Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

MISSED: an environment for mixed-signal microsystem testing and diagnosis

A tight link between design and test data is proposed for speeding up test-pattern generation and diagnosis during mixed-signal prototype verification. Test requirements are already incorporated at the behavioral level and specified with increased detail at lower hierarchical levels. A strict distinction between generic routines and implementation data makes reuse of software possible. A testability-analysis tool and test and DFT libraries support the designer to guarantee testability. Hierarchical backtrace procedures in combination with an expert system and fault libraries assist the designer during mixed-signal chip debuggin

Micro-manufacturing : research, technology outcomes and development issues

Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in Micro-manufacturing is also in Non-MEMS-based manufacturing. Research and technological development (RTD) in this field is encouraged by the increased demand on micro-components as well as promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing. This paper highlights some EU funded research activities in micro/nano-manufacturing, and gives examples of the latest development in micro-manufacturing methods/techniques, process chains, hybrid-processes, manufacturing equipment and supporting technologies/device, etc., which is followed by a summary of the achievements of the EU MASMICRO project. Finally, concluding remarks are given, which raise several issues concerning further development in micro-manufacturing

In-channel experiments on vertical swimming with bacteria-like robots

Bio-inspired micro-robots are of great importance as to implement versatile microsystems for a variety of in vivo and in vitro applications in medicine and biology. Accurate models are necessary to understand the swimming and rigidbody dynamics of such systems. In this study, a series of experiments are conducted with a two-link cm-scale bioinspired robot moving vertically without a tether, in siliconefilled narrow cylindrical glass channels. Swimming velocities are obtained for a set of varying tail and wave geometries, and employed to validate a resistive force theory (RFT) model using modified resistance coefficients based on measured forward velocity and body rotation rates

Semi-autonomous scheme for pushing micro-objects

-In many microassembly applications, it is often desirable to position and orient polygonal micro-objects lying on a planar surface. Pushing micro-objects using point contact provides more flexibility and less complexity compared to pick and place operation. Due to the fact that in micro-world surface forces are much more dominant than inertial forces and these forces are distributed unevenly, pushing through the center of mass of the micro-object will not yield a pure translational motion. In order to translate a micro-object, the line of pushing should pass through the center of friction. In this paper, a semi-autonomous scheme based on hybrid vision/force feedback is proposed to push microobjects with human assistance using a custom built telemicromanipulation setup to achieve pure translational motion. The pushing operation is divided into two concurrent processes: In one process human operator who acts as an impedance controller alters the velocity of the pusher while in contact with the micro-object through scaled bilateral teleoperation with force feedback. In the other process, the desired line of pushing for the micro-object is determined continuously using visual feedback procedures so that it always passes through the varying center of friction. Experimental results are demonstrated to prove nanoNewton range force sensing, scaled bilateral teleoperation with force feedback and pushing microobjects

Online Resources in MEMS Technology for Professional and Educational Development

Over the last twenty years, the National Science Foundation (NSF) through its Advanced Technological Education (ATE) program has funded many ATE centers across the United State of America to advance the technician level work force in the Country. One of these centers is the Southwest Center for Microsystems Education (SCME) located at the University of New Mexico. The SCME offers educational materials and professional development at no cost.  These materials and professional development opportunities include sponsored conferences, downloadable written materials for instructors and students, YouTube channels providing lectures, animations and videos, hands-on kits for the classroom, micro and nano films, webinars, online distance learning courses and mentoring opportunities for educators.DOI: http://dx.doi.org/10.11591/ijere.v3i1.584

PDMS residues-free micro/macrostructures on flexible substrates

Transfer printing has been reported recently as a viable route for electronics on flexible substrates. The method involves transferring micro-/macrostructures such as wires or ultra-thin chips from Si (silicon) wafers to the flexible substrates by using elastomeric transfer substrates such as poly(dimethylsiloxane) (PDMS). A major challenge in this process is posed by the residues of PDMS, which are left over on Si surface after the nanostructures have been transferred. As insulator, PDMS residues make it difficult to realize metal connections and hence pose challenge in the way of using nanostructures as the building blocks for active electronics. This paper presents a method for PDMS residues-free transfer of Si micro-/macrostructures to flexible substrates such as polyimide (PI). The PDMS residues are removed from Si surface by immersing the transferred structures in a solution of quaternary ammonium fluoride such as TBAF (Tetrabutylammonium Fluoride) and non-hydroxylic aprotic solvent such as PMA (propylene glycol methyl ether acetate). The residues are removed at a rate (∼1.5 μm/min) which is about five times faster than the traditional dry etch methods. Unlike traditional alternatives, the presented method removes PDMS without attacking the flexible PI substrates

A Review of Smart Materials in Tactile Actuators for Information Delivery

As the largest organ in the human body, the skin provides the important sensory channel for humans to receive external stimulations based on touch. By the information perceived through touch, people can feel and guess the properties of objects, like weight, temperature, textures, and motion, etc. In fact, those properties are nerve stimuli to our brain received by different kinds of receptors in the skin. Mechanical, electrical, and thermal stimuli can stimulate these receptors and cause different information to be conveyed through the nerves. Technologies for actuators to provide mechanical, electrical or thermal stimuli have been developed. These include static or vibrational actuation, electrostatic stimulation, focused ultrasound, and more. Smart materials, such as piezoelectric materials, carbon nanotubes, and shape memory alloys, play important roles in providing actuation for tactile sensation. This paper aims to review the background biological knowledge of human tactile sensing, to give an understanding of how we sense and interact with the world through the sense of touch, as well as the conventional and state-of-the-art technologies of tactile actuators for tactile feedback delivery

Micro and nanotechnology commercialization: balance between exploration and exploitation

Innovative materials, components, and systems based on micro and nanotechnologies are recognized as promising growth innovators. The coming years the commercialization of micro and nanotechnology will be extended, but in order to commercialize micro and nanotechnology successfully, besides exploration a parallel focus should be aimed at exploitation. This paper presents in a brief and non-exhaustive manor a theoretical introduction and two company introductions related to exploitation and exploration focus embedded in the innovation development process to commercialize customer-oriented applications. A balanced approach between exploration and exploitation within organizations business, technological, and scientific domain could sharpen micro and nanotechnology companies into sustainable competitive market-driven enterprises.