Piezoelectric energy harvesting solutions

This paper reviews the state of the art in piezoelectric energy harvesting. It presents the basics of piezoelectricity and discusses materials choice. The work places emphasis on material operating modes and device configurations, from resonant to non-resonant devices and also to rotational solutions. The reviewed literature is compared based on power density and bandwidth. Lastly, the question of power conversion is addressed by reviewing various circuit solutions

Piezoelectric Transducers Based on Aluminum Nitride and Polyimide for Tactile Applications

The development of micro systems with smart sensing capabilities is paving the way to progresses in the technology for humanoid robotics. The importance of sensory feedback has been recognized the enabler of a high degree of autonomy for robotic systems. In tactile applications, it can be exploited not only to avoid objects slipping during their manipulation but also to allow safe interaction with humans and unknown objects and environments. In order to ensure the minimal deformation of an object during subtle manipulation tasks, information not only on contact forces between the object and fingers but also on contact geometry and contact friction characteristics has to be provided. Touch, unlike other senses, is a critical component that plays a fundamental role in dexterous manipulation capabilities and in the evaluation of objects properties such as type of material, shape, texture, stiffness, which is not easily possible by vision alone. Understanding of unstructured environments is made possible by touch through the determination of stress distribution in the surrounding area of physical contact. To this aim, tactile sensing and pressure detection systems should be integrated as an artificial tactile system. As illustrated in the Chapter I, the role of external stimuli detection in humans is provided by a great number of sensorial receptors: they are specialized endings whose structure and location in the skin determine their specific signal transmission characteristics. Especially, mechanoreceptors are specialized in the conversion of the mechanical deformations caused by force, vibration or slip on skin into electrical nerve impulses which are processed and encoded by the central nervous system. Highly miniaturized systems based on MEMS technology seem to imitate properly the large number of fast responsive mechanoreceptors present in human skin. Moreover, an artificial electronic skin should be lightweight, flexible, soft and wearable and it should be fabricated with compliant materials. In this respect a big challenge of bio-inspired technologies is the efficient application of flexible active materials to convert the mechanical pressure or stress into a usable electric signal (voltage or current). In the emerging field of soft active materials, able of large deformation, piezoelectrics have been recognized as a really promising and attractive material in both sensing and actuation applications. As outlined in Chapter II, there is a wide choice of materials and material forms (ceramics: PZT; polycrystalline films: ZnO, AlN; polymers and copolymers: PVDF, PVDF-TrFe) which are actively piezoelectric and exhibit features more or less attractive. Among them, aluminum nitride is a promising piezoelectric material for flexible technology. It has moderate piezoelectric coefficient, when available in c-axis oriented polycrystalline columnar structure, but, at same time, it exhibits low dielectric constant, high temperature stability, large band gap, large electrical resistivity, high breakdown voltage and low dielectric loss which make it suitable for transducers and high thermal conductivity which implies low thermal drifts. The high chemical stability allows AlN to be used in humid environments. Moreover, all the above properties and its deposition method make AlN compatible with CMOS technology. Exploiting the features of the AlN, three-dimensional AlN dome-shaped cells, embedded between two metal electrodes, are proposed in this thesis. They are fabricated on general purpose Kapton™ substrate, exploiting the flexibility of the polymer and the electrical stability of the semiconductor at the same time. As matter of fact, the crystalline layers release a compressive stress over the polymer, generating three-dimensional structures with reduced stiffness, compared to the semiconductor materials. In Chapter III, a mathematical model to calculate the residual stresses which arise because of mismatch in coefficient of thermal expansion between layers and because of mismatch in lattice constants between the substrate and the epitaxially grown films is adopted. The theoretical equation is then used to evaluate the dependence of geometrical features of the fabricated three-dimensional structures on compressive residual stress. Moreover, FEM simulations and theoretical models analysis are developed in order to qualitative explore the operation principle of curved membranes, which are labelled dome-shaped diaphragm transducers (DSDT), both as sensors and as piezo-actuators and for the related design optimization. For the reliability of the proposed device as a force/pressure sensor and piezo-actuator, an exhaustive electromechanical characterization of the devices is carried out. A complete description of the microfabrication processes is also provided. As shown in Chapter IV, standard microfabrication techniques are employed to fabricate the array of DSDTs. The overall microfabrication process involves deposition of metal and piezoelectric films, photolithography and plasma-based dry and wet etching to pattern thin films with the desired features. The DSDT devices are designed and developed according to FEM and theoretical analysis and following the typical requirements of force/pressure systems for tactile applications. Experimental analyses are also accomplished to extract the relationship between the compressive residual stress due to the aluminum nitride and the geometries of the devices. They reveal different deformations, proving the dependence of the geometrical features of the three-dimensional structures on residual stress. Moreover, electrical characterization is performed to determine capacitance and impedance of the DSDTs and to experimentally calculate the relative dielectric constant of sputtered AlN piezoelectric film. In order to investigate the mechanical behaviour of the curved circular transducers, a characterization of the flexural deflection modes of the DSDT membranes is carried out. The natural frequency of vibrations and the corresponding displacements are measured by a Laser Doppler Vibrometer when a suitable oscillating voltage, with known amplitude, is applied to drive the piezo-DSDTs. Finally, being developed for tactile sensing purpose, the proposed technology is tested in order to explore the electromechanical response of the device when impulsive dynamic and/or long static forces are applied. The study on the impulsive dynamic and long static stimuli detection is then performed by using an ad hoc setup measuring both the applied loading forces and the corresponding generated voltage and capacitance variation. These measurements allow a thorough test of the sensing abilities of the AlN-based DSDT cells. Finally, as stated in Chapter V, the proposed technology exhibits an improved electromechanical coupling with higher mechanical deformation per unit energy compared with the conventional plate structures, when the devices are used as piezo-actuator. On the other hand, it is well suited to realize large area tactile sensors for robotics applications, opening up new perspectives to the development of latest generation biomimetic sensors and allowing the design and the fabrication of miniaturized devices

