Integration of shape memory alloy for microactuation

Shape memory alloy (SMA) actuators in microelectromechanical system (MEMS) have a broad range of applications. The alloy material has unique properties underlying its high working density, simple structures, large displacement and excellent biocompatibility. These features have led to its commercialization in several applications such as micro-robotics and biomedical areas. However, full utilization of SMA is yet to be exploited as it faces various practical issues. In the area of microactuators in particular, fabricated devices suffer from low degrees of freedom (DoF), complex fabrication processes, larger sizes and limited displacement range. This thesis presents novel techniques of developing bulk-micromachined SMA microdevices by applying integration of multiple SMA microactuators, and monolithic methods using standard and unconventional MEMS fabrication processes. The thermomechanical behavior of the developed bimorph SMA microactuator is analyzed by studying the parameters such as thickness of SMA sheet, type and thickness of stress layer and the deposition temperature that affect the displacement. The microactuators are then integrated to form a novel SMA micromanipulator that consists of two links and a gripper at its end to provide three-DoF manipulation of small objects with overall actuation x- and y- axes displacement of 7.1 mm and 5.2 mm, respectively. To simplify the fabrication and improve the structure robustness, a monolithic approach was utilized in the development of a micro-positioning stage using bulk-micromachined SMA sheet that was fabricated in a single machining step. The design consisted of six spring actuators that provided large stage displacement range of 1.2 mm and 1.6 mm in x- and y-axes, respectively, and a rotation of 20° around the z-axis. To embed a self-sensing functionality in SMA microactuators, a novel wireless displacement sensing method based on integration of an SMA spiral-coil actuator in a resonant circuit is developed. These devices have the potential to promote the application of bulk-micromachined SMA actuator in MEMS area

Development of the technological process for the production of the electrostatic curved beam actuator for pneumatic microvalves

This work focuses on the development of an effective technological process for the production of the electrostatic curved beam actuator capable to be used as a driving element in different devices such as microswitches or microvalves. Main attention was drawn to the investigation of electroplating technique as a critical process in the microactuator fabrication as well as to the design of the actuator. In addition, usability of ceramic substrates for the microactuator and microvalve production was examined. The idea behind it was that ceramic substrates can be preprocessed and delivered already with necessary electrical connections on it. This would make the entire production process simpler and cheaper. Several types of polished alumina (Al2O3) substrates were used for this purpose. Electrostatic actuation principle was chosen for its good scaling properties to small dimensions, low power consumption, smaller size and higher switching speed. Curved shape of the actuator allows to reduce its pull-in voltage and thus to increase the amplitude of motion as compared to the parallel-plate structures. The material of the actuator is nickel. It was chosen for its good mechanical properties and relative simplicity of processing. Double layer nickel electroplating was used to produce the microactuator. The layers have different stress gradients controlled by current density during the electroplating process, making it possible to achieve the desired bending of the structure. Compared to bimetallic bending cantilever actuators, the curvature of the single-metal beam is less dependable on temperature and aging. Thus, more stable performance under changing working conditions was ensured. In order to avoid sticking of the microactuator to the isolation layer in the closed state, an array of stand-off bumps was added on the back-side of the beam. These bumps reduce the contact area and increase the distance between the actuator and the isolation layer. Fifteen design variants of the actuator differing in length and width were fabricated in order find the most effective solution for given system requirements. Based on the actuators technological process developed in this work, a simple electrostatic microvalve was designed and produced. Final variants of microvalve were fabricated on a standard 380 µm thick silicon wafer. Gas inlet channel as well as the electrodes and the actuator itself are all placed on the same substrate in order to reduce the size and cost of the system. During characterization, mechanical stability of the actuators and microvalves were studied by means of drop, temperature and shear tests in order to prove the reliability of the system. System performance tests proved stable pull-in voltages from 8,6 V to 11,6 V. Maximal gas flow through the valve was 110±5 ml/min at applied differential pressure of 2 bar

Incorporating nanomaterials with MEMS devices.

