KPFM) and mapping of injected current (local conductivity) via Scanning Spreading Resistance Microscopy (SSRM). xSPM allowed to observe the resulting geometry of the whole device, including active cavity multiple quantum wells (MQW), to obtain profiles of differential doping of the DBR stack, profile of electric potential in the active cavity, and spatial variation of current injection in the individual QW in MQW area. Moreover, by applying forward bias to the VCSEL to initiate laser emission, we were able to observe distribution of the potential in the working regime, paving the way to understanding the 3D current flow in the complete device. Finally, we use finite element modelling (FEM) that confirm the experimental results that of the measurements of the local doping profiles and charge distribution in the active area of the VCSEL around the oxide current confinement aperture. While we show that the new xSPM methodology allowed advanced in-situ studies of VCSELs, it establishes a highly efficient characterisation platform for much broader area of compound semiconductor materials and devices. REFERENCES. 1. D. T. Mathes, R. Hull, K. Choquette, K. Geib, A. Allerman, J. Guenter, B. Hawkins and B. Hawthorne, in Vertical-Cavity Surface-Emitting Lasers Vii, edited by C. Lei and S. P. Kilcoyne (2003), Vol. 4994, pp. 67-82. 2. A. J. Robson, I. Grishin, R. J. Young, A. M. Sanchez, O. V. Kolosov and M. Hayne, Acs Applied Materials & Interfaces 5 (8), 3241-3245 (2013). 3. J. L. Bosse, P. D. Tovee, B. D. Huey and O. V. Kolosov, Journal of Applied Physics 115 (14), 144304 (2014)

Nanocomposite Based Infrared Photothermoelectric Detectors

In the last decade, photothermoelectric (PTE) detectors that combine photothermal and thermoelectric conversion have been demonstrated for infrared and terahertz tracking. They are advantageous in terms of facile fabrication, simple structures, room-temperature operation and self-powering capability. However, some challenges remain to be addressed, including low response performance, large-area fabrication and quick degradation. Based on the aforementioned challenges, this thesis targets optimizing current detectors and exploring new detector structures, which eventually enhance the PTE response and create possibilities for scalable manufacturing and mass production. In this thesis, we mainly develop four innovative PTE detectors. Firstly, we propose a new PTE structure using a capillary-assisted carbon nanotube forest (CNTF). By creating different CNT growth conditions, two regions of CNTF are grown and connected by the introduction of dimethyl sulfoxide. The detectors show a quick and sensitive infrared response. Secondly, we propose flexible and Si-based PTE detectors using CNT/poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) composite. Both detectors show quick mid-infrared responses and demonstrate non-destructive imaging tracking capacities. Thirdly, we create a vertical PTE detector using MXene/PEDOT:PSS composite and integrate the metamaterials into PTE detectors. The applications of non-contact fingertip tracking are achieved. Finally, the PTE detectors using CNTF active layer with MXene electrodes are fabricated and packed with PTFE, which enhances the stability and also indicates the non-destructive testing capacities. Overall, this thesis proposes a systematic method of designing infrared PTE detectors mainly based on CNTs, MXene and related composites, which also provides guidelines and methodology for developing other low-dimensional material/composite based PTE detectors. Furthermore, these detectors also pave the way toward wearable smart sensors for industrial applications