Improvement of signal analysis for the ultrasonic microscopy

This dissertation describes the improvement of signal analysis in ultrasonic microscopy for nondestructive testing. Specimens with many thin layers, like modern electronic components, pose a particular challenge for identifying and localizing defects. In this thesis, new evaluation algorithms have been developed which enable analysis of highly complex layer-stacks. This is achieved by a specific evaluation of multiple reflections, a newly developed iterative reconstruction and deconvolution algorithm, and the use of classification algorithms with a highly optimized simulation algorithm. Deep delaminations inside a 19-layer component can now not only be detected, but also localized. The new analysis methods also enable precise determination of elastic material parameters, sound velocities, thicknesses, and densities of multiple layers. The highly improved precision of determined reflections parameters with deconvolution also provides better and more conclusive results with common analysis methods.:Kurzfassung......................................................................................................................II Abstract.............................................................................................................................V List ob abbreviations........................................................................................................X 1 Introduction.......................................................................................................................1 1.1 Motivation.....................................................................................................................2 1.2 System theoretical description.....................................................................................3 1.3 Structure of the thesis..................................................................................................6 2 Sound field.........................................................................................................................8 2.1 Sound field measurement............................................................................................8 2.2 Sound field modeling..................................................................................................11 2.2.1 Reflection and transmission coefficients.........................................................11 2.2.2 Sound field modeling with plane waves..........................................................13 2.2.3 Generalized sound field position.....................................................................19 2.3 Receiving transducer signal.......................................................................................20 2.3.1 Calculation of the transducer signal from the sound field...............................20 2.3.2 Received signal amplitude..............................................................................21 2.3.3 Measurement of reference signals..................................................................24 3 Ultrasonic Simulation......................................................................................................27 3.1 State of the art............................................................................................................27 3.2 Simulation approach..................................................................................................28 3.2.1 Sound field measurement based simulation...................................................28 3.2.2 Reference signal based simulation.................................................................30 3.3 Determination of the impulse response.....................................................................31 3.3.1 1D ray-trace algorithm....................................................................................31 3.3.2 2D ray-trace algorithm....................................................................................33 3.3.3 Complexity reduction – optimizations.............................................................35 4 Deconvolution – Determination of reflection parameters............................................38 4.1 State of the art............................................................................................................39 4.1.1 Decomposition techniques..............................................................................39 4.1.2 Deconvolution.................................................................................................41 4.2 Analytic signal investigations for deconvolution.........................................................42 4.3 Single reference pulse deconvolution........................................................................44 4.4 Multi-pulse deconvolution..........................................................................................47 4.4.1 Homogeneous multi-pulse deconvolution.......................................................48 4.4.2 Multi-pulse deconvolution with simulated GSP profile....................................49 5 Reconstruction.................................................................................................................50 5.1 State of the art............................................................................................................50 5.2 Reconstruction approach...........................................................................................51 5.3 Direct material parameter estimation.........................................................................52 5.3.1 Sound velocities and layer thickness..............................................................52 5.3.2 Density, elastic modules and acoustic attenuation.........................................54 5.4 Iterative material parameter determination of a single layer......................................56 5.5 Reconstruction of complex specimens......................................................................60 5.5.1 Material characterization of multiple layers ....................................................60 5.5.2 Iterative simulation parameter optimization with correlation...........................62 5.5.3 Pattern recognition reconstruction of specimens with known base structure. 66 6 Applications and results.................................................................................................71 6.1 Analysis of stacked components................................................................................71 6.2 Time-of-flight and material analysis...........................................................................74 7 Conclusions and perspectives.......................................................................................78 References.......................................................................................................................82 Figures.............................................................................................................................86 Tables...............................................................................................................................88 Appendix..........................................................................................................................89 Acknowledgments.........................................................................................................100 Danksagung...................................................................................................................101Die vorgelegte Dissertation befasst sich mit der Verbesserung der Signalauswertung für die Ultraschallmikroskopie in der zerstörungsfreien Prüfung. Insbesondere bei Proben mit vielen dünnen Schichten, wie bei