Development of a micromanipulation system with force sensing

This article provides in-depth knowledge about our undergoing effort to develop an open architecture micromanipulation system with force sensing capabilities. The major requirement to perform any micromanipulation task effectively is to ensure the controlled motion of actuators within nanometer accuracy with low overshoot even under the influence of disturbances. Moreover, to achieve high dexterity in manipulation, control of the interaction forces is required. In micromanipulation, control of interaction forces necessitates force sensing in milli-Newton range with nano-Newton resolution. In this paper, we present a position controller based on a discrete time sliding mode control architecture along with a disturbance observer. Experimental verifications for this controller are demonstrated for 100, 50 and 10 nanometer step inputs applied to PZT stages. Our results indicate that position tracking accuracies up to 10 nanometers, without any overshoot and low steady state error are achievable. Furthermore, the paper includes experimental verification of force sensing within nano-Newton resolution using a piezoresistive cantilever endeffector. Experimental results are compared to the theoretical estimates of the change in attractive forces as a function of decreasing distance and of the pull off force between a silicon tip and a glass surface, respectively. Good agreement among the experimental data and the theoretical estimates has been demonstrated

Fabrication and Characterization of Self-Sensing Nanocomposite - "Smart Skin"

This study characterizes the behaviour and properties of self-sensing polymer nanocomposite. Specifically, we studied the Electrical, Mechanical and Piezoresistive properties. Electrically the material is conductive with a linear response to change in applied strain. Mechanically the material behaves like a polymer, whose Youngs Modulus increases with added MWCNT. From a piezoelectricalperspective this material is stable and can maintain its electrical and mechanical behaviour for 50 cycles of repeated loading at 2mm/min. When producing thin sheets of nanocomposite, the effects of material thickness on piezoresistivity are negligible. The nanocomposite is fabricated by mechanically mixing multiwalled carbon nanotubes (MWCNT) with 2-part polydimethylsiloxane (PDMS). The randomly aligned MWCNT-PDMS is fabricated for two configurations, Type I and Type II. In these configurations, Type I is read longitudinal to force using 4-Probe method and Type II is read perpendicularly with 2-Probe method. The strain is applied to Type I in tension and Type II in compression. The Type I characterizes the bulk conductivity for varying wt% of MWCNT. The Type II looks at the sheet conductivity for varying thickness

Bioinspired PDMS-graphene cantilever flow sensors using 3D printing and replica moulding

Flow sensors found in animals often feature soft and slender structures (e.g. fish neuromasts, insect hairs, mammalian stereociliary bundles, etc.) that bend in response to the slightest flow disturbances in their surroundings and heighten the animal's vigilance with respect to prey and/or predators. However, fabrication of bioinspired flow sensors that mimic the material properties (e.g. low elastic modulus) and geometries (e.g. high-aspect ratio structures) of their biological counterparts remains a challenge. In this work, we develop a facile and low-cost method of fabricating high-aspect ratio (HAR) cantilever flow sensors inspired by the mechanotransductory flow sensing principles found in nature. The proposed workflow entails high-resolution 3D printing to fabricate the master mould, replica moulding to create HAR polydimethylsiloxane (PDMS) cantilevers (thickness = 0.5 – 1 mm, width = 3 mm, aspect ratio = 20) with microfluidic channel (150 µm wide × 90 µm deep) imprints, and finally graphene nanoplatelet ink drop-casting into the microfluidic channels to create a piezoresistive strain gauge near the cantilever's fixed end. The piezoresistive flow sensors were tested in controlled airflow (0 – 9 m/s) inside a wind tunnel where they displayed high sensitivities of up to 5.8 kΩ/ms-1, low hysteresis (11% of full-scale deflection), and good repeatability. The sensor output showed a second order dependence on airflow velocity and agreed well with analytical and finite element model predictions. Further, the sensor was also excited inside a water tank using an oscillating dipole where it was able to sense oscillatory flow velocities as low as 16 – 30 µm/s at an excitation frequency of 15 Hz. The methods presented in this work can enable facile and rapid prototyping of flexible HAR structures that can find applications as functional biomimetic flow sensors and/or physical models which can be used to explain biological phenomena

