A 16 channel high-voltage driver with 14 bit resolution for driving piezoelectric actuators

A high-voltage, 16 channel driver with a maximum voltage of 72 volt and 14 bit resolution in a high-voltage CMOS (HV-CMOS) process is presented. This design incorporates a 14 bit monotonic by design DAC together with a high-voltage complementary class AB output stage for each channel. All 16 channels are used for driving a piezoelectric actuator within the control loop of a micropositioning system. Since the output voltages are static most of the time, a class AB amplifier is used, implementing voltage feedback to achieve 14 bit accuracy. The output driver consists of a push-pull stage with a built-in output current limitation and high-impedance mode. Also a protection circuit is added which limits the internal current when the output voltage saturates against the high-voltage rail. The 14 bit resolution of each channel is generated with a segmented resistor string DAC which assures monotonic by design behavior by using leapfrogging of the buffers used between segments. A diagonal shuffle layout is used for the resistor strings leading to cancellation of first order process gradients. The dense integration of 16 channels with high peak currents results in crosstalk, countered in this design by using staggered switching and resampling of the output voltages

Modeling and Control of Piezoelectric Actuators

Piezoelectric actuators (PEAs) utilize the inverse piezoelectric effect to generate fine displacement with a resolution down to sub-nanometers and as such, they have been widely used in various micro- and nanopositioning applications. However, the modeling and control of PEAs have proven to be challenging tasks. The main difficulties lie in the existence of various nonlinear or difficult-to-model effects in PEAs, such as hysteresis, creep, and distributive vibration dynamics. Such effects can seriously degrade the PEA tracking control performances or even lead to instability. This raises a great need to model and control PEAs for improved performance. This research is aimed at developing novel models for PEAs and on this basis, developing model-based control schemes for the PEA tracking control taking into account the aforementioned nonlinear effects. In the first part of this research, a model of a PEA for the effects of hysteresis, creep, and vibration dynamics was developed. Notably, the widely-used Preisach hysteresis model cannot represent the one-sided hysteresis of PEAs. To overcome this shortcoming, a rate-independent hysteresis model based on a novel hysteresis operator modified from the Preisach hysteresis operator was developed, which was then integrated with the models of creep and vibration dynamics to form a comprehensive model for PEAs. For its validation, experiments were carried out on a commercially-available PEA and the results obtained agreed with those from model simulations. By taking into account the linear dynamics and hysteretic behavior of the PEA as well as the presliding friction between the moveable platform and the end-effector, a model of the piezoelectric-driven stick-slip (PDSS) actuator was also developed in the first part of the research. The effectiveness of the developed model was illustrated by the experiments on the PDSS actuator prototyped in the author's lab. In the second part of the research, control schemes were developed based on the aforementioned PEA models for tracking control of PEAs. Firstly, a novel PID-based sliding mode (PIDSM) controller was developed. The rational behind the use of a sliding mode (SM) control is that the SM control can effectively suppress the effects of matched uncertainties, while the PEA hysteresis, creep, and external load can be represented by a lumped matched uncertainty based on the developed model. To solve the chattering and steady-state problems, associated with the ideal SM control and the SM control with boundary layer (SMCBL), the novel PIDSM control developed in the present study replaces the switching control term in the ideal SM control schemes with a PID regulator. Experiments were carried out on a commercially-available PEA and the results obtained illustrate the effectiveness of the PIDSM controller, and its superiorities over other schemes of PID control, ideal SM control, and the SMCBL in terms of steady state error elimination, chattering suppression, and tracking error suppression. Secondly, a PIDSM observer was also developed based on the model of PEAs to provide the PIDSM controller with state estimates of the PEA. And the PIDSM controller and the PIDSM observer were combined to form an integrated control scheme (PIDSM observer-controller or PIDSMOC) for PEAs. The effectiveness of the PIDSM observer and the PIDSMOC were also validated experimentally. The superiority of the PIDSMOC over the PIDSM controller with σ-β filter control scheme was also analyzed and demonstrated experimentally. The significance of this research lies in the development of novel models for PEAs and PDSS actuators, which can be of great help in the design and control of such actuators. Also, the development of the PIDSM controller, the PIDSM observer, and their integrated form, i.e., PIDSMOC, enables the improved performance of tracking control of PEAs with the presence of various nonlinear or difficult-to-model effects

A flexure-based kinematically decoupled micropositioning stage with a centimeter range dedicated to micro/nano manufacturing