This dissertation demonstrates an elegant method, known as \u27micro-origami\u27 or strain architecture to design and fabricate three-dimensional MEMS structures which are assembled using actuation of a metal-oxide bilayer with conventional planar lithography. Folding allows creating complex, robust, three-dimensional shapes from two-dimensional material simply by choosing folds in the right order and orientation, small disturbances of the initial shape may also be used to produce different final shapes. These are referred to as pop-up structures in this work. The scope of this work presented the deposition of colloidal gold nanoparticles (GNPs) into conformal thin films using a microstenciling technique. Results illustrated that the gold nanoparticle deposition process can easily be integrated into current MEMS microfabrication processes. Thin films of GNPs deposited onto the surfaces of siliconbased bistable MEMS and test devices were shown to have a significant effect on the heating up of microstructures that cause them to fold. The dissertation consists of four chapters, covering details of fabrication methods, theoretical simulations, experimental work, and existing and potential applications. Chapter II illustrates how control of the folding order can generate complex three-dimensional objects from metal-oxide bilayers using this approach. By relying on the fact that narrower structures are released from the substrate first, it is possible to create multiaxis loops and interlinked objects with several sequential release steps, using a single photomask. The structures remain planar until released by dry silicon etching, making it possible to integrate them with other MEMS and microelectronic devices early in the process. Chapter III depicts the fabrication process of different types of bistable structures. It describes the principle of functioning of such structures, and simulations using CoventorWare are used to support the concept. We talk over about advantages and disadvantages of bistable structures, and discuss possible applications. Chapter IV describes fabrication procedure of nanoparticle-MEMS hybrid device. We introduce a convenient synthesis of GNPs with precisely controlled optical absorption in the NIR region by a single step reaction ofHAuCl4 and Na2S203. We take a look at different techniques to pattern gold nanoparticles on the surface of MEMS structures, and also provide a study of their thermal properties under near IR stimulation. We demonstrate the first approach of laser-driven bistable MEMS actuators for bioapplications. Finally, in Conclusion discuss the contributions of this dissertation, existent limitations and plans of the future work

Frequency-controlled wireless passive microfluidic devices

Microfluidics is a promising technology that is increasingly attracting the attention of researchers due to its high efficiency and low-cost features. Micropumps, micromixers, and microvalves have been widely applied in various biomedical applications due to their compact size and precise dosage controllability. Nevertheless, despite the vast amount of research reported in this research area, the ability to implement these devices in portable and implantable applications is still limited. To date, such devices are constricted to the use of wires, or on-board power supplies, such as batteries. This thesis presents novel techniques that allow wireless control of passive microfluidic devices using an external radiofrequency magnetic field utilizing thermopneumatic principle. Three microfluidic devices are designed and developed to perform within the range of implantable drug-delivery devices. To demonstrate the wireless control of microfluidic devices, a wireless implantable thermopneumatic micropump is presented. Thermopneumatic pumping with a maximum flow rate of 2.86 μL/min is realized using a planar wirelessly-controlled passive inductor-capacitor heater. Then, this principle was extended in order to demonstrate the selective wireless control of multiple passive heaters. A passive wirelessly-controlled thermopneumatic zigzag micromixer is developed as a mean of a multiple drug delivery device. A maximum mixing efficiency of 96.1% is achieved by selectively activating two passive wireless planar inductor-capacitor heaters that have different resonant frequency values. To eliminate the heat associated with aforementioned wireless devices, a wireless piezoelectric normally-closed microvalve for drug delivery applications is developed. A piezoelectric diaphragm is operated wirelessly using the wireless power that is transferred from an external magnetic field. Valving is achieved with a percentage error as low as 3.11% in a 3 days long-term functionality test. The developed devices present a promising implementation of the reported wireless actuation principles in various portable and implantable biomedical applications, such as drug delivery, analytical assays, and cell lysis devices

Development of a light-powered microstructure : enhancing thermal actuation with near-infrared absorbent gold nanoparticles.

Development of microscale actuating technologies has considerably added to the toolset for interacting with natural components at the cellular level. Small-scale actuators and switches have potential in areas such as microscale pumping and particle manipulation. Thermal actuation has been used with asymmetric geometry to create large deflections with high force relative to electrostatically driven systems. However, many thermally based techniques require a physical connection for power and operate outside the temperature range conducive for biological studies and medical applications. The work presented here describes the design of an out-of-plane bistable switch that responds to near-infrared light with wavelength-specific response. In contrast to thermal actuating principles that require wired conductive components for Joule heating, the devices shown here are wirelessly powered by near -infrared (IR) light by patterning a wavelength-specific absorbent gold nanoparticle (GNP) film onto the microstructure. An optical window exists which allows near-IR wavelength light to permeate living tissue, and high stress mismatch in the bilayer geometry allows for large actuation at biologically acceptable limits. Patterning the GNP film will allow thermal gradients to be created from a single laser source, and integration of various target wavelengths will allow for microelectromechanical (MEMS) devices with multiple operating modes. An optically induced temperature gradient using wavelength-selective printable or spinnable coatings would provide a versatile method of wireless and non-invasive thermal actuation. This project aims to provide a fundamental understanding of the particle and surface interaction for bioengineering applications based on a “hybrid” of infrared resonant gold nanoparticles and MEMS structures. This hybrid technology has potential applications in light-actuated switches and other mechanical structures. Deposition methods and surface chemistry are integrated with three-dimensional MEMS structures in this work. The long-term goal of this project is a system of light-powered microactuators for exploring cells\u27 response to mechanical stimuli, adding to the fundamental understanding of tissue response to everyday mechanical stresses at the molecular level