Microfabrication of a MEMS piezoresistive flow sensor - materials and processes

Microelectromechanical systems (MEMS) based artificial sensory hairs for flow sensing have been widely explored, but the processes involved in their fabrication are lithography intensive, making the process quite expensive and cumbersome. Most of these devices are also based on silicon MEMS, which makes the fabrication of out-of plane 3D flow sensors very challenging. This thesis aims to develop new fabrication technologies based on Polymer MEMS, with minimum dependence on lithography for the fabrication of piezoresistive 3D out-of-plane artificial sensory hairs for sensing of air flow. Moreover, the fabrication of a flexible sensor array is proposed and new materials are also explored for the sensing application. Soft lithography based approaches are first investigated for the fabrication of an all elastomer device that is tested in a bench top wind tunnel. Micromolding technologies allow for the mass fabrication of microstructures using a single, reusable mold master that is fabricated by SU-8 photolithography, reducing the need for repetitive processing. Polydimethylsiloxane (PDMS) is used as the device material and sputter deposited gold is used as both the piezoresistive as well as the electrode material for collection of device response. The fabrication results of PDMS to PDMS metal transfer micromolding (MTM) are shown and the limitations of the process are also discussed. A dissolving mold metal transfer micromolding process is then proposed and developed, which overcomes the limitations of the conventional MTM process pertinent to the present application. Testing results of devices fabricated using the dissolving mold process are discussed with emphasis on the role of micro-cr  acking as one failure mode in elastomeric devices with thin film metal electrodes. Finally, a laser microfabrication based approach using thin film Kapton as the device material and an electrically conductive carbon-black elastomer composite as the piezoresistor is proposed and demonstrated. Laminated sheets of thick and thin Kapton form the flexible substrate on which the conductive elastomer piezoresistors are stencil printed. Excimer laser ablation is used to make the micro-stencil as well as to release the Kapton cantilevers. The fluid-structure interaction is improved by the deposition of a thin film of silicon dioxide, which produces a stress-gradient induced curvature, strongly enhancing the device sensitivity. This new approach also enables the fabrication of backside interconnects, thereby addressing the commonly observed problem of flow intrusion while using conventional interconnection technologies like wire-bonding. Devices with varying dimensions of the sensing element are fabricated and the results presented, with smallest devices having a width of 400 microns and a length of 1.5 mm with flow sensitivities as high as 60 Ohms/m/s. Recommendations are also proposed for further optimization of the device.M.S.Committee Chair: Allen, Mark; Committee Member: Allen, Sue Ann Bidstrup; Committee Member: Wong, C.P

Development of an Innovative Soft Piezoresistive Biomaterial Based on the Interconnection of Elastomeric PDMS Networks and Electrically-Conductive PEDOT:PSS Sponges

A deeply interconnected flexible transducer of polydimethylsiloxane (PDMS) and poly(3,4-ethylenedioxythiophene):polystyrenesulfonate (PEDOT:PSS) was obtained as a material for the application of soft robotics. Firstly, transducers were developed by crosslinking PEDOT:PSS with 3-glycidyloxypropryl-trimethoxysilane (GPTMS) (1, 2 and 3% v/v) and using freeze-drying to obtain porous sponges. The PEDOT:PSS sponges were morphologically characterized, showing porosities mainly between 200 and 600 µm2; such surface area dimensions tend to decrease with increasing degrees of crosslinking. A stability test confirmed a good endurance for up to 28 days for the higher concentrations of the crosslinker tested. Consecutively, the sponges were electromechanically characterized, showing a repeatable and linear resistance variation by the pressure triggers within the limits of their working range (∆RR0  max = 80% for 1-2% v/v of GPTMS). The sponges containing 1% v/v of GPTMS were intertwined with a silicon elastomer to increase their elasticity and water stability. The flexible transducer obtained with this method exhibited moderately lower sensibility and repeatability than the PEDOT:PSS sponges, but the piezoresistive response remained stable under mechanical compression. Furthermore, the transducer displayed a linear behavior when stressed within the limits of its working range. Therefore, it is still valid for pressure sensing and contact detection applications. Lastly, the flexible transducer was submitted to preliminary biological tests that indicate a potential for safe, in vivo sensing applications

Electronic scanning pressure measuring system and transducer package

An electronic scanning pressure system that includes a plurality of pressure transducers is examined. A means obtains an electrical signal indicative of a pressure measurement from each of the plurality of pressure transducers. A multiplexing means is connected for selectivity supplying inputs from the plurality of pressure transducers to the signal obtaining means. A data bus connects the plurality of pressure transducers to the multiplexing means. A latch circuit is connected to supply control inputs to the multiplexing means. An address bus is connected to supply an address signal of a selected one of the plurality of pressure transducers to the latch circuit. In operation, each of the pressure transducers is successively scanned by the multiplexing means in response to address signals supplied on the address bus to the latch circuit