modernen Halbleiterbauelementen, ist das Auffinden und die Bestimmung der Lage von Fehlstellen eine große Herausforderung. In dieser Arbeit wurden neue Auswertealgorithmen entwickelt, die eine Analyse hochkomplexer Schichtabfolgen ermöglichen. Erreicht wird dies durch die gezielte Auswertung von Mehrfachreflexionen, einen neu entwickelten iterativen Rekonstruktions- und Entfaltungsalgorithmus und die Nutzung von Klassifikationsalgorithmen im Zusammenspiel mit einem hoch optimierten neu entwickelten Simulationsalgorithmus. Dadurch ist es erstmals möglich, tief liegende Delaminationen in einem 19-schichtigem Halbleiterbauelement nicht nur zu detektieren, sondern auch zu lokalisieren. Die neuen Analysemethoden ermöglichen des Weiteren eine genaue Bestimmung von elastischen Materialparametern, Schallgeschwindigkeiten, Dicken und Dichten mehrschichtiger Proben. Durch die stark verbesserte Genauigkeit der Reflexionsparameterbestimmung mittels Signalentfaltung lassen sich auch mit klassischen Analysemethoden deutlich bessere und aussagekräftigere Ergebnisse erzielen. Aus den Erkenntnissen dieser Dissertation wurde ein Ultraschall-Analyseprogramm entwickelt, das diese komplexen Funktionen auf einer gut bedienbaren Oberfläche bereitstellt und bereits praktisch genutzt wird.:Kurzfassung......................................................................................................................II Abstract.............................................................................................................................V List ob abbreviations........................................................................................................X 1 Introduction.......................................................................................................................1 1.1 Motivation.....................................................................................................................2 1.2 System theoretical description.....................................................................................3 1.3 Structure of the thesis..................................................................................................6 2 Sound field.........................................................................................................................8 2.1 Sound field measurement............................................................................................8 2.2 Sound field modeling..................................................................................................11 2.2.1 Reflection and transmission coefficients.........................................................11 2.2.2 Sound field modeling with plane waves..........................................................13 2.2.3 Generalized sound field position.....................................................................19 2.3 Receiving transducer signal.......................................................................................20 2.3.1 Calculation of the transducer signal from the sound field...............................20 2.3.2 Received signal amplitude..............................................................................21 2.3.3 Measurement of reference signals..................................................................24 3 Ultrasonic Simulation......................................................................................................27 3.1 State of the art............................................................................................................27 3.2 Simulation approach..................................................................................................28 3.2.1 Sound field measurement based simulation...................................................28 3.2.2 Reference signal based simulation.................................................................30 3.3 Determination of the impulse response.....................................................................31 3.3.1 1D ray-trace algorithm....................................................................................31 3.3.2 2D ray-trace algorithm....................................................................................33 3.3.3 Complexity reduction – optimizations.............................................................35 4 Deconvolution – Determination of reflection parameters............................................38 4.1 State of the art............................................................................................................39 4.1.1 Decomposition techniques..............................................................................39 4.1.2 Deconvolution.................................................................................................41 4.2 Analytic signal investigations for deconvolution.........................................................42 4.3 Single reference pulse deconvolution........................................................................44 4.4 Multi-pulse deconvolution..........................................................................................47 4.4.1 Homogeneous multi-pulse deconvolution.......................................................48 4.4.2 Multi-pulse deconvolution with simulated GSP profile....................................49 5 Reconstruction.................................................................................................................50 5.1 State of the art............................................................................................................50 5.2 Reconstruction approach...........................................................................................51 5.3 Direct material parameter estimation.........................................................................52 5.3.1 Sound velocities and layer thickness..............................................................52 5.3.2 Density, elastic modules and acoustic attenuation.........................................54 5.4 Iterative material parameter determination of a single layer......................................56 5.5 Reconstruction of complex specimens......................................................................60 5.5.1 Material characterization of multiple layers ....................................................60 5.5.2 Iterative simulation parameter optimization with correlation...........................62 5.5.3 Pattern recognition reconstruction of specimens with known base structure. 66 6 Applications and results.................................................................................................71 6.1 Analysis of stacked components................................................................................71 6.2 Time-of-flight and material analysis...........................................................................74 7 Conclusions and perspectives.......................................................................................78 References.......................................................................................................................82 Figures.............................................................................................................................86 Tables...............................................................................................................................88 Appendix..........................................................................................................................89 Acknowledgments.........................................................................................................100 Danksagung...................................................................................................................10