A FEEDBACK-BASED DYNAMIC INSTRUMENT FOR MEASURING THE MECHANICAL PROPERTIES OF SOFT TISSUES

In this paper, a novel feedback-based dynamic instrument integrated into a Minimally- Invasive-Surgery (MIS) tool to evaluate the mechanical impedance of soft tissues is presented. This instrument is capable of measuring viscoelasticity of tissues if specific boundary conditions are known. Some important advantages of the proposed instrument are that it is robust and simple in comparison to other similar instruments as it does not require magnitude information of plant’s displacement output and no force sensor is used. The precision and accuracy of the measurements of the proposed instrument for soft tissues is noticeably higher than similar instruments, which are not optimized to work with soft tissues. The proposed dynamic instrument is designed to detect the frequency shifts caused by contacting a soft tissue using an improved phase-locked loop feedback system (closed loop). These frequency shifts can then be used to evaluate the mechanical properties of the tissue. The closed-loop method works fast (with an approximate resonance-frequency-shift rate of 15 Hz per second), and is capable of measuring dy­ namic mechanical properties of viscoelastic tissues, while previous focus was mostly on static/quasi-static elastic modulus. The instrument is used to evaluate the equivalent stiffness of several springs and cantilever beams, mass of reference samples, and also the frequency shifts of several phantoms with injected tumors, noting that these frequency shifts can be used to measure the viscoelasticity of the tissues. It is also shown that the instrument can be used for tumor localization in these phantoms

Finite element modeling of dielectric elastomer actuators for space applications

A special actuator device with passive sensing capability based on dielectric elastomer was studied and specialized to be used in space applications. The work illustrates the research project modeling procedure adopted to simulate the mechanical behavior of this material based on a finite element theory approach. The Mooney-Rivlin’s hyperelastic and Maxwell’s electrostatic models provide the theoretical basis to describe its electro-mechanic behavior. The validation of the procedure is performed through a numerical-experimental correlation between the response of a prototype of actuator developed by the Risø Danish research center and the 3D finite element model simulations. An investigation concerning a possible application in the space environment of dielectric elastomer actuators (DEA) is also presented

Numerical modelling of micro energy harvesting systems based on piezoelectric composites polarized with interdigitated electrodes

This paper focuses on the numerical modelling of micro-energy harvesting systems(MEHSs) based on piezoelectric composites polarised with interdigitated electrodes (PCPIE). The system response and the harvested energy are numerically assessed using a multilayer piezoelectric shell finite element (FE) with a uniform fibre aligned electric field (UFAEF) in each active layer. Circuit and compatibility equations are included to take into account the presence of the electrical network. A state-space (SS) model is derived and used to evaluate the effect of electrical impedance on damping and natural frequencies, as well as dissipated energy/power. An energy harvester beam with a piezoelectric macro fibre composite (MFC) patch is first modelled with the developed tools. Numerical results are found to be in good agreement with experimental results reported in the literature. Finally, a MEHS consisting of a closed-box beam equipped with PCPIE devices bonded to its skin is analysed. The structural system is subjected to dynamic loading imposing oscillating displacements and deformations compatibles with those expected during service-life. Numerical results show the influence of the electrical impedance on system response, damping, natural frequencies, and electrical power.Fil: Guennam, Ahmad Eduardo. Universidad Nacional de Tucumán; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Tucumán; ArgentinaFil: Luccioni, Bibiana Maria. Universidad Nacional de Tucumán; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas. Centro Científico Tecnológico Conicet - Tucumán; Argentin

Designing a New Tactile Display Technology and its Disability Interactions

People with visual impairments have a strong desire for a refreshable tactile interface that can provide immediate access to full page of Braille and tactile graphics. Regrettably, existing devices come at a considerable expense and remain out of reach for many. The exorbitant costs associated with current tactile displays stem from their intricate design and the multitude of components needed for their construction. This underscores the pressing need for technological innovation that can enhance tactile displays, making them more accessible and available to individuals with visual impairments. This research thesis delves into the development of a novel tactile display technology known as Tacilia. This technology's necessity and prerequisites are informed by in-depth qualitative engagements with students who have visual impairments, alongside a systematic analysis of the prevailing architectures underpinning existing tactile display technologies. The evolution of Tacilia unfolds through iterative processes encompassing conceptualisation, prototyping, and evaluation. With Tacilia, three distinct products and interactive experiences are explored, empowering individuals to manually draw tactile graphics, generate digitally designed media through printing, and display these creations on a dynamic pin array display. This innovation underscores Tacilia's capability to streamline the creation of refreshable tactile displays, rendering them more fitting, usable, and economically viable for people with visual impairments