Precision positioning stages with large strokes and high positioning accuracy are attractive for high-performance micro/nano manufacturing. This paper presents the dynamic design and characteristic investigation of a novel XY micropositioning stage. Firstly, the mechanism of the stage was introduced. The XY stage was directly driven by two linear motors, and the X- and Y- axes kinematic decoupling was realized through a novel flexible decoupling mechanism based on flexure hinges and preloaded spring. The dynamic model of the XY stage was established, and the influences of the rotational stiffness of the flexure hinge and the initial positions of the working table on the dynamic rotation of the positioning stage were investigated. The stiffness and geometric parameters of the flexure hinges were determined at the condition that the angular displacements of the working table were within ±0.5° with a motion stroke of ±25 mm. Finally the stage performance was investigated through simulation and experiments, the X- and Y-axes step responses, the rotation angular and positioning accuracy of the stage were obtained. The results show that the stage exhibits good performance and can be used for micro/nano manufacturing

Enhanced Positioning Bandwidth in Nanopositioners via Strategic Pole Placement of the Tracking Controller

Funding: This research received no external funding.Peer reviewedPublisher PD

Development and characterization of a novel piezoelectric-driven stick-slip actuator with anisotropic-friction surfaces

Piezoelectric actuators (PEA) hold the most promise for precision positioning applications due to their capability of producing extremely small displacements down to 10 pm (1 pm = 10-12 m) as well as their high stiffness and force output. The piezoelectric-driven stick-slip (PDSS) actuator, working on the friction-inertia concept, has the capacity of accomplishing an unlimited range of motion. It also holds the promises of simple configuration and low cost. On the other hand, the PDSS actuator has a relatively low efficiency and low loading capability, which greatly limits its applications. The purpose of this research is to improve the performance of the PDSS actuators by employing specially-designed working surfaces. The working surfaces, referred as anisotropic friction (AF) surfaces in this study, can provide different friction forces depending on the direction of relative motion of the two surfaces, and are used in this research to accomplish the aforementioned purpose. To fabricate such surfaces, two nanostructure technologies are employed: hot filament chemical vapour deposition (HFCVD) and ion beam etching (IBE). The HFCVD is used to deposit diamond on silicon substrates; and the IBE is used to etch the diamond crystalloid with a certain angle with respect to the coating surface to obtain an unsymmetrical-triangle microstructure. A PDSS actuator prototype containing the AF surfaces was developed in this study to verify the function of the AF surfaces and characterize the performance of PDSS actuators. The designed surfaces were mounted on the prototype; and the improvement in performance was characterized by conducting a set of experiments with both the normal isotropic friction (IF) surfaces and the AF surfaces, respectively. The results illustrate that the PDSS actuator with the AF surface has a higher efficiency and improved loading capability compared to the one with the IF surfaces. A model was also developed to represent the displacement of the novel PDSS actuator. The dynamics of the PEA and the platform were approximated by using a second order dynamic system. The pre-sliding friction behaviour involved was investigated by modifying the LuGre friction model, in which six parameters (Note that three parameters are used in the LuGre model) were employed to represent the anisotropic friction. By combining the PEA mechanism model, the modified friction model, and the dynamics of end-effector, a model for the PDSS actuator with the AF surface was developed. The model with the identified parameters was simulated in MATLAB Simulink and the simulation results obtained were compared to the experimental results to verify the model. The comparison suggests that the model developed in this study is promising to represent the displacement of the novel PDSS actuators with AF surfaces

Deep learning applied to data-driven dynamic characterization of hysteretic piezoelectric micromanipulators

The presence of nonlinearities such as hysteresis and creep increases the difficulty in the dynamic modeling and control of piezoelectric micromanipulators, in spite of the fact that the application of such devices requires high accuracy. Moreover, sensing in the microscale is expensive, making model feedback the only viable option. On the other hand, data-driven dynamic models are powerful tools within system identification that may be employed to construct models for a given plant. Recently, considerable effort has been devoted in extending the huge success of deep learning models to the identification of dynamic systems. In the present paper, we present the results of the successful application of deep learning based black-boxmodels for characterizing the dynamic behavior of micromanipulators. The excitation signal is a multisine spanning the frequency band of interest and the selected model is validated with semi static individual sinusoidal curves. Various architectures are tested to achieve a reasonable result and we try to summarize the best approach for the fine tuning required for such application. The results indicate the usefulness and predictive power for deep learning based models inthe field of system identification and in particular hysteresis modeling and compensation in micromanipulation applications