Ultrasonic Measurement of Thin Condensing Fluid Films

The condensation of vapor onto a cooled surface is a phenomenon which can be difficult to quantify spatially and as a function of time; this thesis describes an ultrasonic system to measure this phenomenon. The theoretical basis for obtaining condensate film thickness measurements, which can be used to calculate growth rates and film surface features, from ultrasonic echoes will be discussed and the hardware and software will be described. The ultrasonic system utilizes a 5MHz planar piston transducer operated in pulse-echo mode to measure the thickness of a fluid film on a cooled copper block over the fluid thickness range of 50 microns to several centimeters; the signal processing algorithms and software developed to carry out this task are described in detail. The results of several experiments involving the measurement of both non-condensing and condensing films are given. In addition, numerical modeling of specific condensate film geometries was performed to support the experimental system; the results of modeling nonuniform fluid layers are discussed in the context of the effect of such layers on the measurement system

In-situ high-resolution measurement of RHF nuclear fuel plates' spacing

International audienceMost of the High Performance Research Reactors (HPRR) are made of plates undergoing a limited swelling during irradiation. Measuring the fuel thickness or the inter-plate distance is then a promissing way to obtain information on the fuel element irradiation history. The experimental constraints are however quite heavy due to the aimed resolution and the element geometry. In order to perform such measurements, a high resolution ultrasonic device was designed. It was thinned down to 1 mm in order to be inserted into the reactor water-channel. The system is then excited with a 120 MHz central frequency burst and the distance measurement is carried out through the ultrasonic waves' time of flight estimation. A series of experiments was performed on a full size irradiated fuel element of the "Institut Laue-Langevin" reactor proving the feasibility of real-time in-situ measurements

Estudo da energia de ultra-som para a estimativa de retro-espalhamento invasiva em tecidos mediante temperatura

Dissertação de mest., Engenharia Eletrónica e Telecomunicações, Faculdade de Ciências e Tecnologia, Univ. do Algarve, 2012This experimental work is part of the application of ultrasound for hyperthermia (thermal therapy) aiming at treatment of cancer cells. The analysis of the back-scattered ultrasound energy enables the study of the temperature behavior induced by the ultrasonic signal in the tissues and it is the primary goal of this case study. To carry out this experiment we developed a gel-based phantom which mimics the behavior of human tissues under ultrasound signals. Subsequently, in order to obtain a more human like phantom the experiments were repeated with ex-vivo pork loin. The experiments involved ultrasonic therapeutic and imaging instrumentation connected to a function generator and a signal acquisition system. Experiments were performed considering different energies (0.5, 1, 1.5 and 2 W/cm3) of the therapeutic transducer and two emission frequencies of the image transducer (5 and 7 MHz). Five temperature sensors were used to measure the invasive temperature in the gel-based phantoms and two sensors in the experiments with pork loin. Analyzing the time delays in the echoes of the back-scattered ultrasonic signals of both types of phantoms we verified the relationship between temperature rise and the increase in the speed of propagation of the echoes. The assessment of variations in the back-scattered energy proved its dependency on the temperature applied in pork loin tissue, but no conclusion could be taken in the case of gel-based phantomEste trabalho experimental enquadra-se na aplicação de ultrassom para hipertermia (terapêutica térmica) com vista ao tratamento de células neoplásicas. A análise da energia do ultrassom retro-difundida possibilita o estudo do comportamento da variação de temperatura espalhada pelo sinal ultrassónico nos tecidos, constituindo o objetivo primordial deste trabalho. Para a realização das experiências foram desenvolvidos ‘phantoms’ baseados em agar-agar para mimificar o comportamento dos tecidos humanos com o ultrassom. Posteriormente, com vista a obter um ‘phantom’ mais próximo do tecido humano, as experiências foram repetidas com lombo de porco ex-vivo. As experiências envolveram instrumentação ultrassónica de terapêutica e de imagem, conectados a instrumentação de geração de funções e de aquisição de sinais. Foram realizadas experiências considerando diferentes energias (0.5, 1, 1.5 e 2 W/cm3) do transdutor de terapia e duas frequências de emissão do transdutor de imagem (5 e 7 MHz). Utilizaram-se 5 sensores de temperatura para medição invasiva da temperatura nos fantômas baseados em gel e dois sensores nas experiências com lombo de porco. Analisando os atrasos temporais nos ecos dos sinais ultrassónicos retro-espalhados para ambos os tipos de ‘phantoms’ verificou-se a relação entre o aumento de temperatura e o aumento da velocidade de propagação dos ecos. A análise das variações das energias retro-espalhadas provou ser dependente da temperatura aplicada no lombo de porco não sendo contudo conclusiva no caso dos ‘phantoms’ baseados em gel