Integration of electronic and optical techniques in the design and fabrication of pressure sensors

Since the introduction of micro-electro-mechanical systems fabrication methods, piezoresistive pressure sensors have become the more popular pressure transducers. They dominate pressure sensor commercialization due to their high performance, stability and repeatability. However, increasing demand for harsh environment sensing devices has made sensors based on Fabry-Perot interferometry the more promising optical pressure sensors due to their high degree of sensitivity, small size, high temperature performance, versatility, and improved immunity to environmental noise and interference. The work presented in this dissertation comprises the design, fabrication, and testing of sensors that fuse these two pressure sensing technologies into one integrated unit. A key innovation is introduction of a silicon diaphragm with a center rigid body (or boss), denoted as an embossed diaphragm, that acts as the sensing element for both the electronic and optical parts of the sensor. Physical principles of piezoresistivity and Fabry-Perot interferometry were applied in designing an integrated sensor and in determining analytic models for the respective electronic and optical outputs. Several test pressure sensors were produced and their performance was evaluated by collecting response and noise data. Diaphragm deflection under applied pressure was detected electronically using the principle of piezoresistivity and optically using Fabry-Perot interferometry. The electronic part of the sensor contained four p-type silicon piezoresistors that were set into the diaphragm. They were connected in a Wheatstone bridge configuration for detecting strain-dependent changes in resistance induced by diaphragm deflection. In the optical part of the sensor, an optical cavity was formed between the embossed surface of the diaphragm and the end face of a single mode optical fiber. An infrared laser operating at 1.55 was used for optical excitation. Deflection of the diaphragm, which causes the length of the optical cavity to change, was detected by Fabry-Perot interference in the reflected light. Data collected on several sensors fabricated for this dissertation were shown to validate the theoretical models. In particular, the principle of operation of a Fabry-Perot interferometer as a mechanism for pressure sensing was demonstrated. The physical characteristics and behavior of the embossed diaphragm facilitated the integration of the electronic and optical approaches because the embossed diaphragm remained flat under diaphragm deflection. Consequently, it made the electronic sensor respond more linearly to applied pressure. Further, it eliminated a fundamental deficiency of previous applications of Fabry-Perot methods, which suffered from non-parallelism between the two cavity surfaces (diaphragm and fiber), owing to diaphragm curvature after pressure was applied. It also permitted the sensor to be less sensitive to lateral misalignment during the fabrication process and considerably reduced back pressure, which otherwise reduced the sensitivity of the sensor. As an integrated sensor, it offered two independent outputs in one sensor and therefore the capability for measurements of: (a) static and dynamic pressures simultaneously, and (b) two different physical quantities such as temperature and pressure

An Implantable Low Pressure, Low Drift, Dual BioPressure Sensor and In-Vivo Calibration Methods Thereof

The human body’s intracranial pressure (ICP) is a critical component in sustaining healthy blood flow to the brain while allowing adequate volume for brain tissue within the rigid structures of the cranium. Disruptions in the body’s autoregulation of intracranial pressure are often caused by hemorrhage, tumors, edema, or excess cerebral spinal fluid resulting in treatments that are estimated to globally cost up to approximately five billion dollars annually. A critical element in the contemporary management of acute head injury, intracranial hemorrhage, stroke, or other conditions resulting in intracranial hypertension, is the real-time monitoring of ICP. Currently, such mainstream clinical monitoring can only take place short-term within an acute care hospital. The monitoring is prone to measurement drift and is comprised of externally tethered pressure sensors that are temporarily implanted into the brain, thus carrying a significant risk of infection. To date, reliable, low drift, completely internalized, long-term ICP monitoring devices remain elusive. The successful development of such a device would not only be safer and more reliable in the short-term but would expand the use of ICP monitoring for the management of chronic intracranial hypertension and enable further clinical research into these disorders. The research herein reviews the current challenges of existing ICP monitoring systems, develops a new novel sensing technology, and evaluates the same for potentially facilitating long-term implantable ICP sensing. Based upon the findings of this research, this dissertation proposes and evaluates a dual matched-die piezo-resistive strain sensing device, with a novel in-vivo calibration system and method thereof, for application to long-term implantable ICP sensing