Micro motion stages with flexure hinges-design and control

The developments in micro and nano technologies brought the need of high precision micropositioning stages to be used in micro/nano applications such as cell manipulation, surgery, aerospace, micro fluidics, optical systems, micromachining and microassembly etc. Micro motion stages with flexible joints called compliant mechanisms are built to provide the needed accuracy and precision. This thesis aims to build compliant planar micro motion stages using flexure hinges to be used as micropositioning devices in x-y directions by applying new control methods. First 3- RRR planar parallel kinematic structure is selected which is also popular in the literature. Then the mechanism is developed to have a new structure which is a 3-PRR mechanism. The necessary geometric parameters are selected by using Finite Element Analysis (FEA). The displacement, stress and frequency behaviors of the mechanisms are compared and discussed. Modeling of the flexure based mechanisms is also studied for 3-PRR compliant stage by using Kinetostatic modeling method which combines the compliance calculations of flexure hinges with kinematics of the mechanism. Piezoelectric actuators and optical 2d position sensor which uses a laser source are used for actuation and measurement of the stages. After the experimental studies it's seen that the results are not compatible with FEA because of the unpredictable errors caused by manufacturing and assembly. We have succeeded to eliminate those errors by implementing a control methodology based on Sliding Mode Control with Disturbance Observer which is also based on Sliding Mode Control using linear piezoelectric actuator models. Finally, we have extracted experimental models for each actuation direction of the stage and used those models instead of piezoelectric actuator models which lowered our errors in the accuracy of our measurement and ready to be used as a high precision micro positioning stage for our micro system applications

Motion Control of Smart Material Based Actuators: Modeling, Controller Design and Experimental Evaluation

Smart material based actuators, such as piezoelectric, magnetostrictive, and shape memory alloy actuators, are known to exhibit hysteresis effects. When the smart actuators are preceded with plants, such non-smooth nonlinearities usually lead to poor tracking performance, undesired oscillation, or even potential instability in the control systems. The development of control strategies to control the plants preceded with hysteresis actuators has become to an important research topic and imposed a great challenge in the control society. In order to mitigate the hysteresis effects, the most popular approach is to construct the inverse to compensate such effects. In such a case, the mathematical descriptions are generally required. In the literature, several mathematical hysteresis models have been proposed. The most popular hysteresis models perhaps are Preisach model, Prandtl-Ishlinskii model, and Bouc-Wen model. Among the above mentioned models, the Prandtl-Ishlinskii model has an unique property, i.e., the inverse Prandtl-Ishlinskii model can be analytically obtained, which can be used as a feedforward compensator to mitigate the hysteresis effect in the control systems. However, the shortcoming of the Prandtl-Ishlinskii model is also obvious because it can only describe a certain class of hysteresis shapes. Comparing to the Prandtl-Ishlinskii model, a generalized Prandtl-Ishlinskii model has been reported in the literature to describe a more general class of hysteresis shapes in the smart actuators. However, the inverse for the generalized Prandtl-Ishlinskii model has only been given without the strict proof due to the difficulty of the initial loading curve construction though the analytic inverse of the Prandtl-Ishlinskii model is well documented in the literature. Therefore, as a further development, the generalized Prandtl-Ishlinskii model is re-defined and a modified generalized Prandtl-Ishlinskii model is proposed in this dissertation which can still describe similar general class of hysteresis shapes. The benefit is that the concept of initial loading curve can be utilized and a strict analytical inverse model can be derived for the purpose of compensation. The effectiveness of the obtained inverse modified generalized Prandtl-Ishlinskii model has been validated in the both simulations and in experiments on a piezoelectric micropositioning stage. It is also affirmed that the proposed modified generalized Prandtl-Ishlinskii model fulfills two crucial properties for the operator based hysteresis models, the wiping out property and the congruency property. Usually the hysteresis nonlinearities in smart actuators are unknown, the direct open-loop feedforward inverse compensation will introduce notably inverse compensation error with an estimated inverse construction. A closed-loop adaptive controller is therefore required. The challenge in fusing the inverse compensation and the robust adaptive control is that the strict stability proof of the closed loop control system is difficult to obtain due to the fact that an error expression of the inverse compensation has not been established when the hysteresis is unknown. In this dissertation research, by developing the error expression of the inverse compensation for modified generalized Prandtl-Ishlinskii model, two types of inverse based robust adaptive controllers are designed for a class of uncertain systems preceded by a smart material based actuator with hysteresis nonlinearities. When the system states are available, an inverse based adaptive variable structure control approach is designed. The strict stability proof is established thereafter. Comparing with other works in the literature, the benefit for such a design is that the proposed inverse based scheme can achieve the tracking without necessarily adapting the uncertain parameters (the number could be large) in the hysteresis model, which leads to the computational efficiency. Furthermore, an inverse based adaptive output-feedback control scheme is developed when the exactly knowledge of most of the states is unavailable and the only accessible state is the output of the system. An observer is therefore constructed to estimate the unavailable states from the measurements of a single output. By taking consideration of the analytical expression of the inverse compensation error, the global stability of the close-loop control system as well as the required tracking accuracy are achieved. The effectiveness of the proposed output-feedback controller is validated in both simulations and experiments