Microsensors Based on MEMS Technology

Sensors play an important role in most of the common activities that occur in our daily lives. They are the building blocks of or microelectromechanical systems (MEMS). This combination of micromechanical structures, sensing elements, and signal conditioning is the beginning of a new era in sensor technology. Sensing systems incorporated with dedicated signal processing functions are called intelligent sensors or smart sensors. The present decade of new millennium will be the decade of smart systems or MEMS. The rapid rise of silicon MEMS recently was due to major advances in silicon microfabrication technology, especially surface micromachining, deep-reactive ion etching, and CMOS-integrated MEMS. In this paper, an overview of the currently available MEMS sensors, materials for sensors and their processing technologies, together with integraticm of sensors and electronics is presented

Cantilever beam microactuators with electrothermal and electrostatic drive

Microfabrication provides a powerful tool for batch processing and miniaturization of mechanical systems into dimensional domain not accessible easily by conventional machining. CMOS IC process compatible design is definitely a big plus because of tremendous know-how in IC technologies, commercially available standard IC processes for a reasonable price, and future integration of microma-chined mechanical systems and integrated circuits. Magnetically, electrostatically and thermally driven microactuators have been reported previously. These actuators have applications in many fields from optics to robotics and biomedical engineering. At NJIT cleanroom, mono or multimorph microactuators have been fabricated using CMOS compatible process. In design and fabrication of these microactuators, internal stress due to thermal expansion coefficient mismatch and residual stress have been considered, and the microactuators are driven with electro-thermal power combined with electrostatical excitation. They can provide large force, and in- or out-of-plane actuation. In this work, an analytical model is proposed to describe the thermal actuation of in-plane (inchworm) actuators. Stress gradient throughout the thickness of monomorph layers is modeled as linearly temperature dependent Δσ. The nonlinear behaviour of out-of-plane actuators under electrothermal and electrostatic excitations is investigated. The analytical results are compared with the numerical results based on Finite Element Analysis. ANSYS, a general purpose FEM package, and IntelliCAD, a FEA CAD tool specifically designed for MEMS have been used extensively. The experimental results accompany each analytical and numerical work. Micromechanical world is three dimensional and 2D world of IC processes sets a limit to it. A new micromachining technology, reshaping, has been introduced to realize 3D structures and actuators. This new 3D fabrication technology makes use of the advantages of IC fabrication technologies and combines them with the third dimension of the mechanical world. Polycrystalline silicon microactuators have been reshaped by Joule heating. The first systematic investigation of reshaping has been presented. A micromirror utilizing two reshaped actuators have been designed, fabricated and characterized

Fabrication of TiNi shape memory alloy microactuators by ion beam sputter deposition

TiNi shape memory alloy has been recently investigated for use in micro actuators because of the high power to volume ratio. Conventional sputtering methods, such as RF and DC sputtering and magnetron sputtering, have previously been used by other workers in order to deposit TiNi thin films. As-deposited films produced by these methods are amorphous, and are then crystallised typically by annealing at 500°C for 1 hour in order to exhibit the shape memory effect. These deposition methods have invariably used alloyed targets to grow thin films. In this thesis, an Ion Beam Sputter Deposition (IBSD) method has been used by which argon ions are used to bombard nonalloyed targets. The thin films grown by this technique demonstrate the characteristics of the shape memory effect. Films have been characterised by electrical resistivity, resistance and thermal measurements, giving physical properties in excellent agreement with those quoted in the literature. Compositional and density measurements were done by X-ray reflectometry and were consistent with equi-atomic composition and nominal density for TiNi. In addition thermal modelling was used to investigate implications of heating and cooling rates for microactuator operation. Finally, a novel fabrication process is proposed, combining ion beam milling and Focused Ion Beam (FIB) trepanning for the process of micro actuator production

Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

Polymer NdFeB Hard Magnetic Scanner for Biomedical Scanning Applications

Micromirror scanners are the most significant of the micro-optical actuator elements with applications in portable digital displays, automotive head-up displays, barcode scanners, optical switches and scanning optical devices in the health care arena for external scanning diagnostics and in vivo scanning diagnostics. Recent development in microscanning technology has seen a shift from conventional electrostatic actuation to electromagnetic actuation mechanisms with major advantages in the ability to produce large scan angles with low voltages, remote actuation, the absence of the pull-in failure mode and the acceptable electrical safety compared to their electrostatic counterparts. Although attempts have been made to employ silicon substrate based MEMS deposition techniques for magnetic materials, the quality and performance of the magnets are poor compared to commercial magnets. In this project, we have developed novel low-cost single and dual-axis polymer hard magnetic micromirror scanners with large scan angles and low power consumption by employing the hybrid fabrication technique of squeegee coating to combine the flexibility of polydimethylsiloxane (PDMS) and the superior magnetic performance of fine particle isotropic NdFeB micropowders. PCB coils produce the Lorentz force required to actuate the mirror for scanning applications. The problem of high surface roughness, low radius of curvature and the magnetic field interaction between the gimbal frame and the mirror have been solved by a part PDMS-part composite fabrication process. Optimum magnetic, electrical and time dependent parameters have been characterized for the high performance operating conditions of the micromirror scanner. The experimental results have been demonstrated to verify the large scan angle actuation of the micromirror scanners at low power consumption