The acousto-ultrasonic approach

The nature and underlying rationale of the acousto-ultrasonic approach is reviewed, needed advanced signal analysis and evaluation methods suggested, and application potentials discussed. Acousto-ultrasonics is an NDE technique combining aspects of acoustic emission methodology with ultrasonic simulation of stress waves. This approach uses analysis of simulated stress waves for detecting and mapping variations of mechanical properties. Unlike most NDE, acousto-ultrasonics is less concerned with flaw detection than with the assessment of the collective effects of various flaws and material anomalies. Acousto-ultrasonics has been applied chiefly to laminated and filament-wound fiber reinforced composites. It has been used to assess the significant strength and toughness reducing effects that can be wrought by combinations of essentially minor flaws and diffuse flaw populations. Acousto-ultrasonics assesses integrated defect states and the resultant variations in properties such as tensile, shear, and flexural strengths and fracture resistance. Matrix cure state, porosity, fiber orientation, fiber volume fraction, fiber-matrix bonding, and interlaminar bond quality are underlying factors

Capacitive Micromachined Ultrasound Transducers for Non-Destructive Testing Applications

The need for using ultrasound non-destructive testing (NDT) to characterize, test and detect flaws within metals, led us to utilize Capacitive Micromachined Ultrasound Transducers (CMUTs) in the ultrasound NDT field. This is due to CMUT's large bandwidths and high receive sensitivity, to be a suitable substitute for piezoelectric (PZT) transducers in NDT applications. The basic operational test of CMUTs, conducted in this research, was carried out based on a pulse-echo technique by propagating acoustic pulses into an object and analyzing the reflected signals. Thus, characterizing the tested material, measuring its dimension, and detecting flaws within it can be achieved. Throughout the course of this research, the fundamental parameters of CMUT including pull-in voltage and resonance frequency were initially calculated analytically and using Finite Element Analysis (FEA). Afterward, the CMUT was fabricated out of two mechanically bonded wafers. The device's movable membrane (top electrode) and stationary electrode (bottom electrode) were made out of Boron-doped Silicon. The two electrodes were electrically isolated by an insulation layer containing a sealed gap. The CMUT was then tested and characterized to analyze its performance for NDT applications. In-immersion characterization revealed that the 2.22 MHz CMUT obtained a -6 dB fractional bandwidth of 189%, and a receive sensitivity of 31.15 mV/kPa, compared to 45% and 4.83 mV/kPa of the PZT probe. A pulse-echo test, performed to examine an aluminum block with and without flaws, showed success in distinguishing the surfaces and the flaws of the tested sample